JPH0653527B2 - Substrate storage device - Google Patents

Description

Description: TECHNICAL FIELD The present invention is applied to a semiconductor manufacturing apparatus, particularly an apparatus for automatically exchanging substrates such as masks and reticles, in which substrates such as masks and reticles are housed. The present invention relates to a substrate storage device.

(Prior Art) As this type of device, a substrate such as a mask or reticle (hereinafter referred to as a reticle) is stored in a state of being kept clean, and an internal reticle or the like can be quickly taken out when necessary. Is desired.

However, in the conventional substrate storage device, a storage box (mounting side member) for supporting a substrate such as a reticle and a lid (cover side member) for the storage box are joined at one end to integrally configure both.
Since a member for stopping the storage box and the lid is provided at the other end, when the storage substrate is taken out from the inside and conveyed, the stopper is removed and then the lid is rotated around the connecting point or the device is removed. It is necessary to open the door provided on the side wall and allow a member for taking out the substrate to enter the inside of the apparatus.

Therefore, in this conventional storage device, there is a concern that dust attached to the lid or dust generated by sliding of the stopper member may fall on the reticle or the like inside. Further, in this conventional storage device, when the substrate is automatically taken out from the inside, the substrate is always carried by the substrate only to a predetermined carrying completion position immediately after being taken out. Therefore, in this conventional apparatus, there is a high possibility that dust, dirt, or the like will adhere to the substrate during transportation.

(Object of the Invention) The present invention has been made in view of such circumstances, and an object of the present invention is to store a substrate such as a mask or a reticle in a state in which the cleanliness of the substrate is kept, and to use an automatic exchange device or the like when necessary. An object of the present invention is to provide a substrate storage device that can take out an internal substrate promptly and in a clean state.

(Means for Achieving the Object) In order to achieve this object, the substrate housing device of the present invention is
Mounting side member (storage box) on which a substrate (reticle, etc.) is mounted
And a lid side member (upper lid) that forms a storage chamber for storing the substrate by being brought into close contact with the placement side member,
An elastic member (elastic plate) for urging the lid side member in the first direction (upward direction) for releasing the close contact between the lid side member and the placement side member, and the lid side member via the elastic member. A frame member (frame) that supports the mounting-side member so as to be pulled out along a second direction (drawing direction) different from the first direction, and is rotatably supported by the frame member. Opening and closing for bringing the lid side member into close contact with the placement side member against the biasing force of the elastic member when rotated so as to be displaced from the open position that is separated along the second direction to the closed position It is characterized by having a lever.

In addition, more preferably, a band is provided between the frame member and the opening / closing lever, and the lid side member is brought into close contact with the placement side member by the band.

(Embodiment) FIG. 1 is a perspective view showing an embodiment of the present invention. 1 in the figure
Is a reticle, 2 is a storage box, 3 is an upper lid, 4 is an elastic plate, 5 is an opening / closing lever, 6 is a frame, and 7 is a band.

The frame 6 is fixed to the inner wall of a carrier body (not shown) that houses a plurality of storage devices according to the present invention.

The upper lid 3 is supported by two elastic plates 4 whose central portions are fixed to the left and right inner sides of the frame 6.

Here, the elastic plate 4 is urged in the direction of separating the upper lid 3 from the storage box 2, that is, in the upward direction.

The upper lid 3 is joined to the storage box 2 by the opening / closing lever 5 and the band 7 so as to be in close contact with the storage box 2 to form a closed space.

The band 7 has one end fixed to the opening / closing lever 5 and the other end fixed to the frame 6 and is provided along the surface of the upper lid 3.

Further, the opening / closing lever 5 is rotated in the direction of the arrow in the drawing with a portion supported by the frame 6 as a fulcrum to move the upper lid 3 away from or close to the storage box 2.

If the band 7 is not provided, the adhesion between the upper lid 3 and the storage box 2 is slightly deteriorated, but the band 7 may not be provided depending on the specifications.

FIG. 2 is a detailed view of the storage box 2.

