JPH069515Y2 - ウエハの収納ボ−ト - Google Patents
ウエハの収納ボ−トInfo
- Publication number
- JPH069515Y2 JPH069515Y2 JP15046284U JP15046284U JPH069515Y2 JP H069515 Y2 JPH069515 Y2 JP H069515Y2 JP 15046284 U JP15046284 U JP 15046284U JP 15046284 U JP15046284 U JP 15046284U JP H069515 Y2 JPH069515 Y2 JP H069515Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- frame
- frames
- storage boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003860 storage Methods 0.000 title claims description 26
- 235000012431 wafers Nutrition 0.000 claims description 87
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15046284U JPH069515Y2 (ja) | 1984-10-03 | 1984-10-03 | ウエハの収納ボ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15046284U JPH069515Y2 (ja) | 1984-10-03 | 1984-10-03 | ウエハの収納ボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6165745U JPS6165745U (enrdf_load_html_response) | 1986-05-06 |
| JPH069515Y2 true JPH069515Y2 (ja) | 1994-03-09 |
Family
ID=30708609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15046284U Expired - Lifetime JPH069515Y2 (ja) | 1984-10-03 | 1984-10-03 | ウエハの収納ボ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069515Y2 (enrdf_load_html_response) |
-
1984
- 1984-10-03 JP JP15046284U patent/JPH069515Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6165745U (enrdf_load_html_response) | 1986-05-06 |
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