JPH07122404A - Thick film thermistor composition, manufacture thereof, and thick film thermistor using the composition and manufacture thereof - Google Patents
Thick film thermistor composition, manufacture thereof, and thick film thermistor using the composition and manufacture thereofInfo
- Publication number
- JPH07122404A JPH07122404A JP34254091A JP34254091A JPH07122404A JP H07122404 A JPH07122404 A JP H07122404A JP 34254091 A JP34254091 A JP 34254091A JP 34254091 A JP34254091 A JP 34254091A JP H07122404 A JPH07122404 A JP H07122404A
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- film thermistor
- thermistor
- composition
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Thermistors And Varistors (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本考案は、絶縁基板上の電極間に
サンドイッチ形に印刷形成される厚膜サーミスタ用の厚
膜サーミスタ組成物及びその製造方法、並びにこの組成
物を用いた厚膜サーミスタ及びその製造方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thick film thermistor composition for a thick film thermistor formed by sandwich printing between electrodes on an insulating substrate, a method for producing the same, and a thick film thermistor using the composition. And a manufacturing method thereof.
【0002】[0002]
【従来の技術】従来の厚膜サーミスタ組成物としては、
Mn,Co,Fe,Niなどのサーミスタ特性を有する
金属酸化物と導電材料としてのRuO2と更にガラス粉
末を混合したものが知られている。そしてこの組成物を
絶縁基板上に形成された第1の電極上に一部を重ね合わ
せて印刷し、更にこの上に第2の電極を重ね合わせて形
成したサンドイッチ形の厚膜サーミスタがある。As a conventional thick film thermistor composition,
It is known that a metal oxide such as Mn, Co, Fe, or Ni having thermistor characteristics, RuO 2 as a conductive material, and glass powder are further mixed. Then, there is a sandwich type thick film thermistor in which a part of the composition is printed on a first electrode formed on an insulating substrate by superimposing and a second electrode is further formed thereon.
【0003】このサンドイッチ形厚膜サーミスタは、同
一平面上の電極間にサーミスタ組成物を印刷したシート
状の厚膜サーミスタと比べて抵抗値を低くすることがで
きる。しかし、このサンドイッチ形の厚膜サーミスタで
も抵抗値は8kΩ程度が限度であり、それ以下の抵抗値
を出すには、第1の導電性物質としてのRuO2を更に
加えるか、あるいはMn,Co,Fe,Niなどのサー
ミスタ特性を有する金属酸化物に更に直接CuまたはC
u酸化物(以下、Cuと略す)を加えていた。This sandwich type thick film thermistor can have a lower resistance value than a sheet-like thick film thermistor in which the thermistor composition is printed between electrodes on the same plane. However, even in this sandwich type thick film thermistor, the resistance value is limited to about 8 kΩ, and in order to obtain a resistance value lower than that, RuO 2 as the first conductive material is further added, or Mn, Co, Further, Cu or C can be directly added to a metal oxide having thermistor characteristics such as Fe and Ni.
u oxide (hereinafter abbreviated as Cu) was added.
【0004】従来のサーミスタ特性を有する金属酸化物
にCuを添加して酸化物とする方法では、Mn,Co,
Fe,Niがスピネル構造を形成するように1000℃
以上の温度で反応させる必要がある。そしてCuを添加
すると、Cuがスピネル構造に取込まれるものと、Cu
OまたはCu2Oのいずれかの化合物を生成するものと
が存在する。このうちCu2Oは長時間放置するとCu
Oに酸化するため、結晶構造及び導電率のそれぞれの変
化、又は、歪などに基因して、抵抗値変化を引き起こす
と考えられている。このことは、Cuを添加しないサー
ミスタ組成物の抵抗値変化率が125℃、1000時間
で+1%程度であるのに対し、Cuを添加したものは1
25℃、100時間で+10%〜+15%の変化を生じ
ることからも知られる。In the conventional method of adding Cu to a metal oxide having thermistor characteristics to form an oxide, Mn, Co,
1000 ℃ so that Fe and Ni form a spinel structure
It is necessary to react at the above temperature. When Cu is added, Cu is incorporated into the spinel structure and Cu
Some produce compounds of either O or Cu 2 O. Of these, Cu 2 O is Cu if left for a long time.
Since it oxidizes to O, it is considered to cause a change in resistance value due to changes in crystal structure and conductivity, strain, or the like. This means that the resistance change rate of the thermistor composition to which Cu is not added is about + 1% at 125 ° C. for 1000 hours, whereas that of Cu is 1
It is also known that a change of + 10% to + 15% occurs at 25 ° C for 100 hours.
【0005】そこで、この問題を解決するため、Cuを
添加する場合、1000℃以下の温度に抑えることが考
えられる。しかし、従来のサーミスタ組成物をプレス成
形したのち、焼成し焼結させるというディスクリートタ
イプでは、化学反応が生じないためスピネル構造が形成
されず、その結果サーミスタ特性が得られず、しかも焼
結しないため、機械的に脆いものになっていた。Therefore, in order to solve this problem, it is conceivable to suppress the temperature to 1000 ° C. or lower when Cu is added. However, in the discrete type in which a conventional thermistor composition is press-molded and then fired and sintered, a spinel structure is not formed because a chemical reaction does not occur, and as a result, thermistor characteristics are not obtained, and further, it is not sintered. , Was mechanically fragile.
【0006】[0006]
【発明が解決しようとする課題】又、RuO2は添加量
が全体の7wt%を超えると、抵抗値とB定数(抵抗値
変化率を知る定数で一般にはB=2000K〜5000
Kである。)とが急激に低下してしまい、サーミスタと
して使用不可能になってしまう。また、サーミスタ特性
を有する金属酸化物にCuを直接添加する方法は、抵抗
値を下げるにはよい方法であるが、このCuを添加した
組成は熱安定性に欠け、125℃、100時間で+10
%〜+15%の抵抗値変化を起こすという問題がある。When the added amount of RuO 2 exceeds 7 wt% of the whole, the resistance value and the B constant (a constant for knowing the rate of change of the resistance value, generally B = 2000K to 5000).
K. ) And abruptly drop, making it unusable as a thermistor. Further, the method of directly adding Cu to the metal oxide having thermistor characteristics is a good method for lowering the resistance value, but the composition to which Cu is added lacks thermal stability and is +10 at 125 ° C. for 100 hours.
There is a problem in that the resistance value changes from% to + 15%.
【0007】本発明は上述の問題点に鑑み、添加された
Cuの耐熱変化を抑え、高いB定数を有しながらも抵抗
値を下げることができる厚膜サーミスタ組成物及びその
製造方法並びにこの組成物を用いた厚膜サーミスタ及び
その製造方法を提供するものである。In view of the above problems, the present invention is a thick film thermistor composition capable of suppressing the heat resistance change of added Cu and having a high B constant, while lowering the resistance value, a method for producing the same, and this composition. A thick film thermistor using a material and a method for manufacturing the same are provided.
【0008】[0008]
【課題を解決するための手段】本発明は、上述の課題を
解決することを目的としてなされてもので、上述の課題
を解決する一手段として以下の構成を備える。即ち、M
n,Co,Fe,Niのそれぞれの酸化物のうちから選
ばれたサーミスタ特性を有する少なくとも2種の金属酸
化物を混合し焼結したものと、第1の導電性物質として
のRuO2と、第2の導電性物質としてのCu、Cu酸
化物,Cu水酸化物及びCu炭酸塩のうちの少なくとも
1種を焼成した酸化物と、ガラスとよりなる。Since the present invention has been made for the purpose of solving the above-mentioned problems, it has the following constitution as one means for solving the above-mentioned problems. That is, M
a mixture of at least two metal oxides having thermistor characteristics selected from the oxides of n, Co, Fe, and Ni and mixed and sintered; and RuO 2 as the first conductive material, The second conductive material is composed of an oxide obtained by firing at least one of Cu, Cu oxide, Cu hydroxide, and Cu carbonate, and glass.
【0009】そして、これを厚膜サーミスタに適用す
る。Then, this is applied to a thick film thermistor.
【0010】[0010]
【作用】以上の構成において、サーミスタ特性を有する
少なくとも2種の金属酸化物を混合し焼結したものと第
1の導電材料としてのRuO2とガラスよりなる厚膜サ
ーミスタ材料に、さらに第2の導電材料として、Cu、
Cu酸化物,Cu水酸化物及びCu炭酸塩のうちの少な
くとも1種を焼成したものを添加することにより、低抵
抗でB定数が高く、耐熱安定性を有する厚膜サーミスタ
組成物、及び厚膜サーミスタを提供することができる。In the above structure, a thick film thermistor material composed of a mixture of at least two metal oxides having thermistor characteristics and sintering, a first conductive material of RuO 2 and glass, and a second As a conductive material, Cu,
Thick film thermistor composition having low resistance, high B constant and heat stability, and thick film by adding at least one of Cu oxide, Cu hydroxide and Cu carbonate A thermistor can be provided.
【0011】[0011]
【実施例】以下、図面を参照して本発明に係わる一実施
例を詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described in detail below with reference to the drawings.
【0012】[0012]
【第1実施例】Mn3O4,Co3O4,Fe3O4を
1:1:0.2のモル比で混合し、成形、焼成すること
により、固相反応させて得た金属酸化物粉末31wt%
と、第1の導電性物質としてのRuO2粉末4wt%
と、第2の導電性物質としてのCuOを10wt%と、
ホウケイ酸鉛ガラス粉末55wt%とを秤量し、自動混
合機またはボールミルにより混合して混合物とする。Example 1 Metal obtained by solid phase reaction by mixing Mn 3 O 4 , Co 3 O 4 and Fe 3 O 4 in a molar ratio of 1: 1: 0.2, molding and firing. Oxide powder 31 wt%
And 4% by weight of RuO 2 powder as the first conductive material
And 10% by weight of CuO as the second conductive material,
55 wt% lead borosilicate glass powder is weighed and mixed by an automatic mixer or a ball mill to form a mixture.
【0013】ここで、有機ビヒクルとして7wt%のエ
チルセルロースを含むブチルカルビトールを前記混合物
の26wt%となるように加え、3本ロール等で充分に
混合し厚膜サーミスタペーストを作製した。得られた厚
膜サーミスタペーストを用い、図1及び図2に示すよう
に、基板1上に対向面積0.25mm2となるように上
下に対向して形成される電極2,2間に焼成後の厚膜が
40μmとなるようにサンドイッチ形に厚膜サーミスタ
体3を印刷し850℃で10分間の焼成により形成し厚
膜サーミスタを得た。Here, as an organic vehicle, butyl carbitol containing 7 wt% of ethyl cellulose was added so as to be 26 wt% of the mixture, and sufficiently mixed with a three-roll or the like to prepare a thick film thermistor paste. Using the obtained thick film thermistor paste, after firing between the electrodes 2 and 2 which are vertically opposed to each other to have an opposed area of 0.25 mm 2 as shown in FIGS. 1 and 2. The thick film thermistor body 3 was printed in a sandwich form so that the thick film of 40 μm was formed and baked at 850 ° C. for 10 minutes to obtain a thick film thermistor.
【0014】得られた厚膜サーミスタの抵抗値871
Ω、B定数2936K,125℃,1000時間加熱の
抵抗値変化率は+1.9%で安定した特性であった。Resistance value 871 of the obtained thick film thermistor
Ω, B constant 2936K, 125 ° C, resistance value change rate after heating for 1000 hours was + 1.9%, which was stable characteristics.
【0015】別表1に、本発明の厚膜サーミスタ試料
2,3,4,5及び6の抵抗値、B定数、125℃,1
00時間又は1000時間の抵抗値変化率を示す。Table 1 shows resistance values, B constant, 125 ° C., 1 of the thick film thermistor samples 2, 3, 4, 5 and 6 of the present invention.
The rate of change in resistance value at 00 hours or 1000 hours is shown.
【0016】表1において実施例1は、100時間、実
施例2〜6は1000時間の加熱である。いずれも12
5℃の耐熱変化であり、抵抗値は25℃で膜厚40μm
対向面積0.25mm2の値であり、B定数は25℃で
の抵抗値を100℃の抵抗値で割ったものの自然対数に
それらの温度の逆数の差をとったものである。In Table 1, Example 1 is heating for 100 hours, and Examples 2-6 is heating for 1000 hours. 12 for each
Heat resistance change at 5 ℃, resistance value at 25 ℃, film thickness 40μm
The facing area is a value of 0.25 mm 2 , and the B constant is the natural logarithm of the resistance value at 25 ° C. divided by the resistance value at 100 ° C., and the difference of the reciprocal of those temperatures.
【0017】尚、以上の実施例では、第2の導電性物質
Cu源としてCuOを用いたが他のCu化合物でもよ
い。この表1より従来の厚膜サーミスタに比べて本発明
の組成物を用いて形成した厚膜サーミスタは、Cuをサ
ーミスタ特性を有する金属酸化物と反応させずに別途添
加することにより、低抵抗で高いB定数を有し、更に1
25℃の熱に対して抵抗値変化率が少なく、安定であ
る。このため、上述の厚膜サーミスタ組成物を用いて厚
膜サーミスタとして基板上に上下に対向して形成される
電極間にサンドイッチ形に厚膜サーミスタ体を印刷、焼
成することにより、低抵抗でB定数が高く、非常に耐熱
安定性が良好の厚膜サーミスタを得ることができる。Although CuO is used as the second conductive material Cu source in the above embodiments, other Cu compounds may be used. As shown in Table 1, the thick film thermistor formed by using the composition of the present invention has a lower resistance than the conventional thick film thermistor by adding Cu separately without reacting with the metal oxide having thermistor characteristics. Has a high B constant, and is 1
It is stable with a small rate of change in resistance value with respect to heat of 25 ° C. Therefore, by using the above-mentioned thick film thermistor composition, a thick film thermistor body is printed and fired in a sandwich form between electrodes which are vertically formed on a substrate as a thick film thermistor, so that B It is possible to obtain a thick film thermistor having a high constant and excellent heat resistance stability.
【0018】[0018]
【発明の効果】以上説明したように、本発明によれば、
金属酸化物と共に混合し成形して予め固相反応させた場
合(すなわち表1における試料番号1)のようにB定数
を低下させたり、耐熱安定性に欠けることがなく、低抵
抗でB定数が高く、熱に対する抵抗値変化率の少ない厚
膜サーミスタ組成物及び厚膜サーミスタを得ることがで
きる。又、ガラス量を一定にして、金属酸化物と第1、
第2の導電材料を配合したから、それぞれの添加量を変
化させることにより、幅の広い抵抗値とB定数の組み合
せが可能になる。As described above, according to the present invention,
There is no decrease in B constant as in the case of mixing and molding with a metal oxide and preliminarily solid phase reaction (that is, sample No. 1 in Table 1), and there is no lack of heat stability. It is possible to obtain a thick film thermistor composition and a thick film thermistor which are high and have a low resistance change rate with respect to heat. In addition, the glass amount is kept constant and the metal oxide and the first,
Since the second conductive material is blended, a wide range of resistance values and B constants can be combined by changing the amount of each additive.
【図1】本発明の厚膜サーミスタ組成物を用いて形成さ
れた厚膜サーミスタの平面図である。FIG. 1 is a plan view of a thick film thermistor formed using the thick film thermistor composition of the present invention.
【図2】同上A−A線縦断面図である。FIG. 2 is a vertical sectional view taken along line AA of the above.
【図3】本発明の厚膜サーミスタのCuO添加量と抵抗
値の特性図である。FIG. 3 is a characteristic diagram of CuO addition amount and resistance value of the thick film thermistor of the present invention.
【図4】同上のCuO添加量とB定数の特性図である。FIG. 4 is a characteristic diagram of CuO addition amount and B constant as above.
1. 基板 2. 電極 3. 厚膜サーミスタ体 1. Substrate 2. Electrode 3. Thick film thermistor body
【表1】 [Table 1]
Claims (4)
化物のうちから選ばれたサーミスタ特性を有する少なく
とも2種の金属酸化物を混合し焼結したものと、第1の
導電性物質としてのRuO2と、第2の導電性物質とし
てのCu,Cu酸化物,Cu水酸化物及びCu炭酸塩の
うちの少なくとも1種を焼成した酸化物と、ガラスとよ
りなることを特徴とする厚膜サーミスタ組成物。1. A mixture of at least two metal oxides having thermistor characteristics selected from the oxides of Mn, Co, Fe and Ni, mixed and sintered, and a first conductive material. RuO 2 , a second conductive substance, an oxide obtained by firing at least one of Cu, Cu oxide, Cu hydroxide and Cu carbonate, and glass. Membrane thermistor composition.
化物のうちから選ばれたサーミスタ特性を有する少なく
とも2種の金属酸化物を秤量し、混合し、焼成し、更に
粉砕し、秤量するA工程と、第1の導電性物質としての
RuO2を秤量するB工程と、第2の導電性物質として
のCu,Cu酸化物,Cu水酸化物及びCu炭酸塩のう
ちの少なくとも1種を最終的にCu酸化物にして、その
Cu酸化物を秤量するC工程と、ガラスを秤量するD工
程と、前記秤量4工程A,B,C及びDで得られた各粉
末を混合して厚膜ペーストを製造するE工程と、前記E
工程で得られた厚膜ペーストを焼成し焼結するF工程と
からなることを特徴とする厚膜サーミスタ組成物の製造
方法。2. At least two metal oxides having thermistor characteristics selected from the respective oxides of Mn, Co, Fe and Ni are weighed, mixed, fired, further crushed and weighed. At least one of Cu, Cu oxide, Cu hydroxide, and Cu carbonate as the second conductive material, and the A step, the B step of weighing RuO 2 as the first conductive material, Finally, the Cu oxide is mixed, and the C step of weighing the Cu oxide, the D step of weighing the glass, and the powders obtained in the weighing 4 steps A, B, C and D are mixed to form a thick film. E step of manufacturing a film paste, and the E step
A method for producing a thick film thermistor composition, which comprises the step F of firing and sintering the thick film paste obtained in the step.
スタ組成物を、基板上に上下に対向して形成される電極
間に、サンドイッチ形になるように、印刷し焼成するこ
とにより形成することを特徴とする厚膜サーミスタ。3. The thick film thermistor composition according to claim 1 or 2 is formed by printing and firing so as to form a sandwich shape between electrodes formed on a substrate so as to face each other vertically. Thick film thermistor characterized by
製造方法と、基板上に上下に対向して形成される第1の
電極を印刷するG工程と、その第1の電極上の少なくと
も一部分と電気的に接続するように、前記サーミスタ組
成物を積層して印刷するH工程と、更にサーミスタ組成
物上の少なくとも一部分と電気的に接続するように第2
の電極を印刷するI工程と、前記第1の電極、前記サー
ミスタ組成物、及び前記第2の電極を基板と共に焼成す
るJ工程とよりなることを特徴とする厚膜サーミスタの
製造方法。4. A method for producing a thick film thermistor composition according to claim 2, a G step of printing first electrodes vertically opposed to each other on a substrate, and at least on the first electrodes. A step H of laminating and printing the thermistor composition so as to electrically connect to a part, and a second step to electrically connect to at least a part of the thermistor composition.
2. The method for producing a thick film thermistor, which comprises the step I of printing the electrode of step 1 and the step J of firing the first electrode, the thermistor composition, and the second electrode together with the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03342540A JP3140124B2 (en) | 1991-10-24 | 1991-10-24 | Thick film thermistor composition, method for producing the same, thick film thermistor and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03342540A JP3140124B2 (en) | 1991-10-24 | 1991-10-24 | Thick film thermistor composition, method for producing the same, thick film thermistor and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07122404A true JPH07122404A (en) | 1995-05-12 |
JP3140124B2 JP3140124B2 (en) | 2001-03-05 |
Family
ID=18354543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03342540A Expired - Lifetime JP3140124B2 (en) | 1991-10-24 | 1991-10-24 | Thick film thermistor composition, method for producing the same, thick film thermistor and method for producing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3140124B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5592282A (en) * | 1993-07-22 | 1997-01-07 | York Limited | Suppression of stimulated scattering in optical time domain reflectometry |
CN114334322A (en) * | 2022-03-14 | 2022-04-12 | 西安宏星电子浆料科技股份有限公司 | Linear PTC (Positive temperature coefficient) resistor slurry with stable resistance value |
-
1991
- 1991-10-24 JP JP03342540A patent/JP3140124B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5592282A (en) * | 1993-07-22 | 1997-01-07 | York Limited | Suppression of stimulated scattering in optical time domain reflectometry |
CN114334322A (en) * | 2022-03-14 | 2022-04-12 | 西安宏星电子浆料科技股份有限公司 | Linear PTC (Positive temperature coefficient) resistor slurry with stable resistance value |
CN114334322B (en) * | 2022-03-14 | 2022-05-27 | 西安宏星电子浆料科技股份有限公司 | Linear PTC (Positive temperature coefficient) resistor slurry with stable resistance value |
Also Published As
Publication number | Publication date |
---|---|
JP3140124B2 (en) | 2001-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103996538A (en) | Multilayer ceramic electronic component | |
JP2000044341A (en) | Dielectric ceramic composition | |
JPH07122404A (en) | Thick film thermistor composition, manufacture thereof, and thick film thermistor using the composition and manufacture thereof | |
JPH0661016A (en) | Thick film thermistor composition and manufacture thereof as well as thick film thermistor using same and manufacture thereof | |
JPH11106259A (en) | Dielectric ceramic composition | |
US5562972A (en) | Conductive paste and semiconductor ceramic components using the same | |
CN112088411B (en) | Thermistor sintered compact and temperature sensor element | |
EP2450327A1 (en) | Semiconductor ceramic and positive-coefficient thermistor | |
JPH0677009A (en) | Thick film thermistor composition and manufacture thereof, and thick film thermistor using the composition and manufacture thereof | |
JP2717054B2 (en) | Thick film thermistors and compositions for thick film thermistors | |
JPH05129103A (en) | Thick-film thermistor composition and its manufacture, and thick-film thermistor using the composition and its manufacture | |
JPH0661015A (en) | Thick film thermistor composition and manufacture thereof as well as thick film thermistor using same and manufacture thereof | |
JPH11135303A (en) | Thick-film thermistor composition | |
JPH0661013A (en) | Thick film positive temperature coefficient thermistor composition and manufacture thereof as well as thick film positive temperature coefficient thermistor using the composition | |
CN115036086A (en) | Thermistor sintered compact and temperature sensor element | |
US6190790B1 (en) | Resistor material, resistive paste and resistor using the resistor material, and multi-layered ceramic substrate | |
JPS62250603A (en) | Manufacture of thick film resistor | |
JP3567774B2 (en) | Resistance material, resistance paste and resistor using the same, and ceramic multilayer substrate | |
JP3134430B2 (en) | Non-reducing dielectric ceramic composition | |
JPS61158122A (en) | Conductive paste | |
KR100207898B1 (en) | Resistive material composition, resistive paste, and resistor | |
Burn et al. | New high-performance, low-fire MLC dielectrics for SMT applications | |
JP3213647B2 (en) | Negative thermistor composition and negative thermistor | |
JP3538700B2 (en) | Resistance material, resistance paste and resistor using the same, and ceramic multilayer substrate | |
JPS61101008A (en) | Manufacture of thick film type positive temperature coefficient semiconductor element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 7 Free format text: PAYMENT UNTIL: 20071215 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081215 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091215 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091215 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 10 Free format text: PAYMENT UNTIL: 20101215 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 11 Free format text: PAYMENT UNTIL: 20111215 |
|
EXPY | Cancellation because of completion of term |