JPS62179499U - - Google Patents
Info
- Publication number
- JPS62179499U JPS62179499U JP6787486U JP6787486U JPS62179499U JP S62179499 U JPS62179499 U JP S62179499U JP 6787486 U JP6787486 U JP 6787486U JP 6787486 U JP6787486 U JP 6787486U JP S62179499 U JPS62179499 U JP S62179499U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- storage container
- purge
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims description 9
- 238000000605 extraction Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Multiple-Way Valves (AREA)
Description
第１図〜第３図はこの考案の実施例を示し、第
１図は弁装置の横断面を示し第２図の―線矢
視拡大断面図、第２図は弁装置の取付状態を示す
側面視部分断面図、第３図は弁装置の縦断面図で
、第４図は従来例の弁装置を示す模式図である。
１……ガス貯蔵容器、２……弁装置、３……ガ
ス取出し導管、５……止め弁、６……パージ弁、
９……弁箱、１０……弁室、１２……出口孔、１
２ａ……始端部、２９……弁箱、３２……出口孔
、３２ｂ……終端部、Ａ……超高純度ガス、Ｂ…
…パージ用ガス。
Fig. 1 to Fig. 3 show an embodiment of this invention, Fig. 1 shows a cross section of the valve device, Fig. 2 is an enlarged cross-sectional view taken along the - line arrow in Fig. 2, and Fig. 2 shows the installed state of the valve device. 3 is a longitudinal sectional view of the valve device, and FIG. 4 is a schematic diagram showing a conventional valve device. DESCRIPTION OF SYMBOLS 1... Gas storage container, 2... Valve device, 3... Gas extraction conduit, 5... Stop valve, 6... Purge valve,
9... Valve box, 10... Valve chamber, 12... Outlet hole, 1
2a...Starting end, 29...Valve box, 32...Outlet hole, 32b...Terminal end, A...Ultra high purity gas, B...
...Purge gas.
Claims (1)
３内にパージ用ガスＢを導入するパージ弁６との
組み合わせからなるガス貯蔵容器内の超高純度ガ
ス取出し用弁装置において、パージ弁６の弁箱２
９を止め弁５の弁箱９に固設し、パージ弁６の出
口孔３２の終端部３２ｂを、止め弁５の弁室１０
のうちの止め弁５の出口孔１２の始端部１２ａが
開口する箇所とは異なる箇所に開口した事を特徴
とするガス貯蔵容器内の超高純度ガス取出し用弁
装置。 ２ パージ弁６の弁箱２９が止め弁５の弁箱９に
継目なしで一体に形成されている実用新案登録請
求の範囲第１項に記載したガス貯蔵容器内の超高
純度ガス取出し用弁装置。 ３ パージ弁６の弁箱２９が止め弁５の弁箱９に
対して、別体に形成されて気密状に固定されてい
る実用新案登録請求の範囲第１項に記載したガス
貯蔵容器内の超高純度ガス取出し用弁装置。 ４ パージ弁６の出口孔３２の終端部３２ｂが、
止め弁５の弁室１０のうちの止め弁５の出口孔１
２の始端部１２ａが開口する箇所と対称な箇所に
開口する実用新案登録請求の範囲第１項に記載し
たガス貯蔵容器内の超高純度ガス取出し用弁装置
。[Scope of Claim for Utility Model Registration] 1. A system for extracting ultra-high purity gas from a gas storage container, consisting of a combination of a stop valve 5 of the gas storage container 1 and a purge valve 6 for introducing purge gas B into the gas extraction conduit 3. In the valve device, the valve box 2 of the purge valve 6
9 is fixed to the valve box 9 of the stop valve 5, and the terminal end 32b of the outlet hole 32 of the purge valve 6 is connected to the valve chamber 10 of the stop valve 5.
A valve device for taking out an ultra-high purity gas in a gas storage container, characterized in that the opening is at a location different from the location where the starting end 12a of the outlet hole 12 of the stop valve 5 is opened. 2. The valve for taking out ultra-high purity gas in a gas storage container as set forth in claim 1 of the utility model registration claim, in which the valve box 29 of the purge valve 6 is seamlessly formed integrally with the valve box 9 of the stop valve 5. Device. 3. In the gas storage container described in claim 1 of the utility model registration claim, the valve box 29 of the purge valve 6 is formed separately from the valve box 9 of the stop valve 5 and is fixed in an airtight manner. Valve device for ultra-high purity gas extraction. 4 The terminal end 32b of the outlet hole 32 of the purge valve 6 is
Outlet hole 1 of the stop valve 5 in the valve chamber 10 of the stop valve 5
2. A valve device for taking out an ultra-high purity gas in a gas storage container as set forth in claim 1, which opens at a location symmetrical to the location where the starting end portion 12a of No. 2 opens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986067874U JPH0710160Y2 (en) | 1986-05-06 | 1986-05-06 | Valve device for extracting ultra-high purity gas from gas storage container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986067874U JPH0710160Y2 (en) | 1986-05-06 | 1986-05-06 | Valve device for extracting ultra-high purity gas from gas storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62179499U true JPS62179499U (en) | 1987-11-14 |
| JPH0710160Y2 JPH0710160Y2 (en) | 1995-03-08 |
Family
ID=30907172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986067874U Expired - Lifetime JPH0710160Y2 (en) | 1986-05-06 | 1986-05-06 | Valve device for extracting ultra-high purity gas from gas storage container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0710160Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848799A (en) * | 1982-09-13 | 1983-03-22 | Hitachi Ltd | Diffuser equipped with vane |
-
1986
- 1986-05-06 JP JP1986067874U patent/JPH0710160Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848799A (en) * | 1982-09-13 | 1983-03-22 | Hitachi Ltd | Diffuser equipped with vane |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0710160Y2 (en) | 1995-03-08 |
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