JP3007266B2 - Heater lamp device for liquid heating - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater lamp for heating liquids such as cleaning water and various etching chemicals in, for example, a cleaning device and a wet etching device in a semiconductor manufacturing process.

[0002]

2. Description of the Related Art In recent semiconductor manufacturing processes, as the degree of integration of semiconductors increases, the importance of cleaning techniques for removing contaminants such as dopant elements, heavy metal elements, constituent elements of etching and cleaning liquids, organic contaminants, and particles. Has also increased. Typical cleaning processes include initial cleaning, pre-oxidation cleaning, pre-diffusion cleaning, pre-film deposition cleaning, resist stripping cleaning, and the contents to be removed are slightly different depending on the process, but the cleaning water was used at the beginning. Water near the theoretical value called ultrapure water is used from ion-exchanged water,
This contributes to improved yield and miniaturization. Recently, even ionic contamination from dead bacteria and materials has become a problem, so transparent quartz that contains almost no contaminants has been used as a material for cleaning equipment that comes into direct contact with cleaning water. Is being promoted.

[0003] In such a washing step, if the washing water is heated to warm water, the washing effect is greatly increased. For example, it is known that when the temperature of pure water increases from 30 ° C. to 50 ° C., the solubility of contaminants increases three-fold. For this reason, the cleaning water is often heated by a dedicated heater lamp. In addition to the cleaning water, for example, SiO 2 is used for forming openings for selective diffusion and forming contact holes.
_{2 In the} etching, an etching chemical solution composed of a mixture of HF, NH ₄ F, and H ₂ O is used, and such a chemical solution is also heated to an optimum temperature by a heater lamp similar to a heater lamp for heating cleaning water.

[0004] For the chemical liquid heater, KOMATSU
TECHNICAL REPORT 1992, VOL.
38, no. 130, page 121 to page 134, which is described in detail in the article "Development of a Radiant Chemical Heater for Semiconductor Manufacturing". In general, a long tube-type halogen lamp with a power consumption of about 1 to 6 KW. Is used.
This is because the temperature rises quickly and the amount of radiated heat is easily controlled.

However, with such a high-output halogen lamp, for example, when the power supply voltage is 200 V AC, the current is 20 A, and the power consumption is 4 kW, in the lamp design, the diameter of the tungsten wire constituting the filament becomes large and the diameter of the coil becomes large. As a result, both the weight and the heat capacity increase, and the rising speed of the temperature decreases.
In addition, there is a disadvantage that the rush current to the lamp at the time of lighting increases. The inrush current tends to deform the coil. The bulb diameter of the bulb increases, and the supporter holding the filament also increases, and is therefore easily deformed. Therefore, impact resistance and vibration resistance are also reduced. The conductive member buried in the sealing portion is generally a molybdenum metal foil, but when the current value exceeds 20 A, the Joule heat cannot be ignored, the temperature of the sealing portion is easily increased, and the use of the foil is difficult. Life is shortened. If the coated lead wires are attached to both ends of the lamp when inserting the lamp into the hollow quartz tube, the lead wire is caught or twisted on the inner wall of the quartz tube, making it difficult to insert the lamp. Such disadvantages are pointed out.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to provide a heater lamp device for heating a liquid, which solves the above-mentioned disadvantages, has excellent vibration resistance and impact resistance, has a long service life, and is easy to handle. It is to offer something.

[0007]

Basically, instead of designing a halogen lamp that consumes a large amount of power, a halogen lamp that consumes a small amount of power is designed, and these lamps are bundled and used. The section will discontinue the use of coated leads for convenient insertion.

Specifically, it is practical to adopt the following configuration. Inside a tubular valve having sealing portions at both ends, a filament is arranged along the valve pipe axis, and an internal lead member extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. At least one of the tubular lamps including an external lead member extending from the conductive member to the outside of the sealing portion is bundled, and at least one end of the tubular lamp, the external lead member belonging to the same side can be bent. It is characterized by being connected by a metal member. Inside a tubular valve having sealing portions at both ends, a filament is arranged along the valve pipe axis, and an internal lead member extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. Bundling two tubular lamps including an external lead member extending from the conductive member to the outside of the sealing portion,
At one end of the tubular lamp, external lead members belonging to the same side are connected by a bendable metal member, and at the other end of the tubular lamp, the external lead member belonging to the same side is connected to a Faston. It is characterized by being connected by a tongue for a terminal (trade name). Inside a tubular valve having sealing portions at both ends, a filament is arranged along the valve tube axis, and an inner lead member extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. Bundling two tubular lamps including an external lead member extending from the conductive member to the outside of the sealing portion,
At one end of the tube lamp, the external lead members belonging to the same side are bent and connected, or are connected by a bendable metal member, and at the other end of the tube lamp, The coated lead wires are respectively connected to the external lead members belonging to the side of (1), and the ends of the coated lead wires are connected by one common terminal.

In the above, the metal member is a stranded wire, a thin metal wire, or a thin metal tape, and has a base member fixed to the end portion with an adhesive. Is good.

[0010] Alternatively, when priority is given to ease of handling, external lead members belonging to the same side are connected to each other with tongues for Faston terminals (trade names) at both ends of the tube lamp.

[0011]

The power consumption of each lamp can be halved. For example, instead of using one halogen lamp with power consumption of 4 KW, two halogen lamps with power consumption of 2 KW are used. Therefore, the design of the lamp is a 2KW halogen lamp design. As a result, the diameter of the tungsten wire used for the filament coil can be reduced, and the temperature rise can be accelerated. The load per lamp is reduced, and the bulb diameter can be reduced. The volume of the valve becomes about one half. Since the weight of the filament is small and the diameter of the bulb is small,
Supporter design is easier, and vibration and impact resistance are increased. The deformation of the filament due to the rush current can be suppressed. When the lamps are lit in parallel, the current is divided, so that the rise in the temperature of the sealing portion can be reduced. Therefore, the service life of the foil is extended. Since one side of the lamp is made into a plate-like terminal or short-circuited, it is easy to use.

What is important here is that, at one end of the tube lamp, the metal member used to connect the external lead members on the same side is formed of a bendable stranded wire, a single wire, and a thin ribbon. It is to be. Due to variations in production, all external lead members do not always extend properly from the center of the bulb tube axis, so multiple lamps are bundled on the same plane or on the same curved surface. In such a case, there is a possibility that there is an external lead member extending out of the plane. Therefore, in this case, when the external lead member of the lamp is connected, it is desirable that the metal member used for the connection be “deformable”. In the present invention, as described above, since a deformable metal member is used, no breakage of the sealing portion occurs in the connection. Also, after the above connection, two lamps,
Even if it is discovered that they are not aligned without being twisted, even if the lamp position is forcibly corrected, the connecting metal member will be deformed, so that a large force will not be applied to the external lead member and the sealing part, There is no breakage accident of the sealing part.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is an explanatory diagram of an embodiment of a heater lamp device for heating liquid according to the present invention. In the figure, reference numerals 1 and 2 denote halogen lamps designed to have an electric rating of 200 V and 2 KW.
3 and 4 are crush seals belonging to one end,
External lead members 5 and 6 made of a molybdenum rod are extended, and both of them are one common terminal,
It is connected to a tongue piece 7 for a Faston terminal (trade name). 8 and 9 are crush seals belonging to the other end,
External lead members 10 and 11 made of molybdenum rods, respectively
And both of them have a nickel stranded wire 12
Are connected by A flexible lead wire 14 having a round terminal 13 is connected to the stranded wire 12.
The base 15 including the sealing portions 8 and 9, the external lead members 10 and 11, and the stranded wires 12 is covered, and the inside is hardened with an adhesive. In the above state, the two halogen lamps are tightly bound and tied.

As described above, when two lamps are assembled with reference to the bulb portion of the lamp, the four external lead members 5, 6, 10, and 11 are ideally arranged on the same plane. However, this may not always be the case due to variations in production. Similarly, in the assembling operation, after connecting the tongue piece 7 to the external lead members 5 and 6 belonging to one end, when connecting the external lead members 10 and 11 with the stranded wire 12, the external lead members 10 and 11 are connected to be shifted from the ideal plane. Sometimes. For example, FIG. 2 is an explanatory view of the stranded portion of FIG. 2 viewed from the longitudinal direction of the lamp. In the figure, two lamps are connected to form a “twisted surface”. Is the case. In this case, since the stranded wire 12 is bendable, the positions of the two lamps can be easily corrected to the correct positions as shown in FIG. After correction, the adhesive and the base are protected.

Similar correction can be made by using a thin metal ribbon or a thin single wire instead of the twisted wire 12. Therefore, in the above embodiment, it is very convenient to insert the lamp from the tongue side when inserting the lamp into the quartz pipe in the water tank when heating and raising the temperature of the chemical solution or pure water used in the semiconductor device production process.

FIG. 4 is an explanatory diagram of another embodiment. In this embodiment, the external lead members 5 and 6 belonging to one end are bent in advance, and are connected without using tongue pieces. The structure is easy to insert into a quartz pipe.

FIG. 5 is an explanatory diagram of another embodiment. In the figure, external lead members 5, 6 at one end are
They are connected by a metal ribbon 16 made of a thin plate of nickel or copper. Coated lead wires are connected to the external lead members 10 and 11 at the other end, respectively, and are bundled at one end by one round terminal 13. In this embodiment, the base 15
Are mounted on both ends, and the base 15 is formed with positioning irregularities for forward / backward movement, rotation, etc., corresponding to the irregularities of the counterpart device in which the lamp device is used.

According to another embodiment, if only the ease of use is considered, it is preferable to connect the external lead members at both ends of the lamp device with tongues for the Faston terminal. In this case, it is better for at least one tongue to have some flexibility.

Although not shown in the drawings, halogen lamps usually have an exhaust pipe residue called a chip. However, when two or more lamps are bundled and used, the chips are placed on the same side. Bundling is preferable because the lamp device becomes easier to use. Alternatively, in the case of two lamps, a compact lamp device can be obtained by bundling them so that they face outward.

[0020]

As can be understood from the above description of the embodiment, in the present invention, instead of using one high-power lamp as the liquid heating heater lamp device, two or more lamps are used. It is designed to be divided and used to increase the vibration resistance and shock resistance and to obtain a lamp with a long service life, and then to bundle and use those lamps. The present invention provides an excellent liquid heating heater lamp device by devising a connection structure of an external lead member in consideration of ease of use and ease of manufacture.

[Brief description of the drawings]

FIG. 1 is an explanatory view of an embodiment of a heater lamp device for heating liquid according to the present invention.

FIG. 2 is an explanatory diagram of a connection structure of an external lead member.

FIG. 3 is an explanatory view of a connection structure of an external lead member.

FIG. 4 is an explanatory diagram of another connection structure of the external lead member.

FIG. 5 is an explanatory view of another embodiment of the liquid heating heater lamp device of the present invention.

[Explanation of symbols]

 1, 2, halogen lamp 3, 4, 8, 9 sealing portion 5, 6, 10, 11 external lead member 12 nickel stranded wire 13 round terminal 14 covering lead 15 base 16 metal ribbon

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H05B 3/10 H05B 3/44

Claims (7)

(57) [Claims] 1. A filament disposed along a valve tube axis inside a tubular valve having sealing portions at both ends, and extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. At least one end of the tubular lamp includes an internal lead member and an external lead member extending from the conductive member to the outside of the sealing portion. Are connected by a bendable metal member. 2. The metal member is a stranded wire, a single thin metal wire, or a thin metal tape,
The heater lamp device for liquid heating according to claim 1, further comprising a base member fixed to the end portion with an adhesive. 3. A filament disposed along a valve pipe axis inside a tubular valve having sealing portions at both ends, and extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. Two tubular lamps including an internal lead member and an external lead member extending from the conductive member to the outside of the sealing portion, and at one end of the tubular lamp, an external lead member belonging to the same side Liquid heating characterized by being connected with a bendable metal member and connecting an external lead member belonging to the same side with a tongue for a Faston terminal (trade name) at the other end of the tubular lamp. Heater lamp device. 4. The metal member is a stranded wire, a thin metal wire, or a thin metal tape,
The heater lamp device for heating liquid according to claim 3, further comprising a base member fixed to the end portion with an adhesive. 5. A filament disposed along a valve tube axis inside a tubular valve having sealing portions at both ends, and extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. Two tube lamps including an internal lead member and an external lead member extending from the conductive member to the outside of the sealing portion, and bending an external lead member belonging to the same side at one end of the tube lamp. Or by using a bendable metal member, and connecting the coated lead wires to the external lead members belonging to the same side at the other end of the tube-type lamp. Characterized in that the ends of the heater lamps are connected by one common terminal. 6. A filament disposed along a valve tube axis inside a tubular valve having sealing portions at both ends, and extending from both ends of the filament and connected to a conductive member embedded in the sealing portion. Two tube lamps including an inner lead member and an outer lead member extending from the conductive member to the outside of the sealing portion, and the outer lead members belonging to the same side at both ends of the tube lamp are fastened by Faston. A heater lamp device for heating liquid, which is connected by a tongue for a terminal (trade name). 7. The tube lamp according to claim 3, wherein the tube lamp has a chip, and the chip is bundled so as to be located on the same side or outside of the bundled tube lamp. The heater lamp device for heating liquid according to claim 5 or 6.