JPH071173A - Laser beam machining device with observation function - Google Patents

Abstract

PURPOSE:To simultaneously perform the observation of polarization and a laser machining, to evade the destruction of an analyzer by a laser beam, to dispense with the release of an analyzer even at the time of laser machining and to protect a laser machining from the effect of an analyzer. CONSTITUTION:The laser beam machining device with an observation function is constituted in such a manner that it is provided with polarizers 52, 73 and an analyzer 66 so as to obtain the observed image of the polarization on a sample 56 and that a part of the optical path is shared between the optical path of a machining laser beam directed to the sample and the optical path of an observation system for the light containing the image of the sample and moving reversely against this machining laser beam. Additionally, the analyzer 66 is provided on such exclusive optical path for the observation system that is separated from the optical path for the machining laser beam directed to the sample.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an object to be processed (sample).
The present invention relates to a laser processing apparatus having an observation function and an observation function having a processing function using a laser beam of an object to be processed, and is particularly suitable for application to a laser beam repairing apparatus for a defect in a liquid crystal display panel.

[0002]

2. Description of the Related Art As is well known, a liquid crystal display panel includes fine processing and the like performed in a clean room in its manufacturing process, but defects are caused by dust or the like. Although it is possible to increase the degree of cleanliness to suppress defects, the capital investment to complete a cleanroom that has a degree of cleanliness that almost completely suppresses defects is huge, so manufacturing in an existing cleanroom with a certain degree of cleanliness The defect occurrence rate is high (for example, 80%). Further, the liquid crystal display panel is expensive, and discarding the liquid crystal display panel having a defect causes a large economical loss. Due to recent technological development, a large-sized liquid crystal display panel can be realized, and it tends to be more and more expensive.

Therefore, a process of finding and correcting a defect in the liquid crystal display panel is provided as a part of the manufacturing process of the liquid crystal display panel, and a laser processing apparatus with an observation function is used to inspect (observe) the existence of the defect and to detect the defect. Corrections have been made. For example, a short circuit or a protrusion of the wiring pattern is detected and cut or removed by laser light, or a foreign substance is detected and irradiated with laser light and crushed to a size without a problem. .

FIG. 3 shows a schematic sectional structure of a liquid crystal display panel. The liquid crystal display panel 1 includes, for example, a polarizing plate 2, a glass substrate 3, a common electrode 4, a molecular alignment treatment layer 5, a liquid crystal layer 6, a molecular alignment treatment layer 7, a switching array layer (scanning electrodes, signal electrodes, A layer including a switching element) 8, a glass substrate 9, a polarizing plate 10 and a light diffusing reflector (backlight) 11.

Each element of such a liquid crystal display panel 1 is
They are generally formed in the following order. (1) First, the common electrode 4 is formed on the glass substrate 3, and the switching array layer 8 is formed on the glass substrate 9 in parallel.
(2) Next, the molecular alignment treatment layer 5 is formed on the surface of the common electrode 4, and the molecular alignment treatment layer 5 is formed on the surface of the switching array layer 8. (3) The glass substrates 3 and 9 having a predetermined layer formed on the surface as described above are bonded together with a spacer (not shown) interposed therebetween, and a liquid crystal is sealed between them to form a liquid crystal layer 6. (4) After that, the polarizing plate 2, the polarizing plate 10 and the light diffusing reflector (backlight) 11 are formed.

Then, the inspection and repair of the defect are performed according to the above (1).
(Or (2)) The common electrode 4 (and the molecular orientation treatment layer 5) is formed on the glass substrate 3 after the formation treatment, or the switching array layer 8 (and the molecular orientation treatment layer) is formed on the glass substrate 9. 7) may be performed in the first formation state such as the formation state, or may be performed in the second formation state in which the liquid crystal layer 6 for which the formation process of (3) above is completed is also formed. In some cases, the liquid crystal display panel 1 in which the formation process (4) has been completed is completed in the third formation state.

The inspection in the first formation state is performed by the common electrode 4
Since the switching array layer 8 is exposed on the surface,
It is in a state where it is easy to visually detect a defect by using a normal microscope configuration (it is in a state where it is easy to electrically inspect the defect). However, even if a defect is found by inspection in the first formation state and the defect is repaired, foreign matter may enter in the liquid crystal encapsulation process. Therefore, it is necessary to inspect and correct the second or third formation state so that the liquid crystal display panel 1 is not discarded.

