JPH0712948Y2 - Parts testing equipment - Google Patents

Parts testing equipment

Info

Publication number
JPH0712948Y2
JPH0712948Y2 JP805890U JP805890U JPH0712948Y2 JP H0712948 Y2 JPH0712948 Y2 JP H0712948Y2 JP 805890 U JP805890 U JP 805890U JP 805890 U JP805890 U JP 805890U JP H0712948 Y2 JPH0712948 Y2 JP H0712948Y2
Authority
JP
Japan
Prior art keywords
component
defective
tray
components
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP805890U
Other languages
Japanese (ja)
Other versions
JPH0399375U (en
Inventor
勝利 岡安
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP805890U priority Critical patent/JPH0712948Y2/en
Publication of JPH0399375U publication Critical patent/JPH0399375U/ja
Application granted granted Critical
Publication of JPH0712948Y2 publication Critical patent/JPH0712948Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【考案の詳細な説明】 「産業上の利用分野」 この考案は例えば半導体集積回路素子のような部品の良
否を試験する部品試験装置に関し、特に不良と判定され
た部品の再テストを自動的に行なわせることができる機
能を付加した部品試験装置を提供しようとするものであ
る。
DETAILED DESCRIPTION OF THE INVENTION "Industrial application field" The present invention relates to a component testing apparatus for testing the quality of a component such as a semiconductor integrated circuit element, and in particular, automatically retests a component determined to be defective. The object of the present invention is to provide a component testing device with an added function that can be performed.

「従来の技術」 従来の半導体集積回路素子(以下単にICと称す)を試験
する部品試験装置では被試験ICを筒状のマガジンに整列
させて収納し、このマガジンをIC試験装置の部品供給側
のマガジンストッカに装着し、マガジンから先頭と後尾
の方向の向が規定された部品を順次試験装置に供給す
る。
"Conventional Technology" In a conventional component testing device for testing semiconductor integrated circuit devices (hereinafter simply referred to as IC), ICs to be tested are aligned and stored in a cylindrical magazine, and this magazine is stored on the component supply side of the IC testing device. It is mounted on the magazine stocker of and the parts whose orientations in the front and rear directions are specified are sequentially supplied from the magazine to the test equipment.

試験装置はマガジンから排出されたICを順次試験し、そ
の試験結果によって良品を不良品に選別し、良品と不良
品を別々にマガジンに仕分けして収納し、試験を終了す
る。
The test device sequentially tests the ICs discharged from the magazine, sorts the good products into defective products according to the test result, stores the good products and the defective products separately in the magazine, and ends the test.

「考案が解決しようとする課題」 試験結果において不良品が多量に発生した場合次の2通
りの原因が考えられる。素子の製造工程のミス。試
験装置の不具合。
“Problems to be solved by the device” When a large number of defective products are generated in the test results, the following two causes can be considered. A mistake in the manufacturing process of the device. Defective test equipment.

不良発生原因がかかを判定するには再テストが必要
となる。
Retesting is required to determine whether the cause of the defect is present.

従来は不良と判定されたICを収納したマガジンは人手に
よって試験装置の供給側マガジンストッカに移し替え再
テストを実行している。
Conventionally, the magazine containing ICs that have been determined to be defective is manually transferred to the supply-side magazine stocker of the test device and retested.

このために人手が掛ることと、試験部門における省力
化、強いては無人化の障害となっている。
This is an obstacle to manpower, labor saving in the testing department, and eventually unmanned operation.

この考案の目的は不良品が発生すると、その不良品を自
動的に再テストさせることができる機能を付加した部品
試験装置を提供しようとするものである。
An object of the present invention is to provide a component testing apparatus having a function of automatically retesting a defective product when the defective product occurs.

「課題を解決するための手段」 この考案では、部品供給部から繰出される部品を受取っ
て一列に整列させる部品整列装置と、 この部品整列装置によって整列された複数の部品を装置
内で循環するトレーに移載する第1部品移載装置と、 第1部品移載装置によって部品が移載されたトレーが移
送され、搭載された部品の良否を試験する試験装置と、 この試験装置によって試験された部品を搭載して到来す
るトレーから、このトレーに搭載されている部品を直線
搬送装置に移載する第2部品移載装置と、 直線搬送装置によって搬送される部品の中の良品と判定
された部品を直線搬送装置から排出する良品選別装置
と、 この良品選別装置によって直線搬送装置から排出された
部品を収納する良品収納部と、 直線搬送装置の終端と、部品整列装置との間に設けら
れ、良品選別装置によって選別されずに直線搬送装置の
終端に運ばれた不良品を部品整列装置に帰還させる不良
品搬送装置と、 によって部品試験装置を構成する。
"Means for Solving the Problem" In the present invention, a component aligning device for receiving components delivered from a component supply unit and aligning them in a line, and a plurality of components aligned by the component aligning device are circulated in the device. A first component transfer device that transfers the components to a tray, a tray that transfers the components transferred by the first component transfer device, and a test device that tests the quality of the mounted components, and a test device that tests The second component transfer device that transfers the components mounted on this tray to the linear transport device from the tray that comes with the mounted components, and is determined to be a good product among the components transported by the linear transport device. Non-defective product sorting device that ejects the parts that have been ejected from the linear transport device, a non-defective product storage unit that stores the components that are ejected from the linear transport device by this non-defective product sorting device, the end of the linear transport device, and the component alignment device And a defective product conveying device which is provided between the defective product conveying device and the non-defective product selecting device and returns the defective product conveyed to the end of the linear conveying device to the component aligning device.

この考案の構成によれば試験の結果、不良と判定された
部品は良品選別装置によって選択されずに直線搬送装置
の終端に運ばれる。
According to the configuration of the present invention, the parts determined to be defective as a result of the test are carried to the end of the linear carrying device without being selected by the non-defective product sorting device.

直線搬送装置の終端と部品供給側に設けた部品整列装置
との間に不良品搬送装置を設けたので不良品が良品選別
装置によって選別されずに直線搬送装置の終端まで運ば
れると、不良品搬送装置が動作して不良品を部品供給側
に設けた部品整列装置に帰還させることができる。
Since a defective product conveying device is provided between the end of the linear conveying device and the component aligning device provided on the component supply side, if defective products are not sorted by the good product sorting device and are conveyed to the end of the linear conveying device, defective products The transport device operates and the defective product can be returned to the component alignment device provided on the component supply side.

従ってこの考案によれば不良品が発生しても、その不良
品を自動的に部品供給側に帰還させることができ、不良
品を自動的に再テストすることができる。よって人手を
掛けることなく不良品を所定回以上繰返し試験すること
ができる利点が得られる。
Therefore, according to this invention, even if a defective product occurs, the defective product can be automatically returned to the component supply side, and the defective product can be automatically retested. Therefore, there is an advantage that a defective product can be repeatedly tested a predetermined number of times or more without manpower.

「実施例」 第1図にこの考案の一実施例を示す。第1図に示す100
は試験装置を示す。この試験装置100はテストヘッド101
に電気的に接続され、テストヘッド101に装着される部
品10の動作を試験し、良、不良を判定する。
"Embodiment" FIG. 1 shows an embodiment of the present invention. 100 shown in FIG.
Indicates a test device. This test apparatus 100 has a test head 101.
The operation of the component 10 electrically connected to the test head 101 and mounted on the test head 101 is tested to determine whether it is good or bad.

尚この例ではテストヘッド101を恒温槽102の内部に設
け、部品10を所望の温度環境下において動作させ、所定
の動作を行なうか否かを試験することができるように構
成した場合を示す。
In this example, the test head 101 is provided inside the constant temperature bath 102, and the component 10 is operated in a desired temperature environment so that it can be tested whether or not a predetermined operation is performed.

恒温槽102の内側と外側にわたって室内レール103が環状
に設けられる。この案内レール103にトレー104が案内さ
れて恒温槽102の内部と外部とをA−B−C−D−E−
Fの順に移動し、部品10を搬送する。
An indoor rail 103 is provided in an annular shape across the inside and outside of the constant temperature bath 102. The tray 104 is guided by the guide rail 103 so that the inside and the outside of the constant temperature bath 102 are ABCDE-E-
The part 10 is conveyed by moving in the order of F.

これから試験しようとする部品10は図の左下に位置した
部品供給部200に収納されており、この部品供給部200か
ら部品10が整列装置300に繰出される。
The component 10 to be tested is stored in the component supply unit 200 located at the lower left of the figure, and the component 10 is delivered from the component supply unit 200 to the alignment device 300.

整列装置300は例えばベルト式の搬送装置によって構成
することができ、例えばパルスモータによって移動量が
制御でき、正逆何れの方向にも部品10を移動させること
ができる。通常の部品供給状態では部品を一方向にのみ
移動させるが、後述する不良品搬送装置400が不良品を
搬送して来たときは逆向に駆動され不良品を任意の位置
に搬送することができる。
The aligning device 300 can be configured by, for example, a belt type conveying device, and the movement amount can be controlled by, for example, a pulse motor, and the components 10 can be moved in either forward or reverse directions. In the normal component supply state, the component is moved only in one direction, but when a defective product conveying device 400 described later conveys a defective product, it can be driven in the opposite direction to convey the defective product to an arbitrary position. .

整列装置300と対向して第1部品移載装置500を設ける。
第1部品移載装置500はY軸方向に移動できるように支
持された可動台501と、この可動台501に支持された空気
の吸引力によって部品10を吸着する複数の吸着ヘッド50
2とによって構成することができる。この例では可動台5
01に8個の吸着ヘッド502を取付けた場合を示す。
A first component transfer device 500 is provided so as to face the alignment device 300.
The first component transfer device 500 includes a movable base 501 that is supported so as to be movable in the Y-axis direction, and a plurality of suction heads 50 that suction the components 10 by the suction force of air supported by the movable base 501.
It can be composed of 2 and. In this example, the movable table 5
The case where eight suction heads 502 are attached to 01 is shown.

第1部品移載装置500は整列装置300によって一列に並べ
られた部品10を一度に8個、吸着ヘッド502に吸着し、
トレー104に移し替える。
The first component transfer device 500 sucks eight components 10 arranged in a line by the aligning device 300 at a time onto the suction head 502,
Transfer to tray 104.

トレー104には一列に8個の部品収納用凹部104Aを有
し、この部品収納用凹部104Aに吸着ヘッド502から8個
の部品10を落し込む。
The tray 104 has eight recesses 104A for storing components in one row, and eight components 10 are dropped into the recesses 104A for storing components from the suction head 502.

この移載作業をトレー104に形成された凹部104Aの列の
数だけ繰返すとトレー104は満杯となり、順路A−Bを
通ってテストヘッド101の位置に運ばれる。
When this transfer operation is repeated for the number of rows of the recesses 104A formed in the tray 104, the tray 104 becomes full and is conveyed to the position of the test head 101 through the route A-B.

テストヘッド101の位置ではトレー104から部品10が1個
ずつ取出され、この取出された部品がテストヘッド101
の部品装着部に装着され、試験装置100によって部品の
動作が試験される。
At the position of the test head 101, the parts 10 are taken out one by one from the tray 104, and the taken-out parts are taken out by the test head 101.
The component is mounted on the component mounting part of (1) and the operation of the component is tested by the test apparatus 100.

試験が終了すると部品10はトレー104の元の位置に戻さ
れる。テストヘッド101とトレー104との間において部品
10を運ぶ搬送装置としては空気による吸着ヘッドと、X
−Yの2方向に移動する移動台とによって、構成するこ
とができる。
When the test is complete, the part 10 is returned to its original position on the tray 104. Parts between test head 101 and tray 104
As a transfer device for carrying 10, an air suction head, X
It can be configured by a movable table that moves in two directions of -Y.

このX及びY方向に移動する搬送装置が試験を終了した
部品10をトレー104に戻すとき、試験装置100はトレー10
4上の凹部104Aの位置に対応した記憶位置にその凹部104
Aに収納される部品10の良否を記憶する。
When the transport device that moves in the X and Y directions returns the finished component 10 to the tray 104, the testing device 100
4 at the storage position corresponding to the position of the recess 104A on the recess 104
The quality of the component 10 stored in A is stored.

