JPH0713222Y2 - ウエハカセットの位置決め検知装置 - Google Patents
ウエハカセットの位置決め検知装置Info
- Publication number
- JPH0713222Y2 JPH0713222Y2 JP2625289U JP2625289U JPH0713222Y2 JP H0713222 Y2 JPH0713222 Y2 JP H0713222Y2 JP 2625289 U JP2625289 U JP 2625289U JP 2625289 U JP2625289 U JP 2625289U JP H0713222 Y2 JPH0713222 Y2 JP H0713222Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer cassette
- detection
- pair
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 27
- 235000012431 wafers Nutrition 0.000 description 39
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 12
- 210000000078 claw Anatomy 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2625289U JPH0713222Y2 (ja) | 1989-03-07 | 1989-03-07 | ウエハカセットの位置決め検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2625289U JPH0713222Y2 (ja) | 1989-03-07 | 1989-03-07 | ウエハカセットの位置決め検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02116738U JPH02116738U (enrdf_load_stackoverflow) | 1990-09-19 |
| JPH0713222Y2 true JPH0713222Y2 (ja) | 1995-03-29 |
Family
ID=31247714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2625289U Expired - Lifetime JPH0713222Y2 (ja) | 1989-03-07 | 1989-03-07 | ウエハカセットの位置決め検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713222Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-03-07 JP JP2625289U patent/JPH0713222Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02116738U (enrdf_load_stackoverflow) | 1990-09-19 |
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