However, for example, in the second formation state, the glass substrate 3, the common electrode 4, the molecular alignment treatment layer 5, the liquid crystal layer 6, the molecular alignment treatment layer 7, the switching array layer 8 and the glass substrate 9 are used. Yes, that is, since there are more constituent elements than in the first formation state and there is a thick glass substrate or liquid crystal layer, even if an attempt is made to find a defect using a normal microscope configuration, Not easily found. Therefore, conventionally, defect finding is based on the experience of a skilled person.

In order to solve such an inconvenience, a laser processing apparatus 20 with an observation function as shown in FIG. 4 has been already proposed, which enables a defect to be detected with high accuracy by polarization observation using a polarization microscope configuration. There is. By using such a laser processing apparatus 20 with an observation function, it is possible to find and repair a defect in the second formation state, and therefore it is possible to omit the defect detection and correction in the first formation state.

FIG. 4 shows a laser processing apparatus 20 with an observation function provided with only an epi-illumination system for the sake of simplicity.

Hereinafter, the defect finding operation and the correction operation using the laser beam will be sequentially described, and the configuration of the conventional laser processing apparatus 20 with an observation function will be clarified through this operation description.

In FIG. 4, the light beam emitted from the epi-illumination light source 21 is focused through the condensing optical system 22,
It is converted into polarized light through the polarizer 23, and the half mirror 2
The optical path is bent by 4 and is converted into substantially parallel light through the objective lens 25, and the liquid crystal display panel 26 as a sample is irradiated with the parallel light. The light reflected by the liquid crystal display panel 26 (the light including the image of the liquid crystal display panel 26), on the contrary, passes through the objective lens 25 and reaches the half mirror 24, goes straight through the half mirror 24, and then is mounted. Polarized light is detected (detected) by a detachable analyzer 27 in the optical path switching prism 28. The laser processing apparatus with an observation function 20 is provided with an eyepiece system and a monitor system as an observation system, and the optical path switching prism 28 is for switching the optical paths of the eyepiece system and the monitor system (in some cases, a laser irradiation system). . The light whose optical path is bent to the eyepiece 29 side through the optical path switching prism 28 causes the eyepiece 29 to form an image of the liquid crystal display panel 26 on the eyepiece part. On the other hand, the light selected by the optical path switching prism 28 to the straight optical path (monitor system optical path) is bent by the half mirror 30, the image point position is changed by the relay lens 31, and the optical path is bent by the total reflection mirror 32. Tuned 2
An image of the liquid crystal display panel 26 is formed on the incident surface of the video camera unit 33, which is mainly configured by the dimensional CCD sensor. Such a polarization observation image is displayed on the monitor 34.

As described above, a single analyzer 27 can form a polarization observation image on both the eyepiece system and the monitor system.

For example, the operator, who knows the defect from the polarization observation image of the liquid crystal display panel 26 displayed on the monitor 34, detaches the analyzer 27 from the apparatus 20, and then activates the laser oscillator 35. The laser beam emitted from the laser oscillator 35 goes straight through the half mirror 30, goes straight through the part of the optical path switching prism 28 in the straight path selection state, goes straight through the half mirror 24, and is focused by the objective lens 25. The defective portion of the liquid crystal display panel 26 is irradiated.

Due to the condensing energy of the irradiation laser light, short-circuiting of wiring patterns, cutting and removal of protrusions, and crushing of foreign substances mixed in are rectified, whereby defects of the liquid crystal display panel 26 are corrected.

[0016]

However, in the conventional laser processing apparatus 20 with an observation function, the analyzer 27 is attached at the time of defect inspection (at the time of observation) of the liquid crystal display panel (sample) 26 to correct the defects by laser. Sometimes the analyzer 27 has to be detached, and considering that many liquid crystal display panels 26 are to be inspected and modified, the operator's labor involved in the attachment / detachment operation is very large.

Further, it is determined whether polarized light can be observed or corrected depending on whether or not the analyzer 27 is attached, and there is a problem that polarized light observation and correction cannot be performed at the same time. Obviously, in order to protect the eyes of the operator at the time of correction using laser light, it is necessary to prevent observation by the eyepiece system. However, it is preferable that the polarized observation image is displayed on the monitor 34 even when the laser light is irradiated (when the defect is repaired) because the repair can be quickly evaluated. It should be noted that although the images of normal observation other than the polarized observation can be displayed simultaneously with the correction, the observation accuracy is lower than that of the polarized observation image.

