JPH06630Y2 - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPH06630Y2
JPH06630Y2 JP1985197023U JP19702385U JPH06630Y2 JP H06630 Y2 JPH06630 Y2 JP H06630Y2 JP 1985197023 U JP1985197023 U JP 1985197023U JP 19702385 U JP19702385 U JP 19702385U JP H06630 Y2 JPH06630 Y2 JP H06630Y2
Authority
JP
Japan
Prior art keywords
pump
gas
gap
oil
labyrinth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985197023U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62114197U (enrdf_load_stackoverflow
Inventor
重一 川口
成田　　潔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1985197023U priority Critical patent/JPH06630Y2/ja
Publication of JPS62114197U publication Critical patent/JPS62114197U/ja
Application granted granted Critical
Publication of JPH06630Y2 publication Critical patent/JPH06630Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1985197023U 1985-12-20 1985-12-20 タ−ボ分子ポンプ Expired - Lifetime JPH06630Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197023U JPH06630Y2 (ja) 1985-12-20 1985-12-20 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197023U JPH06630Y2 (ja) 1985-12-20 1985-12-20 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS62114197U JPS62114197U (enrdf_load_stackoverflow) 1987-07-20
JPH06630Y2 true JPH06630Y2 (ja) 1994-01-05

Family

ID=31156370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197023U Expired - Lifetime JPH06630Y2 (ja) 1985-12-20 1985-12-20 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH06630Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2578431B (en) 2018-10-25 2021-09-22 Edwards Ltd Oil feed for a vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5874898A (ja) * 1981-10-29 1983-05-06 Shimadzu Corp タ−ボ分子ポンプ
JPS60157994U (ja) * 1984-03-30 1985-10-21 株式会社島津製作所 タ−ボ分子ポンプ

Also Published As

Publication number Publication date
JPS62114197U (enrdf_load_stackoverflow) 1987-07-20

Similar Documents

Publication Publication Date Title
KR900001231B1 (ko) 기판의 회전 건조 장치
JP3825372B2 (ja) ターボ圧縮機
JPH0784871B2 (ja) 真空排気装置
JP3517263B2 (ja) 静圧気体軸受スピンドル
FR2619162A1 (fr) Joint de trajet d'ecoulement sans contact
JP4457018B2 (ja) サーチガス漏れ検出器
JPH06630Y2 (ja) タ−ボ分子ポンプ
JP2010270657A (ja) ドライ真空ポンプ
JPS60125795A (ja) 複合真空ポンプ
JPH09502001A (ja) クロー形真空ポンプの運転法及びこの運転法の実施に適したクロー形真空ポンプ
JP2003172261A (ja) 回転軸シール機構
JPH02196187A (ja) オイルフリースクリュ真空ポンプ
JPS6143297A (ja) 分子ポンプのガスパ−ジ装置
JPS5874898A (ja) タ−ボ分子ポンプ
JPS6345597Y2 (enrdf_load_stackoverflow)
US4588361A (en) High vacuum rotary pump
US7896625B2 (en) Vacuum pumping system and method of operating a vacuum pumping arrangement
JPH11336699A (ja) ウォータポンプ
JPS62168994A (ja) 高真空排気装置
JPH11311197A (ja) ガス圧縮装置
JPH0674795B2 (ja) タ−ボ分子ポンプ
JPH0720395Y2 (ja) 真空排気装置
JP2600957B2 (ja) 遠心機の排気構造
JPH1193877A (ja) 真空ポンプ
JP3034968B2 (ja) 真空ポンプの気体軸受装置