JPH07120682B2 - Nozzle for dispenser - Google Patents
Nozzle for dispenserInfo
- Publication number
- JPH07120682B2 JPH07120682B2 JP63112712A JP11271288A JPH07120682B2 JP H07120682 B2 JPH07120682 B2 JP H07120682B2 JP 63112712 A JP63112712 A JP 63112712A JP 11271288 A JP11271288 A JP 11271288A JP H07120682 B2 JPH07120682 B2 JP H07120682B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- needle
- nozzle
- central
- needles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/743—Apparatus for manufacturing layer connectors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
- Die Bonding (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、２個の部品を固定するために、一方の部品に
予めペースト又はガラスエポキシ樹脂等の接着剤を吐出
するデイスペンサー用ノズルにに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a nozzle for a dispenser, which discharges an adhesive such as a paste or a glass epoxy resin to one part in advance in order to fix two parts. Regarding
［従来の技術］ 例えば半導体装置の製造工程には、リードフレーム、基
板等（以下基板で総称する）にペレットを固着させるダ
イボンデイング工程がある。このダイボンデイング工程
は次のようにして行われる。まず基板上にデイスペンサ
ー用ノズルで接着剤を吐出する。次に接着剤が吐出され
た基板上にペレットをダイボンダーで圧着する。これに
より、接着剤は伸ばされて広がり、ペレットは接着剤を
介して基板に固着される。次にペレットがボンデイング
された基板はキュアー炉によりキュアーされる。[Prior Art] For example, in a manufacturing process of a semiconductor device, there is a die bonding process of fixing pellets to a lead frame, a substrate or the like (hereinafter collectively referred to as a substrate). This die bonding process is performed as follows. First, the adhesive is discharged onto the substrate by a dispenser nozzle. Next, the pellets are pressure-bonded onto the substrate from which the adhesive has been discharged, using a die bonder. As a result, the adhesive is stretched and spread, and the pellets are fixed to the substrate via the adhesive. The substrate with the pellets bonded is then cured in a curing oven.
ところで、大きさが例えば5mm□以上の大型ペレットに
なると、ペレットの接着面全体に接着剤が広がるように
接着剤を吐出する必要がある。By the way, in the case of a large pellet having a size of, for example, 5 mm □ or more, it is necessary to discharge the adhesive so that the adhesive spreads over the entire bonding surface of the pellet.
そこで従来、大型ペレットをボンデイングする場合に用
いるノズルは、第５図に示すもの（以下公知例１とい
う）及び実開昭62−202375号公報（以下公知例２とい
う）に示すものが用いられている。Therefore, conventionally, the nozzles used for bonding large pellets are those shown in FIG. 5 (hereinafter referred to as known example 1) and those disclosed in Japanese Utility Model Laid-Open No. 62-202375 (hereinafter referred to as known example 2). There is.
第５図に示す公知例１は、複数個のニードル１が碁盤目
状に等間隔に配置されたノズル２よりなり、このノズル
２はノズルホルダー３に取付けられて用いられる。公知
例２は、下面を円弧状に突出して形成し、かつ下面に十
字状の溝を形成したＲ形状となっている。A known example 1 shown in FIG. 5 comprises nozzles 2 in which a plurality of needles 1 are arranged at regular intervals in a grid pattern, and the nozzles 2 are attached to a nozzle holder 3 for use. In the known example 2, the lower surface is formed so as to project in an arc shape, and a cross-shaped groove is formed on the lower surface to form an R shape.