By the way, the analyzer 27 shown in FIG.
Polarizing plastic film 4 as shown in 2
A glass plate in which 0 is sandwiched between glass plates 41 and 42 is often used because of its advantages such as availability and polarization characteristics. If the operator erroneously activates the laser oscillator 35 without detaching the analyzer 27 having such a configuration from the device 20, the laser light energy damages the analyzer 27 (particularly the plastic film 40). , There is a high possibility that it cannot be used for subsequent defect inspection. The analyzer 27 having the above-described configuration applied to the laser processing apparatus 20 with an observation function actually costs about tens of thousands of yen, and the problem of damage is large. Moreover, laser correction with the analyzer 27 attached is
Due to the difference in the polarization planes of the laser light and the analyzer 27, the energy of the laser light reaching the liquid crystal display panel 26 becomes small, so that the energy is not sufficiently achieved.

Therefore, it is conceivable to provide a mechanism or a structure for automatically performing the attachment / detachment of the analyzer 27 on the optical path in accordance with the operation mode. The cost remains high, and even if such measures are taken, there remains a problem that polarization observation and laser correction cannot be performed simultaneously.

The above-mentioned problems are caused by a laser processing apparatus having an observation function which has a transillumination light source instead of or in addition to the epi-illumination light source, and an observation function other than the liquid crystal display panel when the sample intended by the apparatus is not a liquid crystal display panel. The same is also true of the laser processing apparatus with a laser.

The present invention has been made in view of the above points, and provides a laser processing apparatus with an observation function capable of solving all the above-mentioned problems occurring in connection with an analyzer necessary for polarization observation. It is the one I tried to provide.

[0022]

In order to solve the above problems, the present invention provides an optical path of a processing laser beam toward a sample, which is equipped with a polarizer and an analyzer and can obtain a polarization observation image of the sample, and this processing. In the laser processing device with an observation function that shares a part of the optical path with the observation system optical path of the light that includes the image of the sample that travels backwards to the laser beam for observation, The feature is that an analyzer is provided on the dedicated optical path.

Here, it is a preferable aspect to provide an analyzer having an eyepiece system and a monitor system as an observation system and having a polarization observation function only on the dedicated optical path of the monitor system.

[0024]

The present invention provides an analyzer having a polarization observation function,
It is provided on the dedicated optical path of the observation system, which is separated from the optical path of the processing laser beam toward the sample.

Thereby, polarization observation and laser processing can be simultaneously performed, the analyzer is not damaged by laser light, separation of the analyzer can be unnecessary even during laser processing, and laser processing is not affected by the analyzer. You can

When repairing a defect using laser light,
Since the optical path of the eyepiece system is certainly blocked to protect the operator's eyes, observation by the eyepiece system is secondary. Therefore, in consideration of downsizing and cost reduction of the device, install an analyzer only in the monitor system. Is preferred.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a laser processing apparatus with an observation function according to the present invention will be described in detail below with reference to the drawings. here,
FIG. 1 shows the configuration of this embodiment.

This embodiment comprises a liquid crystal display panel in the above-mentioned second formation state, that is, a glass substrate, a common electrode, a molecular alignment treatment layer, a liquid crystal layer, a molecular alignment treatment layer, a switching array layer and a glass substrate. The liquid crystal display panel in the state (see FIG. 3) is particularly conscious as a sample. Of course, a liquid crystal display panel in another forming state can be targeted.

Also, in this embodiment, the observation of polarized light using a polarizer and an analyzer is used as the basis of observation in order to perform observation with high accuracy.

In the following, the defect finding operation and the correction operation using the laser beam of the laser processing apparatus 50 with an observation function of this embodiment will be sequentially described, and through the description of these operations, the laser processing apparatus 50 with an observation function of the embodiment will be described. The composition is also clarified.

In FIG. 1, for example, a transmissive illumination light source located at the bottom (here, it is assumed that a condensing optical system is included).
The light emitted from 51 is converted into polarized light via the polarizer 52. The polarizer 52 is a stage 5 which is made movable by a stage controller 54.
It is provided on the lower surface of No. 3 so as to be rotatable by 90 ° or more, and defines the polarization plane of the emitted polarized light according to the operation position of the lever 52a provided on its outer circumference. Polarizer 52
The light (polarized light) that has passed through passes through a through hole 53a provided in the central portion of the stage 53, further passes through a glass plate 55 for mounting a sample provided on the upper surface of the stage 53, and The liquid crystal display panel 56 mounted on the glass plate 55 is illuminated.

