JPH065541Y2 - 空気調和設備 - Google Patents
空気調和設備Info
- Publication number
- JPH065541Y2 JPH065541Y2 JP1989018071U JP1807189U JPH065541Y2 JP H065541 Y2 JPH065541 Y2 JP H065541Y2 JP 1989018071 U JP1989018071 U JP 1989018071U JP 1807189 U JP1807189 U JP 1807189U JP H065541 Y2 JPH065541 Y2 JP H065541Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- clean
- case
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004378 air conditioning Methods 0.000 title description 9
- 230000001143 conditioned effect Effects 0.000 claims description 21
- 238000007664 blowing Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989018071U JPH065541Y2 (ja) | 1989-02-17 | 1989-02-17 | 空気調和設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989018071U JPH065541Y2 (ja) | 1989-02-17 | 1989-02-17 | 空気調和設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02109941U JPH02109941U (en, 2012) | 1990-09-03 |
| JPH065541Y2 true JPH065541Y2 (ja) | 1994-02-09 |
Family
ID=31232385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989018071U Expired - Lifetime JPH065541Y2 (ja) | 1989-02-17 | 1989-02-17 | 空気調和設備 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH065541Y2 (en, 2012) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317048A (ja) * | 2005-05-11 | 2006-11-24 | Takenaka Komuten Co Ltd | クリーンルーム |
| US20100120349A1 (en) * | 2008-10-31 | 2010-05-13 | Airsonett Ab | Surgical theater ventilating devices and methods |
| JP6911799B2 (ja) * | 2018-03-15 | 2021-07-28 | 信越半導体株式会社 | シリコン多結晶充填作業用のクリーンブース |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6069441A (ja) * | 1983-09-26 | 1985-04-20 | Ryowa Chiyouon Kogyo Kk | ス−パ−クリ−ンシステム |
-
1989
- 1989-02-17 JP JP1989018071U patent/JPH065541Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02109941U (en, 2012) | 1990-09-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |