JPH068051B2 - Method of manufacturing thermal print head - Google Patents

Method of manufacturing thermal print head

Info

Publication number
JPH068051B2
JPH068051B2 JP62136600A JP13660087A JPH068051B2 JP H068051 B2 JPH068051 B2 JP H068051B2 JP 62136600 A JP62136600 A JP 62136600A JP 13660087 A JP13660087 A JP 13660087A JP H068051 B2 JPH068051 B2 JP H068051B2
Authority
JP
Japan
Prior art keywords
resistant layer
layer
print head
thermal print
oxidation resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62136600A
Other languages
Japanese (ja)
Other versions
JPS63297069A (en
Inventor
弘朗 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP62136600A priority Critical patent/JPH068051B2/en
Publication of JPS63297069A publication Critical patent/JPS63297069A/en
Publication of JPH068051B2 publication Critical patent/JPH068051B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
    • B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
    • B41J2/335—Structure of thermal heads

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、プリンタ等に使用される熱印字ヘッドの製造
方法に関する。The present invention relates to a method for manufacturing a thermal print head used in a printer or the like.

（従来の技術） 従来の薄膜型の熱印字ヘッドは、第３図のように、基板
２０の上にグレーズ層２１、抵体２２、導体２３、耐酸
化層２４および耐摩耗層２５を順次積層してなるのが一
般的である。(Prior Art) As shown in FIG. 3, a conventional thin-film thermal print head has a glaze layer 21, a resistor 22, a conductor 23, an oxidation resistant layer 24, and an abrasion resistant layer 25 sequentially laminated on a substrate 20. It is generally done.

（発明が解決しようとする問題点） かかる熱印字ヘッドでは、抵抗体２２上の導体２３の一
部をエッチング等で除去して発熱体部２６を形成するた
め、発熱体部２６の表面26aは、その両側部分よりも凹
形にへこむことになる。(Problems to be Solved by the Invention) In such a thermal print head, a portion of the conductor 23 on the resistor 22 is removed by etching or the like to form the heating element portion 26. Therefore, the surface 26a of the heating element portion 26 is , It will be concave more than both sides.

そのため、発熱体部２６の紙当たりが悪くなり、鮮明な
印字が行なわれないという問題がある。As a result, there is a problem that the heating element portion 26 does not hit the paper well and clear printing cannot be performed.

これに対し、第４図のように、グレーズ層２１の曲率を
大きくするグレーズ曲率アップ方式（ＳＰＧ方式）や、
第５図のように、グレーズ層21aの上に更に小幅なグレ
ーズ層21bを設けるダブルグレーズ方式（ＷＰＧ方式）
が提案されている。On the other hand, as shown in FIG. 4, a glaze curvature increasing method (SPG method) for increasing the curvature of the glaze layer 21,
Double glaze method (WPG method) in which a narrower glaze layer 21b is provided on the glaze layer 21a as shown in FIG.
Is proposed.

これらの方式による熱印字ヘッドでは、発熱体部２６の
表面26a、第３図のものに比べて上方に凸状に突出した
ものとなるが、グレーズ層２１自体の形成が困難である
ばかりか、グレーズ層２１上の所定位置に精確に発熱体
部を形成する必要があり、グレーズ層に対する発熱体部
の位置ずれを極めて小幅に抑えなければならなず、製造
工程の負担が大きい。In the thermal print head according to these methods, the surface 26a of the heating element portion 26 is projected upward as compared with the surface 26a shown in FIG. 3, but not only is it difficult to form the glaze layer 21 itself, It is necessary to accurately form the heating element portion at a predetermined position on the glaze layer 21, and the positional deviation of the heating element portion with respect to the glaze layer must be suppressed to an extremely small width, which imposes a heavy burden on the manufacturing process.

本発明は、かかる従来の問題点に鑑みて、紙当たりが良
く、鮮明な印字が行なわれる熱印字ヘッドを、寸法精度
良く、製造容易に得ることを目的とする。In view of such conventional problems, it is an object of the present invention to obtain a thermal print head which has good paper contact and can perform clear printing with good dimensional accuracy and easy manufacturing.

