JPH065541Y2 - 空気調和設備 - Google Patents

空気調和設備

Info

Publication number
JPH065541Y2
JPH065541Y2 JP1989018071U JP1807189U JPH065541Y2 JP H065541 Y2 JPH065541 Y2 JP H065541Y2 JP 1989018071 U JP1989018071 U JP 1989018071U JP 1807189 U JP1807189 U JP 1807189U JP H065541 Y2 JPH065541 Y2 JP H065541Y2
Authority
JP
Japan
Prior art keywords
air
room
clean
case
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989018071U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02109941U (US06653308-20031125-C00197.png
Inventor
耕一 村田
悳 岡本
元 奥平
Original Assignee
株式会社大氣社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社大氣社 filed Critical 株式会社大氣社
Priority to JP1989018071U priority Critical patent/JPH065541Y2/ja
Publication of JPH02109941U publication Critical patent/JPH02109941U/ja
Application granted granted Critical
Publication of JPH065541Y2 publication Critical patent/JPH065541Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP1989018071U 1989-02-17 1989-02-17 空気調和設備 Expired - Lifetime JPH065541Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989018071U JPH065541Y2 (ja) 1989-02-17 1989-02-17 空気調和設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989018071U JPH065541Y2 (ja) 1989-02-17 1989-02-17 空気調和設備

Publications (2)

Publication Number Publication Date
JPH02109941U JPH02109941U (US06653308-20031125-C00197.png) 1990-09-03
JPH065541Y2 true JPH065541Y2 (ja) 1994-02-09

Family

ID=31232385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989018071U Expired - Lifetime JPH065541Y2 (ja) 1989-02-17 1989-02-17 空気調和設備

Country Status (1)

Country Link
JP (1) JPH065541Y2 (US06653308-20031125-C00197.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317048A (ja) * 2005-05-11 2006-11-24 Takenaka Komuten Co Ltd クリーンルーム
US20100120349A1 (en) * 2008-10-31 2010-05-13 Airsonett Ab Surgical theater ventilating devices and methods
JP6911799B2 (ja) * 2018-03-15 2021-07-28 信越半導体株式会社 シリコン多結晶充填作業用のクリーンブース

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム

Also Published As

Publication number Publication date
JPH02109941U (US06653308-20031125-C00197.png) 1990-09-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term