JP2000111155A - Liquid heater - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid heater which is effective for reduction of manufacture cost and rise of safety. SOLUTION: A lamp heater 14 is arranged over liquid 10. By such structure, even if a liquid storage container 12 for accommodating the liquid 10 breaks, the liquid 10 flows out downward, so this liquid heater can prevent the contact between the liquid 10 and the lamp heater 14, The lamp heater 14 and the liquid storage container 12 are arranged within reflecting member 20. By such structure, a great part of light emitted from the lamp heater 14 is irradiated with the liquid 10, so the heating efficiency can be raised by the conduction of radiative heat. For example, a halogen lamp and a quartz U-shaped pipe are arranged within an outer tube, and isopropyl alcohol is let flow in this quartz U-shaped pipe, and the isopropyl alcohol having flown in is heated with the light of the halogen lamp.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid heating apparatus, and more particularly, to a liquid heating apparatus that is effective for reducing manufacturing costs and improving safety.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, formation of a resist pattern by photolithography is performed in three steps of resist application, exposure, and development. Then, the semiconductor substrate is etched using the resist pattern formed by performing these steps as a mask, and after the etching is completed, the resist pattern is peeled off using an organic solvent.

As described above, when a resist pattern is stripped using an organic solvent, the temperature of the organic solvent to be stripped is raised to, for example, nearly 80 degrees.

As a means for adjusting the temperature of the organic solvent, a technique of heating the organic solvent using radiant heat of a lamp has been conventionally known. For example, a heating technique using a double-tube structure including an inner tube containing a lamp and an outer tube surrounding the inner tube is known. In this technique, an organic solvent is filled between an inner tube and an outer tube, and the organic solvent is heated by light emitted from a lamp.

According to such a double tube structure, most of the light emitted from the lamp is absorbed by the organic solvent, so that a device having high heating efficiency can be constructed.

[0006]

However, the double tube structure as described above has a problem that the heating efficiency is high, but the manufacturing cost is high due to the complicated structure.

Further, when the inner tube serving as the interface between the organic solvent and the lamp is broken, the organic solvent flows out of the inner tube and comes into contact with the lamp, possibly causing ignition.

As a technique which does not easily cause the above-described problems, there is a heating apparatus described in Japanese Utility Model Laid-Open No. 59-138232. This heating device has a structure in which a heater is provided below a container containing an organic solvent via a glass plate.

However, in the above structure, when the container containing the organic solvent is damaged, the glass plate is damaged by the broken pieces, and the organic solvent may leak from the damaged portion and come into contact with the heater. .

[0010] As described above, the prior art has a problem in the manufacturing cost and the safety of the apparatus. Therefore, a technique for solving such a problem has been demanded.

Accordingly, an object of the present invention is to provide a liquid heating device that is effective for reducing manufacturing costs and improving safety.

[0012]

In order to achieve the above object, the invention according to claim 1 is characterized in that the liquid (10) is irradiated with light.
In a liquid heating device for heating a liquid, a translucent liquid container (12) for containing the liquid (10) and a liquid container (12) which are separately disposed above the liquid container (12). And a lamp heater (14) for irradiating light to the liquid (10) accommodated therein.

According to a second aspect of the present invention, in a liquid heating apparatus for heating a liquid (10) by light irradiation, a light-transmissive liquid container (12) for storing the liquid (10).
A lamp heater (14) disposed around the liquid container (12) and irradiating the liquid (10) contained in the liquid container (12) with light; and a lamp heater (14). And a reflector (20) surrounding the lamp heater (14) and reflecting light emitted by the lamp heater (14) toward the liquid container (12).

According to a third aspect of the present invention, in a liquid heating apparatus for heating a liquid (10) by light irradiation, a light-transmissive liquid container (12) for storing the liquid (10).
A lamp heater (14) disposed above the liquid storage container (12) for irradiating light to the liquid (10) stored in the liquid storage container (12); and the liquid storage container (12). And surrounding said lamp heater (14),
A reflecting member (20) for reflecting light emitted by the lamp heater (14) toward the liquid container (12).

[0015]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

(Summary of the Invention) A feature of the present invention resides in that the lamp heater 14 is disposed above the liquid 10. With such a structure, even if the liquid storage container 12 that stores the liquid 10 is broken, the liquid 10 flows downward, so that contact between the liquid 10 and the lamp heater 14 can be prevented (see FIG. 1). .

The second feature of the present invention is that the lamp heater 1
4 and the liquid container 12 are disposed inside the reflection member 20. With such a structure, the lamp heater 1
Since most of the light emitted by 4 is irradiated on the liquid 10,
Heating efficiency can be improved by radiant heat transfer (see FIG. 2).

(First Embodiment) FIG. 1 is a conceptual diagram showing a first embodiment of a liquid heating apparatus according to the present invention. Hereinafter, the configuration of the first embodiment of the present invention will be described with reference to FIG.

The liquid 10 is an object to be heated by the liquid heating apparatus according to the present invention, and the heated liquid 10 is used as, for example, a resist pattern peeling or other processing solvent. In particular, when the liquid 10 is an organic liquid having a low flash point such as isopropyl alcohol, the effect of the present invention is remarkably exhibited.

