JPH071381A - Overhead traveling industrial robot unit - Google Patents

Abstract

PURPOSE:To secure an overhead traveling industrial robot unit that prevents dust from occurring from a traveling passage by decreasing the extent of dust scattering to the outside of the traveling passage from an industrial robot. CONSTITUTION:A base 9 travels on a traveling passage 3 with a slit 4 along the longitudinal direction and an industrial robot 7 whose operating part 10 is projected out of the slit 4 is installed there, while a flexible duct 16 whose one end is opened to an air feeding chamber 14 of the base 9 is set up in the traveling passage 3 and the other end is kept in this passage 3. In addition, one end of an exhaust pipe 17 interconnected to the outside of a building is connected to the side of the traveling passage 3 of the flexible duct 16, and a blower 15 feeding air at the outside of the air feeding chamber 14 to this chamber 14, is installed there. With this constitution, air nearby the industrial robot 7 is fed to the air feeding chamber.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an overhead traveling industrial robot apparatus installed in a clean room.

[0002]

2. Description of the Related Art FIGS. 10 and 11 are views showing a conventional overhead traveling industrial robot apparatus. FIG. 10 is a front view and FIG.
FIG. 11 is a left side view of FIG. 10. In the figure, (1) is the floor of the building, (2) is a hollow pillar standing from the floor (1), and (3) is a runway horizontally supported by the upper end of the pillar (2). Then, the slit (4) formed in a duct shape and provided along the longitudinal direction is provided on the side surface. (5) is an exhaust fan provided at the base of the pillar (1), and (6) is a floor grating.

Reference numeral (7) is an industrial robot which travels along the traveling road (3), and is provided with a traveling drive unit (8) and is guided by the rails of the traveling road (3) to travel on a base (9) and a base. It is composed of an operating portion (10) supported by (9) and protruding from the slit (4). Reference numeral (11) is a flexible cable guide provided in the traveling path (3) and arranged in a lateral U shape, and one end thereof is a base (9).
The other side is held at a predetermined position on the traveling path (3). (12) is a cable for supplying power to the industrial robot (7) guided by the cable guide (11), and (13) is a cable for exchanging signals with the industrial robot (7) guided by the cable guide (11). is there.

The conventional overhead traveling industrial robot apparatus is constructed as described above, and the exhaust fan (5) is provided so that the air in the traveling path (3) travels as shown by the arrows in FIGS. 10 and 11. Exhaust from the road (3) through the pillar (2) to below the floor (1). As a result, dust generated from the traveling drive unit (8) of the industrial robot (7) provided in the clean room and the surrounding area does not scatter into the clean room from the slit (4) of the traveling path (3). The power supply cable (12) and the signal transfer cable (13) are guided by a dedicated cable guide (11).

[0005]

In the conventional overhead traveling industrial robot apparatus as described above, the air in the traveling path (3) passes through the pillars (2) by the exhaust fan (5) to the floor (1). The air is exhausted downwards so that dust does not scatter from the slit (4) of the traveling path (3). However, when the traveling speed of the industrial robot (7) increases, the movement of the base (9) in the traveling path (3) exhibits the same phenomenon as the movement of the piston. For this reason, the air in the traveling path (3) is easily discharged from the slit (4), and dust generated from the traveling drive unit (8) of the industrial robot (7) and the surrounding area becomes a slit () in the traveling path (3). There was a problem of scattering from 4) and contaminating the inside of the clean room.

As a countermeasure against such a case, in order to prevent dust of the industrial robot (7) from scattering from the slit (4) of the traveling path (3), the number and capacity of the exhaust fans (5) are changed. It is possible to increase the number of pillars (2) by increasing the number of pillars (2) by increasing the number of pillars (2). However, this measure has a limit to the degree of cleanliness that can be obtained in a clean room when the traveling speed of the industrial robot (7) is increased.

The present invention has been made in order to solve the above problems, and an object thereof is to obtain an overhead traveling industrial robot apparatus in which dust is less likely to scatter from slits in a traveling path on which an industrial robot travels.

[0008]

According to a first aspect of the present invention, there is provided an overhead traveling industrial robot apparatus comprising:
There is a slit in the running path that is installed in the building and has a slit formed along the length and a base that is equipped with a travel drive unit that is guided by the travel path and is supported by the base. An industrial robot projecting from the robot, a flexible duct disposed in the traveling path, one end of which is opened to an air supply chamber provided in the base and the other end of which is held in the traveling path. An exhaust pipe, one end of which is connected to the end of the duct on the traveling road side, communicates with the outside of the building, and a blower that is provided on the base and blows air outside the air supply chamber to the air supply chamber.

