JPH0713216Y2 - プラズマ処理装置 - Google Patents
プラズマ処理装置Info
- Publication number
- JPH0713216Y2 JPH0713216Y2 JP3265088U JP3265088U JPH0713216Y2 JP H0713216 Y2 JPH0713216 Y2 JP H0713216Y2 JP 3265088 U JP3265088 U JP 3265088U JP 3265088 U JP3265088 U JP 3265088U JP H0713216 Y2 JPH0713216 Y2 JP H0713216Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plasma processing
- processing apparatus
- outer electrode
- inner electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3265088U JPH0713216Y2 (ja) | 1988-03-14 | 1988-03-14 | プラズマ処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3265088U JPH0713216Y2 (ja) | 1988-03-14 | 1988-03-14 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01137528U JPH01137528U (lv) | 1989-09-20 |
JPH0713216Y2 true JPH0713216Y2 (ja) | 1995-03-29 |
Family
ID=31259203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3265088U Expired - Lifetime JPH0713216Y2 (ja) | 1988-03-14 | 1988-03-14 | プラズマ処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0713216Y2 (lv) |
-
1988
- 1988-03-14 JP JP3265088U patent/JPH0713216Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01137528U (lv) | 1989-09-20 |
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