［発明が解決しようとする課題］ 第５図に示す公知例１で接着剤を吐出すると、第６図
（ａ）に示すように接着剤４（4a、4b、4c・・・）が吐
出される。吐出された接着剤４は円形であるので、これ
にペレットをボンデイングすると、接着剤４はつぶされ
てそれぞれ中心より同図（ｂ）のように広がる。即ち、
隣りの接着剤4aと4b、4aと4d、4bと4c、4bと4e・・・の
方が対角線上の接着剤4aと4e、4bと4d、4bと4f・・・よ
りも近いため、隣り同志の接着剤４が先に接してしま
い、周りが接着剤４で囲まれた空間部５ができる。この
空間部５に残った空気は外に出ることができなくなり、
これが空洞として残る。この空洞がキュアー後にボイド
となる。このようにボイドが発生すると、ボンデイング
されたペレットの高さ位置が安定しなく、またペレット
にひずみが生じて欠け、割れが生じる。[Problems to be Solved by the Invention] When the adhesive is discharged in the known example 1 shown in FIG. 5, the adhesive 4 (4a, 4b, 4c ...) Is discharged as shown in FIG. 6 (a). It Since the discharged adhesive 4 is circular, when the pellets are bonded to this, the adhesive 4 is crushed and spreads from the center as shown in FIG. That is,
Adjacent adhesives 4a and 4b, 4a and 4d, 4b and 4c, 4b and 4e ... are closer than the diagonal adhesives 4a and 4e, 4b and 4d, 4b and 4f ... The adhesives 4 of the same group come into contact with each other first, and a space 5 surrounded by the adhesive 4 is formed. The air remaining in this space 5 cannot go out,
This remains as a cavity. This cavity becomes a void after curing. When the voids are generated in this way, the height position of the bonded pellets is not stable, and the pellets are distorted and chipped or cracked.
公知例２の十字溝を持つＲ形状ノズルは、１個の中心穴
で十字状に接着剤を吐出するので、大型ペレット用のも
のになると、第７図（ａ）に示すように、ノズル６より
吐出された接着剤７は、同図（ｂ）（ｃ）のようにノズ
ル６の上昇時に中心部に集中し、糸引き８が生じ、また
吐出された接着剤７の形状が安定しない。Since the R-shaped nozzle having the cross groove of the known example 2 discharges the adhesive in a cross shape with one central hole, when it is used for a large pellet, the nozzle 6 is used as shown in FIG. 7 (a). The discharged adhesive 7 is concentrated in the central portion when the nozzle 6 rises as shown in (b) and (c) of the figure, stringing 8 occurs, and the shape of the discharged adhesive 7 is not stable.
前記したようにノズル先端と吐出した位置との間に納豆
のように糸引き現象が生じると、一定量以上吐出された
り、次の吐出部分へ引きずり、製品価値を劣化させると
か、ペレットの上面にはみ出すなどの悪影響を及ぼす。As described above, if a stringing phenomenon occurs like natto between the tip of the nozzle and the discharging position, a certain amount or more is discharged, the product is dragged to the next discharging part, the product value is deteriorated, or the upper surface of the pellet is deteriorated. Adverse effects such as protrusion.
本発明の目的は、ボイドが発生しなく、また糸引き現象
が生じないデイスペンサー用ノズルを提供することにあ
る。An object of the present invention is to provide a nozzle for a dispenser in which voids do not occur and a stringing phenomenon does not occur.
［課題を解決するための手段］ 接着剤を吐出する複数個のニードルを有するデイスペン
サー用ノズルにおいて、中心に配置された中心ニードル
と、この中心ニードルの外側に配置された複数個の第２
ニードルと、この第２ニードルの外側に配置された複数
個の第３ニードルとを少なくとも有し、前記第２ニード
ル間の距離は前記中心ニードルと前記第２ニードルとの
距離より長く、かつ前記第２ニードルと前記第３ニード
ルとの距離は前記中心ニードルと前記第２ニードルとの
距離より長く構成することにより達成される。[Means for Solving the Problems] In a nozzle for a dispenser having a plurality of needles for discharging an adhesive, a central needle arranged at the center and a plurality of second needles arranged outside the central needle.
A needle and a plurality of third needles arranged outside the second needle, the distance between the second needles being longer than the distance between the central needle and the second needle, and The distance between the two needles and the third needle is achieved by making the distance longer than the distance between the central needle and the second needle.
