JPH066121Y2 - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPH066121Y2
JPH066121Y2 JP10070287U JP10070287U JPH066121Y2 JP H066121 Y2 JPH066121 Y2 JP H066121Y2 JP 10070287 U JP10070287 U JP 10070287U JP 10070287 U JP10070287 U JP 10070287U JP H066121 Y2 JPH066121 Y2 JP H066121Y2
Authority
JP
Japan
Prior art keywords
wafer
movement
elements
connecting member
legs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10070287U
Other languages
English (en)
Japanese (ja)
Other versions
JPS647146U (enrdf_load_stackoverflow
Inventor
康雄 喜多
二郎 飛田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10070287U priority Critical patent/JPH066121Y2/ja
Publication of JPS647146U publication Critical patent/JPS647146U/ja
Application granted granted Critical
Publication of JPH066121Y2 publication Critical patent/JPH066121Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Discharge By Other Means (AREA)
JP10070287U 1987-06-30 1987-06-30 搬送装置 Expired - Lifetime JPH066121Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10070287U JPH066121Y2 (ja) 1987-06-30 1987-06-30 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10070287U JPH066121Y2 (ja) 1987-06-30 1987-06-30 搬送装置

Publications (2)

Publication Number Publication Date
JPS647146U JPS647146U (enrdf_load_stackoverflow) 1989-01-17
JPH066121Y2 true JPH066121Y2 (ja) 1994-02-16

Family

ID=31329014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10070287U Expired - Lifetime JPH066121Y2 (ja) 1987-06-30 1987-06-30 搬送装置

Country Status (1)

Country Link
JP (1) JPH066121Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008141898A (ja) * 2006-12-05 2008-06-19 Duplo Seiko Corp アクチュエータおよび搬送装置

Also Published As

Publication number Publication date
JPS647146U (enrdf_load_stackoverflow) 1989-01-17

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