JPH0674796B2 - Multi-channel vacuum pump - Google Patents

Description

TECHNICAL FIELD The present invention relates to a multi-channel vacuum pump applied to a nuclear fusion device or the like.

(Prior Art) A conventional vacuum pump for a nuclear fusion device is shown in FIG. (0
1) is a turbo molecular pump, (02) is a rotary pump, (014
a) is the upper casing of the turbo molecular pump (01), (014
b) is an upper casing of the rotary pump (02), and (014c) is a lower casing common to the turbo molecular pump (01) and the rotary pump (02).

First, the turbo molecular pump (01) will be explained.
a) is a rotating body, (01b) is a multi-stage moving blade provided on the upper side of the rotating body (01a), (01c) is facing the multi-stage moving blade (01b), and inside the upper casing (014a) A multi-stage vane fixed to a wall surface (03) surrounds the rotating body (01a), and the upper casing (014a) and the lower casing (014).
c) a non-contact seal for partitioning with, an upper radial gas bearing (04) mounted on the inner wall surface of the lower casing (014c), and a lower casing (06) below the upper radial gas bearing (04). 014c) a lower radial gas bearing mounted on the inner wall surface, (05) a gas turbine fixed to the lower end of the rotating body (01a), and (05a) penetrating the lower wall of the lower casing (014c). Gas turbine (05)
The drive gas supply port opened at (07) (07) faces the gas turbine (05) and is the lowest thrust gas bearing attached to the lower inner wall surface of the lower casing (014c). 01a) is the upper radial gas bearing (04), the lower radial gas bearing (06) and the lowermost thrust gas bearing (07)
(07) is rotatably supported by and. See also (08)
Is a support gas supply port provided in the lowermost wall of the lower casing (014c), and the rotating part of each of the above parts is made of ceramics.

Next, the rotary pump (02) will be described. (02a) is a rotating body, (02b) (02c) is a stationary hollow body having a thread groove on the inner peripheral surface, and the stationary hollow body (02b) (02c) is It is fixed to the inner wall surface of the upper casing (014b) and
a) is rotatably fitted in the stationary hollow body (02b) (02c). Also, (09) is the lower casing (014c).
The upper radial gas bearing mounted on the inner wall surface of the, the lower radial gas bearing (011) mounted on the inner wall of the lower casing (014c) below the upper radial gas bearing (09), and the (010) rotating The gas turbine fixed to the lower end of the body (02a), (012) (012) is the same gas turbine (01
0), which is the lowermost thrust gas bearing mounted on the inner wall surface of the lower part of the lower casing (014c).
a) is the upper radial gas bearing (09), the lower radial gas bearing (011) and the lowermost thrust gas bearing (012) (01
2) It is rotatably supported by and. Also (010a)
Is the gas turbine (05) and the gas turbine (010)
An air supply passage (015) for communicating between the rotary body (01a) directly above the upper radial gas bearing (04) and the rotary body (02a) directly above the stationary hollow body (02c). In the air supply passage communicating with each other, among the above-mentioned parts, the rotating part is made of ceramics.

Next, the operation of the vacuum pump for a nuclear fusion device shown in FIG. 5 will be described. Supporting gas (B ₁ ) is supplied by supporting gas supply port (08)
From turbo molecular pump (01) radial gas bearing (04)
(06) and thrust gas bearings (07) (07), and the radial gas bearings (09) (011) and thrust gas bearings (012) (012) of the rotary pump (02), and the turbo molecular pump (01 ), The rotating body (01a) and the rotating body (02a) of the rotary pump (02) are rotatably supported. Further, the driving gas (C ₁ ) is supplied from the driving gas supply port (05a) to the gas turbine (0
5) to rotate the rotating body (01a) of the turbo molecular pump (01) and the multi-stage rotor blades (01b), which have an exhausting capacity in a high vacuum region, at high speed, while the driving gas (C ₁ ) is gas. Gas turbine (01) through the air supply passage (010a) from the turbine (05)
(0) to rotate the rotary body (02a) of the rotary pump (02) which has the exhaust capacity in the low vacuum region at high speed, and moves the gas on the intake side of the turbo molecular pump (01) to the arrow (A ₁ ) → ( A ₂ ) →
Evacuate in the (A ₃ ) direction to create a high vacuum on the inlet side of the turbo molecular pump (01). At this time, the exhaust side of the rotary pump (02) is exhausted at a pressure near atmospheric pressure.

(Problems to be Solved by the Invention) In the conventional vacuum pump for a fusion device shown in FIG.
(1) The rotating part of the turbo molecular pump (01) is composed of ceramics (ceramics of brittle material, which is excellent in magnetic field resistance, heat resistance, and corrosion resistance).
Also, it was difficult to increase the size of the multi-stage rotor blade (01b) from the viewpoint of molding and firing of the member, and there was a limit to increase the exhaust capacity in the high vacuum region. (II) Support gas supply port (08)
From turbo molecular pump (01) radial gas bearing (04)
(06) and thrust gas bearings (07) (07) and bearing gas (B) sent to the radial gas bearings (09) (011) and slite gas bearings (012) (012) of the rotary pump (02). ₁ ) is discharged out of the lower casing (014c),
The radioactive gas in the vacuum pump could also be discharged outside together with the supporting gas (B ₁ ). (III) The rotating parts of the turbo molecular pump (01) and the rotary pump (02) are made of ceramics of brittle material, and the rotating parts are more likely to be broken than the vacuum pump made of a metal material. When the rotating part is destroyed, the casings (014a) and (014b) are also destroyed, and there is a risk that the radioactive gas in the vacuum pump is released to the outside.

(Means for Solving the Problems) The present invention addresses the above problems, and a plurality of vacuum pump units are arranged side by side inside an external casing having an intake port at the top thereof, and the respective vacuum pumps are provided. Each unit is composed of upper and lower two-stage unit inner casing and a pump element installed in the unit inner casing, and the pump element rotatably supports the rotor and the rotor. And a turbo molecular pump having multi-stage rotor blades provided on the same rotating body, a gas turbine for driving the rotating body provided on the same rotating body, and a cylindrical body surrounding each part, and a thread groove on the rotating body and the inner peripheral surface. A rotary pump having a stationary hollow body provided and a gas bearing for rotatably supporting the stationary body in the stationary hollow body, and a gas turbine for driving the rotating body provided in the stationary body and a cylindrical body surrounding the respective parts; The above Drive gas supply pipe for supplying drive gas to the turbo molecular pump and the gas turbine of the rotary pump, and support gas supply for supplying rotary body support gas to the gas bearings of the turbo molecular pump and rotary pump A pipe line, an air supply pipe line that guides exhaust gas from the turbo molecular pump to an intake port of the rotary pump, one exhaust pipe line that guides exhaust gas from the rotary pump to an external pipe line, the turbo molecular pump, and It is characterized in that it is configured by the gas turbine of the rotary pump and the other exhaust pipe line that guides the exhaust gas from the gas bearing to the external pipe line.

The object of the present invention is to obtain a large exhaust velocity required for a nuclear fusion device or the like, and to increase the pressure of the gas sucked from the high vacuum region to near atmospheric pressure. In addition, it is possible to prevent damage to the rotating parts and discharge of radioactive gas to the outside, thus improving safety. Furthermore, the point is to provide a multi-channel vacuum pump that can operate at any pumping speed from large to small pumping speeds and can respond to load changes.

(Operation) The multi-channel vacuum pump of the present invention is configured as described above, and supplies the rotor support gas to the turbo molecular pump and the gas bearings of the rotary pump from the support gas supply pipe to generate the turbo molecule. The rotary body of the pump and the multi-stage rotor blades, and the rotary body of the rotary pump are rotatably supported, and the drive gas is supplied from the drive gas supply pipeline to the turbo-molecular pump and the gas turbine of the rotary pump. While rotating the turbo molecular pump that has the exhaust capacity in the vacuum region and the multi-stage rotor blades at high speed, rotate the rotating body of the rotary pump that has the exhaust capacity in the low vacuum region at high speed, Turbo molecular pump for gas → air supply line → rotary pump →
One of the exhaust lines is evacuated to the external line to bring the intake side of the turbo molecular pump to a high vacuum and the exhaust side of the rotary pump to a pressure near atmospheric pressure. At this time, the exhaust gas from the gas turbines and gas bearings of the turbo molecular pump and the rotary pump is exhausted to the external conduit via the other exhaust conduit.
The above operation is for one vacuum pump unit installed in the outer casing, but the same operation is performed in each of the other vacuum pump units installed in the outer casing.

(Embodiment) Next, an explanation will be given of an embodiment shown in FIGS. 1 to 4 in which the multi-channel vacuum pump of the present invention is applied to a nuclear fusion device. First, the whole will be described with reference to FIGS. 1 to 3. (1) is a turbo molecular pump, (14a ₁ ) and (14a ₂ ) are upper and lower cylindrical bodies of the turbo molecular pump (1), and (19) is the same turbo molecular pump. The inner casing for the unit surrounding the upper and lower cylindrical bodies (14a ₁ ) (14a ₂ ) of the molecular pump (1) (the upper part of the upper and lower two-stage unit inner casing), (19a) is the top of the inner casing (19) for the unit. An intake port provided in the rotary pump, (2) a rotary pump, (14b ₁ ) and (14b ₂ ) upper and lower cylinders of the same rotary pump (2), and (20) upper and lower cylinders (14b ₁ ) of the same rotary pump (2). ) (14b ₂ ) surrounding the unit inner casing (lower part of the upper and lower two-stage unit inner casing) and the above-mentioned upper and lower two-stage unit inner casings (19) (20) are assembled, and the vacuum pump unit (26 ) Is configured. Further, (27) is an outer casing, (27a) is an intake port provided at the top of the outer casing (27), and a plurality of vacuum pump units (26 in this embodiment) (26) are provided in the outer casing (27). ) Are arranged side by side.

Next, details of the vacuum pump unit (26) will be described with reference to FIG.

First, the turbo molecular pump (1) will be explained (1a)
Is a rotor of the turbo molecular pump (1), (1b) is a multistage rotor fixed to the upper part of the rotor (1a), and (1c) is an upper cylinder facing the multistage rotor (1b). (14a ₁ ) Multi-stage stator vanes fixed to the inner wall surface, (1d) a disk part fixed to the lower end of the rotating body (1a), (3) an upper cylinder surrounding the rotating body (1a) A non-contact seal for partitioning the body (14a ₁ ) and the lower cylinder (14a ₂ ), (4) is the upper radial gas bearing (8b ₁ ) mounted on the inner wall surface of the lower cylinder (14a ₂ ) The lower cylindrical body (14) has a bearing gas supply port (6) penetrating through the wall of the body (14a ₂ ) and opening to the upper radial gas bearing (4) below the upper radial gas bearing (4).
a ₂ ) lower radial gas bearing mounted on the inner wall of (a ₂ ), (8
b ₂ ) penetrates the wall of the lower cylindrical body (14a ₂ ) and opens into the lower radial gas bearing (6), and a supporting gas supply port,
(5) (5) is a gas turbine fixed to the middle part of the rotating body (1a), (5b ₁ ) (5b ₁ ) is the lower cylindrical body (14a ₂ )
The driving gas supply ports (5b ₂ ) (5b ₂ ) penetrating the wall and opening to the respective gas turbines (5) are the lower cylindrical bodies (14a ₂ )
Exhaust ports that penetrate through the wall and open to the outside of the lower cylindrical body (14a ₂ ), (7) and (7) face the disk portion (1d), and the lower inner wall surface of the lower cylindrical body (14a ₂ ). the bottom of the thrust gas bearing attached to, (8b ₃₎ is in the lower cylindrical body (14a ₂₎ through the wall opening in the thrust gas bearing of the bottom part (7) bearing gas supply port, the rotary body (1a) is rotatably supported by an upper radial gas bearing (4), a lower radial gas bearing (6) and a lowermost thrust gas bearing (7) (7). Further, each of the above-mentioned parts is surrounded by the unit inner casing (19), and among the above-mentioned each part, the rotating part is constituted by ceramics.

Next, the rotary pump (2) will be described. (2a) is a rotating body, (2b) is a stationary hollow body having a thread groove on its inner peripheral surface
(2d) is a disk portion fixed to the lower end of the rotating body (2a), and the stationary hollow body (2b) is fixed to the inner wall surface of the upper cylindrical body (14b ₁ ), and the rotating body (2a) Is the same stationary hollow body (2
It is rotatably fitted in b). Further, (9) is an upper radial gas bearing mounted on the inner wall surface of the lower cylindrical body (14b ₂ ), and (8a ₁ ) is an upper radial gas bearing (9) penetrating the lower cylindrical body (14b ₂ ) wall. The support gas supply port opened at the bottom, (11) is the lower radial gas bearing (8a ₂ ) mounted on the inner wall surface of the lower cylindrical body (14b ₂ ) below the upper radial gas bearing (9). Lower cylinder (14b ₂ )
A supporting gas supply port that penetrates through the wall and opens to the lower radial gas bearing (11), a gas turbine in which (10) and (10) are fixed to the intermediate part of the rotating body (2a), (5a ₁ ) (5a) ₁ ) penetrates the wall of the lower cylindrical body (14b ₂ ) and the respective gas turbines (1
Driving gas supply port (5a ₂ ) (5a ₂ ) opened in (0) penetrates the wall of the lower cylinder (14b ₂ ) and
b ₂ ) Exhaust port opened to the outside, (12) (12) is the lowest thrust gas bearing mounted on the inner wall surface of the lower part of the lower casing (14b ₂ ) facing the disk part (2d), ( 8a ₃ ) is a supporting gas supply port that penetrates through the wall of the lower cylindrical body (14b ₂ ) and opens to the thrust gas bearings (12) (12) at the bottom, and the rotating body (2a) is the upper radial gas bearing. (9), the lower radial gas bearing (11) and the lowermost thrust gas bearings (12, 12) are rotatably supported. Each of the above parts is surrounded by the unit inner casing (20), and among the above parts, the rotating part is made of ceramics.

Further, (5a) and (5b) in FIG. 4 are gas turbines (5) of the turbo molecular pump (1) and the rotary pump (2).
A driving gas supply line for supplying a driving gas to (10),
(25a) is an automatic valve provided in the drive gas supply pipe (5a), and the drive gas supply pipe (5a) communicates with each of the drive gas supply ports (5a ₁ ) to drive the same. the gas supply line (5b) is communicated with the above-described drive gas supply port (5b _1). Further, (8a) and (8b) are gas supply lines for bearings that supply gas for supporting the rotor to the gas bearings of the turbo molecular pump (1) and the rotary pump (2), and (25b) is gas supply for the bearings. With the automatic valve installed in the pipe (8a), the gas supply pipe (8
a) communicates with the bearing gas supply ports (8a ₁ ) (8a ₂ ) (8a ₃ ), and the bearing gas supply line (8b) communicates with the bearing gas supply ports (8b ₁ ) (8b ₂ ) It communicates with (8b ₃ ). Also (2
1) is an air supply line for guiding the exhaust gas from the turbo molecular pump (1) to the intake port of the rotary pump (2), and (22) is between the non-contact seal (3) and the radial gas bearing (4). An air supply conduit for guiding gas to the rotary pump (2), (23) one exhaust conduit for guiding exhaust gas from the rotary pump (2) to an external conduit, and (25c) for the exhaust conduit (23) Automatic valve installed in
(24) is a gas turbine (5) and gas bearings (4), (6) and (7) of the turbo molecular pump (1), and a gas turbine (10) and gas bearings (9) and (1) of the rotary pump (2).
1) The other exhaust pipe line that guides the exhaust gas from (12) to the external pipe line, and (25d) is an automatic valve provided in the exhaust pipe line (24).

Further, (28) in FIGS. 1 and 3 is an air supply / exhaust unit provided under the outer casing (27), and the air supply / exhaust unit (28) is a multilayer flat plate (28a) to (28e). , Partition plates (29a) to (29c) and the drive gas supply pipe (5a)
A driving gas supply pipe (30) communicating with (5b), a supporting gas supply pipe (31) communicating with the supporting gas supply pipes (8a), (8b), and the one exhaust pipe One exhaust pipe line (32) communicating with (23) and the other exhaust pipe line (33) communicating with the other exhaust pipe line (24).

