JPH0620447Y2 - Storage unit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a storage unit. INDUSTRIAL APPLICABILITY The present invention can be used as, for example, a storage unit that keeps the inside of a storage unit (drawer) clean in a clean room and does not impair the cleanliness of the surroundings.

[Outline of device]

According to the present invention, in a storage unit having a drawer, an opening is formed at the bottom of the drawer, and the opening is selectively opened and closed by a movable shutter in accordance with the pulling operation, so that the inside of the storage unit (drawer) It is intended to obtain a storage unit that keeps the room clean and does not hinder the cleanliness of the surroundings.

[Conventional technology]

Various manufacturing equipment is installed in the clean room, but almost all of them are used in combination, so the dimensions vary. For this reason, the size of the portion of the clean room that is made to be particularly clean is inevitably large in order to comprehensively accommodate all the devices. Usually, the depth direction may be largely left over depending on the device, and this extra portion (clean space) becomes a dead space. As a countermeasure, products in the process (wafer, mask, rectile, etc.) are placed in this dead space.
Installed a storage unit that can store

FIG. 2 is a diagram showing a state in which a conventional storage unit is installed in a clean room, and FIG. 3 is a diagram showing a state in which a drawer of the conventional storage unit is opened.

In these figures, 1 is a clean room, for example, a clean room called a clean zone unit (CZU). Reference numeral 2 is a maintenance chamber, 3 is a duct, 4 is a clean filter, 5 is clean air, 6 is a storage unit, and 7 is a main device, which is a device requiring a high degree of cleanliness. Reference numeral 8 is a housing cover, 9 is a drawer, and 10 is a storage item requiring cleanliness, such as a wafer, a mask, and a reticle.

Here, a general arrangement configuration in the clean room 1 is shown, and the storage unit 6 is installed in the unused dead spaces above and behind the main device 7. Further, the center of gravity of the storage unit 6 comes to the front when the drawer is pulled out (when the drawer 9 is pulled out),
It is firmly installed on the floor or on the wall.

[Problems to be solved by the invention]

In the above-described conventional storage unit 6, since the clean air 5 cannot pass through the storage unit 6 (the housing cover 8 and the drawer 9) when the drawer 9 is stored in the housing cover 8 (when stored). However, there is a problem that it is not possible to keep the storage object 10 in the storage unit 6 (drawer 9), which requires cleanliness, clean. As a countermeasure against this, a structure may be considered in which openings are provided in the housing cover 8 and the drawer 9 to allow the clean air 5 to pass therethrough, but when the stored item 10 is taken in and out (at the time of drawing), the dust in the drawer 9 falls outside. Then, there is also a problem that it adversely affects the main device 7 and the like, which require cleanliness.

The present invention has been made to solve such a problem, and it is possible to obtain a storage unit that keeps the inside of the storage unit clean during storage and does not hinder the cleanliness of the surroundings when it is pulled out. To aim.

[Means for solving problems]

The storage unit according to the present invention is a storage unit including a drawer, wherein an opening is formed in a bottom of the drawer, and the drawer includes a movable shutter having an opening corresponding to the opening of the drawer bottom. The movable shutter is opened by the return spring when the drawer is housed and the opening of the movable shutter is aligned with the position of the drawer opening. Since the movable shutter is moved relative to the drawer and the opening of the movable shutter is displaced from the position of the opening of the drawer to close the opening, the opening is selectively opened and closed according to the drawing operation. It is a storage unit characterized by being.

The structure of the present invention will be described below with reference to an embodiment of the present invention which will be described in detail later.

That is, the storage unit of the present invention is a storage unit having a drawer 16 as illustrated in FIGS. 1 (a) to (c).
An opening 17a is formed at the bottom of the drawer 16. The drawer 16 comprises a movable shutter 14 having an opening 17b corresponding to the opening 17a at the bottom of the drawer. The movable shutter 14 is in a state where the drawer 16 is stored (first
In the state (a) of the drawing), the opening 17b of the movable shutter 14 is aligned with the position of the opening 17a of the drawer 16, and the opening 17a is opened. The movable shutter 14 is moved relatively to the drawer 16 by the return spring 12 when the drawer 16 is drawn out (the state shown in FIGS. 1 (b) and (c)), and the opening 17b of the movable shutter 14 is opened. The opening 17a of the drawer 16 is displaced from the position of the opening 17a to close the opening 17a.
As a result of this configuration, the opening 17a of the drawer 16 is selectively opened and closed according to the drawing operation.

Here, the operation of closing the opening 17a of the drawer 16 is aligned with the opening 17b of the movable shutter 14 by automatically returning the movable shutter 14 to the rear by the return spring 12 when the drawer 16 is pulled out. Due to this, the opening 17a of the drawer 16 which has been in the closed state deviates from the opening 17b of the movable shutter 14, and is closed by the movable shutter 14.

The pulling-out operation is composed of an operation of pulling out the drawer 16 from the housing cover 15 and an operation of storing it in the housing cover 15.

[Action]

In the present invention, when the drawer is stored (when it is stored), the opening of the drawer is opened, so that clean air can pass through the drawer and the inside of the drawer is kept clean. Be done. Also, when the drawer is pulled out (when it is pulled out), the opening of the drawer is closed, so the dust inside the drawer does not fall outside, impairing the cleanliness of nearby devices. I'm sorry.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG. In this example, the present invention is applied to a storage unit in a clean room. As a matter of course, the present invention is not limited to the application in the clean room, and is not limited to the embodiments described below.