［作用］ 本発明のデイスペンサー用ノズルによれば、第２ニード
ル間の距離は中心ニードルと第２ニードルとの距離より
長く、かつ第２ニードルと第３ニードルとの距離は中心
ニードルと第２ニードルとの距離より長いので、本発明
の方法のように、まず中心接着剤に第２接着剤がくっつ
き、その後に第２接着剤同志がくっつき、次に前記１つ
となった接着剤に第３接着剤がくっつき、接着剤部に空
気が残らない。[Operation] According to the nozzle for the dispenser of the present invention, the distance between the second needles is longer than the distance between the central needle and the second needle, and the distance between the second needle and the third needle is equal to the central needle and the second needle. Since it is longer than the distance to the needle, as in the method of the present invention, the second adhesive sticks to the central adhesive first, then the second adhesive sticks to each other, and then the third adhesive sticks to the third adhesive. The adhesive sticks and no air remains on the adhesive.
［実施例］ 以下、本発明の一実施例を第１図乃至第４図により説明
する。第１図に示すように、ノズル10は、中心に配置さ
れた中心ニードル11と、この中心ニードル11の外側で中
心ニードル11を中心とする同一円周上に等間隔に配置さ
れた４個の第２ニードル12と、この第２ニードル12の外
側で中心ニードル11を中心とする同一円周上における第
２ニードル12間に配置された４個の第３ニードル13とを
有している。そして、ノズル10はノズルホルダー14に取
付けられて用いられる。[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 to 4. As shown in FIG. 1, the nozzle 10 includes a central needle 11 arranged at the center and four central needles 11 arranged at equal intervals outside the central needle 11 on the same circumference centered on the central needle 11. It has a second needle 12 and four third needles 13 arranged outside the second needle 12 and between the second needles 12 on the same circumference centered on the central needle 11. The nozzle 10 is attached to the nozzle holder 14 for use.
ここで、中心ニードル11から第２ニードル12までの中心
間距離ａと、第２ニードル12同志の中心間距離ｂ及び第
２ニードル12から第３ニードル13までの中心間距離ｃ
は、ｂがａより大きく、かつｃがｂより大きくなってい
る。また中心間距離ａは、第２図に示すように、基板15
上への吐出時の接着剤20、21がニードル11、12間にはい
上がらない程度に離されている。同図（ａ）は適切な距
離を示し、同図（ｂ）は狭すぎた場合を示す。Here, the center distance a from the center needle 11 to the second needle 12, the center distance b between the second needles 12 and the center distance c from the second needle 12 to the third needle 13
Indicates that b is larger than a and c is larger than b. Further, as shown in FIG.
The adhesives 20, 21 at the time of discharging upward are separated from each other so that they do not rise between the needles 11, 12. The figure (a) shows an appropriate distance, and the figure (b) shows the case where it is too narrow.
次に接着剤吐出方法を第３図により説明する。第１図に
示すノズル10によって基板15上へ接着剤を吐出される
と、ニードル11、12、13の配置と同様に第３図（ａ）に
示すように、中心部に中心接着剤20が、その外側に第２
接着剤21が、更にその外側に第３接着剤22が吐出され
る。これにペレット30をボンデイングすると、接着剤2
0、21、22は第３図（ｂ）（ｃ）（ｄ）のように伸ばさ
れて広がる。Next, the adhesive discharging method will be described with reference to FIG. When the adhesive is discharged onto the substrate 15 by the nozzle 10 shown in FIG. 1, the central adhesive 20 is formed in the central portion as shown in FIG. 3 (a) as in the arrangement of the needles 11, 12, and 13. , Second on the outside
The adhesive 21 and the third adhesive 22 are further discharged to the outside. Bonding the pellets 30 to this, the adhesive 2
0, 21, and 22 are stretched and spread as shown in FIGS. 3 (b), (c), and (d).
