JPH068109Y2 - ウエハー搬送用ベルト - Google Patents
ウエハー搬送用ベルトInfo
- Publication number
- JPH068109Y2 JPH068109Y2 JP1988043093U JP4309388U JPH068109Y2 JP H068109 Y2 JPH068109 Y2 JP H068109Y2 JP 1988043093 U JP1988043093 U JP 1988043093U JP 4309388 U JP4309388 U JP 4309388U JP H068109 Y2 JPH068109 Y2 JP H068109Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- belt
- fluororesin
- contact portion
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920001971 elastomer Polymers 0.000 claims description 20
- -1 polyethylene Polymers 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 13
- 229920003002 synthetic resin Polymers 0.000 claims description 9
- 239000000057 synthetic resin Substances 0.000 claims description 9
- 239000004698 Polyethylene Substances 0.000 claims description 8
- 239000004743 Polypropylene Substances 0.000 claims description 7
- 229920000573 polyethylene Polymers 0.000 claims description 7
- 229920001155 polypropylene Polymers 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 36
- 239000000126 substance Substances 0.000 description 9
- 239000000428 dust Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920006311 Urethane elastomer Polymers 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229920001973 fluoroelastomer Polymers 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Structure Of Belt Conveyors (AREA)
- Belt Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988043093U JPH068109Y2 (ja) | 1988-03-31 | 1988-03-31 | ウエハー搬送用ベルト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988043093U JPH068109Y2 (ja) | 1988-03-31 | 1988-03-31 | ウエハー搬送用ベルト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147340U JPH01147340U (en, 2012) | 1989-10-12 |
| JPH068109Y2 true JPH068109Y2 (ja) | 1994-03-02 |
Family
ID=31269494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988043093U Expired - Lifetime JPH068109Y2 (ja) | 1988-03-31 | 1988-03-31 | ウエハー搬送用ベルト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068109Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201700111949A1 (it) * | 2017-10-05 | 2019-04-05 | Morello Forni Di Morello Marco & C S A S | Metodo di formatura della pasta da pizza e macchina per la sua attuazione |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6132888Y2 (en, 2012) * | 1981-05-22 | 1986-09-25 |
-
1988
- 1988-03-31 JP JP1988043093U patent/JPH068109Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01147340U (en, 2012) | 1989-10-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0513275B1 (en) | Wafer carrier | |
| EP0778611A3 (en) | End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector | |
| EP0926706A3 (en) | Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate manufacturing method | |
| US6003185A (en) | Hesitation free roller | |
| JP6073192B2 (ja) | 基板洗浄装置、基板洗浄システムおよび基板洗浄方法 | |
| US6545267B1 (en) | Wafer holder of ion implantation apparatus | |
| JPH068109Y2 (ja) | ウエハー搬送用ベルト | |
| JP2016092240A (ja) | 真空吸着パッドおよび真空吸着装置 | |
| US6752162B1 (en) | Edge roller assembly, method for contacting an edge of a substrate, and transport system for transporting semiconductor wafers to a wafer processing station | |
| US9004564B2 (en) | Wafer handling apparatus | |
| KR101667151B1 (ko) | 진공 흡착장치 | |
| US20090003979A1 (en) | Techniques for handling substrates | |
| KR102432439B1 (ko) | 기판 이송 모듈용 슬립 방지 척 | |
| TWI833735B (zh) | 用於高對流連續旋轉鍍覆之流輔助動態封件 | |
| JPS62287638A (ja) | ウエハ保持具 | |
| JP2020119923A (ja) | 半導体基板搬送用部材及びそれを有する半導体素子製造装置 | |
| JPH05177571A (ja) | 吸着パッド | |
| KR100852623B1 (ko) | 반도체 웨이퍼 이송용 진공흡착장치 | |
| TWI878753B (zh) | 晶圓加工系統和晶圓加工方法 | |
| JPH0641143U (ja) | スピンチャック | |
| JP7287332B2 (ja) | ロボットハンド | |
| JPH073137U (ja) | 半導体ウエハ搬送用ハンド | |
| WO2000054941A9 (en) | Wafer gripping fingers | |
| JPS6132888Y2 (en, 2012) | ||
| US6526640B1 (en) | Tool for installing seal ring |