CN1391037A - Ultrahigh-vacuum pump and its hydraulic method by 3D compressed air in water - Google Patents

Abstract

An ultrahigh-vacuum pump is composed of pipeline, hydraulic valve, hydraulic oil inlet and outlet, piston and its connecting rod, spring and its pull rod, movable sleeved rod of valve, fixed rod, big and small cavities and their partition, movable pipe, valve, water tank, small turbine and air filtering pipe. Its hydraulic method features that the air is compressed, passed to lower water level by turbine, floated toward high water level, and escaped in atmosphere from water surface. More pumps can be serially connected for highe vacuum degree. Its advantages are high displacement capacity, small size and low cost.

Description

The hydraulic method of ultrahigh vacuum pump and 3 D compressed air entry thereof

(1) technical field:

The present invention is the hydraulic method that ultrahigh vacuum pump and the entry of 3 D compressed air gas thereof obtain ultrahigh vacuum, belongs to engineering goods, and particularly the entry of 3 D compressed air gas obtains the technology of ultrahigh vacuum.

(2) background technique:

Existing vacuum pump kind is a lot, but all has following shortcoming and problem: (1) can't be extracted into ultrahigh vacuum from barometric pressure by a vacuum pump, even to the extreme high vacuum degree; (2) vacuum pumping rate is slow; (3) it is very high to be extracted into the expense of high vacuum; (4) manufacturing expense of pump is expensive; (5) slow especially or the like to the pumping speed of hydrogen and helium, these are ubiquitous common drawback of existing vacuum pump and problem.

(3) summary of the invention:

Purpose of the present invention be exactly for overcome and solve that existing vacuum pump exists can't be extracted into ultrahigh vacuum from barometric pressure by a vacuum pump, and vacuum pumping rate is too slow, shortcoming that expense is too high and problem, research, invention, design and a kind ofly can utilize hydraulic pressure, thereby 3 D compressed air improves the pressure that is compressed gas greatly, to be compressed gas again enters in the low water level water, gas is owing to the water surface that floating function floats to high water level enters in the atmosphere again, be implemented in exhaust ports and obtain an extremely low backing pressuring, and very fast pumping speed is arranged, simple in structure, cost is low, vacuumize the ultrahigh vacuum pump of advantages such as expense is low and the hydraulic method that the 3 D compressed air entry obtains ultrahigh vacuum thereof.