トレー104上の全ての部品10が試験を終了すると、トレ
ー104は順路C−Dを通って第2部品移載装置600の下部
に移動する。
When all the components 10 on the tray 104 have finished the test, the tray 104 moves to the lower part of the second component transfer device 600 through the route CD.

第2部品移載装置600は第1部品移載装置500と同様にY
軸方向に移動自在に支持された移動台601と、この移動
台601に支持された吸着ヘッド602とによって構成され、
吸着ヘッド602がトレー104上の部品を吸着すると移動台
601が直線搬送装置700に向って移動する。
The second component transfer device 600 has the same Y as the first component transfer device 500.
A movable table 601 supported movably in the axial direction, and a suction head 602 supported by the movable table 601.
When the suction head 602 sucks the parts on the tray 104, the moving table
601 moves toward the linear transport device 700.

吸着ヘッド602が直線搬送装置700の上に到達すると、吸
着ヘッド602は部品10を吸着から解放し、部品10を直線
搬送装置700に移載する。
When the suction head 602 reaches above the linear transport device 700, the suction head 602 releases the component 10 from the suction and transfers the component 10 to the linear transport device 700.

直線搬送装置700は部品供給側に設けた部品整列装置300
と同様にベルト式の搬送機構によって構成することがで
きる。
The linear transport device 700 is a component aligner 300 provided on the component supply side.
Similarly to the above, it may be configured by a belt type transport mechanism.

直線搬送装置700の両側に良品選別装置720と部品収納部
740とが設けられる。良品選別装置720は例えば複数のエ
アシリンダによって構成することができ直線搬送装置70
0によって運ばれて来る部品10の中から良品と判定され
た部品10を直線搬送装置700の上から排出し、対向して
設けた部品収納部740に収納させる。
The non-defective product sorting device 720 and the parts storage section are located on both sides of the linear transport device 700.
And 740. The non-defective product sorting device 720 can be composed of, for example, a plurality of air cylinders, and the linear transport device 70 can be used.
The component 10 determined to be non-defective among the components 10 carried by 0 is discharged from the top of the linear transport device 700, and is stored in the component storage section 740 provided opposite thereto.

良品選別装置720はトレー104上の部品の位置に対応して
記憶した良否の判定結果に基づいて動作し、良品だけを
選択して部品収納部740に収納する。
The non-defective item selection device 720 operates based on the result of quality judgment stored corresponding to the position of the component on the tray 104, and selects only non-defective items and stores them in the component storage section 740.

不良と判定された部品10は良品収納部740によって排出
されることなく直線搬送装置700の終端701に到達する。
The component 10 determined to be defective reaches the end 701 of the linear transport device 700 without being discharged by the non-defective product storage unit 740.

この考案においては、直線搬送装置700の終端701と整列
装置300との間に不良品を直線搬送装置700から整列装置
300に帰還させる不良品搬送装置400を設けた構造を特徴
とするものである。
In the present invention, a defective product is arranged between the terminal 701 of the linear transport device 700 and the aligning device 300 from the linear transport device 700.
The structure is characterized in that a defective product conveying device 400 for returning to 300 is provided.

不良品搬送装置400はX軸方向に移動できるように支持
した可動台401と、可動台401に取付けた吸着ヘッド402
とによって構成することができる。
The defective product conveying device 400 includes a movable base 401 supported so as to be movable in the X-axis direction, and a suction head 402 attached to the movable base 401.
It can be configured by and.

直線搬送装置700の終端701に部品10が到来すると、その
状態を光学式スイッチ等によって検出する。終端701に
部品が到来すると、不良品搬送装置400が動作を始め、
終端701に到来した部品10を吸着ヘッド402に吸着して整
列装置300に搬送する。
When the component 10 arrives at the end 701 of the linear transport device 700, the state is detected by an optical switch or the like. When a component arrives at the terminal 701, the defective product conveying device 400 starts operating,
The component 10 that has reached the end 701 is adsorbed by the adsorption head 402 and conveyed to the alignment device 300.

整列装置300に不良品が搬送されると、不良品の数に応
じて試験装置100はトレー104に移載する不良品の位置を
指定し、不良品の再テストを認識する。
When the defective products are conveyed to the aligning device 300, the testing device 100 specifies the positions of the defective products to be transferred to the tray 104 according to the number of defective products, and recognizes the retest of the defective products.

試験装置100は不良品の再テスト回数を計数し、同一の
部品が規定の回数以上再テストを繰返したか否かを判定
し、同一部品が規定回数以上再テストを繰返したとき眞
に不良と判定する。
The test apparatus 100 counts the number of retests of defective products and determines whether the same component has been retested more than a specified number of times, and when the same component has been retested more than a specified number of times, it is determined to be truly defective. To do.

「考案の効果」 以上説明したように、この考案によれば試験した部品に
不良が発生しても、その不良部品を自動的に再テストさ
せることができる。
[Advantage of Invention] As described above, according to this invention, even if a defect occurs in a tested component, the defective component can be automatically retested.

この結果仮にテストヘッド101でたまたま接触不良によ
り不良判定結果が出された場合でも、その不良と判定さ
れた部品は再テストに自動的に帰還されるから、人手を
掛けることなく再テストによって正しい試験を行なうこ
とができる。
As a result, even if the test head 101 accidentally gives a failure determination result due to a contact failure, the parts that are determined to be defective are automatically returned to the retest, so the correct test can be performed by the retest without human intervention. Can be done.

またテストヘッド101が故障して接触不良が発生した場
合には試験される部品の全てが不良と判定され多量の不
良品が発生するが、この不良品は自動的に再テストさ
れ、人手を掛けることなく再テストを繰返すことができ
る。
Also, if the test head 101 fails and contact failure occurs, all of the tested components are determined to be defective and a large number of defective products occur, but these defective products are automatically retested and manpower is applied. The retest can be repeated without.

またこの場合再テストされる部品の数が異常に多く、再
テストの回数も規定回数に達したとき、試験装置は試験
を停止し、この状態で初めて人為的に試験装置の故障
か、部品が眞に不良であるのかの判定を行なえばよい。
Also, in this case, when the number of parts to be retested is abnormally large and the number of retests reaches the specified number, the test equipment stops the test and only in this state is the test equipment artificially broken or the parts are It suffices to make a determination as to whether or not it is truly defective.

従ってこの考案によればときどき発生する接触不良等に
よる不良判定故事を自動的に救済することができ試験の
自動化を達することができる。
Therefore, according to this invention, it is possible to automatically remedy a failure determination event due to a contact failure or the like that sometimes occurs, and automation of the test can be achieved.

【図面の簡単な説明】[Brief description of drawings]