Further, in the overhead traveling industrial robot apparatus according to the second aspect of the present invention, there is provided a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the longitudinal direction, and a traveling drive section. An industrial robot in which an operating part supported by the base is guided by the traveling path and is mounted so as to project from the slit, and one end is provided on the base arranged in the traveling path. A flexible duct that is open to the air supply chamber and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and a base. An air blower installed to blow air outside the air supply chamber to the air supply chamber, and one side connected to the base with one end connected to the base placed inside the traveling road and laterally facing the slit side of the traveling road. Flexible cable guides arranged in a U shape and the length of the runway Along a shielding plate for partitioning a peripheral surface disposed upright from the base movement path and cable guide side of the provided running path are provided.

Further, in the overhead traveling industrial robot apparatus according to the third aspect of the present invention, a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the longitudinal direction, and a traveling drive section. An industrial robot in which an operating part supported by the base is guided by the traveling path and is mounted so as to project from the slit, and one end is provided on the base arranged in the traveling path. A flexible duct that is open to the air supply chamber and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and a base. An air blower installed to blow air outside the air supply chamber to the air supply chamber, and one side connected to the base with one end connected to the base placed inside the traveling road and laterally facing the slit side of the traveling road. Flexible cable guides arranged in a U shape and the length of the runway An upper shield plate that is installed along the circumference of the traveling path and separates the movement path of the base and the cable guide side, and a lower shield plate that is arranged in parallel apart from this upper shield plate and one side is the base. The other side is fixed to the upper end of the cable guide, and an upper groove for fitting the upper shield plate on the upper surface and a lower groove for fitting the lower shield plate on the lower surface are provided, and a bracket constituting a labyrinth is provided.

According to a fourth aspect of the present invention, in an overhead traveling industrial robot apparatus, a traveling path installed in a building, formed in a duct shape, and provided with slits along its length, and a traveling drive section. An industrial robot in which an operating part supported by the base is guided by the traveling path and is mounted so as to project from the slit, and one end is provided on the base arranged in the traveling path. A flexible duct that is open to the air supply chamber and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and a base. An air blower that is provided to blow air outside the air blowing chamber to the air blowing chamber, and a trumpet-shaped wind guide that is provided outside the air blowing chamber and is arranged around the air blower are provided.

According to a fifth aspect of the present invention, there is provided an overhead traveling industrial robot apparatus including a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along its length, and a traveling drive section. An industrial robot in which an operating unit supported by the base is arranged so as to project from a slit, an exhaust robot for exhausting air in the traveling road, and a traveling road. A refraction slit which is provided along the longitudinal direction and is opened in the side surface in the cross section of the traveling path and is bent upward to open the upper surface to form a slit.

According to a sixth aspect of the present invention, there is provided an overhead traveling industrial robot apparatus in which a traveling path is installed in a building, is formed in a duct shape, and is provided with slits along its length, and a traveling drive section. An industrial robot in which an operating unit supported by the base is arranged so as to project from a slit, an exhaust robot for exhausting air in the traveling road, and a traveling road. And a duct plate forming a slit duct communicating with the exhaust fan by opening upward at the lower edge of the slit.

According to a seventh aspect of the present invention, there is provided an overhead traveling industrial robot apparatus, which is installed in a building, has a duct formed like a duct, and has a longitudinal slit, and a traveling drive unit. An industrial robot in which an operating unit supported by the base is arranged so as to project from a slit, an exhaust robot for exhausting air in the traveling road, and a traveling road. And a duct plate that forms a slit duct communicating with the exhaust fan by opening upward to the lower edge of the slit, and the slit duct side provided at the end of the duct plate near the exhaust fan. And an adjusting plate for adjusting the exhaust suction force on the slit side.

[0015]

In the invention according to claim 1 of the present invention configured as described above, the blower moves together with the base of the industrial robot, and the air near the base is exhausted through the air supply chamber.

In the invention according to claim 2 of the present invention configured as described above, the blower moves together with the base of the industrial robot so that air near the base is exhausted through the air supply chamber. The space on the cable guide side of the traveling path is divided from the slit side by the shielding plate.

According to the third aspect of the present invention configured as described above, the blower moves together with the base of the industrial robot so that air near the base is exhausted through the air supply chamber. Also, the space on the cable guide side of the traveling path is divided from the slit side by both the upper shield plate and the lower shield plate,
A labyrinth is formed by the above and the bracket.

