JPH0672198U - Heater lamp for liquid heating - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a heater lamp for heating liquid such as washing water or chemical liquid, which has excellent heat efficiency, high work efficiency, is easy to work and easy to handle. [Structure] A tubular halogen bulb 1 having a ceramic layer containing a black pigment formed on the bulb surface is arranged in a quartz outer bulb 2 to increase the radiant intensity of far infrared rays, and extend from both ends of the halogen bulb 1. Connect the pair of lead wires 31 and 32 to the outer tube 2.
It is led out from one of the openings 21 and is fixed to the opening of the outer tube 2.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a heater lamp for heating liquids such as pure water for cleaning and various etching chemicals such as a cleaning device and a wet etching device in a semiconductor manufacturing process.

[0002]

[Prior art]

 In the recent semiconductor manufacturing process, as the degree of integration of semiconductors has increased, the importance of cleaning technology for removing contaminants such as dopant elements, heavy metal elements, constituent elements of etching and cleaning liquids, organic contaminants, and particles has also increased. ing. Typical cleaning steps are initial cleaning, pre-oxidation cleaning, pre-diffusion cleaning, pre-filming cleaning, resist stripping cleaning, etc.The contents to be removed differ slightly depending on the process, but the cleaning water is used initially. From the ion-exchanged water that has been used, water called ultrapure water, which is close to the theoretical value, has come to be used, contributing to the improvement of yield and miniaturization. In addition, recently, bacterial corpses and even ionic contamination from materials have become a problem.Therefore, transparent quartz, which contains almost no contaminants, is used as a material for cleaning equipment that comes into direct contact with cleaning water. Is being used.

In such a cleaning process, if the cleaning water is heated to warm water, the cleaning effect is greatly increased. For example, it is known that when the temperature of pure water is raised from 30 ° C to 50 ° C, the solubility of contaminants is tripled. Therefore, the wash water is often heated by a dedicated heater lamp. Further, not only cleaning water but also SiO ₂ etching performed for forming an opening for selective diffusion or forming a contact hole, for example, an etching chemical solution composed of a mixture of HF, NH ₄ F and H ₂ O is used. Although used, the chemical solution is also heated to the optimum temperature by a heater lamp similar to the heater lamp for heating the wash water.

[0004]

The heater used for this purpose is a double tube type in which a heater is placed in an outer tube made of quartz, and a quartz solution filled with cleaning water or a chemical solution is used. Although it is placed in a tank to heat it, the heater itself, which is the heat source, uses a heater lamp consisting of a nichrome wire heater or a tubular halogen bulb. Here, since the nichrome wire heater has a low temperature rise during heating and its thermal efficiency is not so high, a heater lamp is often used as a heat source.

On the other hand, a heater lamp composed of a halogen bulb has a faster temperature rise at the time of heating and is superior in thermal efficiency to the nichrome wire heater, but has higher brightness than the nichrome wire heater, and an outer tube or a liquid tank. Since it is made of transparent quartz, it is difficult to operate because it is dazzling when it is lit. Also, the synthetic resin member for installing the liquid tank is directly irradiated with visible light or near infrared rays, so the synthetic resin member May be adversely affected and deteriorate in a short period of time.

Next, a heater lamp composed of a halogen bulb is superior in thermal efficiency to a nichrome wire heater, but emits a large amount of visible light or near infrared light and is far infrared light that matches the absorption wavelength band of pure water or a chemical solution. The amount of radiation is not necessarily large, and it is necessary to further improve the thermal efficiency in order to shorten the heating time and improve the working efficiency. In addition, the lead wires extending from both ends of the heater lamp consisting of a tubular halogen light bulb extend from the openings at both ends of the outer tube, which makes it difficult to handle.

[0007] Therefore, an object of the present invention is to provide a heater lamp for heating liquid such as cleaning water or chemical liquid, which has excellent thermal efficiency, high working efficiency, and is easy to work and easy to handle.

[0008]

[Means for Solving the Problems]

 In order to achieve such an object, the heater lamp for liquid heating of the present invention has a tube-shaped halogen bulb in which a ceramic layer containing black pigment is formed on the surface of a bulb, which is arranged in a quartz outer bulb. A pair of lead wires extending from both ends are led out from one opening of the outer tube and fixed to the opening of the outer tube.

[0009]

[Action]

 Since the ceramic layer containing black pigment is formed on the bulb surface of the tubular halogen bulb, the radiation amount of far infrared rays matching the absorption wavelength band of pure water and chemicals is increased to improve the thermal efficiency and work efficiency. , The glare at the time of lighting is eliminated, and the work becomes easier. Also, since a pair of lead wires extending from both ends of the halogen bulb are led out from one opening of the outer tube and fixed to the opening of the outer tube, there is an advantage that handling is easy.