The present invention realizes by following technical proposals: the structural representation of ultrahigh vacuum pump as shown in Figure 1, the structural representation of gas-discharging type high vacuum pump is as shown in Figure 2.It is by the vacuum pipe 1 of belt switch, hydraulic drive valving 2,26,46, hydraulic oil injects or outflow opening 3,23,24,47, hydraulic piston 4,22,27,45, piston rod 5,20,30,44, spring pull bar 6,17,31,43, spring 7,16,32,42, the movable loop bar 8 of valve, 13,34,41, be fixed on the bar 9 on the valve, 15,33,40, valve 10,14,35,39, big cavity 11, pneumaticpiston 12,36, the opening 18 that big cavity 11 links to each other with hydraulic fluid chamber 21, floating pipe 19, hydraulic fluid chamber 21, hydraulic oil container intermediate clapboard 25, areola 29 and hydraulic oil container 21 openings 28, areola 29, upper shed water tank 37, little turbo machine 38, the common installation of atmosphere screen pipe 48 connects and composes, and its mutual alignment and interconnected relationship are: the pipeline the other end of belt switch vacuum pipe 1 be evacuated container and be connected; Hydraulic drive valving 2 is fixed on the pipeline outer wall after loading onto the ultrahigh vacuum seal rubber ring by screw; Hydraulic oil injects or the hydraulic oil injection or the outflow opening of outflow opening 3,23,24,41 and hydraulic drive valving 26 are connected with oil hydraulic pump; Hydraulic piston 4 welds mutually with piston rod 5; Spring pull bar 6 is welded on the inwall of pipeline; The push rod 9,15,33,44 of valve all is welded on the corresponding valve respectively; The bar of the movable loop bar 8 of valve, loop bar is welded on the inner-walls of duct; Spring pull bar 17,31 all is welded on the inwall of floating pipe 19; Pneumaticpiston 12 is fixed on the floating pipe 19, and a plurality of ultrahigh vacuum seal rubber rings (as fluorine rubber ring) are installed on the pneumaticpiston 12, means of fixation is multiple, as long as guarantee the optical frames plane of pneumaticpiston 12 and the optical frames plane of big cavity 11, when pressurized gas, two optical frames planes fit like a glove, and gas all flows to 29 li of floating pipe 19 and areolas just; Big cavity 11 be connected after hydraulic oil container 21 can add the ultrahigh vacuum seal circle with screw, to reach the requirement of taking out ultrahigh vacuum; Hydraulic drive piston 22,27 is welded on the floating pipe 19 and all installs the hydraulic seal circle; Hydraulic drive valving 26 is fixed on the floating pipe 19 and near piston 27, hydraulic pressure injects or flows out oil pipe from hydraulic oil injection or outflow opening 24 introducings on the hydraulic drive valving 26, hydraulic drive valving 26 should be tried one's best and do not accounted for the interior space of floating pipe 19, so that gas communication is in the inwall of the floating pipe of should packing into as far as possible; Areola 29 is identical with being connected of hydraulic oil container 21 with big cavity 11 with the connection of hydraulic oil container 21; Areola 29 is connected with water tank 37, the termination of areola 29 enter in the water tank 37 and with the inner side surface of water tank 37 on a plane, and with the circumference of the blade rotation of little turbo machine 38 in form minute surface; Areola 29 is with being connected of water tank 37 to add water proof rubber with screw fixedly connected; The blade of little turbo machine 38 is pressed close to termination and this minute surface of areola 29, little turbo machine 38 is fixed on 37 li in water tank, the center of rotation of little turbo machine 38 to depart from areola 29 the center so that gas enter in the water, the blade of little turbo machine 38 is except that preventing the inlet end women's head-ornaments that in vertical areola 29 termination face direction drainings the termination of blade is curved a bit so that draining prevents that water from entering this termination face outside slewing circle to sense of rotation; In actual manufacture process; should can insert a manger board at face place, the termination of areola 29; when little turbo machine 38 is shut down; water can not enter areola 29; this piece manger board also can be substituted by the blade of little turbo machine 38; when little turbo machine 38 was shut down, this blade is attached to prevented on areola 29 terminations that sealing enters.

The working principle of this ultrahigh vacuum pump is as follows: pipeline 1 by valve be evacuated container and be connected; When hydraulic-pressure pump will be extracted oil again from 24 injection oil out from 23, hydraulic oil promotes piston 27, driving floating pipe 19 moves to the right as shown in Figure 1, hydraulic drive valving 2 is pushed valve 10 open, valve 14 and 35 is then for closing, the gas that is evacuated in the container enters 11 li of big cavitys by valve 10, is opened to maximum up to big cavity 11; At this moment, hydraulic drive valving 2 injects by hydraulic oil or outflow opening 3 is extracted hydraulic oil out by oil pump, valve 10 is closed under the pulling force of elastic force, oil hydraulic pump will inject or outflow opening 24 extraction hydraulic oil by hydraulic oil simultaneously, inject or outflow opening 23 injection hydraulic oil from hydraulic oil again, hydraulic oil promotes piston 22 and moves to the left side as shown in Figure 1, hydraulic drive valving 26 injects hydraulic oil (oil pipe that Fig. 1 does not draw and connects) by oil hydraulic pump, back down valve 14 and 35 by piston rod 20 and 30, gas enters 29 li of areolas by floating pipe 19, is harmonious up to piston 12 minute surfaces and big cavity 11 minute surfaces; At this moment hydraulic drive valving 26 is discharged hydraulic oil by oil pump, throttle down 14 and 35 under the pulling force of spring 16 and 32, and extract out oily by 23 by oil hydraulic pump, inject oil by 24, floating pipe 19 is (shown in Figure 1) motion again to the right, drive piston 12,36 and 22 move to the right together, piston 36 is all pushed the gas of 29 li of areolas to little turbo machine 38 and is discharged into water, certainly when move in the right, valve 10 is opened, valve 14 and 35 is closed, floating pipe 19 constantly moves back and forth like this, push the gas that is evacuated in the container to little turbo machine, little turbo machine enters gas in the water of low water level, and gas is floating to be discharged in the atmosphere on the water surface of high water level; Big cavity 11, hydraulic oil container 21, areola 29 and water tank 37 are connected as a single entity as shown in Figure 1; Big cavity 11 is opened a mouth with hydraulic oil container 21 joints are middle, so that floating pipe 19 motions, opening and floating pipe are equipped with the ultrahigh vacuum rubber seal, and big cavity 11 is separated with hydraulic oil container 21; Hydraulic oil container 21 is divided into two by intermediate clapboard 25, opens a mouth in the middle of the dividing plate and allows floating pipe 19 move, and this opening and floating pipe can not flow the oil on both sides by the hydraulic seal seal with elastometic washer mutually; The joint middle opening of areola 29 and hydraulic oil container 21 is so that floating pipe 19 moves, and opening and floating pipe 19 separate areola 29 and hydraulic oil container 21 by the ultrahigh vacuum seal seal with elastometic washer; 37 li in water tank is inserted in the termination of areola 29, the termination face of areola 29 and water tank 37 join the side inner side surface at grade, and form minute surface (is minute surface) in the circle of little turbo machine 38 rotations.Little turbo machine 38 is installed in the water tank 37, the blade of little turbine will be pressed close to end face and the water tank inner side surface (requiring to be minute surface in little turbo machine 38 slewing circles) that areola 29 inserts water tank, the blade of little turbo machine 38 is closeer, the inclination angle of blade and surface of contact is smaller, when little turbo machine 38 quick rotation, water can not insert minute surface in the circle that little turbo machine 38 of the end face of water tanks and water tank rotates near areola 29.