In the figure, reference numeral 2a is a reticle support member provided on the bottom surface of the storage box 2, and a reference numeral 2b is a reticle fixing member for preventing the reticle from being displaced in the front-rear and left-right directions. A protrusion 2c is provided on the back surface of the upper lid 3 to prevent the reticle from being vertically displaced.

Next, the operation of the opening / closing lever 5 will be described with reference to FIGS. 3 (A) and 3 (B) are a cross-sectional view seen from the pull-out direction and a cross-sectional view seen from the direction perpendicular to the pull-out direction when the opening / closing lever 5 is rotated in the closing direction.

4 (A) and 4 (B) are a cross-sectional view seen from the pull-out direction and a cross-sectional view seen from the direction perpendicular to the pull-out direction when the open / close lever 5 is rotated in the open direction.

In FIGS. 3 (A) and 3 (B), the upper lid 3 has an opening / closing lever 5 and a band 7.
Then, the upper lid 3 and the storage box 2 are brought into close contact with each other to form a closed space.

In this state, the storage box 2 is supported by the predetermined supporting surface of the frame 6.

In FIGS. 4 (A) and 4 (B), the belt 7 is loosened by operating the opening / closing lever 5 to the open side, and the elastic plate 4 having the central portion fixed
By the restoring force of, the upper lid 4 is displaced upward in a generally parallel manner.

Then, when the storage box 2 is pulled out, the storage box 2 is slightly displaced parallel to the frame 6 from the state shown in FIG. 4A and pulled out without coming into contact with the frame 6.

When the storage box 2 is attached, the reverse operation of pulling out the storage box 2 is performed.

(Modification) Although one embodiment has been described above, the elastic plate 4 may be attached to the upper lid 3 instead of being attached to the frame 6.

A coil spring may be used instead of the elastic plate 4.

Further, instead of the belt 7, any means for holding the upper lid downward in conjunction with opening / closing of the opening / closing lever 5 may be used.

The fixed portion of the elastic plate 4 may be at another position, for example, an end portion, instead of the central portion.

(Effect) As described above, according to the present invention, when the mounting side member is pulled out from the frame member, the lid side member and the mounting side member can be kept in a separated state. It is possible to reduce the possibility that the two will slide or contact each other when the placing side member is pulled out. Further, the opening / closing lever moves along the pulling (or mounting) direction of the mounting member with respect to the frame member to switch between contact and release of the mounting side member and the lid side member. If you do
It is possible to facilitate the close contact and release of the mounting side member and the lid side member in association with the operation of pulling out or mounting the mounting side member to the frame member.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a detailed view of a storage box, and FIGS. 3 (A) and (B) are sectional views when the opening / closing lever is rotated in the closing direction. 4 (A) and (B) are sectional views when the opening / closing lever is rotated in the opening direction, in which 1 is a reticle (substrate), 2 is a storage box (mounting side member), 3 is an upper lid (lid side). Member), 4 is an elastic plate (elastic member), 5 is an opening / closing lever, 6 is a frame (frame member), and 7 is a band.

Continuation of the front page (51) Int.Cl. ⁵ Identification number Office reference number FI technical display location B65G 1/02 D 7456-3F H01L 21/027 21/68 T 8418-4M

Claims (2)

[Claims] 1. A mounting-side member on which a substrate is mounted, a lid-side member that forms a storage chamber for storing the substrate by being brought into close contact with the mounting-side member, and the lid-side member. The elastic member for urging the lid side member in a first direction for releasing the close contact of the placing side member, the lid side member supported via the elastic member, and the placing side member for the first side. A frame member that is supported so as to be pulled out along a second direction different from the direction, and is rotatably supported by the frame member, and is displaced from an open position that is separated along the second direction to a closed position. A substrate storage device, comprising an opening / closing lever for bringing the lid side member into close contact with the placement side member against the biasing force of the elastic member when rotated. 2. The substrate according to claim 1, wherein a band is provided between the frame member and the opening / closing lever, and the lid side member is brought into close contact with the mounting side member by the band. Storage device.