Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyowa Vacuum Engineering Co Ltd
Original Assignee
Kyowa Vacuum Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyowa Vacuum Engineering Co LtdfiledCriticalKyowa Vacuum Engineering Co Ltd
Priority to JP11260788UpriorityCriticalpatent/JPH0710230Y2/ja
Publication of JPH0234984UpublicationCriticalpatent/JPH0234984U/ja
Application grantedgrantedCritical
Publication of JPH0710230Y2publicationCriticalpatent/JPH0710230Y2/ja