この状態を更に詳記すると、第３図（ａ）のように吐出
された中心接着剤20から第２接着剤21までの中心間距離
ａは第２接着剤21同志の中心間距離ｂより小さいので、
まず同図（ｂ）に示すように中心接着剤20に第２接着剤
21が接する。その後、同図（ｃ）に示すように第２接着
剤21同志がくっつく。この時、中心接着剤20と第２接着
剤21との間及び第２接着剤21間には空気の出口があるの
で、空気は矢印方向に流れ、中心接着剤20と第２接着剤
21間には空気は残らない。更に接着剤20、21、22をつぶ
すと、同図（ｄ）に示すように中心接着剤20と第２接着
剤21とは１つの接着剤23となって第３接着剤22と重な
る。この時、第３接着剤22と接着剤23とは、同図（ｃ）
に示すくぼみ24がなくなった状態で重なるので、やはり
空気は外部へ出て行く。更に接着剤22、23が伸ばされる
と、第４図に示すように接着剤22、23は１つの接着剤25
となり、ペレット30がボンデイングされる。ここで、第
３接着剤22によってペレット30の４隅のぬれ性が確保さ
れる。This state will be described in more detail. As shown in FIG. 3A, the center-to-center distance a from the discharged central adhesive 20 to the second adhesive 21 is smaller than the center-to-center distance b between the second adhesives 21. So
First, as shown in FIG. 2B, the second adhesive is applied to the center adhesive 20.
21 touches. After that, the second adhesive 21 sticks together as shown in FIG. At this time, since there is an air outlet between the central adhesive 20 and the second adhesive 21 and between the second adhesive 21, the air flows in the direction of the arrow, and the central adhesive 20 and the second adhesive 21 flow.
No air remains between 21. When the adhesives 20, 21, 22 are further crushed, the central adhesive 20 and the second adhesive 21 become one adhesive 23 and overlap with the third adhesive 22, as shown in FIG. At this time, the third adhesive 22 and the adhesive 23 are as shown in FIG.
Since the indentations 24 shown in are overlapped with each other, the air also goes out. When the adhesives 22 and 23 are further extended, the adhesives 22 and 23 become one adhesive 25 as shown in FIG.
And pellet 30 is bonded. Here, the third adhesive 22 ensures the wettability of the four corners of the pellet 30.
このように、第１図に示すノズル10のニードル11、12、
13より第３図（ａ）に示すように吐出された接着剤20、
21、22は、ペレット30をボンデイングしても接着剤24中
に空気が残らないので、ボイドが発生しなく、品質が向
上する。また複数個のニードル11、12、13で接着剤20、
21、22を吐出するので、糸引き現象も生じない。In this way, the needles 11, 12, of the nozzle 10 shown in FIG.
The adhesive 20 discharged from 13 as shown in FIG. 3 (a),
Since air does not remain in the adhesive 24 for 21 and 22 even when the pellet 30 is bonded, voids do not occur and the quality is improved. In addition, the adhesive 20, with a plurality of needles 11, 12, 13
Since 21 and 22 are discharged, the stringing phenomenon does not occur.
ところで、第３図（ａ）のような接着剤吐出方法は、必
ずしも第１図に示すようなノズル10に限定されない。例
えば、中心接着剤20と第３接着剤22とを１つのノズルで
吐出し、その後第２接着剤21を別のノズルで吐出しても
よい。By the way, the adhesive discharging method as shown in FIG. 3A is not necessarily limited to the nozzle 10 as shown in FIG. For example, the central adhesive 20 and the third adhesive 22 may be discharged from one nozzle, and then the second adhesive 21 may be discharged from another nozzle.
また前記実施例は、第１図に示すように、第２ニードル
12及び第３ニードル13、また第２接着剤21及び第３接着
剤22はそれぞれ４個で、かつ４個の第２ニードル12及び
第２接着剤21は同一円周上で、また４個の第３ニードル
13及び第３接着剤22も同一円周上の場合について説明し
たが、ペレット30の大きさ及び形状に適合するように、
その数、配置及び吐出位置は変えてもよいことは勿論で
ある。In addition, the above-mentioned embodiment, as shown in FIG.
12 and the third needle 13, and the second adhesive 21 and the third adhesive 22 are four, respectively, and the four second needles 12 and the second adhesive 21 are on the same circumference and four. 3rd needle
13 and the third adhesive 22 are also described on the same circumference, but in order to fit the size and shape of the pellet 30,
Of course, the number, arrangement, and ejection position may be changed.