The liquid container 12 is a translucent container for storing the liquid 10, and is formed of, for example, quartz glass. The liquid container 12 can be formed in various shapes such as a straight pipe, a U-shaped pipe, a meandering pipe, or a container containing a partition plate, in addition to the one shown in FIG. When the liquid container 12 is formed in a tubular shape, the production cost can be reduced by using a commercially available quartz glass tube of a standard size.

The lamp heater 14 is a heat source of the liquid heating device according to the present invention, and is disposed above the liquid container 12 and irradiates the liquid 10 stored in the liquid container 12 with light. The liquid 10 that has received the light absorbs the energy of the light and increases in temperature. Lamp heater 1
As the light source 4, one that emits near infrared rays such as a halogen lamp can be used. Preferably, as shown in the figure, a reflecting member 20 is provided behind the lamp heater 14 to collect light from the lamp heater 14 and achieve efficient irradiation.

The direction in which the lamp heater 14 is provided is:
Even if it is not directly above the liquid container 12, the liquid container 12
May be obliquely upward as long as it is difficult for the liquid 10 to flow out.

According to the first embodiment of the present invention described above, since the lamp heater 14 is disposed above the liquid container 12, even if the liquid container 12 is damaged, the liquid 10 is And the contact between the liquid 10 and the lamp heater 14 is avoided. In addition, since the structure is simpler than that of the conventional double pipe, manufacturing costs can be reduced.

(Second Embodiment) FIG. 2 is a sectional view showing a configuration of a liquid heating apparatus according to a second embodiment of the present invention. Hereinafter, the configuration of the second embodiment of the present invention will be described with reference to FIG.

The reflecting member 20 surrounds the liquid container 12 and the lamp heater 14 inside, and
4 reflects the emitted light. As shown in the figure, the reflecting member 20 may have a split type shape which is divided into upper and lower portions, or may have an integrated shape by using a tubular member such as a metal tube as it is.

The shape of the reflecting member 20 is preferably such that light reaches the liquid 10 with a small number of reflections. For example, depending on the arrangement of the lamp heater 14 and the liquid container 12, a tubular or rectangular shape such as a circle or an oval may be used. Various shapes such as are used. Desirably, in order to reduce the manufacturing cost, the reflection member 20 is formed using a standard commercially available standard tube such as a metal tube.

It is preferable that the inner surface of the reflecting member 20 be mirror-polished in order to improve the light reflectance. A configuration in which a reflective film or the like is attached instead of mirror polishing is also within the scope of the present invention.

As shown in the figure, the radiation of light from the lamp heater 14 is directly applied to the liquid container 12 or is reflected on the inner surface of the reflecting member 20 and then applied to the liquid container 12. You. That is, the light emitted by the lamp heater 14 contributes to the heating of the liquid 10 while being repeatedly reflected inside the reflecting member 20.

Other configurations are the same as those of the first embodiment.

According to the second embodiment of the present invention described above, since the lamp heater 14 and the liquid container 12 are covered with the reflection member 20, the heating efficiency of the liquid 10 is improved.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the accompanying drawings.

(Summary of Embodiment) A halogen lamp 104 and a quartz U-shaped tube 110 are disposed inside an outer tube 102, and isopropyl alcohol 100 flows into the quartz U-shaped tube 110, and the isopropyl alcohol 100 Is heated by the light of the halogen lamp 104 (see FIG. 3).

(Preferred Embodiment) FIG. 3 is a partial perspective view showing the structure of a liquid heating apparatus according to a preferred embodiment of the present invention. Hereinafter, the configuration of the liquid heating device will be described with reference to FIG.

The quartz U-shaped tube 110 is formed of a quartz glass having a light transmitting property and a heat resistance, and contains isopropyl alcohol 100 therein. This quartz U-shaped tube 110
Is isopropyl alcohol 10 at the start end side of the outer tube 102.
A liquid inlet 112 for introducing 0 and a liquid outlet 114 for discharging isopropyl alcohol 100 are formed, extend in the longitudinal direction inside the outer tube 102, and are bent in a U-shape at the end of the outer tube 102. Having.

The halogen lamp 104 is a quartz U-shaped tube 11
0 and a quartz U-shaped tube 1 inside the outer tube 102.
Extends with 10. This halogen lamp 104
On the starting end side of the outer tube 102, there is a pair of lead terminals 108 arranged to penetrate the ceramic base 106.

The outer tube 102 fixes the halogen lamp 104 to the upper part of its inner peripheral surface via a fixing member, and also fixes the quartz U-shaped tube 110 to the lower part of its inner peripheral surface via a fixing member. I do.

FIG. 4 is a partial cross-sectional view taken along the line IV-IV of FIG. As shown in the figure, the outer tube 102 is mainly composed of a metal tube 134, and a mirror surface 136 is formed on the inner surface of the metal tube 134. The outer periphery of the metal tube 134 is covered with a heat insulating material 138, and heat generated by the light of the halogen lamp 104 is sealed inside.