Next, the operation of the multi-channel vacuum pump shown in FIGS. 1 to 4 will be specifically described. Supporting gas (B ₁ )
From the gas supply pipe for support (31) of the air supply and exhaust unit (28) to the gas supply pipe for support (8a) → gas supply port for support (8a ₁ ) (8a ₂ ) (8a ₃ ) → rotary pump (2) Radial gas bearings (9) (11) and thrust gas bearings (12)
Send to (12) (see arrow (B ₁ ) → (B ₂ ) → (B ₃ )), and from the above-mentioned bearing gas supply pipe (8a) to the bearing gas supply pipe (8b) → bearing gas supply Mouth (8b ₁ ) (8b ₂ ) (8
b ₃ ) → Send it to the radial gas bearings (4) (6) and thrust gas bearings (7) (7) of the turbo molecular pump (1) (see arrow (B ₁ ) → (B ₂ ) → (B ₄ ). ), The rotor (1a) of the turbo molecular pump (1) and the rotor (2a) of the rotary pump (2) are rotatably supported. Driving gas (C ₁ )
From the driving gas supply pipeline (30) of the air supply and exhaust unit (28) to the driving gas supply pipeline (5a) → the driving gas supply port (5a ₁ ) (5a ₁ ) → the rotary pump (2) Send to gas turbine (10) (see arrow (C ₁ ) → (C ₂ ) → (C ₃ )), and also from above drive gas supply pipeline (5a) to drive gas supply pipeline (5b) → drive Gas supply port (5b ₁ ) (5b ₁ ) → Send to gas turbine (5) of turbo molecular pump (1) (see arrow (C ₁ ) → (C ₂ ) → (C ₄ )) Rotating body (1a) of turbo molecular pump (1) having exhaust capacity and multi-stage rotor blade (1b) rotate at high speed, and rotating body (2a) of rotary pump (2) having exhaust capacity in low vacuum region Rotate at high speed. At this time, the gas on the intake port (27a) side of the outer casing (27) is changed into a turbo molecular pump (1) → an air supply conduit (21) → a rotary pump (2) → one exhaust conduit (23) →
Exhaust to one of the air supply and exhaust unit (28) exhaust pipe (32) (arrow (A ₁ ) → (A ₂ ) → (A ₃ ) → (A ₄ ) →
The gas between the non-contact seal (3) and the radial gas bearing (4) is sent to the rotary pump (2) along with (A ₅ ) → (A ₆ ) (arrow (A ₇ ) → (A ₈ )), and together with the above exhaust, exhaust to one exhaust pipe line (23) → to one exhaust pipe line (32) of the air supply and exhaust unit (28), and then to the vacuum pump unit (26). Make a high vacuum on the intake port (19a) side of. At this time, the rotary pump (2) exhausts air at a pressure near atmospheric pressure. The bearing gas sent to the gas bearings (9) (11) (12) (12) of the rotary pump (2) and the gas turbine (1) of the rotary pump (2).
The driving gas sent to (0) is exhausted from the exhaust ports (5a ₂ ) (5a ₂ ) to the other exhaust pipe line (24) → the other exhaust pipe line (33) of the air supply and exhaust unit (28) ( Arrow (D ₁ ) → (D ₃ ) →
(See D ₄ ). The bearing gas sent to the gas bearings (4) (6) (7) (7) of the turbo molecular pump (1) and the driving gas sent to the gas turbine (5) of the turbo molecular pump (1) From the exhaust ports (5b ₂ ) (5b ₂ ) to the other exhaust pipe line (24) → to the other exhaust pipe line (33) of the air supply and exhaust unit (28) (arrow (D ₂ ) → (D ₃ ) → (D ₄ )). The above operation is for one vacuum pump unit (26) installed in the outer casing (27), but the same applies to each of the other vacuum pump units (26) installed in the outer casing (27). Is performed.

(Effects of the Invention) The multi-channel vacuum pump of the present invention has a plurality of vacuum pump units arranged side by side inside an outer casing having an intake port as described above, and each of the vacuum pump units is It is composed of upper and lower two-stage unit inner casing and a pump element installed in the unit inner casing. The pump element is a gas bearing and a rotor which rotatably support the rotor and the rotor. A turbo molecular pump having a multi-stage rotor blade provided, a gas turbine for driving a rotating body provided in the same rotating body, and a cylindrical body surrounding each portion, and a stationary hollow body having a rotating body and a thread groove on the inner peripheral surface. And a rotary pump having a gas bearing that rotatably supports the rotating body in the stationary hollow body, a gas turbine for driving the rotating body provided in the rotating body, and a cylindrical body that surrounds each portion, and the turbo. Driving gas supply line for supplying driving gas to the gas turbine of the molecular pump and the rotary pump, and supporting gas supply line for supplying rotary body supporting gas to the gas bearings of the turbo molecular pump and the rotary pump An air supply conduit for guiding exhaust gas from the turbo molecular pump to an intake port of the rotary pump, one exhaust conduit for guiding exhaust gas from the rotary pump to an external conduit, the turbo molecular pump and the rotary pump Of the exhaust gas from the gas turbine and the gas bearing to the external pipe, and the other exhaust pipe that guides the exhaust to the external pipe. The large exhaust speed required by the fusion device can be obtained, and the gas sucked from the high vacuum region can be boosted to near atmospheric pressure. Further, since the diameter of the brittle material rotor blade of the turbo molecular pump can be reduced as described above, it is possible to prevent the rotor blade from being broken and improve the safety of the multi-channel vacuum pump. In addition, even if the moving blade should break, there is an inner casing for the unit around it, so that the fragments of the moving blade do not scatter to the adjacent vacuum pump unit. Moreover, since each vacuum pump unit is surrounded by the outer casing, it is possible to prevent the release of radioactive gas to the outside, and also in this respect, the safety of the multi-channel vacuum pump can be improved.