Further, in the invention according to claim 4 of the present invention configured as described above, the blower moves together with the base of the industrial robot, and the air near the base is guided to the air supply chamber by the air guide. It is exhausted through the air supply chamber.

Further, in the invention according to claim 5 of the present invention configured as described above, the air in the traveling path is exhausted by the exhaust fan, and the outside air is discharged from the refraction slit which is provided in the traveling path and constitutes the labyrinth. Flows in.

Further, according to the invention of claim 6 of the present invention configured as described above, the air in the traveling path is exhausted by the exhaust fan, and the slits upwardly opened at the lower edge of the slit of the traveling path. The outside air is sucked directly downward from the partial duct.

Further, according to the invention of claim 7 of the present invention configured as described above, the air in the traveling path is exhausted by the exhaust fan, and the slits opened upward at the lower edge of the slit of the traveling path. The outside air is sucked directly downward from the partial duct. In addition, the exhaust suction force on the slit side and the slit side is adjusted by the adjusting plate.

[0022]

【Example】

Example 1. 1 and 2 are views showing an embodiment of the present invention. FIG. 1 is a front view showing a partially broken main part of an overhead traveling industrial robot apparatus, and FIG. 2 is a left side main part of FIG. FIG. In the figure, (1) is the floor of the building, (2) is a hollow pillar standing from the floor (1), and (3) is a runway horizontally supported by the upper end of the pillar (2). Then, the slit (4) formed in a duct shape and provided along the longitudinal direction is provided on the side surface. (5) is a pillar (1)
An exhaust fan provided at the base of (6) is a floor grating.

Reference numeral (7) is an industrial robot which travels on the traveling road (3), and is provided with a traveling drive unit (8) and is guided by the rails of the traveling road (3) to travel on a base (9) and a base. It is composed of an operating portion (10) supported by (9) and protruding from the slit (4). Reference numeral (11) is a flexible cable guide provided in the traveling path (3) and arranged in a lateral U shape, and one end thereof is a base (9).
The other side is held at a predetermined position on the traveling path (3). (12) is a cable for supplying power to the industrial robot (7) guided by the cable guide (11), and (13) is a cable for exchanging signals with the industrial robot (7) guided by the cable guide (11). is there.

Reference numeral (14) is an air supply chamber provided in the traveling drive unit (8), and (15) is provided in the air supply chamber (14) so that air outside the air supply chamber (14) is supplied to the air supply chamber (14). (16), one end is the base (9)
A flexible duct that is open to the air supply chamber (14) provided in the cable guide (11) and the other end is held at a predetermined position of the traveling path (3), and (17) is flexible. Runway (3) of the sex duct (16)
The exhaust pipe has one end connected to the side end and communicates with the outside of the building.

In the overhead traveling industrial robot apparatus configured as described above, the blower (1) is mounted on the base (9) of the industrial robot (7).
An air supply chamber (14) equipped with 5) is provided, and the blower (15) moves together with the movement of the industrial robot (7). In addition, the flexible duct (16) whose one end is open to the air supply chamber (14) is a cable guide.
It is placed in (11) and moves with the movement of the industrial robot (7). Then, along with the operation of the industrial robot (7), the blower (1
5) is urged to move the air supply chamber as shown by the arrow in FIGS. 1 and 2.
(14) The outside air is sent to the air supply chamber (14), and the flexible duct (1
Exhaust to the outside of the building through 6) and the exhaust pipe (17).

As a result, the air in the traveling path (3) is exhausted to the bottom of the floor (1) through the pillar (2) by the exhaust fan (5). Further, along with the operation of the industrial robot (7), the air outside the air supply chamber (14), that is, the air near the industrial robot (7) is supplied to the air supply chamber (14), and the flexible duct (16) and It is exhausted outside the building through the exhaust pipe (17). Therefore, the industrial robot
When the traveling speed of (7) becomes faster, the movement of the base (9) in the traveling path (3) becomes similar to the operation with the piston, but the air near the industrial robot (7) directly The air is delivered to the air delivery chamber (14). For this reason, the slits in the traveling path (3) generated from the traveling drive unit (8) of the industrial robot (7) and its surroundings.
The dust scattered from (4) can be reduced and the cleanliness in the clean room can be maintained.

