JPS62179499U - - Google Patents
Info
- Publication number
- JPS62179499U JPS62179499U JP6787486U JP6787486U JPS62179499U JP S62179499 U JPS62179499 U JP S62179499U JP 6787486 U JP6787486 U JP 6787486U JP 6787486 U JP6787486 U JP 6787486U JP S62179499 U JPS62179499 U JP S62179499U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- storage container
- purge
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims description 9
- 238000000605 extraction Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Multiple-Way Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986067874U JPH0710160Y2 (ja) | 1986-05-06 | 1986-05-06 | ガス貯蔵容器内の超高純度ガス取出し用弁装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986067874U JPH0710160Y2 (ja) | 1986-05-06 | 1986-05-06 | ガス貯蔵容器内の超高純度ガス取出し用弁装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62179499U true JPS62179499U (enExample) | 1987-11-14 |
| JPH0710160Y2 JPH0710160Y2 (ja) | 1995-03-08 |
Family
ID=30907172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986067874U Expired - Lifetime JPH0710160Y2 (ja) | 1986-05-06 | 1986-05-06 | ガス貯蔵容器内の超高純度ガス取出し用弁装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0710160Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848799A (ja) * | 1982-09-13 | 1983-03-22 | Hitachi Ltd | 羽根付ディフュ−ザ |
-
1986
- 1986-05-06 JP JP1986067874U patent/JPH0710160Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848799A (ja) * | 1982-09-13 | 1983-03-22 | Hitachi Ltd | 羽根付ディフュ−ザ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0710160Y2 (ja) | 1995-03-08 |