（問題点を解決するための手段） 本発明は、上記の目的を達成するために、発熱抵抗体が
形成された基板上に耐酸化層の下層部をスパッタリング
により形成し、前記下層部上に耐酸化層の上層部をＣＶ
Ｄにより形成し、該形成された耐酸化層を、前記発熱抵
抗体に相当する部分を残してエッチング除去した後に、
前記耐酸化層上に耐摩耗層を形成して熱印字ヘッドを製
造する。(Means for Solving the Problems) In order to achieve the above object, the present invention forms a lower layer portion of an oxidation resistant layer on a substrate on which a heating resistor is formed by sputtering, and forms the lower layer portion on the lower layer portion. CV on top of the oxidation resistant layer
D is formed, and the formed oxidation resistant layer is removed by etching, leaving a portion corresponding to the heating resistor,
A thermal print head is manufactured by forming a wear resistant layer on the oxidation resistant layer.

（実施例） 以下、本発明を図面に示す実施例に基づいて詳細に説明
する。(Example) Hereinafter, the present invention will be described in detail based on an example shown in the drawings.

第１図は本発明の製造方法によって得られる熱印字ヘッ
ドの断面図である。この実施例の熱印字ヘッドは、基板
１上に、上側に凸状に湾曲するグレーズ層２、抵抗体
３、導体４、耐酸化層５および耐摩耗層６を順次積層し
てなるものである。導体４の各部のうち、グレーズ層２
上に位置する部分を除去してその下側の抵抗体３を露出
させることにより、発熱体部７が形成されている。FIG. 1 is a sectional view of a thermal print head obtained by the manufacturing method of the present invention. The thermal print head of this embodiment comprises a substrate 1 on which a glaze layer 2, which is convexly curved upward, a resistor 3, a conductor 4, an oxidation resistant layer 5 and an abrasion resistant layer 6 are sequentially laminated. . Of each part of the conductor 4, the glaze layer 2
The heating element portion 7 is formed by removing the upper portion and exposing the resistor 3 on the lower side.

ここで、耐酸化層５はSiO2等の透明の膜体であって、こ
の耐酸化層５の抵抗体３との対応部分5aは、その両側部
分5b,5bよりも肉厚となっていて、発熱体部７の表面7a
を外側上方へ突出させている。Here, the oxidation resistant layer 5 is a transparent film body such as SiO 2, and the portion 5a of the oxidation resistant layer 5 corresponding to the resistor 3 is thicker than both side portions 5b, 5b. , The surface 7a of the heating element portion 7
Is projected outward and upward.

第２図(a)および(b)は、上記構成の熱印字ヘッドの製造
過程を示す断面図である。次に、これらの図に基づい
て、本発明の該熱印字ヘッドの製造方法を説明する。2 (a) and 2 (b) are cross-sectional views showing a manufacturing process of the thermal print head having the above structure. Next, a method for manufacturing the thermal print head of the present invention will be described based on these drawings.

まず、基板１のグレーズ層２、抵抗体３、導体４を従来
と同様の方法で順次形成する。そして耐酸化層５の形成
は、まずスパッタリングにより下層部を形成し、その上
にＣＶＤにより上層部を形成するという２段階形成方式
により行う。この段階では、第２図(a)のように、導体
４の除去部の存在により、耐酸化層５の表面に凹部９が
形成されることになる。First, the glaze layer 2, the resistor 3, and the conductor 4 of the substrate 1 are sequentially formed by the same method as the conventional method. The oxidation resistant layer 5 is formed by a two-step formation method in which a lower layer portion is first formed by sputtering and then an upper layer portion is formed by CVD. At this stage, as shown in FIG. 2A, due to the existence of the removed portion of the conductor 4, the recess 9 is formed on the surface of the oxidation resistant layer 5.