Example 2. FIG. 3 is a view showing another embodiment of the present invention, which is equivalent to FIG. 2 described above, and is configured similarly to FIG. 1 except for FIG. In the figure, (2) is a hollow pillar standing upright from the floor (1), (3) is a running path horizontally supported by the upper end of the pillar (2) and formed in a duct shape. A slit (4) is provided on the side surface along the length. (7) is an industrial robot that travels along the road (3), and is equipped with a travel drive unit (8) and is guided by the rails of the road (3) to travel along the base (9) and base.
It is composed of an operating portion (10) supported by (9) and protruding from the slit (4).

Reference numeral (11) is a flexible cable guide provided in the running path (3) and arranged in a lateral U shape. One end is connected to the base (9) and the other side is running path ( It is held in place in 3). (12) is a cable for supplying power to the industrial robot (7) guided by the cable guide (11), (13) is an industrial robot (7) guided by the cable guide (11)
It is a cable for exchanging signals with.

Reference numeral (14) is an air supply chamber provided in the traveling drive unit (8), and (15) is provided in the air supply chamber (14) to supply air outside the air supply chamber (14) to the air supply chamber (14). (16), one end is the base (9)
Is a flexible duct which is opened in the air supply chamber (14) provided in the cable guide (11), and the other end of which is held at a predetermined position on the traveling path (3). (18) is provided along the length of the traveling path (3) and is erected from the bottom of the traveling path (3), and the movement route of the base (9) of the industrial robot (7) and the cable guide (11) side. It is a shielding plate that partitions the.

Also in the overhead traveling industrial robot apparatus configured as described above, the air blow chamber (14) equipped with the air blower (15) is provided in the base (9) of the industrial robot (7) and the air blower is provided. (1
5) moves with the movement of the industrial robot (7). Therefore, although detailed description is omitted, it is apparent that the same operation as that of the embodiment of FIGS. 1 and 2 can be obtained in the embodiment of FIG. Further, in the embodiment of FIG. 3, the space on the cable guide (11) side in the travel path (3) is shielded by the shield plate (18). Therefore, it is possible to reduce dust generated near the cable guide (11) and scattered from the slit (4) of the traveling path (3) into the clean room.

Example 3. FIG. 4 is also a view showing another embodiment of the present invention, which is an enlarged view of a substantial part of FIG.
Other than that, the configuration is similar to that of FIGS. 1 and 3 described above. In the figure, the same reference numerals as those in FIG. 3 indicate the corresponding parts, and (18) is provided along the length of the traveling road (3) and is erected from the bottom surface of the traveling road (3), and is a base of the industrial robot (7). A lower shield plate that separates the movement path of the platform (9) from the cable guide (11) side, and (19) is installed along the length of the road (3) and hangs down from the ceiling surface of the road (3). , The upper shield plate (20) is located away from the lower shield plate (18) near the cable guide (11), and one side of the (20) is the base (9).
The other side is a bracket fixed to the upper end of the cable guide (11), and the upper groove (21) where the upper shield plate (19) fits on the upper surface.
Also, a lower groove (22) into which the lower shield plate (18) fits is provided on the lower surface to form a labyrinth.

Also in the overhead traveling industrial robot apparatus configured as described above, the air blow chamber (14) equipped with the air blower (15) is provided on the base (9) of the industrial robot (7) and the air blower is provided. (1
5) moves with the movement of the industrial robot (7). Therefore, although detailed description is omitted, it is obvious that the embodiment of FIG. 4 can also obtain the same operation as the embodiment of FIGS.

In the embodiment shown in FIG. 4, the upper shield plate (1
9) and the lower shield plate (18) shield the space on the cable guide (11) side in the traveling path (3), and the upper shield plate (19),
The labyrinth is constituted by the lower shield plate (18) and the bracket (20). As a result, it is possible to further reduce the dust generated near the cable guide (11) and scattered from the slit (4) of the traveling path (3) into the clean room.

Example 4. 5 and 6 are views showing another embodiment of the present invention, in which FIG. 5 is a view corresponding to the main part of FIG.
FIG. 6 is a plan view of FIG. 5, and is configured similarly to FIGS. 1 and 2 except for FIGS. 5 and 6. In the figure, the same reference numerals as those in FIGS. 1 and 2 indicate corresponding parts, and (23) is a trumpet-shaped air guide provided outside the air supply chamber (14) and arranged around the blower (15). Is.

Also in the overhead traveling industrial robot apparatus configured as described above, the air blow chamber (14) equipped with the air blower (15) is provided in the base (9) of the industrial robot (7) and the air blower is provided. (1
5) moves with the movement of the industrial robot (7). Therefore, although detailed description is omitted, it is obvious that the embodiment of FIG. 4 can also obtain the same operation as the embodiment of FIGS.