The light transmitted through the liquid crystal display panel 56 (the image of the liquid crystal display panel 56 by the polarized illumination light) is the objective lens 5.
It is enlarged by 7 and goes straight through the half mirror 58 to reach the position of the optical path switching prism 59.

That is, in this embodiment, there is no analyzer on the optical path before reaching the optical path switching prism 59 even during the observation operation.

Laser processing apparatus 5 with observation function of this embodiment
0 also has an eyepiece system and a monitor system as an observation system, and the optical path switching prism 59 is for switching the optical paths of the eyepiece system and the monitor system (laser irradiation system in some cases).
That is, the observation by the eyepiece system and the observation by the monitor system can be selectively executed. For example, an optical path switching prism 59 is provided attached to a rectilinear mechanism that uses the dovetail as a guide, and the optical path switching prism 59 bends the optical path of the light that has proceeded straight through the half mirror 58 during observation by the eyepiece system. At the time of observation by the monitor system, the optical path switching prism 59 deviates from the optical path of the light traveling straight through the half mirror 58 and causes the light to travel straight.

The light (image of the liquid crystal display panel 56) whose optical path is bent by the optical path switching prism 59 is a mechanical shutter that is in an open state at that time (a conventional mechanical shutter is also provided, but it is omitted in the conventional description). ) 60 to reach the eyepiece 61, and by this eyepiece 61,
An image of the liquid crystal display panel 56 is formed on the eyepiece.

On the other hand, the light traveling straight (the liquid crystal display panel 56 without operating the optical path by the optical path switching prism 59).
Image) passes through a mechanical shutter (which is also provided in the related art, but is omitted in the related art) 62 which is in an open state at that time, and then the optical path is bent by a half mirror 63, and a relay lens 64 is used. The image point position is changed, and the optical path is bent by the total reflection mirror 65.

In the case of this embodiment, light whose optical path is bent by the total reflection mirror 65 (image of the liquid crystal display panel 56)
Does not irradiate directly on the video camera section 67 which is a photoelectric conversion section, but on the incident surface side of the video camera section 67.
The polarized light is detected (analyzed) by an analyzer 66 that can be rotated by 0 ° or more, and then is irradiated onto a video camera unit 67, and the liquid crystal display panel 56 is placed on the video camera unit 67.
Is imaged. Such a polarization observation image is displayed on the monitor 68.
Displayed by.

The optical path switching prism 59, the mechanical shutter 60 and the mechanical shutter 62 described above are
The operation is interlocked by an operator's manual operation with respect to the mechanical structure or by a command from an electric controller 69 described later. As described above, the operation and state opposite to the eyepiece system observation and the monitor system observation are performed. To take.

Further, the analyzer 66 of this embodiment is rotatably provided on the incident side of the video camera section 67 as described above, and, for example, according to the operating position of the lever 66a provided on its outer circumference. The polarization plane that can be detected by the above can be arbitrarily defined.

In this embodiment, since the polarizer 52 and the analyzer 66 are both rotatable, polarized light observation can be performed from various viewpoints.

As described above, in this embodiment, the liquid crystal display panel 56 in the state of the glass substrate, the common electrode, the molecular alignment treatment layer, the liquid crystal layer, the molecular alignment treatment layer, the switching array layer and the glass substrate is used as a sample. I am particularly conscious of it, and conversely, I am particularly conscious as a sample of the liquid crystal display panel 56 in which the upper and lower polarizing plates and the light diffusive reflector (backlight) are not present from the finished product (see FIG. 3). .
However, a defect inspection inside the liquid crystal display panel 56 can be performed as if it were a panel similar to the finished product. The transillumination light source 51 is a backlight (see reference numeral 11 in FIG. 3).
Can be considered as The polarizer 52 can be regarded as the polarizing plate by making the polarization plane of the polarizer 52 the same as the backlight side polarizing plate (see reference numeral 10 in FIG. 3). The polarization plane of the analyzer 66 is the liquid crystal layer transmission side polarization plate (see reference numeral 2 in FIG. 3).
It can be regarded as the polarizing plate by making it the same as.