Next, as described in claim 2, when the shape of the outer tube is made to include at least one L-shaped portion and the halogen bulb is arranged at the bottom of this L-shaped portion, the heat source becomes Since a halogen bulb can be located at the bottom of the liquid tank, the liquid can be heated efficiently.

[0011]

【Example】

 The present invention will be described in detail below with reference to the embodiments shown in the drawings. In FIG. 1, the outer tube 2 is made of a quartz tube having an extremely low content of impurities so that no contaminants are generated from the outer tube 2. The outer tube 2 has an opening 21 at one end. Although it may be a straight pipe type, in this embodiment, it is bent at a right angle at two places and has a shape having two L-shaped portions. A tubular halogen bulb 1 is arranged at the bottom 22 of the front L-shaped portion.

The halogen bulb 1 has a power consumption of 1000 W, and as shown in FIG. 2, a pressure sealing portion 12 is formed at both ends of a quartz bulb 11 having a tube diameter of 10 mm. A filament 15 in which a tungsten wire is wound around a coil is arranged in the valve 11, and an inert gas is enclosed together with a trace amount of halogen gas. The molybdenum foil 13 embedded in the crimping and sealing portion 12 is welded to the lead portion obtained by stretching both ends of the filament 15, and one end of the external lead rod 14 is welded and extended from the crimping and sealing portion 12. .

On the surface of the bulb 11, a ceramic layer 16 containing a black pigment having a film thickness of about 100 μm is formed as shown by a dotted line for convenience. The ceramic layer 16 is a mixture of silica-based or alumina-based ceramic with about 15% by weight of black copper oxide as a black pigment, and the solution of the mixture is coated on the surface of the valve 11. It is formed by firing.

Next, as shown in FIG. 1, a pair of lead wires 31, 32 are connected to both ends of the halogen bulb 1. The lead wires 31, 32 are opened by the silicon cap 4 in the opening 21 of the outer tube 2. It is fixed to and is led out from the opening 21. That is, the pair of lead wires 31 and 32 are not led out from the openings at both ends of the outer tube 2, but are led out from one opening.

When using the heater lamp for heating a liquid having such a structure, however, the halogen lamp 1 is lit by arranging the heater lamp in a quartz liquid tank 5 filled with a liquid such as cleaning water or a chemical liquid. At this time, since the ceramic layer 16 containing the black pigment is formed on the surface of the bulb 11, the emission wavelength is displaced to the far infrared side, and the emission wavelength peak becomes 3 to 5 μm. Therefore, the radiant intensity of far-infrared rays that matches the absorption wavelength band of pure water or chemicals is 2-3 times that of a normal halogen bulb, and the thermal efficiency is improved and the heating time can be shortened by about 10%. The work efficiency is improved. Further, in this embodiment, since the halogen bulb 1 is arranged at the bottom 22 of the L-shaped portion of the outer tube 2 and located at the bottom of the liquid tank 5, the liquid can be efficiently heated.

Further, since the ceramic layer 16 containing the black pigment diffuses light, it has a great anti-glare effect. Even if the outer tube 2 and the liquid tank 5 are made of transparent quartz, it is not dazzling and the work is easy to perform. It In addition, a synthetic resin member (not shown) for installing the liquid tank 5 is not adversely affected. Since the pair of lead wires 31, 32 extending from both ends of the halogen bulb 1 are led out from one opening 21 of the outer tube 2, there is an advantage that the handling is easy.

[0017]

[Effect of device]

 As described above, in the liquid heating heater lamp of the present invention, the ceramic layer containing the black pigment is formed on the bulb surface of the tubular halogen light bulb, and the pair of lead wires extending from both ends of the halogen bulb is connected to the outer bulb. Since it is derived from one of the openings, the radiation amount of far infrared rays that match the absorption wavelength band of pure water or chemicals is increased to improve thermal efficiency, and the glare during lighting is eliminated and work can be performed easily. Moreover, the heater lamp for liquid heating can be easily handled.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of the present invention.

FIG. 2 is a sectional view of a halogen bulb.

[Explanation of symbols]

 1 Halogen bulb 11 Bulb 15 Filament 16 Ceramic layer containing black pigment 2 Outer tube 21 Opening of outer tube 22 Bottom of L-shaped part of outer tube 31,32 Lead wire 4 Silicon cap 5 Liquid tank

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Akira Satomi 1194 Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd. Within

Claims (2)

[Scope of utility model registration request] 1. A tubular halogen light bulb, in which a ceramic layer containing a black pigment is formed on the surface of a bulb, is arranged in a quartz outer bulb, and a pair of lead wires extending from both ends of the halogen bulb has one opening of the outer bulb. A heater lamp for heating liquid, characterized in that the heater lamp is drawn out from and fixed to the opening. 2. The heater for liquid heating according to claim 1, wherein the outer tube includes at least one L-shaped portion, and the halogen bulb is arranged at a bottom portion of the L-shaped portion. lamp.