In the embodiment shown in FIGS. 5 and 6, the air near the base (9) of the industrial robot (7) is blown by the air guide (23), and the air is blown by the blower (15) to blow the air blower (23). It is efficiently introduced into the air supply chamber (14) through the space as shown by the arrow in FIGS. As a result, the traveling drive unit (8) of the industrial robot (7) is
Also, dust generated from the periphery and scattered from the slit (4) of the traveling path (3) is further reduced, and the cleanliness in the clean room can be maintained.

Example 5. FIG. 7 is also a diagram showing another embodiment of the present invention. FIG. 7 is an enlarged view corresponding to the main part of FIG. 11 described above, and is configured similarly to FIG. 10 and FIG. 11 except for FIG. There is. In the figure, the same reference numerals as those in FIG. 10 and FIG. 11 indicate the corresponding parts, and (24) is provided on the traveling road (3) and arranged along the longitudinal direction, and is opened on the side surface in the cross section of the traveling road (3). The refraction slit (25), which is bent upwards and has an open upper surface, has one end fixed to the base (9) of the industrial robot (7) and refracted along the refraction slit (24) in the cross section, and This is a mounting bracket on which the operating part (10) of the industrial robot (7) is mounted.

In the overhead traveling industrial robot apparatus configured as described above, the industrial robot is installed from the mounting bracket (25) through the bending slit (24) of the traveling path (3) whose upper surface is open to form a labyrinth. (7) is equipped. As a result, the refraction slits of the road (3) that formed the labyrinth
The air in the clean room is sucked by the exhaust fan (5) as shown by an arrow in FIG. 7 via (24) and is exhausted to the bottom of the floor (1) through the pillar (2). Therefore, the amount of dust scattered in the traveling path (3) from the refraction slit (24) of the traveling path (3) can be reduced, and the cleanliness in the clean room can be maintained.

Example 6. 8 and 9 are views showing another embodiment of the present invention, in which FIG. 8 is a partial vertical section corresponding to the above-mentioned FIG. 10, and FIG. 9 is a vertical sectional left side view of FIG. Other than FIG. 9 and FIG. 9, the configuration is similar to that of FIG. 10 and FIG. In the figure, the same reference numerals as those in FIG. 10 and FIG. 11 indicate the corresponding parts, and (26) divides the inside of the pillar (2) in the vertical direction and extends in the substantially vertical direction to the lower edge of the slit (4). The duct plate that constitutes the slit duct (27) that opens upward, and (28) is an adjustment plate whose upper end is pivoted at the lower end of the duct plate (26), and the slit (4) of the exhaust fan (5). Side and slit ducts (27)
Adjust the suction capacity on the side. Reference numeral (29) is an adjusting handle for rotationally displacing the adjusting plate (28).

In the overhead traveling industrial robot apparatus configured as described above, the slit duct (27) is provided in the pillar (2).
Is provided, and the slit duct (27) is opened at the lower side of the opening of the slit (4) which causes dust scattering in the traveling path (3). This ensures that dust inside the driveway (3) will not be covered by the slit (4).
The air in the traveling path (3) is sucked by the slit duct (27) at the opening of the air duct and is exhausted by the exhaust fan (5) through the pillar (2) to the floor ( 1) Exhaust down.

At the lower end of the slit duct (27), there is an adjusting plate (2) for adjusting the suction capacity of the exhaust fan (5) on the slit (4) side and the slit duct (27) side.
8) and an adjusting handle (29) for rotationally displacing the adjusting plate (28) are provided. Therefore, by adjusting the suction capacity of the exhaust fan (5) on each of the slit (4) side and the slit duct (27) side, the inside of the traveling path (3) scattered from the slit (4) of the traveling path (3). It is possible to reduce the amount of dust and to maintain the cleanliness in the clean room.

[0042]

As described above, the invention according to claim 1 of the present invention is provided with a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the longitudinal direction, and a traveling drive section. An industrial robot in which the operating part supported by the base is guided by the traveling path and is supported by the base is arranged to project from the slit, and an air supply chamber is arranged in the traveling path and one end of which is provided in the base. A flexible duct that is open and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and is installed on the base to send An air blower that blows air outside the air chamber to the air feeding chamber is provided.

As a result, the blower moves together with the base of the industrial robot, and the air near the base is exhausted through the air supply chamber. Therefore, when the traveling speed of the industrial robot increases, the movement of the base in the traveling path becomes the same as the movement of the piston, but the air near the industrial robot is directly sent to the air supply chamber. It Therefore, there is an effect of reducing dust generated around the traveling drive unit of the industrial robot and scattered from the slits of the traveling path.