In addition to the above static observation, FIG.
As shown in FIG.
When connected and driven, the defect inspection inside the liquid crystal display panel 56 in a panel state similar to that of the finished product can be dynamically performed. That is, the defect can be evaluated by observing it in a state close to reality.

Further, if the polarizer 52 and / or the analyzer 66 are appropriately rotated to maximize the contrast of the polarization observation image by the monitor 68, the defect can be easily evaluated.

The analyzer 66 of this embodiment is also detachable. However, the reason why the device is detachable is to switch the observation between polarized observation and normal observation, and not to switch the detachable state between the conventional observation and correction.

The operator, who knows the defect that can be corrected by the polarization observation image of the liquid crystal display panel 56 displayed by the monitor 68, operates the electric controller 69 without removing the analyzer 66, and operates the laser oscillator 7.
0 is started to pulse-oscillate the laser light. The pulse period, the laser power, the spot shape of the laser beam, the oscillation time, etc. can be appropriately set for the electric controller 69 (the pulse width is fixed in this embodiment).

Laser oscillator (here, it includes divergence or focusing of laser light and a configuration in which the spot shape is predetermined)
The laser light emitted from 70 travels straight through the half mirror 63, passes through the mechanical shutter 62 in the open state, reaches the half mirror 58 without being operated by the optical path switching prism 59, and the half mirror 58 is reached. It goes straight through 58, is condensed by the objective lens 57, and is irradiated to the defective portion of the liquid crystal display panel 56.

Due to the condensing energy of the irradiation laser light, short-circuiting of wiring patterns, cutting off and removal of protrusions, and inclusion of foreign matter are crushed to correct defects in the liquid crystal display panel 56.

The irradiation energy is the liquid crystal display panel 5.
Liquid crystal display panel 5 because it is almost absorbed by 6
The laser light transmitted through 6 does not adversely affect the polarizer 52 and the like.

In the case of this embodiment, even when the defect is corrected by such a laser beam, the light emitted from the transmissive illumination light source 51 reaches the video camera section 67 through the observation optical path of the monitor system as described above, and the polarized observation image is obtained. Is continuously displayed on the monitor 68. Therefore, it is possible to immediately recognize whether or not the correction has been sufficiently performed by the laser oscillation of this time, and it is possible to immediately instruct the next laser oscillation when the correction is insufficient without switching to the observation operation state. .

In the case of this embodiment, the sample is intended for a device limited to a predetermined liquid crystal display panel 56, so that the focal length of the objective lens 57 is the liquid crystal display panel 5.
6 is selected in consideration of the upper glass (see reference numeral 3 in FIG. 3). Further, the oscillation laser frequency and wavelength of the laser oscillator 70 are also fixed, and the objective lens 57 is selected so that aberration is small at that wavelength.

Therefore, the liquid crystal display panel 56 as a sample
When the laser frequency is changed, or when the laser frequency is changed by replacing the laser oscillator 70, it is preferable to change the objective lens 57 as well.

Laser processing apparatus 5 with observation function of this embodiment
In addition to the observation function with the illumination light from the transmissive illumination light source 51 as described above, 0 can also perform observation with epi-illumination. When the liquid crystal display panel 56 as a sample is in a completed state, that is, when a light diffusing reflection plate (backlight) (see reference numeral 11 in FIG. 3) is provided, the illumination light from the transmissive illumination light source 51 is emitted. Since the liquid crystal display panel 56 cannot be transmitted, only observation by epi-illumination can be applied.

The light beam emitted from the epi-illumination light source 71 is
After being focused through the condensing optical system 72, the polarizer 73
The light is turned into polarized light through the optical path, the optical path is bent by the half mirror 58, and the light is turned into substantially parallel light through the objective lens 57 to illuminate the liquid crystal display panel 56 as a sample. The optical path after being reflected from the liquid crystal display panel 56 is the same as that in the case of observation by transmitted illumination, and polarized observation by the monitor system is possible. Further, when polarization observation is performed by the monitor system, defect correction using laser light can be simultaneously performed, as in the case of observation by transmitted illumination.

The polarized light observation by such epi-illumination is performed by the liquid crystal display panel in the above-mentioned second formation state, that is, the glass substrate, the common electrode, the molecular alignment treatment layer, the liquid crystal layer, the molecular alignment treatment layer, the switching array layer. Also, the present invention can be applied to a liquid crystal display panel (see FIG. 3) formed of a glass substrate. However, in this formed state, since the liquid crystal display panel 56 has no reflective component, the intensity of the reflected light becomes weak, and therefore the contrast of the polarized observation image becomes weaker than that in the case of the transillumination illumination.