次に、上記耐酸化層５の各部のうち、導体４の除去部に
対応する凹部９のみをフオトレジストで覆い、その他の
部分の耐酸化層５をハーフエツチングにより途中まで除
去する。これにより、耐酸化層５の上層部に相当する第
２図(b)の交叉斜線で示す部分１０が除去されて、上層
部と下層部との２層構造からなる耐酸化層５の抵抗体３
との対応部分5aが、その両側部分5b,5bよりも肉厚とな
る。すなわち、耐酸化層５の発熱体部７は外側上方へ突
出する。Next, among the respective portions of the oxidation resistant layer 5, only the concave portion 9 corresponding to the removed portion of the conductor 4 is covered with photoresist, and the other portions of the oxidation resistant layer 5 are partially removed by half etching. As a result, the portion 10 indicated by the cross hatched lines in FIG. 2 (b) corresponding to the upper layer portion of the oxidation resistant layer 5 is removed, and the resistor of the oxidation resistant layer 5 having a two-layer structure of the upper layer portion and the lower layer portion is removed. Three
The portion 5a corresponding to and is thicker than the side portions 5b, 5b. That is, the heating element portion 7 of the oxidation resistant layer 5 projects outward and upward.

上記のように、耐酸化層５の上層部をエッチング除去す
るようにしているので、下層部と上層部のエッチングレ
イトの異なりにより、ハーフエッチングが所定の深さ寸
法において精度良く行われ、これにより、製造に際し発
熱体部７の突出寸法が所定寸法に精度良くそろった、印
字性能に優れる熱印字ヘッドが得られる。As described above, since the upper layer portion of the oxidation resistant layer 5 is removed by etching, due to the difference in the etching rate of the lower layer portion and the upper layer portion, half etching is performed accurately at a predetermined depth dimension. A thermal printing head having excellent printing performance, in which the protruding dimensions of the heating element portion 7 are accurately aligned to a predetermined dimension during manufacturing, can be obtained.

その後、第１図のように、耐酸化層５の上に耐摩耗層６
が形成され、その耐摩耗層６は耐酸化層５の表面に沿う
ものとなるので、耐摩耗層６の発熱部７も外側上方に突
出することになる。Then, as shown in FIG. 1, a wear-resistant layer 6 is formed on the oxidation-resistant layer 5.
Since the abrasion resistant layer 6 is formed along the surface of the oxidation resistant layer 5, the heat generating portion 7 of the abrasion resistant layer 6 also protrudes outward and upward.

また、耐酸化層５のエッチングの際、該耐酸化層５は透
明であるので、耐酸化層５を通して抵抗体３を透視する
ことができ、そのため、発熱体部７に対するエッチング
を位置ずれなく精確に行なうことができ、発熱体部の位
置ずれをマスクアライメントの精度まで抑えることがで
きる。Further, when the oxidation resistant layer 5 is etched, since the oxidation resistant layer 5 is transparent, the resistor 3 can be seen through the oxidation resistant layer 5. Therefore, the etching with respect to the heating element portion 7 can be accurately performed without displacement. Therefore, it is possible to suppress the positional deviation of the heating element up to the mask alignment accuracy.

（効果） 以上説明した本発明によれば、発熱体部の表面が外側に
突出し、紙当たりが良く、鮮明な印字が行なわれる熱印
字ヘッドが得られる。(Effect) According to the present invention described above, it is possible to obtain a thermal print head in which the surface of the heating element portion is projected to the outside, the paper hits well, and clear printing is performed.

また、発熱体部の突出構造は、抵抗体上の耐酸化層の肉
厚調整により得られるので、グレーズ層自体の改良で得
られる従来の構成に比べ、製作が容易である。Further, since the protruding structure of the heating element portion is obtained by adjusting the thickness of the oxidation resistant layer on the resistor, it is easier to manufacture than the conventional configuration obtained by improving the glaze layer itself.

くわえて、そして耐酸化層の形成は、スパッタリングに
より下層部を形成し、その上にＣＶＤにより上層部を形
成するという２段階形成方法により行い、上層部をエッ
チング除去するようにしているので、下層部と上層部の
エッチングレイトの異なりにより、ハーフエッチングが
所定の深さ寸法において精度良く行われ、これにより、
製造に際し、発熱体部の突出寸法が所定寸法に精度良く
そろった、印字性能に優れる熱印字ヘッドが得られる。In addition, the oxidation resistant layer is formed by a two-step forming method in which a lower layer portion is formed by sputtering and then an upper layer portion is formed by CVD, and the upper layer portion is removed by etching. Due to the difference in etching rate between the upper part and the upper part, half etching is accurately performed at a predetermined depth dimension.
At the time of manufacture, a thermal print head having excellent printing performance in which the protruding size of the heating element is accurately aligned with a predetermined size can be obtained.

【図面の簡単な説明】[Brief description of drawings]

第１図は本発明によって得られる熱印字ヘッドの断面
図、第２図(a)および(b)は本発明の熱印字ヘッドの製造
過程を示す断面図、第３図、第４図および第５図は熱印
字ヘッドの従来例の断面図である。 １…基板、３…抵抗体、４…導体、５…耐酸化層、5a…
対応部分、5b…両側部分、６…耐摩耗層、７…発熱体
部、7a…表面。FIG. 1 is a sectional view of a thermal print head obtained by the present invention, and FIGS. 2 (a) and 2 (b) are sectional views showing a manufacturing process of the thermal print head of the present invention, FIG. 3, FIG. 4 and FIG. FIG. 5 is a sectional view of a conventional example of a thermal print head. 1 ... Substrate, 3 ... Resistor, 4 ... Conductor, 5 ... Oxidation resistant layer, 5a ...
Corresponding part, 5b ... both sides, 6 ... wear-resistant layer, 7 ... heating element part, 7a ... surface.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】発熱抵抗体が形成された基板上に耐酸化層
の下層部をスパッタリングにより形成し、 前記下層部上に耐酸化層の上層部をＣＶＤにより形成
し、 該形成された耐酸化層を、前記発熱抵抗体に相対する部
分を残してエッチング除去した後に、前記耐酸化層上に
耐摩耗層を形成することを特徴とする熱印字ヘッドの製
造方法。1. A lower layer portion of an oxidation resistant layer is formed on a substrate on which a heating resistor is formed by sputtering, an upper layer portion of the oxidation resistant layer is formed on the lower layer portion by CVD, and the formed oxidation resistant layer is formed. A method for manufacturing a thermal print head, comprising: forming a wear-resistant layer on the oxidation-resistant layer after removing the layer by etching, leaving a portion facing the heat-generating resistor.
JP62136600A 1987-05-29 1987-05-29 Method of manufacturing thermal print head Expired - Fee Related JPH068051B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62136600A JPH068051B2 (en) 1987-05-29 1987-05-29 Method of manufacturing thermal print head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62136600A JPH068051B2 (en) 1987-05-29 1987-05-29 Method of manufacturing thermal print head

Publications (2)

Publication Number Publication Date
JPS63297069A JPS63297069A (en) 1988-12-05
JPH068051B2 true JPH068051B2 (en) 1994-02-02

Family

ID=15179090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62136600A Expired - Fee Related JPH068051B2 (en) 1987-05-29 1987-05-29 Method of manufacturing thermal print head

Country Status (1)

Country Link
JP (1) JPH068051B2 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128477A (en) * 1979-03-28 1980-10-04 Mitsubishi Electric Corp Preparing method for heat-sensitive head
JPS5865678A (en) * 1981-10-15 1983-04-19 Seiko Epson Corp Thermal head
JPS5869076A (en) * 1981-10-22 1983-04-25 Seiko Epson Corp Thermal head
JPS5887076A (en) * 1981-11-18 1983-05-24 Seiko Epson Corp Manufacture of thermal head
JPS5887075A (en) * 1981-11-18 1983-05-24 Seiko Epson Corp Manufacture of thermal head
JPS6295245A (en) * 1985-10-22 1987-05-01 Alps Electric Co Ltd Thermal head

Also Published As

Publication number Publication date
JPS63297069A (en) 1988-12-05

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