JPH0710160Y2 - ガス貯蔵容器内の超高純度ガス取出し用弁装置 - Google Patents

ガス貯蔵容器内の超高純度ガス取出し用弁装置

Info

Publication number
JPH0710160Y2
JPH0710160Y2 JP1986067874U JP6787486U JPH0710160Y2 JP H0710160 Y2 JPH0710160 Y2 JP H0710160Y2 JP 1986067874 U JP1986067874 U JP 1986067874U JP 6787486 U JP6787486 U JP 6787486U JP H0710160 Y2 JPH0710160 Y2 JP H0710160Y2
Authority
JP
Japan
Prior art keywords
valve
gas
purge
storage container
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986067874U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62179499U (enExample
Inventor
忠弘 大見
洋一 菅野
慶多朗 米沢
則雄 大長
次郎 新田
功司 宮崎
肇 三好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Neriki Valve Co Ltd
Original Assignee
Neriki Valve Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neriki Valve Co Ltd filed Critical Neriki Valve Co Ltd
Priority to JP1986067874U priority Critical patent/JPH0710160Y2/ja
Publication of JPS62179499U publication Critical patent/JPS62179499U/ja
Application granted granted Critical
Publication of JPH0710160Y2 publication Critical patent/JPH0710160Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP1986067874U 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置 Expired - Lifetime JPH0710160Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986067874U JPH0710160Y2 (ja) 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986067874U JPH0710160Y2 (ja) 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置

Publications (2)

Publication Number Publication Date
JPS62179499U JPS62179499U (enExample) 1987-11-14
JPH0710160Y2 true JPH0710160Y2 (ja) 1995-03-08

Family

ID=30907172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986067874U Expired - Lifetime JPH0710160Y2 (ja) 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置

Country Status (1)

Country Link
JP (1) JPH0710160Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848799A (ja) * 1982-09-13 1983-03-22 Hitachi Ltd 羽根付ディフュ−ザ

Also Published As

Publication number Publication date
JPS62179499U (enExample) 1987-11-14

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