As described above, according to the laser processing apparatus 50 with an observation function of the above-described embodiment, since the analyzer 66 is provided at a position irrelevant to the optical path of the correction laser beam, the polarized observation image is displayed. In this state, laser defect correction can be performed. Therefore, the correction content can be evaluated immediately, and if necessary, can be subsequently corrected.

Further, according to the above embodiment, the analyzer 6
Since 6 is provided at a position irrelevant to the optical path of the correction laser beam, it is not necessary to remove the analyzer 66 during the correction operation, and the operator's labor can be saved as compared with the conventional case.

Further, according to the above-described embodiment, for the same reason, the analyzer 66 is naturally not damaged by the laser beam, and the analyzer 66 is not reduced in the intensity of the correction laser beam.

As described above, according to the above-mentioned embodiment, the conventional problems can be solved while the polarization observation function is secured.

In the above embodiment, the analyzer 66 is provided on the incident surface of the video camera section 67, but the installation position of the analyzer 66 is not limited to this. It may be located at any position on the optical path dedicated to the monitor system, which is separated from the optical path of the light.

Further, in the above embodiment, the analyzer 66 is provided only in the monitor system to enable polarization observation. However, the optical path portion dedicated to the eyepiece system is separated from the laser light optical path by the optical path switching prism 59. An analyzer may be provided to enable polarization observation by the eyepiece system. Although the safety mechanism (mechanical shutter) is provided, in consideration of the protection of the eyes of the operator, the operator performs laser correction by visually observing the display on the monitor 68. Therefore, the analyzer 6 is used only in the monitor system as in the above embodiment.
Providing 6 is sufficient as an observation function. On the contrary, since only one analyzer 66 is required, there are advantages in terms of configuration and economy.

Further, in the above embodiment, the apparatus for manually activating the correction by the laser beam is shown, but the standard pattern is stored and the defect is automatically generated by the matching with the image picked up by the video camera section 67. The present invention can also be applied to a device that discovers and activates. In short,
It is sufficient that the analyzer having the polarization observation function is provided on the optical path dedicated to the observation system.

Furthermore, in the above-mentioned embodiment, the sample is described as a liquid crystal display panel, but it can be applied to an apparatus for other samples. For example, a compact disc made of an organic film material, or an EE having an optical window (glass)
The PROM may be the sample. Further, the processing is not limited to the defect correction, and may be processing as manufacturing.

[0063]

As described above, according to the present invention, the analyzer, which is a constituent element having a polarization observation function, is provided on the optical path dedicated to the observation system, which is separated from the optical path of the processing laser beam. Polarization observation and laser processing can be performed at the same time, the analyzer is not damaged by laser light, it is not necessary to detach the analyzer during laser processing, and the laser processing device with an observation function does not affect the laser processing. Can be realized.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of an embodiment.

FIG. 2 is a block diagram showing a usage mode different from that of FIG. 1 in the embodiment.

FIG. 3 is a sectional view showing a schematic sectional structure of a liquid crystal display panel.

FIG. 4 is a block diagram showing a conventional configuration example.

FIG. 5 is a sectional view showing a configuration of an analyzer.

[Explanation of symbols]

50 ... Laser processing device with observation function, 51 ... Transmitted illumination light source, 52 ... Polarizer, 56 ... Liquid crystal display panel (sample), 57 ... Objective lens, 59 ... Optical path switching prism, 6
1 ... Eyepiece lens, 63 ... Half mirror, 66 ... Analyzer, 67 ... Video camera part, 70 ... Laser oscillator, 71
… Epi-illumination light source.

Claims (2)

[Claims] 1. A light including a polarization observation image of a sample, which is provided with a polarizer and an analyzer, and an optical path of a processing laser beam toward the sample, and a light including an image of the sample traveling backward to the processing laser beam. In the laser processing apparatus with an observation function that shares a part of the optical path with the observation system optical path, the analyzer is provided on the dedicated optical path of the observation system, which is separated from the optical path of the processing laser light toward the sample. Laser processing equipment with observation function. 2. The observation function according to claim 1, wherein the observation system includes an eyepiece system and a monitor system, and the analyzer having a polarization observation function is provided only on a dedicated optical path of the monitor system. Laser processing equipment.