Further, in the multi-channel vacuum pump of the present invention, it is possible to install the respective vacuum pump units having different evacuation speeds in the outer casing and selectively use the respective vacuum pump units. Can be operated at any pumping speed from a large pumping speed to a small pumping speed, and is effective in responding to changes in load.

[Brief description of drawings]

FIG. 1 is a vertical sectional side view showing an embodiment of a vacuum pump unit of a multi-channel vacuum pump according to the present invention, FIG. 2 is a cross-sectional plan view showing the whole multi-channel vacuum pump, and FIG. A side view, FIG. 4 is an enlarged vertical side view showing details of the vacuum pump unit, and FIG. 5 is a vertical side view showing a conventional vacuum pump. (1) …… Turbo molecular pump, (1a) …… Rotating body, (1
b) ... Multi-stage rotor blades, (4) (6) (7) ... Rotating body (1
gas bearing of a), (5) the rotary body drive gas turbine ... rotating body (1a), a cylindrical body (14a ₁₎ (14a ₂₎ ...... turbomolecular pump (1), (2) ... Rotation Pump, (2a) ……
Rotating body, (2b) ... Stationary hollow body, (9) (11) (12) ...
... gas bearing of the rotary body (2a), (10) the rotary body drive gas turbine ...... rotating body (2a), cylindrical body _{(14b 1) (14b 2)} ...... rotary pump (2), (5a) (5b) …… Drive gas supply pipeline, (8a) (8b) …… Supporting gas supply pipeline, (19)
(20) …… Internal casing for upper and lower two stages, (2
1) (22) …… Air supply line, (23) …… One exhaust line,
(24) ... other exhaust line, (26) ... vacuum pump unit, (27) ... external casing.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Harushi Osawa Inventor Harushige Osawa 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Works (72) Inventor Yuji Otani 4 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture 6-22 No. Mitsubishi Heavy Industries, Ltd. Hiroshima Works (72) Inventor Satoshi Hata 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Hiroshima Prefecture (56) Mitsubishi Heavy Industries Ltd. (56) Bibliography Sho 60-34594 (JP, U)

Claims (1)

[Claims] 1. A plurality of vacuum pump units are arranged side by side inside an outer casing having an intake port at the top, and each of the vacuum pump units is provided with an upper and lower two-stage unit inner casing and a unit inner casing. It is composed of a pump element installed in the inner casing, and the pump element is provided in the rotor and a gas bearing that rotatably supports the rotor and the multistage rotor blades provided in the rotor. A turbo molecular pump having a gas turbine for driving a rotating body and a cylindrical body surrounding each part, a stationary hollow body having a thread groove on the inner peripheral surface of the rotating body, and a rotating body capable of rotating the rotating body in the stationary hollow body. A rotary pump having a supporting gas bearing, a rotary body driving gas turbine provided in the rotary body, and a cylindrical body surrounding the same, and a driving gas for the turbo molecular pump and the rotary turbine gas turbine. And a gas supply line for driving supplies,
A bearing gas supply conduit for supplying a rotor bearing gas to the turbo molecular pump and gas bearings of the rotary pump; an air supply conduit for guiding exhaust gas from the turbo molecular pump to an intake port of the rotary pump; One of the exhaust pipes that guides the exhaust gas from the rotary pump to the external pipe line and the other exhaust pipe line that guides the exhaust gas from the gas turbine and gas bearing of the turbo molecular pump and the rotary pump to the external pipe line A multi-channel vacuum pump characterized by the following.