JPH067291Y2 - レーザ干渉測定装置 - Google Patents

レーザ干渉測定装置

Info

Publication number
JPH067291Y2
JPH067291Y2 JP16103088U JP16103088U JPH067291Y2 JP H067291 Y2 JPH067291 Y2 JP H067291Y2 JP 16103088 U JP16103088 U JP 16103088U JP 16103088 U JP16103088 U JP 16103088U JP H067291 Y2 JPH067291 Y2 JP H067291Y2
Authority
JP
Japan
Prior art keywords
light
reflected
transmitted light
beam splitter
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16103088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0281408U (xx
Inventor
充夫 後藤
吉久 谷村
俊郎 黒澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP16103088U priority Critical patent/JPH067291Y2/ja
Publication of JPH0281408U publication Critical patent/JPH0281408U/ja
Application granted granted Critical
Publication of JPH067291Y2 publication Critical patent/JPH067291Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP16103088U 1988-12-12 1988-12-12 レーザ干渉測定装置 Expired - Lifetime JPH067291Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16103088U JPH067291Y2 (ja) 1988-12-12 1988-12-12 レーザ干渉測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16103088U JPH067291Y2 (ja) 1988-12-12 1988-12-12 レーザ干渉測定装置

Publications (2)

Publication Number Publication Date
JPH0281408U JPH0281408U (xx) 1990-06-22
JPH067291Y2 true JPH067291Y2 (ja) 1994-02-23

Family

ID=31443619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16103088U Expired - Lifetime JPH067291Y2 (ja) 1988-12-12 1988-12-12 レーザ干渉測定装置

Country Status (1)

Country Link
JP (1) JPH067291Y2 (xx)

Also Published As

Publication number Publication date
JPH0281408U (xx) 1990-06-22

Similar Documents

Publication Publication Date Title
EP0513305B1 (en) Apparatus for the measurement of surface shape
CN110285761B (zh) 一种结构紧凑的光栅三维位移测量装置
US8477317B2 (en) Position measuring arrangement
JPH067291Y2 (ja) レーザ干渉測定装置
JPH10332354A (ja) 干渉測定装置
US4395123A (en) Interferometric angle monitor
ES2232967T3 (es) Dispositivo de medicion interferometrica para la medicion de la forma en superficies rugosas.
US5471302A (en) Interferometric probe for distance measurement utilizing a diffraction reflecting element as a reference surface
JPS6355035B2 (xx)
JP2823112B2 (ja) 測距儀
JP2517929Y2 (ja) 分離型レ−ザ干渉計
SU1043486A1 (ru) Устройство дл измерени углового перемещени объекта
JPS6041287B2 (ja) 微小角測定方法
JP3061160B2 (ja) レーザ干渉変位測定装置
JPS6029684Y2 (ja) 光学的微小変位測定装置
JP2002508838A (ja) 干渉測定装置
JPH0612243B2 (ja) 座標測定装置
JP2000088513A (ja) 非球面波発生レンズ系組立調整装置
JPS6484104A (en) Laser interference length measuring machine
JP2000121322A (ja) レーザ測長器
SU1569532A1 (ru) Устройство дл измерени шероховатости
SU1227948A1 (ru) Интерферометр дл измерени перемещений
SU1441190A1 (ru) Интерференционное устройство дл измерени малых перемещений
JP2725746B2 (ja) 干渉計
JP2780868B2 (ja) 放散的に反射する対象物の表面輪郭を決定する方法および装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term