Further, as described above in the invention according to claim 2 of the present invention, the traveling path installed in the building and formed in the shape of a duct and provided with slits along the longitudinal direction, and the traveling drive section are provided. An industrial robot in which the operating part supported by the base is guided by the traveling path and is supported by the base is arranged to project from the slit, and an air supply chamber is arranged in the traveling path and one end of which is provided in the base. A flexible duct that is open and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and is installed on the base to send A blower that blows the air outside the air chamber to the air supply chamber, and a U-shape that is placed inside the running path and has one end connected to the base and the other end that is held on the running path and that is lateral to the slit side of the running path. -Shaped flexible cable guide and travel along the length of the road It is erected from the peripheral surface in which is provided a shielding plate for partitioning the movement path and the cable guide side of the base.

As a result, the blower moves together with the base of the industrial robot, air near the base is exhausted through the air supply chamber, and the space on the cable guide side of the traveling path is separated from the slit side by the shield plate. It Therefore, when the traveling speed of the industrial robot becomes faster, the movement of the base in the traveling path becomes the same as the movement of the piston, but the air near the industrial robot is directly sent to the air supply chamber. It Therefore, it is possible to reduce the dust generated around the traveling drive unit of the industrial robot and scattered from the slit of the traveling path, and further the dust generated from the cable guide side and scattered into the clean room through the slit of the traveling path. It has the effect of reducing the amount.

Further, as described above, the invention according to claim 3 of the present invention is provided with a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the longitudinal direction, and a traveling drive section. An industrial robot in which the operating part supported by the base is guided by the traveling path and is supported by the base is arranged to project from the slit, and an air supply chamber is arranged in the traveling path and one end of which is provided in the base. A flexible duct that is open and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and is installed on the base to send A blower that blows the air outside the air chamber to the air supply chamber and a U-shape that is placed inside the running path and has one end connected to the base and the other end that is held on the running path and that is laterally facing the slit side of the running path. A flexible cable guide placed in the An upper shield plate that stands up from the peripheral surface and separates the movement path of the base from the cable guide side, and a lower shield plate that is placed parallel to and away from the upper shield plate, and one side is the base and the other side is the upper side of the cable guide. An upper groove that is fixed to an end and that is fitted to the upper shield plate is provided on the upper surface, and a lower groove that is fitted to the lower shield plate is provided on the lower surface to form a labyrinth bracket.

As a result, the blower moves together with the base of the industrial robot, and the air near the base is exhausted through the air supply chamber. Further, the space on the cable guide side of the traveling path is divided from the slit side by both the upper shield plate and the lower shield plate, and the labyrinth is constituted by the above both and the bracket. Therefore, when the traveling speed of the industrial robot becomes faster, the movement of the base in the traveling path becomes the same as the movement of the piston, but the air near the industrial robot is directly sent to the air supply chamber. It Therefore, it is possible to reduce the dust generated around the traveling drive unit of the industrial robot and scattered from the slits of the traveling path, and further, the dust generated from the cable guide side and scattered through the slits of the traveling path into the clean room. It has the effect of further reducing the amount.

Further, as described above, the invention according to claim 4 of the present invention is provided with a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the length thereof, and a traveling drive section. An industrial robot in which the operating part supported by the base is guided by the traveling path and is supported by the base is arranged to project from the slit, and an air supply chamber is arranged in the traveling path and one end of which is provided in the base. A flexible duct that is open and has the other end held on the running path, an exhaust pipe that has one end connected to the running path side end of the flexible duct and communicates with the outside of the building, and is installed on the base to send An air blower that blows air outside the air chamber to the air blow chamber, and a trumpet-shaped air guide provided outside the air blow chamber and surrounding the blower are provided.

As a result, the blower moves together with the base of the industrial robot, and the air near the base is guided to the air supply chamber by the air guide and is exhausted through the air supply chamber. Therefore, when the traveling speed of the industrial robot increases, the motion of the base in the traveling path becomes the same as the movement of the piston, but the air near the industrial robot is efficiently and directly sent to the air supply chamber. Be worried. Therefore, there is an effect of further reducing the dust generated around the traveling drive unit of the industrial robot and scattered from the slits of the traveling path.