第1図はこの考案の一実施例を示す平面図である。 10:部品、100:試験装置、101:テストヘッド、102:恒温
槽、103:案内レール、104:トレー、200:部品供給部、30
0:整列装置、400:不良品搬送装置、500:第1部品移載装
置、501:可動台、502:吸着ヘッド、600:第2部品移載装
置、601:可動台、602:吸着ヘッド、700:直線搬送装置、
720:良品選別装置、740:良品収納部。
FIG. 1 is a plan view showing an embodiment of the present invention. 10: Parts, 100: Testing device, 101: Test head, 102: Constant temperature bath, 103: Guide rail, 104: Tray, 200: Parts supply unit, 30
0: aligning device, 400: defective product conveying device, 500: first component transfer device, 501: movable table, 502: suction head, 600: second component transfer device, 601: movable table, 602: suction head, 700: Linear transport device,
720: Non-defective item sorting device, 740: Non-defective item storage section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】A.部品供給部から繰出される部品を受取っ
て一例に整列させる部品整列装置と、 B.この部品整列装置によって整列された複数の部品を装
置内で循環するトレーに移載する第1部品移載装置と、 C.第1部品移載装置によって部品が移載されたトレーが
移送され、搭載された部品の良否を試験する試験装置
と、 D.この試験装置によって試験された部品を搭載して到来
するトレーから、このトレーに搭載されている部品を直
線搬送装置に移載する第2部品移載装置と、 E.上記直線搬送装置によって搬送される部品の中の良品
と判定された部品を上記直線搬送装置から排出する良品
選別装置と、 F.この良品選別装置によって上記直線搬送装置から排出
された部品を収納する良品収納部と、 G.上記直線搬送装置の終端と、上記部品整列装置との間
に設けられ、上記良品選別装置によって選別されずに上
記直線搬送装置の終端に運ばれた不良品を上記部品整列
装置に帰還させる不良品搬送装置と、 によって構成した部品試験装置。
1. A component arranging device for receiving a component delivered from a component supply unit and arranging it as an example; B. Transferring a plurality of components aligned by this component arranging device to a tray circulating in the device. C. the first component transfer device, C. the tray on which the components are transferred by the first component transfer device is transferred, and the test device for testing the quality of the mounted component is tested by this test device. The second component transfer device that transfers the components mounted on this tray to the linear transport device from the tray that comes with the mounted components, and E. Non-defective products among the components transported by the linear transport device. The non-defective product sorting device that discharges the parts determined to be from the above-mentioned linear transport device; F. The non-defective product storage unit that stores the parts discharged from the above-mentioned linear transport device by this non-defective product sorting device; And the parts aligning device Is provided between the, device test apparatus defective products carried at the end of the straight conveying apparatus without being screened by the non-defective sorting device constituted by a defective conveying device for feeding back to the component alignment apparatus.
JP805890U 1990-01-29 1990-01-29 Parts testing equipment Expired - Fee Related JPH0712948Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP805890U JPH0712948Y2 (en) 1990-01-29 1990-01-29 Parts testing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP805890U JPH0712948Y2 (en) 1990-01-29 1990-01-29 Parts testing equipment

Publications (2)

Publication Number Publication Date
JPH0399375U JPH0399375U (en) 1991-10-17
JPH0712948Y2 true JPH0712948Y2 (en) 1995-03-29

Family

ID=31511702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP805890U Expired - Fee Related JPH0712948Y2 (en) 1990-01-29 1990-01-29 Parts testing equipment

Country Status (1)

Country Link
JP (1) JPH0712948Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7919974B2 (en) * 2004-07-23 2011-04-05 Advantest Corporation Electronic device test apparatus and method of configuring electronic device test apparatus

Also Published As

Publication number Publication date
JPH0399375U (en) 1991-10-17

Similar Documents

Publication Publication Date Title
KR100910355B1 (en) Electronic component testing apparatus
US6137303A (en) Integrated testing method and apparatus for semiconductor test operations processing
US7151388B2 (en) Method for testing semiconductor devices and an apparatus therefor
JP3136613B2 (en) Semiconductor device test apparatus and test tray used in the test apparatus
US6239396B1 (en) Semiconductor device handling and sorting apparatus for a semiconductor burn-in test process
JP5186370B2 (en) Electronic component transfer method and electronic component handling apparatus
WO1997005495A1 (en) Semiconductor device tester
JPH11231020A (en) Ic test system
JPH08248095A (en) Inspecting apparatus
JP4222442B2 (en) Insert for electronic component testing equipment
JPH112657A (en) Complex ic tester
KR100401014B1 (en) Test Handler
JP2000088918A (en) Ic handler
JPH0712948Y2 (en) Parts testing equipment
JP5314668B2 (en) Electronic component transfer apparatus and electronic component testing apparatus including the same
JP2741043B2 (en) Semiconductor element sorting method
JP3009115B2 (en) IC test equipment
JPH0854444A (en) Inspecting apparatus and method therefor
WO2008032396A1 (en) Test tray and electronic component testing apparatus provided with same
JPH10340937A (en) Composite ic test system
JPH0712947Y2 (en) Parts testing equipment
JPS6123012A (en) Tray construction of base plate stocker
JP2001235512A (en) Electronic part testing device
JPH0717026Y2 (en) IC test equipment
EP3729115A1 (en) Kit-less pick and place handler

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees