JPH0713217Y2 - 半導体製造装置の下部電極 - Google Patents

半導体製造装置の下部電極

Info

Publication number
JPH0713217Y2
JPH0713217Y2 JP1988126177U JP12617788U JPH0713217Y2 JP H0713217 Y2 JPH0713217 Y2 JP H0713217Y2 JP 1988126177 U JP1988126177 U JP 1988126177U JP 12617788 U JP12617788 U JP 12617788U JP H0713217 Y2 JPH0713217 Y2 JP H0713217Y2
Authority
JP
Japan
Prior art keywords
lower electrode
wafer
semiconductor manufacturing
recess
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988126177U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245631U (enrdf_load_stackoverflow
Inventor
公彦 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP1988126177U priority Critical patent/JPH0713217Y2/ja
Publication of JPH0245631U publication Critical patent/JPH0245631U/ja
Application granted granted Critical
Publication of JPH0713217Y2 publication Critical patent/JPH0713217Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1988126177U 1988-09-24 1988-09-24 半導体製造装置の下部電極 Expired - Lifetime JPH0713217Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988126177U JPH0713217Y2 (ja) 1988-09-24 1988-09-24 半導体製造装置の下部電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988126177U JPH0713217Y2 (ja) 1988-09-24 1988-09-24 半導体製造装置の下部電極

Publications (2)

Publication Number Publication Date
JPH0245631U JPH0245631U (enrdf_load_stackoverflow) 1990-03-29
JPH0713217Y2 true JPH0713217Y2 (ja) 1995-03-29

Family

ID=31377453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988126177U Expired - Lifetime JPH0713217Y2 (ja) 1988-09-24 1988-09-24 半導体製造装置の下部電極

Country Status (1)

Country Link
JP (1) JPH0713217Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742174Y2 (enrdf_load_stackoverflow) * 1978-07-28 1982-09-17
JPS6054449A (ja) * 1983-09-05 1985-03-28 Toshiba Corp 半導体ウエハ搬送治具
JPS6167922A (ja) * 1984-09-12 1986-04-08 Fujitsu Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPH0245631U (enrdf_load_stackoverflow) 1990-03-29

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