Further, as described above, the invention according to claim 5 of the present invention is provided with a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the length thereof, and a traveling drive section. An industrial robot in which the base is guided by the traveling path and is supported by the operating base is arranged so as to project from the slits, an exhaust fan for exhausting air in the traveling path, and an industrial robot provided in the traveling path. A refraction slit, which is arranged along the longitudinal direction, is opened on a side surface in a cross section of the traveling path, is refracted upward, and the upper surface is opened to form a slit.

As a result, the air in the traveling path is exhausted by the exhaust fan, and the outside air flows in through the refraction slits provided in the traveling path and forming the labyrinth. Therefore, it is possible to reduce the amount of dust in the traveling path scattered from the refraction slits of the traveling path to the outside, and it is possible to maintain the cleanliness in the clean room.

Further, as described above, the invention according to claim 6 of the present invention is provided with a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the length thereof, and a traveling drive section. An industrial robot in which the base is guided by the traveling path and is supported by the operating base is arranged so as to project from the slits, an exhaust fan for exhausting air in the traveling path, and an industrial robot provided in the traveling path. A duct plate is provided at the lower edge of the slit, the duct plate forming an slit duct that opens upward and communicates with the exhaust fan.

As a result, the air in the running path is exhausted by the exhaust fan, and the air is directly sucked downward from the slit duct that opens upward at the lower edge of the slit in the running path. Therefore, it is possible to reduce the amount of dust scattered in the traveling path from the slits in the traveling path, and it is possible to maintain the cleanliness in the clean room.

Further, as described above, the invention according to claim 7 of the present invention is provided with a traveling path which is installed in a building, is formed in a duct shape, and is provided with slits along the longitudinal direction, and a traveling drive section. An industrial robot in which the base is guided by the traveling path and is supported by the operating base is arranged so as to project from the slits, an exhaust fan for exhausting air in the traveling path, and an industrial robot provided in the traveling path. A duct plate that forms a slit duct that opens upward at the lower edge of the slit and communicates with the exhaust fan, and a duct plate that is provided at the end of the duct plate near the exhaust fan and is located on the slit duct side and the slit side. An adjustment plate for adjusting the exhaust suction force is provided.

As a result, the air in the running path is exhausted by the exhaust fan, and the air is directly sucked downward from the slit duct that opens upward at the lower edge of the slit in the running path. In addition, the exhaust suction force on the slit side and the slit side is adjusted by the adjusting plate. Therefore, it is possible to further reduce the amount of dust in the traveling path scattered from the slits in the traveling path, and it is possible to maintain the cleanness in the clean room.

[Brief description of drawings]

FIG. 1 is a view showing a first embodiment of the present invention and is a front view showing a partially cutaway main part of an overhead traveling industrial robot apparatus.

FIG. 2 is an enlarged view of a left side main part of FIG.

FIG. 3 is a diagram showing a second embodiment of the present invention, which is equivalent to FIG.

FIG. 4 is a diagram showing a third embodiment of the present invention and is an enlarged view of a substantial part of FIG. 3 described above.

5 is a diagram showing a fourth embodiment of the present invention and is a diagram corresponding to the main part of FIG. 1 described above.

FIG. 6 is a plan view of FIG.

FIG. 7 is a diagram showing a fifth embodiment of the present invention and will be described later with reference to FIG.
FIG.

FIG. 8 is a view showing a sixth embodiment of the present invention, and is a view corresponding to FIG.

9 is a vertical left side view of FIG.

FIG. 10 is a front view of a main part of a conventional overhead traveling industrial robot apparatus.

11 is a left side view of FIG.

[Explanation of symbols]

 3 Traveling path 4 Slit 5 Exhaust fan 7 Industrial robot 8 Traveling drive unit 9 Base 10 Operating unit 11 Cable guide 14 Air supply chamber 15 Blower 16 Flexible duct 17 Exhaust pipe 18 Shielding plate, Lower shielding plate 19 Upper shielding plate 20 bracket 21 upper groove 22 lower groove 23 wind guide 24 refraction slit 26 duct plate 27 slit portion duct 28 adjustment plate

Claims (7)

[Claims] 1. A traveling path installed in a building, which is formed in a duct shape and is provided with slits along its length, and a base provided with a travel drive unit are guided by the traveling path to travel to the base. An industrial robot in which a supported operating portion is arranged to project from the slit, and one end which is arranged in the traveling path and opens at an air supply chamber provided in the base and the other end is held in the traveling path. A flexible duct, an exhaust pipe having one end connected to the end portion of the flexible duct on the side of the traveling path and communicating with the outside of the building, and the flexible pipe provided on the base to remove air outside the air supply chamber An overhead traveling industrial robot device having a blower for feeding air to an air feeding chamber. 2. A traveling path which is installed in a building and which is formed in a duct shape and which is provided with slits along the longitudinal direction, and a base on which a traveling drive unit is installed are guided by the traveling path and travel on the base. An industrial robot in which a supported operating portion is arranged to project from the slit, and one end which is arranged in the traveling path and opens at an air supply chamber provided in the base and the other end is held in the traveling path. A flexible duct, an exhaust pipe having one end connected to the end portion of the flexible duct on the side of the traveling path and communicating with the outside of the building, and the flexible pipe provided on the base to remove air outside the air supply chamber A blower for supplying air to the air supply chamber and a U-shaped member disposed in the traveling path, one end of which is connected to the base and the other end of which is held by the traveling path, and which is laterally opposite to the slit side of the traveling path. Flexible cable guides arranged in a line and along the length of the running path An overhead traveling industrial robot apparatus provided with a shield plate that is provided upright from the peripheral surface of the traveling path and partitions the movement path of the base and the cable guide side. 3. A traveling path installed in a building, which is formed in a duct shape and is provided with slits along the longitudinal direction, and a base provided with a traveling drive unit are guided by the traveling path and travel to the base. An industrial robot in which a supported operating portion is arranged to project from the slit, and one end which is arranged in the traveling path and opens at an air supply chamber provided in the base and the other end is held in the traveling path. A flexible duct, an exhaust pipe having one end connected to the end portion of the flexible duct on the side of the traveling path and communicating with the outside of the building, and the flexible pipe provided on the base to remove air outside the air supply chamber A blower for supplying air to the air supply chamber and a U-shaped member disposed in the traveling path, one end of which is connected to the base and the other end of which is held by the traveling path, and which is laterally opposite to the slit side of the traveling path. Flexible cable guides arranged in a line and along the length of the running path An upper shield plate that is provided upright from the peripheral surface of the traveling path to partition the movement path of the base and the cable guide side, and a lower shield plate that is arranged in parallel apart from the upper shield plate, and one side is the above The base is fixed to the upper end of the cable guide on the other side, and the upper groove for fitting the upper shield plate is provided on the upper surface and the lower groove for fitting the lower shield plate is provided on the lower surface to form a labyrinth bracket. A robot device for overhead traveling industry equipped with. 4. A traveling path installed in a building, which is formed in a duct shape and is provided with slits along its length, and a base provided with a travel drive unit are guided by the traveling path to travel to the base. An industrial robot in which a supported operating portion is arranged to project from the slit, and one end which is arranged in the traveling path and opens at an air supply chamber provided in the base and the other end is held in the traveling path. A flexible duct, an exhaust pipe having one end connected to the end portion of the flexible duct on the side of the traveling path and communicating with the outside of the building, and the flexible pipe provided on the base to remove air outside the air supply chamber An overhead traveling industrial robot apparatus comprising: a blower that blows air to a blower chamber; and a trumpet-shaped wind guide that is provided outside the blower chamber and surrounds the blower. 5. A traveling path installed in a building, which is formed in a duct shape and is provided with slits along its length, and a base provided with a travel drive unit are guided by the traveling path and travel to the base. An industrial robot in which a supported operating portion is arranged so as to project from the slit, an exhaust fan for exhausting air in the traveling path, and a longitudinal passage provided in the traveling path and traversing the traveling path. A robot apparatus for an overhead traveling industry, comprising: a refraction slit which is opened to a side surface and bent upward to open an upper surface to form the slit. 6. A traveling path, which is installed in a building, is formed in a duct shape, and is provided with slits along the longitudinal direction, and a base provided with a traveling drive unit is guided by the traveling path and travels to the base. An industrial robot in which a supported operating portion is arranged to project from the slit, an exhaust fan for exhausting air in the traveling path, and an upward opening at the lower edge portion of the slit provided in the traveling path. And a duct plate forming a slit duct communicating with the exhaust fan. 7. A traveling path installed in a building, which is formed in a duct shape and is provided with slits along the longitudinal direction, and a base provided with a traveling drive unit are guided by the traveling path and travel to the base. An industrial robot in which a supported operating portion is arranged to project from the slit, an exhaust fan for exhausting air in the traveling path, and an upward opening at the lower edge portion of the slit provided in the traveling path. And a duct plate that forms a slit duct communicating with the exhaust fan, and is provided at an end of the duct plate near the exhaust fan to adjust the exhaust suction force on the slit duct side and the slit side. An overhead traveling industrial robot apparatus having an adjusting plate.