またペレット30が非常に大きい場合には、第３ニードル
13及び第３接着剤22の外側に、複数個の第４ニードル及
び第４接着剤を設けても、更に第４ニードル及び第４接
着剤の外側に第５ニードル及び第５接着剤を設けてもよ
い。If the pellet 30 is very large, use the 3rd needle.
Even if a plurality of fourth needles and a fourth adhesive are provided on the outer side of 13 and the third adhesive 22, a fifth needle and a fifth adhesive are further provided on the outer sides of the fourth needle and the fourth adhesive. Good.
また前記実施例は、中心ニードル11、第２ニードル12及
び第３ニードル13の穴径が同じである場合について説明
したが、中心ニードル11の穴径を他の第２ニードル12及
び第３ニードル13より大きくすると、大型ペレットのボ
ンデイングの場合にはぬれ性がよくなる。Further, in the above embodiment, the case where the central needle 11, the second needle 12 and the third needle 13 have the same hole diameter is explained, but the central needle 11 has the same hole diameter as the other second needle 12 and the third needle 13. The larger the value, the better the wettability in the case of bonding large pellets.
試作実験の結果、第１図及び第３図に示す中心間距離ａ
をペレットサイズＡの約20〜30％に、中心ニードル11か
ら第３ニードル13までの中心間距離ｄをペレットサイズ
Ａの約40〜60％にそれぞれ設定し、ペレットサイズＡが
５〜10mm□の時には、中心ニードル11の穴径D1φを0.7
〜0.9mm、第２及び第３ニードル12、13の穴径D2φを0.6
〜0.7mmに、ペレットサイズＡが10〜15mm□の時には、D
1φを0.9〜1.5mm、D2φを0.7〜0.9mmとしたところ、非
常に良好な結果が得られた。As a result of the trial experiment, the center-to-center distance a shown in FIG. 1 and FIG.
Is set to about 20 to 30% of the pellet size A, and the center-to-center distance d from the central needle 11 to the third needle 13 is set to about 40 to 60% of the pellet size A. Sometimes, the hole diameter D 1 φ of the central needle 11 is 0.7
~ 0.9 mm, the hole diameter D 2 φ of the second and third needles 12, 13 is 0.6
To 0.7 mm, and when the pellet size A is 10 to 15 mm □, D
When 1φ was set to 0.9 to 1.5 mm and D 2 φ was set to 0.7 to 0.9 mm, very good results were obtained.
［発明の効果］ 以上の説明から明らかなように、本発明によれば、ボイ
ドが発生しなく、また糸引き現象も生じなく、高品質の
接着剤吐出が行える。[Effects of the Invention] As is clear from the above description, according to the present invention, it is possible to discharge a high-quality adhesive without generating a void or a stringing phenomenon.
第１図は本発明になるノズルの一実施例を示し、（ａ）
は断面図、（ｂ）は底面図、第２図（ａ）（ｂ）はそれ
ぞれニードルの間隔を示す正面説明図、第３図（ａ）
（ｂ）（ｃ）（ｄ）は接着剤の広がり状態の平面説明
図、第４図は第３図の方法によってボンデイングされた
状態を示し、（ａ）は平面図、（ｂ）は断面図、第５図
は従来例のノズルを示し、（ａ）は断面図、（ｂ）は底
面図、第６図（ａ）（ｂ）は第５図のノズルにより吐出
された接着剤の広がり状態を示す平面説明図、第７図
（ａ）（ｂ）（ｃ）は他の従来例により吐出された接着
剤の状態説明図である。 10:ノズル、11:中心ニードル、 12:第２ニードル、13:第３ニードル、 15:基板、20:中心接着剤、 21:第２接着剤、22:第３接着剤、 23、25:接着剤、 ａ、ｂ、c:中心間距離。FIG. 1 shows an embodiment of a nozzle according to the present invention, (a)
Is a cross-sectional view, (b) is a bottom view, FIGS. 2 (a) and (b) are front explanatory views showing needle intervals, and FIG. 3 (a).