The hydraulic method that ultrahigh vacuum pump 3 D compressed air gas entry of the present invention obtains ultrahigh vacuum is that 3 D compressed air is compressed entry, water can not enter 29 li of the areolas of distribution by little turbo machine 38 pressurized gas entry, the water surface that the gas of entry floats to high water level enters atmosphere, uses hydraulic pressure that the minute surface of two pressurized gass can be pressed and closely reaches micron number magnitude (10 ^-6M); The hydraulic drive valvings 26 that are fixed with 12,36 and two hydraulic pistons 22,27 of two pneumaticpistons and valve 14,35 and promotion valve 14 and 35 unlatchings on the floating pipe 19 all are fixed on the floating pipe 19; Promote this device side-to-side movement for hydraulic-pressure pump, by the hydraulic oil inlet or export 23,24 and discharge or inject hydraulic oil and realize; When floating pipe 19 when move in the right, hydraulic-pressure pump will be extracted the oil of left side fuel tank again out by hydraulic oil inlet or outflow opening 23 and by hydraulic oil injection or outflow opening 24 hydraulic oil be injected in the fuel tank of the right, hydraulic oil makes floating pipe 19 move to the right by promoting hydraulic piston 27, at this moment valve 10 is opened, valve 14 and 35 is closed, and is evacuated gas in the container and enters 11 li of big cavitys and reach maximum up to big cavity 11; When floating pipe 19 when move in the left side, hydraulic-pressure pump will inject or outflow opening 24 is extracted the right fuel tank oil out and injected by hydraulic oil again or outflow opening 23 injects hydraulic oil in the fuel tank of the left side by hydraulic oil, hydraulic oil promotes piston 22, and floating pipe 19 is moved to the left side; At this moment valve 10 is closed, valve 14 and 35 is opened, the all gas that big cavity is 11 li is arranged in areola 29 and floating pipe 19, (these two faces are minute surface when piston 12 and big cavity 11 left surfaces compress fully, and fit like a glove during compression, like this can be more with the gases row light of 11 li of big cavitys) time, floating pipe 19 moves right, valve 10 is opened, the gas that is evacuated in the container enters 11 li of big cavitys again, valve 14 and 35 is closed, piston 36 is pressed to little turbo machine 38 with the gas of 29 li of areolas and is all entered again in the water and (disregard the gas of 19 li of floating pipes), gas enters in the atmosphere to the water surface by the water of 37 li in water tank is floating again, and so just the gas that will be evacuated in the container has entered atmosphere; Floating pipe 19 like this about constantly motion back and forth, the gas of vacuum-pumping container constantly can be entered atmosphere, when areola 29 when move in the left side, enter 29 li of areolas if disregard gas from the leakage of areola 29 inwalls, then areola is zero vacuum for 29 li, in fact at this moment the degree of vacuum of 29 li of areolas is high, the prime that the extreme high vacuum degree occurred, the gas that is evacuated in the container will fast, in a large number, constantly be pressed into 29 li of areolas, constantly be entered to climb up on top of the water in the water by little turbo machine 38 again to enter in the atmosphere; Like this, the degree of vacuum that is evacuated container can reach ultrahigh vacuum even extreme high vacuum; If the cross-section area of big 11 li pistons 12 of cavity is S, the length of piston 12 operations is L, the cross-section area of 29 li pistons 36 of areola is S ', we calculate the condition of high vacuum degree that gas-discharging type high vacuum 3 D compressed air shown in Figure 2 can reach earlier, and then calculate desirable ultrahigh vacuum pump shown in Figure 1 and gas is entered the ultrahigh vacuum degree that can reach in the water; When the termination of areola piston 36 face is a minute surface, during the complete pressurized gas of areola piston 36 that right face also be minute surface, two minute surfaces will fit like a glove so that with the more discharges of gas; The gas that is evacuated in the container will enter in the atmosphere, and only the pressure that obtains after the piston 36 of 29 li of areolas compresses gas fully is greater than barometric pressure, and this gas just can be discharged from and enter in the atmosphere; And the pressure that piston 36 obtains after gas is compressed fully is when equaling barometric pressure, the final presure that this also is extracted into for this pump, i.e. this pump maximum vacuum that can be extracted into; If the ultimate vacuum of this pump is P, P is SL at big 11 li shared volumes of cavity, through floating pipe 19 left after the motion compresses, gas is discharged to 29 li of areolas, (gas that floating pipe is 19 li is disregarded), piston 36 is S ' d with the volume of these gas compressions, d is the termination face of piston 36 and the right come-at-able minimum range of that face, these two faces all are minute surface, d can reach the micron number magnitude, the pressure of the gas after compressing fully, (disregarding the gas of 19 li of floating pipes) equals barometric pressure

That is: $\frac{S\·L}{S^{\′}\·d}P=101323.2$

: $P=\frac{S^{\′}d}{S\·L}\×101323.2----\left(1\right)$

Claim

The vacuum raising factor for this vacuum pump, it is more little that the vacuum raising factor is worked as S ', d is more little, S is big more, L is big more, and it is just more little that vacuum improves the factor, also just be this pump ultimate vacuum high more, the final presure of vacuum pump is relevant with the volume size of pump in other words, and this is one of most important characteristic of the present invention; If with two such vacuum pump series connection, the vacuum of establishing another vacuum pump improves the factor and is

S ₁Be big cavity 11 piston cross-section areas, S ₁' be areola 29 piston cross-section areas, d ₁' be S ₁' with right face compression minimum range, L ₁Be S ₁Running length; Be connected on the back level of above-mentioned vacuum pump, because this vacuum pump can accomplish not take place backflowing of gas, this is that all gas-jet vacuum pumps are not all accomplished (gas-jet vacuum pump refers to arrange vacuum pump in the atmosphere with being evacuated gas in the container) at present; The P of formula (1) just is the backing pressuring of back level pump, so the final presure P ' that this back level vacuum pump can be extracted into $P^{\′}=\frac{S_1^1{d}_1^{\′}}{S_1{L}_1}P=\frac{S_1^1{d}_1^{\′}}{S_1{L}_1}\·\frac{S^{\′}d}{\mathrm{SL}}\×101323.2----\left(2\right)$

That is: the vacuum of two this vacuum pump series connection improves the product that the factor is these two vacuum pump vacuum raising factors; Method with this vacuum pump series connection can make the degree of vacuum of being taken out container reach ultrahigh vacuum even higher degree of vacuum.

Desirable ultrahigh vacuum pump as shown in Figure 1, enough near as long as the blade of little turbo machine is pressed close to the minute surface that the termination face of areola 29 formed, little turbo machine 38 rotating speeds are also higher, can realize that the minute surface that this end face is formed does not have water to enter, and realize dry; The gas of piston 36 pushing is all entered in the water of low water level by little turbo machine 38, gas again in the water the floating water surface to high water level enter in the atmosphere; Like this at piston 36 when move in the left side, if do not consider that gas penetrates into 29 li of areolas from the inwall of areola 29, then areola 29 can be seen absolute vacuum as, in fact the degree of vacuum in the areola is high; The gas of being taken out like this in the container just constantly is pressed into 29 li of areolas apace, constantly be pushed to the blade of little turbo machine 38 again, constantly be discharged in the water again, constantly floating again enters in the atmosphere on water tank 37 waters surface again, and this pump is discharged gas, all equally get rid of for any gas in the atmosphere, this is that present ultra-high vacuum system and extreme high vacuum system are not accomplished for hydrogen and very difficult eliminating of helium; So this pump shown in Figure 1 can reach ultrahigh vacuum or extreme high vacuum from the pressure that barometric pressure is extracted in the container always with the gas in the container, and pumping speed is very big, the expense that vacuumizes is also obviously very low, these all are that all vacuum pumps are inaccessiable at present, this vacuum pump will substitute all vacuum pumps at present, is desirable vacuum pump.

The present invention compares with prior art equipment, have following advantage and beneficial effect: (1) the present invention realizes that ultrahigh vacuum is that air is pushed in the water of low water level, enter on the water surface that gas in the water floats to high water level and be discharged into atmosphere, little turbo machine keeps water and aqueous vapor can not enter the areola of exhaust; (2) raising of degree of vacuum of the present invention does not lie in compression one dimension length dimension, and is the compress three-dimensional dimension, thereby makes the multiple that degree of vacuum improves increases two-dimentional dimension (wide and high) product ratio; (3) owing to being the power of pump with hydraulic pressure, make the compresses in length dimension can reach the above dimension of micron, thereby improve the pressure of pressurized gas greatly, this is inaccessiable by other power; (4) can begin up to ultrahigh vacuum from barometric pressure, and the amount of taking out is big; (5) do not have gas to backflow, and pump structure improves the sealing of pump greatly, cleaning in the pump; (6) compare than other pump that can reach ultrahigh vacuum, manufacturing is simple, cost is low.

(4) description of drawings:

Below Figure of description is further specified as follows: Fig. 1 is the structural representation of desirable ultrahigh vacuum pump; Fig. 2 is the structural representation of gas-discharging type high vacuum pump.Among each figure: 1 is the vacuum pipe of belt switch, and 2,26,46 is the hydraulic drive valving, and 3,23,24,47 are hydraulic oil injection or outflow opening; 4,22,27,45 is hydraulic piston, a plurality of hydraulic seal rubber rings of cover on each piston; 5,20,30,44 is piston rod; 6,17,31,43 is the spring pull bar, holds the other end of spring; 7,16,32,42 is spring, and spring will reach when the valve closing the pulling force of valve, and gas can not enter; 8,13,34,41 is the movable loop bar of valve, and this loop bar is fixed on the tube wall, and motion is finished out and closed to support piston; 9,15,33,40 for being fixed on the bar on the valve, and piston rod promotes this bar and makes valve open; 10,14,35,39 is valve, and valve is made of metal, and a plurality of ultrahigh vacuum viton seal rings are housed on it; 11 and 29 are respectively big areola; 12 and 36 is pneumaticpiston, and a plurality of ultrahigh vacuum viton seal rings are housed on the piston; 18 is the opening that big cavity 11 links to each other with hydraulic fluid chamber 21, so that floating pipe 19 translation back and forth, this opening has the ultrahigh vacuum seal circle to make big cavity 11 and hydraulic fluid chamber 21 also keep separating when pipeline moves back and forth; 19 is floating pipe, pneumaticpiston 12,36, and hydraulic piston 22,27,45, valve 14,35, hydraulic drive valving 26 all are fixedly mounted on this floating pipe 19; 21 is hydraulic fluid chamber, is divided into two oil pockets by intermediate clapboard 25; 25 is the hydraulic oil container intermediate clapboard, the dividing plate middle opening is so that floating pipe 19 moves back and forth, this opening and floating pipe 19 have the hydraulic seal seal with elastometic washer, two limit oil can not leaked mutually, 28 for the opening connecting part of areola 29 and hydraulic oil container 21 so that piston pipeline 19 moves back and forth, and have the ultrahigh vacuum seal circle that areola and hydraulic oil container are separated; 29 is areola, and 36 is the piston in the areola, is with a plurality of ultrahigh vacuum seal circles on this piston, and this piston end face is a minute surface; 37 are the upper shed water tank, and 38 is little turbine, and 48 is the atmosphere screen pipe.

(5) embodiment:

The inventor is through years of researches and test, think and realize that optimal way of the present invention can be as follows: (1) presses Fig. 1 or design shown in Figure 2, manufacturing or choose each parts, for example: pipeline 1, hydraulic oil injects or outflow opening 3,23,24,47, hydraulic drive valving 2,26,46, piston rod 5,20,30,44, spring pull bar 6,17,31,43, the movable loop bar 8 of valve, 13,34,41, valve 10,14,35,39, cavity 11,29, hydraulic fluid chamber 21, piston 4,22,27,45,12,36, floating pipe 19, cavity partition 25 grades all can be selected for use and be applicable to the ultra-high vacuum system stainless steel material, adopt high-precision machine-tooled method processing and refining to form; Piston 4,22,27,45 all is with a plurality of O type hydraulic seal circles outward; Piston 12 and 36 is the special-purpose viton seal rings of a plurality of O type ultrahigh vacuum that close specification of overcoat all, and the piston 12 that requires to be equipped with the seal ring of O type fluorine rubber all should be that optical mirror plane contacts with 36 with the surface of contact of cavity 11 and 29 pressurized gass; (2) manufacturing or chosen each parts after, again by Fig. 1 or shown in Figure 2 and above described each component locations of specification and interconnected relationship connection is installed, just can realize desirable ultrahigh vacuum pump of the present invention preferably; (3) operate by the hydraulic method of described ultrahigh vacuum pump of the present invention of top specification and 3 D compressed air entry then, just can realize the inventive method preferably; (4) implementation process it should be noted: 1 pipeline for the band valve, pipeline left end are taken out container with quilt and are linked to each other.Little turbo machine can be made blade type, also can make circular plate type, it is identical with general turbo machine to make blade type, blade than comparatively dense and be close to nearly water tank that comprise the inner side surface (requiring this inner side surface in the blade rotational circle of little turbine, to be minute surface) of areola 29 termination faces.For anti-sealing enters from parallel this inner side surface, can the blade end points along the blade rotation direction more partially, play the effect of draining outside little turbine rotation circumference.Make circular plate type, the blade that little turbine changes is substituted by a single face minute surface plectane, bores many apertures identical with blade lean on this plectane, and more greatly, the aperture that contacts with water is littler facing to the minute surface place for aperture.A circumferential band is formed in these holes.The width of band is just in the inner radius of areola 29 termination faces.When the plectane fast rotational, the gas that areola is 29 li can enter in the water from these apertures, and water can not enter.This circular plate type is more quite a lot of than blade type sealing, but air displacement is good not as blade type; The serial connection of two high vacuum pumps realizes ultrahigh vacuum pump: pump as shown in Figure 2, and two such pump serial connections, the air-filtering pipeline 48 that is serially connected in the back pump is not wanted.The size of getting two pumps for convenience of calculation is the same.Getting big cavity radius is 40cm, the areola inside radius is 1cm, and piston running length L=50cm is owing to use hydraulic pressure, make the minute surface of pressurized gas piston can reach micron (this is that other power transmission is inaccessiable near distance), get d=10 with that minute surface that faces toward is approaching ^-6M is got by formula (1);

By such pump, the degree of vacuum that is evacuated container can be reached 1.27 * 10 ^-4Handkerchief.If two such pump serial connections, the final presure that must be connected in series pump by formula (2) is: 1.26 * 10 ^-13Handkerchief.Being connected in series two pumps realizes ultrahigh vacuum even more should note during high vacuum, when being evacuated container and reaching high vacuum, be about to begin and control the valve 39 of two pumps, only opening at pressurized gas piston 36 of valve 39 just opened during near maximum compression, in order to avoid gas backflows, realize ultrahigh vacuum even extreme high vacuum.

Claims (2)