1 (a) to 1 (c) are detailed views of a storage unit of the present invention, FIG. 1 (a) is a view showing a state in which a drawer is stored, and FIG. 1 (b) is FIG. 1C is a diagram showing a state where the drawer is pulled out part way, and FIG. 1C is a diagram showing a state where the drawer is completely pulled out.

In these figures, the same symbols as those in FIGS. 2 and 3 indicate the same parts. Reference numeral 11 is a fixed bar. Reference numeral 12 is a return spring, which has the function of automatically returning the movable shutter 14 to the rear when the drawer 16 is pulled out. Reference numeral 13 is a circular rod guide, which is connected to the movable shutter 14 and serves to move the movable shutter 14 relative to the drawer 16. Reference numeral 14 is a movable shutter. Sign
Reference numeral 15 is a housing cover, which has a structure for passing the clean air 5. Reference numeral 16 is a drawer according to the present invention, 17a is an opening of the movable shutter 14, and 17b is an opening of the drawer 16 according to the present invention.

In this case as well, as in the case of the storage unit shown in FIG. 2, the storage unit of this embodiment is installed in the dead space. Further, dust is not generated when the drawer 16 and the movable shutter 14 slide. The operation of pulling out the storage unit according to the present embodiment includes an operation of pulling out the drawer 16 from the housing cover 15 and an operation of housing the drawer 16 in the housing cover 15.

Next, the drawing operation will be specifically described.

First, as shown in FIG. 1 (a), when the drawer 16 is housed in the housing cover 15, the movable shutter 14 is automatically pushed by the fixed bar 11 and slides forward, The opening 17b of the drawer 16 and the opening 17a of the movable shutter 14 are aligned. At this time, the clean air 5 passes through the drawer 16 through the matched openings 17a and 17b.

Then, as shown in FIGS. 1 (b) and 1 (c), the drawer
When 16 is pulled out, the movable shutter 14 is returned to the rear by the return spring 12. Return spring 12
This is because the movable shutter 14 is automatically returned to the rear when the drawer 16 is pulled out.
Specifically, in the state of FIG. 1 (a) in which the drawer 16 is housed, the return spring 12 is in pressure contact with the fixed bar 11 and compressed as shown in the figure. When pulled out, the return spring 12 is opened and becomes free as shown in FIG. 1 (b). When the return spring 12 is in the free state, the rod is pulled by the return spring 12, and as a result, the movable shutter 14 connected to the rod is pulled back to the rear. as a result,
As the movable shutter 14 moves rearward relative to the drawer 16, the opening 17b of the movable shutter 14 is displaced from the opening 17a of the drawer 16, and the opening 17b of the drawer 16 is closed. Will be done. The opening 17a of the movable shutter 14 is also closed at the same time.

When the drawer 16 is pulled out and the return spring 12 is released and is in a free state, the circular bar is pulled by the return spring 12, and thus the movable shutter 14 is pulled back backward. A known structure of the return spring can be adopted. For example, a circular bar is passed through the coil of the return spring 12, one end of the circular bar (the left end in the figure) is fixed to the center of the return spring 12, and the other end of the circular bar is attached to the return spring. In the free state of 12, the same position as the end (right end) of the return spring 12 is located inward (left side), and the end (right end) of the return spring 12 is fixed to the rod guide 13. In the compressed state shown in FIG. 1 (a), the circular bar is pushed by the return spring 12 and protrudes from the circular bar guide 13 to push the movable shutter 14 so that the drawer 16 and the movable shutter 14 are relatively moved. Defines the position,
When the return spring 12 is free,
12 is pulled inward, and the movable shutter 14 is pulled backward as shown in FIG. 1 (b). As a result, the above-described return operation is performed.

That is, in the above embodiment, since the opening of the drawer 16 is opened when the drawer 16 is housed in the housing cover 15, the clean air 5 can pass through the drawer 16 and Will be able to keep it clean.
Further, since the opening 17b of the drawer 16 is closed when the drawer 16 is pulled out,
Dust inside (for example, dust generated when the stored item 10 is taken in and out) does not drop to the outside, and does not impair the cleanliness of a device or the like in the vicinity that requires cleanliness.

Although the movable shutter 14 having the shutter mechanism is provided above the drawer 16 in the above embodiment, the present invention is not limited to this.
Even if it is provided in the lower part of 16, the same cleaning effect as in the above embodiment can be obtained.

[Effect of device]

As described above, according to the present invention, it is possible to keep the inside of the drawer clean, it is possible to store the stored items while maintaining the cleanliness, and the dust inside the drawer does not drop outside, so The degree of cleanliness will not be impaired for devices that require

[Brief description of drawings]

FIG. 1 is a view showing the details of the storage unit of the present invention, FIG. 2 is a view showing a state in which the conventional storage unit is installed in a clean room, and FIG. 3 is a state in which the drawer of the conventional storage unit is opened. FIG. 16 …… Drawer, 17b …… Opening.

Claims (1)

[Scope of utility model registration request] 1. A storage unit having a drawer, wherein an opening is formed at the bottom of the drawer, and the drawer is provided with a movable shutter having an opening corresponding to the opening of the drawer bottom. In the state where the drawer is stored, the opening of the movable shutter is aligned with the position of the opening of the drawer and the opening is opened, and when the drawer is pulled out, the movable shutter is opposed to the drawer by the return spring. And the movable shutter is moved so that the opening of the movable shutter is displaced from the position of the opening of the drawer to close the opening, so that the opening is selectively opened and closed according to the drawing operation. A storage unit characterized by.