The halogen lamp 104 is provided for the filament 1
It comprises a pair of glass tubes 130 accommodating the glass tubes 28, and a halogen lamp protection tube 132 accommodating the respective glass tubes 130. The halogen lamp 104 has, for example, 1K
W is used.

The glass tube 130, together with the filament 128, encloses a mixed gas composed of an inert gas such as nitrogen, argon, and krypton and a small amount of a halogen gas. In the glass tube 130, a voltage is applied to the lead terminal 108 to cause the filament 128 to move from about 2000 ° C.
Heat is generated at 00 ° C, and near-infrared rays are mainly emitted. Near-infrared radiation from the filament 128 heats the isopropyl alcohol 100 in the quartz U-shaped tube 110.

The pair of filaments 128 are connected to the outer tube 102.
Are connected to each other on the terminal side of the outer tube 102 and connected to the pair of lead terminals 108 shown in FIG. The halogen lamp 104
May have a double end structure in which lead terminals are provided on both sides of the glass tube 130.

The mirror surface 13 formed on the inner surface of the metal tube 134
Reference numeral 6 reflects near-infrared light emitted from the halogen lamp 104. Near infrared rays reflected by the mirror surface 136 are transmitted through the quartz U-shaped tube 110 and absorbed by the isopropyl alcohol 100.

The processing tank 118 shown in FIG.
The isopropyl alcohol 100 heated in 10 is stored, and the semiconductor wafer is cleaned using the isopropyl alcohol 100 as a cleaning agent.

The pump 122 pulls up the isopropyl alcohol 100 stored in the processing tank 118 and
It flows out into the pipe 110. The isopropyl alcohol 100 discharged from the pump 122 flows into the quartz U-shaped tube 110 from the liquid inlet 112 of the quartz U-shaped tube 110, and is discharged from the liquid outlet 114.

The filter 120 removes contaminants from the isopropyl alcohol 100 discharged from the liquid discharge port 114, and supplies a clean liquid to the processing tank 118.

The temperature sensor 126 is provided in the processing tank 118, detects the temperature of the isopropyl alcohol 100, and inputs the detected temperature to the controller 124.

The controller 124 includes a temperature sensor 126
, The voltage value output to the lead terminal of the halogen lamp 104 is adjusted to maintain the isopropyl alcohol 100 at a predetermined temperature.

[0047]

As described above, according to the present invention,
It is possible to provide a liquid heating device that is effective in reducing manufacturing costs and improving safety.

Further, according to the first embodiment of the present invention, since the lamp heater 14 is disposed above the liquid container 12, even if the liquid container 12 is damaged, the liquid 10 can be moved downward. Outflow, liquid 10 and lamp heater 14
Contact with the body is avoided. In addition, since the structure is simpler than that of the conventional double pipe, manufacturing costs can be reduced.

According to the second embodiment of the present invention, since the lamp heater 14 and the liquid container 12 are covered with the reflection member 20, the heating efficiency of the liquid 10 is improved.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing a first embodiment of a liquid heating device according to the present invention.

FIG. 2 is a cross-sectional view illustrating a configuration of a liquid heating device according to a second embodiment of the present invention.

FIG. 3 is a partial perspective view showing a structure of a liquid heating device according to a preferred embodiment of the present invention.

FIG. 4 is a partial cross-sectional view taken along the line IV-IV of FIG. 3;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Liquid, 12 ... Liquid accommodation container, 14 ... Lamp heater, 20 ... Reflection member, 100 ... Isopropyl alcohol, 102 ... Outer tube, 104 ... Halogen lamp, 106 ...
Ceramic base, 108 lead terminal, 110 U-shaped quartz tube, 112 liquid inlet, 114 liquid outlet, 1
18 ... processing tank, 120 ... filter, 122 ... pump, 1
Reference numeral 24: controller, 126: temperature sensor, 128: filament, 130: glass tube, 132: halogen lamp protection tube, 134: metal tube, 136: mirror surface, 138: heat insulating material

Claims (3)

[Claims] 1. A liquid heating device for heating a liquid (10) by light irradiation, comprising: a light-transmissive liquid container (1) for containing the liquid (10).
2) and a lamp heater (14) that is separately disposed above the liquid storage container (12) and irradiates light to the liquid (10) stored in the liquid storage container (12). A liquid heating device characterized by the above-mentioned. 2. A liquid heating apparatus for heating a liquid (10) by light irradiation, comprising: a translucent liquid container (1) for accommodating the liquid (10).
2), a lamp heater (14) disposed around the liquid storage container (12) and irradiating the liquid (10) stored in the liquid storage container (12) with light; (12) and a reflecting member (20) surrounding the lamp heater (14) and reflecting light emitted by the lamp heater (14) toward the liquid container (12). Liquid heating device. 3. A liquid heating device for heating a liquid (10) by light irradiation, wherein a light-transmissive liquid container (1) for containing the liquid (10).
2), a lamp heater (14) disposed above the liquid storage container (12) and irradiating the liquid (10) stored in the liquid storage container (12) with light, and the liquid storage container ( 1
2) and a reflecting member (20) surrounding the lamp heater (14) and reflecting light emitted by the lamp heater (14) toward the liquid container (12). Liquid heating device.