1, a kind of ultrahigh vacuum pump, it is characterized in that: it is by the vacuum pipe (1) of belt switch, hydraulic drive valving (2), (26), (46), hydraulic oil injects or outflow opening (3), (23), (24), (47), hydraulic piston (4), (22), (27), (45), piston rod (5), (20), (30), (44), spring pull bar (6), (17), (31), (43), spring (7), (16), (32), (40), the movable loop bar (8) of valve, (13), (34), (41), be fixed on the bar (9) on the valve, (15), (33), (40), valve (10), (14), (35), (39), big cavity (11), pneumaticpiston (12), (36), the opening (18) that big cavity (11) links to each other with hydraulic fluid chamber (21), floating pipe (19), hydraulic fluid chamber (21), hydraulic oil container intermediate clapboard (25), areola (29) and hydraulic oil container (21) opening (28), areola (29), upper shed water tank (37), little turbo machine (38), the common installation of atmosphere screen pipe (48) connects and composes, its mutual alignment and interconnected relationship are: the pipeline the other end of belt switch vacuum pipe (1) be evacuated container and be connected; Hydraulic drive valving (2) is fixed on the outer wall of pipeline after loading onto the ultrahigh vacuum seal rubber ring by screw, and hydraulic oil injects or the hydraulic oil injection or the outflow opening of outflow opening (3), (23), (24), (41) and hydraulic drive valving (26) are connected with oil hydraulic pump; Hydraulic piston (4) welds mutually with piston rod (5); Spring pull bar (6) is welded on the inwall of pipeline; The push rod of valve (9), (15), (33), (44) all are welded on the corresponding valve respectively; The movable loop bar (8) of valve, the bar of loop bar is welded on the inwall of pipeline; Spring pull bar (17), (31) all are welded on the inwall of floating pipe (19); Pneumaticpiston (12) is fixed on the floating pipe (19), and pneumaticpiston (12) is gone up a plurality of ultrahigh vacuum seal fluorine rubber rings is installed, means of fixation is multiple, as long as guarantee the optical frames plane of gas piston (12) and the optical frames plane of big cavity (11), when pressurized gas, two optical frames planes fit like a glove, and gas all flows to floating pipe (19) and areola (29) lining just; Big cavity (11) be connected after hydraulic oil container (21) can add the ultrahigh vacuum seal circle with screw; Hydraulic drive piston (22), (27) are welded on floating pipe (19) and go up and all install the hydraulic seal circle; Hydraulic drive valving (26) is fixed on the floating pipe (19) and near piston (27), hydraulic drive valving (26) is gone up hydraulic pressure and is injected oil pipe from hydraulic oil injection or outflow opening (24) introducing, hydraulic drive valving (26) should be tried one's best and do not accounted for the interior space of floating pipe (19), in the inwall of the floating pipe of should as far as possible packing into; Areola (29) is identical with being connected of hydraulic oil container (21) with big cavity (11) with the connection of hydraulic oil container (21); Areola (29) is connected with water tank (37), the termination of areola (29) enter in the water tank (37) and with the inner side surface of water tank (37) on a plane, and with the circumference of the blade rotation of little turbo machine (38) in form minute surface; Areola (29) is with being connected of water tank (37) to add water proof rubber with screw fixedly connected; The blade of little turbo machine (38) is pressed close to termination and this minute surface of areola (29), little turbo machine (38) is fixed on water tank (37) lining, the center of rotation of little turbo machine (38) will depart from the center of areola (29), the blade of little turbo machine (38) is except that preventing the inlet end women's head-ornaments that in vertical areola (29) termination face direction draining the termination of blade is a little curved along sense of rotation.

2, by the described a kind of ultrahigh vacuum pump of claim 1, the hydraulic method of its 3 D compressed air entry, it is characterized in that: 3 D compressed air compression entry, water can not enter in the areola of exhaust by little turbo machine (38) pressurized gas entry, the water surface that the gas of entry floats to high water level enters atmosphere, uses hydraulic pressure that the minute surface of two pressurized gass can be pressed and closely reaches the micron number magnitude; The hydraulic drive valving (26) that is fixed with two pneumaticpistons (12), (36) and two hydraulic pistons (22), (27) and valve (14), (35) and promotion valve (14) and (35) unlatching on the floating pipe (19) all is fixed on the floating pipe (19); What promote this device side-to-side movement is hydraulic-pressure pump, realizes by hydraulic oil inlet or outlet (23), (24) discharge or injection hydraulic oil; When floating pipe (19) when move in the right, hydraulic-pressure pump will be extracted the oil of left side fuel tank again out by hydraulic oil inlet or outflow opening (23) and by hydraulic oil injection or outflow opening (24) hydraulic oil be injected in the fuel tank of the right, hydraulic oil makes floating pipe (19) move to the right by promoting hydraulic piston (27), at this moment valve (10) is opened, valve (14) and (35) are closed, and are evacuated gas in the container and enter big cavity (11) lining and reach maximum up to big cavity (11); When floating pipe (19) when move in the left side, hydraulic-pressure pump will inject or outflow opening (24) is extracted the right fuel tank oil out and injected by hydraulic oil again or outflow opening (23) injects hydraulic oil in the fuel tank of the left side by hydraulic oil, hydraulic oil promotes piston (22), and floating pipe (19) is moved to the left side; At this moment valve (10) is closed, open valve (14) and (35), the all gas of big cavity (11) lining is arranged advance areola (29) and floating pipe (19) lining, when piston (12) compresses fully with big cavity (11) left surface, floating pipe (19) moves right, valve (10) is opened, the gas that is evacuated in the container enters big cavity (11) lining again, valve (14) and (35) are closed, piston (36) is pressed to little turbo machine (38) with the gas of areola (29) lining and is all entered in the water again, gas enters in the atmosphere to the water surface by the water of water tank (37) lining is floating again, and so just the gas that will be evacuated in the container has entered atmosphere; Constantly motion back and forth about floating pipe (19) is such, the gas of vacuum-pumping container constantly can be entered atmosphere, when areola (29) when move in the left side, enter areola (29) lining if disregard gas from the leakage of areola (29) inwall, then areola (29) lining is zero vacuum, in fact at this moment the degree of vacuum of areola (29) lining is high, the prime that the extreme high vacuum degree occurred, the gas that is evacuated in the container will fast, in a large number, constantly be pressed into areola (29) lining, constantly enter water by little turbo machine (38) again and climb up on top of the water and enter in the atmosphere; Like this, the degree of vacuum that is evacuated container can reach ultrahigh vacuum even extreme high vacuum; If the cross-section area of big cavity (11) lining piston (12) is S, the length of piston (12) operation is L, the cross-section area of areola (29) lining piston (36) is S ', we calculate the condition of high vacuum degree that gas-discharging type high vacuum 3 D compressed air can reach earlier, and then calculate desirable ultrahigh vacuum pump and gas is entered the ultrahigh vacuum degree that can reach in the water; When the termination face of areola piston (36) is a minute surface, areola piston (36) fully during pressurized gas that right face also be minute surface, two minute surfaces will fit like a glove so that with the more discharges of gas; The gas that is evacuated in the container will enter in the atmosphere, and only the pressure that obtains after the piston (36) of areola (29) lining compresses gas fully is greater than barometric pressure, and this gas just can be discharged from and enter in the atmosphere; And the pressure that piston (36) obtains after gas is compressed fully is when equaling barometric pressure, the final presure that this also is extracted into for this pump, i.e. this pump maximum vacuum that can be extracted into; If the ultimate vacuum of this pump is P, P is at big cavity, (11) the shared volume in lining is SL, through floating pipe, (19) left after the motion compresses, gas is discharged to areola, (29) lining, (gas that floating pipe is 19 li is disregarded), piston, (36) volume with these gas compressions is S ' d, d is the termination face of piston 36 and the right come-at-able minimum range of that face, these two faces all are minute surface, d can reach the micron number magnitude, the pressure of the gas after compressing fully, (disregarding the gas of 19 li of floating pipes) equals barometric pressure

Promptly $\frac{S\·L}{S^{\′}\·d}P=101323.2$ : $P=\frac{S^{\′}\·d}{S\·L}\×101323.2----\left(1\right)$

Claim

The vacuum raising factor for this vacuum pump, it is more little that the vacuum raising factor is worked as S ', d is more little, S is big more, L is big more, and it is just more little that vacuum improves the factor, also just be this pump ultimate vacuum high more, the final presure of vacuum pump is relevant with the volume size of pump in other words, and this is one of most important characteristic of the present invention; If with two such vacuum pump series connection, the vacuum of establishing another vacuum pump improves the factor and is

S ₁Be big cavity 11 piston cross-section areas, S ₁' be areola 29 piston cross-section areas, d ₁Be S ₁' with right face compression minimum range, L ₁Be S ₁Running length; Be connected on the back level of above-mentioned vacuum pump, because this vacuum pump can accomplish not take place backflowing of gas, this is that all gas-jet vacuum pumps are not all accomplished at present, and the P of formula (1) just is the backing pressuring of back level pump, so the final presure P ' that this back level vacuum pump can be extracted into $P^{\′}=\frac{S_1^1{d}_1^{\′}}{S_1{L}_1}P=\frac{S_1^1{d}_1^{\′}}{S_1{L}_1}\·\frac{S^{\′}d}{\mathrm{SL}}\×101323.2----\left(2\right)$

That is: the vacuum of two this vacuum pump series connection improves the product that the factor is these two vacuum pump vacuum raising factors; Method with this vacuum pump series connection can make the degree of vacuum of being taken out container reach ultrahigh vacuum even higher degree of vacuum.