JPH06822Y2 - 半導体ウエハ移載装置 - Google Patents
半導体ウエハ移載装置Info
- Publication number
- JPH06822Y2 JPH06822Y2 JP14310087U JP14310087U JPH06822Y2 JP H06822 Y2 JPH06822 Y2 JP H06822Y2 JP 14310087 U JP14310087 U JP 14310087U JP 14310087 U JP14310087 U JP 14310087U JP H06822 Y2 JPH06822 Y2 JP H06822Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding
- groove
- boat
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 11
- 235000012431 wafers Nutrition 0.000 claims description 62
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14310087U JPH06822Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ移載装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14310087U JPH06822Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ移載装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448034U JPS6448034U (enrdf_load_stackoverflow) | 1989-03-24 |
| JPH06822Y2 true JPH06822Y2 (ja) | 1994-01-05 |
Family
ID=31409618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14310087U Expired - Lifetime JPH06822Y2 (ja) | 1987-09-21 | 1987-09-21 | 半導体ウエハ移載装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06822Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-09-21 JP JP14310087U patent/JPH06822Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6448034U (enrdf_load_stackoverflow) | 1989-03-24 |
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