(B) (c) (d) is an explanatory plan view of the spread state of the adhesive, FIG. 4 shows a state of being bonded by the method of FIG. 3, (a) is a plan view, and (b) is a sectional view. FIG. 5 shows a nozzle of a conventional example, (a) is a sectional view, (b) is a bottom view, and FIGS. 6 (a) and (b) are spread states of the adhesive agent discharged by the nozzle of FIG. And FIG. 7A, FIG. 7B, and FIG. 7C are state explanatory views of the adhesive discharged by another conventional example. 10: Nozzle, 11: Central needle, 12: Second needle, 13: Third needle, 15: Substrate, 20: Central adhesive, 21: Second adhesive, 22: Third adhesive, 23, 25: Adhesive Agents, a, b, c: Center distance.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 福家 滋 東京都武蔵村山市伊奈平２丁目51番地の１ 株式会社新川内 (56)参考文献 特開 昭63−157430（ＪＰ，Ａ) 実開 昭62−183562（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeru Fukuya 1-51, 2-51 Inahira, Musashimurayama city, Tokyo Shinkawauchi Co., Ltd. (56) Reference JP-A-63-157430 (JP, A) 62-183562 (JP, U)
Claims (2)
るデイスペンサー用ノズルにおいて、中心に配置された
中心ニードルと、この中心ニードルの外側に配置された
複数個の第２ニードルと、この第２ニードルの外側に配
置された複数個の第３ニードルとを少なくとも有し、前
記第２ニードル間の中心距離は前記中心ニードルと前記
第２ニードルとの中心距離より長く、かつ前記第２ニー
ドルと前記第３ニードルとの中心距離は前記中心ニード
ルと第２ニードルとの中心距離より長いことを特徴とす
るデイスペンサー用ノズル。1. A nozzle for a dispenser having a plurality of needles for discharging an adhesive, the central needle being disposed at the center, a plurality of second needles disposed outside the central needle, and At least a plurality of third needles arranged outside the two needles, wherein a center distance between the second needles is longer than a center distance between the center needle and the second needle, and A nozzle for a dispenser, wherein a center distance from the third needle is longer than a center distance between the center needle and the second needle.
径より大きいことを特徴とする特許請求の範囲第１項記
載のデイスペンサー用ノズル。2. The nozzle for a dispenser according to claim 1, wherein the hole diameter of the central needle is larger than the hole diameter of the second needle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63112712A JPH07120682B2 (en) | 1988-05-06 | 1988-05-06 | Nozzle for dispenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63112712A JPH07120682B2 (en) | 1988-05-06 | 1988-05-06 | Nozzle for dispenser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01281737A JPH01281737A (en) | 1989-11-13 |
| JPH07120682B2 true JPH07120682B2 (en) | 1995-12-20 |
Family
ID=14593618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63112712A Expired - Fee Related JPH07120682B2 (en) | 1988-05-06 | 1988-05-06 | Nozzle for dispenser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07120682B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104511394A (en) * | 2013-09-30 | 2015-04-15 | 无锡华润安盛科技有限公司 | Dispensing head and dispensing device |
| KR102549347B1 (en) * | 2022-10-06 | 2023-06-30 | 주식회사 솔탑 | Capillary Electrospray |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100537836B1 (en) * | 2003-08-18 | 2005-12-19 | 앰코 테크놀로지 코리아 주식회사 | Dispensing tool for attaching chip |
| US20070102841A1 (en) * | 2005-11-04 | 2007-05-10 | Nordson Corporation | Applicators and methods for dispensing a liquid material |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62183582U (en) * | 1986-05-09 | 1987-11-21 | ||
| JPS63157430A (en) * | 1986-12-22 | 1988-06-30 | Matsushita Electronics Corp | Die bonding method for semiconductor device |
-
1988
- 1988-05-06 JP JP63112712A patent/JPH07120682B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104511394A (en) * | 2013-09-30 | 2015-04-15 | 无锡华润安盛科技有限公司 | Dispensing head and dispensing device |
| KR102549347B1 (en) * | 2022-10-06 | 2023-06-30 | 주식회사 솔탑 | Capillary Electrospray |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01281737A (en) | 1989-11-13 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |