JPH0652179A - Product processor - Google Patents

Abstract

PURPOSE:To improve the yield of a lot by prolonging process processing time when a product processing within prescribed time by means of the specified device of a process is impossible or when the product processing is possible at any time within prescribed time. CONSTITUTION:A processing plan generation means 10 generates the processing condition of the lot. A process processing means 20 processes the lot by the device. A process progress management means 30 manages a processing progress situation in the device of the lot. A device state management means 40 evaluates the product processing state of the device. When the product processing within prescribed time by the specified device of the process is impossible and when the product processing is possible at any time within prescribed time, a processing time alteration means 50 increases/alters the process processing time of the specified device. Thus, the processing time of the process where the quality of the product can be expected as processing time is longer such as a cleaning process in the production line of semiconductor IC, for example, is prolonged, and the yield of the lot can be improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a product processing apparatus in which a plurality of products are sequentially processed by a plurality of apparatuses corresponding to respective processes.

[0002]

2. Description of the Related Art A conventional product processing apparatus will be described with reference to FIG. FIG. 5 is a functional block diagram of a conventional product processing apparatus used in a production line for processing a plurality of products by an apparatus corresponding to each process.

The processing plan creating means 100 creates a plan of a processing flow of a product to be produced, a processing device, a processing condition, etc., and defines a sequence of steps for producing a plurality of products in a product processing plan table. It functions to register the processing flow, the device for processing each process, the processing conditions thereof, and the like.

The process processing means 101 processes the product by the device of each process, and based on the process flow, the processing device, the processing condition and the like of each product registered in the product processing plan table, each process. Function to process multiple products in sequence.

The process progress management means 102 manages the process progress status of each product, and when the product process is started by the device of each process, the process number of the product and the device used for the next process process are selected. Functions to register in the product processing progress management table.

The process waiting product group creating means 103 creates a product group waiting for the processing of each device, and based on the processing device information of the next process registered in the product processing progress management table, the product is processed. When the data of the processing management table is updated, the group of products to be processed for the corresponding apparatus is registered in the processing waiting product management table, and the product processing schedule of the apparatus is established based on this information.

In the conventional product processing apparatus configured as described above, the processing time of the process is set to a fixed time when the product processing schedule is set up.

[0008]

By the way, in a production line in which a plurality of products are processed by an apparatus arranged in each process,
A certain device for sequentially processing products (for example, a cleaning device for removing impurities such as dust from a lot in a semiconductor IC, particularly in a semiconductor line for producing a VLSI) from a lot
The longer the process time is, the more impurities are removed from the product, and the product is closer to a completely clean state. Therefore, the yield of the process and thus the product yield are improved.

However, in the above-mentioned conventional product processing apparatus, since the processing time of each process is set to a fixed time, the device maintenance and the processing waiting lot are performed on the device which performs the subsequent processing of the product. Even if there are too many products that cannot be processed within a certain period of time, or if there are few lots waiting to be processed and products can be processed at any time within a certain period of time, it is not possible to make changes to lengthen the process time. I don't know. Therefore, the impurities are not completely removed from the product,
There is a problem that the yield of the process and thus the total yield of the product cannot be improved.

The present invention has been made in view of the above problems, and an object of the present invention is to make it impossible for a product processing apparatus to perform product processing within a certain time period for an apparatus that performs subsequent processing of products. In some cases, if the product can be processed at any time within a certain period of time, the processing time of a specific process can be changed to a longer time to bring the product closer to a clean state without impurities, thereby improving the process yield and hence the product yield. It is an object to provide an improved product processing device.

[0011]

In order to achieve the above object, the means of the present invention as set forth in claim 1 is, as shown in FIG. 1, for sequentially processing a plurality of products by an apparatus corresponding to each step. As a configuration of the product processing apparatus, a processing plan creating unit that creates a processing plan of a product to be processed, and an apparatus of each process are controlled based on the processing plan of the product created by the processing plan creating unit, and the products are sequentially processed. Processing means for processing,
Process progress management means for managing the progress status of product processing in each process, device status evaluation means for evaluating the status of product processing in the device of each process managed by the process progress management means, and device status evaluation means As a result of the evaluation in the above, if the device that processes the next and subsequent steps of the product cannot process the number of products according to the processing plan within a certain period of time, the processing time changing means that increases and changes the processing time in the specific device is used. Is provided.

[0012] According to a second aspect of the invention, the processing means is a processing plan for preparing a processing plan for a product to be processed as a configuration of a product processing apparatus for sequentially processing a plurality of products by an apparatus corresponding to each process. Creating means, process processing means for controlling the apparatus of each step based on the processing plan of the product created by the processing plan creating means, and sequentially processing the products, and processing for managing the progress of the processing of the product in each step Progress management means, equipment state evaluation means for evaluating the state of product processing in the equipment of each process managed by the treatment progress management means, and the result of evaluation by the equipment state evaluation means When the performing device can process the number of products according to the treatment plan at any time within a fixed time, the processing time changing means for increasing and changing the processing time in the specific device is provided.

According to a third aspect of the present invention, in the above second aspect of the invention, the device state evaluation means waits for a process by the specific device for each specific device among the devices specified by the process progress management means. The number of products waiting to be processed shall be detected.

The processing time changing means is configured to increase and change the processing time by the specific device when the number of detected products waiting to be processed is less than a predetermined number.

[0015]

With the above construction, according to the invention of claim 1, when the processing by the specific device for performing the subsequent process of the product cannot be performed by the device within a certain time, the processing time changing means As the processing time of a product specific process, such as a cleaning process in a semiconductor IC production line, which is expected to improve the quality of the product is increased as the processing time is longer, the processing in the process is almost complete. This is done, for example, by prolonging the cleaning time, the product is kept in a completely clean state without impurities, and the process yield and hence the final yield of the product are improved.

According to the second aspect of the present invention, the processing time changing means 50 is used in the case where the processing by the specified apparatus for processing the next step of the product is possible at any time within the fixed time.
As a result, the processing time of the specific process of the product, for example, the cleaning process is increased and changed, so that the same effect as the invention of claim 1 can be obtained.

According to the third aspect of the present invention, in the operation of the second aspect of the invention, the device state evaluation means detects the number of products waiting to be processed, and when the number of products waiting to be processed is less than a predetermined number, the processing time is changed. Since the processing time of the specific device is increased and changed by the means, it is possible to reliably detect the state in which the processing by the device is possible at any time within a fixed time, and to increase the processing time of the specific device, The operation of the invention of claim 2 can be surely obtained.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An example in which an embodiment of the product processing apparatus according to claim 1 of the present invention is applied to a semiconductor process lot processing apparatus using a computer will be described with reference to FIGS.

First, a first embodiment according to the invention of claim 1 will be described. 1 is a functional block diagram of a semiconductor process lot processing apparatus according to an embodiment, FIG. 2 is a diagram showing an example of a lot processing plan table of the semiconductor process lot processing apparatus, and FIG. 3 is a lot processing progress management table of the semiconductor process lot processing apparatus. FIG. 4 is a diagram showing an example, and FIG. 4 is a diagram showing an example of an apparatus state management table of the semiconductor process lot processing apparatus.

In FIG. 1, the semiconductor process lot processing apparatus comprises a processing plan creating means 10, a process processing means 20, a processing progress management means 30, an apparatus state evaluation means 40 and a processing time changing means 50. Hereinafter, the function of each means will be described in detail.

The processing plan creating means 10 uses the lot name 6
1, the process number 62, the process name 63, the processing device 64, the processing condition 65, the processing time 66 in the lot processing plan table 60 (see FIG. 2) in the auxiliary storage on the auxiliary storage, processing of each process of the lot for each record It has a function to register devices, processing conditions, processing time, and the like.

In a semiconductor line for producing a semiconductor IC, particularly a VLSI, impurities such as dust in the air are one of the factors that reduce the yield of the lot. That is, the longer the cleaning time is, the more impurities are removed from the lot, and the lot becomes closer to a completely clean state, so that the yield of the process and hence the yield of the lot are improved. Therefore, in the processing time item 66, the processing time is registered only for a process in which the processing time of the process affects the yield of the process as described above, and the processing time is registered as 0 for the process that does not affect. . This registration is repeated according to the number of lots.

In this embodiment, the processing time of the cleaning process by the apparatus 2 and the apparatus 6 is registered as 10 and 20, but another factor affecting the yield is the processing time of the water cleaning step after wet etching. , The etching rate of the etching process, the deposition rate of the deposition process, etc. are considered.

Further, the processing plan creating means 10 has a lot processing progress management table 70 (in the auxiliary storage device having the lot name 71, the current processing step number 72 and the processing apparatus 73 of the next step as items as items as shown in FIG. 3),
A function of registering a lot name in the lot name item 71, and a device state management table 80 (FIG. 4) on an auxiliary storage device having a processing device 81, a waiting lot number 82 and a device status 83 as items as shown in FIG. In, the processing device item 81 has a function of registering a device that processes each process. Note that these registrations are repeated according to the number of devices.

Next, the process processing means 20 is operated by the process shown in FIG.
In the lot processing plan table 60 of No., a record in which the process number item 62 value is 1 is searched, and the lot name item 61 value for the processing device of the processing device item 64,
Lot processing information such as a process number item 62 value, a process name item 63 value, a processing device item 64 value, a processing condition item 65 value, and a processing time item 66 value is extracted, and the extracted data is stored in the processing device item 64 of the record. It has a function of transmitting from a computer to a corresponding device.

Further, each of the devices 1, 2, ... Processes the lot based on the lot processing information transmitted from the computer. At the start and end of the lot processing, the lot name, the processing start time ( (Processing end time), current processing step number, processing start information including processing device, and processing end information are transmitted to the computer.

On the other hand, the computer includes the devices 1, 2, ...
When the processing end information is received, a record in which the value obtained by adding 1 to the received lot name and current processing step number and the lot name item 61 value and the step number item 62 value in the lot processing plan table 60 are the same is retrieved, The above-mentioned lot processing information is extracted and transmitted, and in response to this, each of the devices 1, 2, ... Receives lot processing information, transmits processing start information, performs lot processing, and transmits processing end information. Is configured.

In this way, the computer and each device 1,
While exchanging signals with each other, search, extraction, transmission, reception processing and lot processing are repeated until the final step of the lot. Further, these processes are performed in parallel for the number of lots registered in the lot processing plan table 60.

Next, when the computer receives the processing start information from each of the devices 1, 2, ... In the function of the process processing means 20 described above, the processing progress management means 30 has the same lot name as the received lot name. The record including the lot name item 71 value in the lot processing progress management table 70 is searched, and the received current process step number is registered in the current process step number item 72.

At the same time, a record containing the lot name item 61 value and the process number item 62 value in the lot processing plan table 60, which is the same as the value obtained by adding 2 to the received lot name and current processing step number, is searched for, and the processing device is searched. Item 6
The four values are extracted and registered in the processing device item 73 of the next step of the record including the lot name item 71 value of the lot processing management table 70 which is the same as the received lot name.

Further, the lot name item 61 value and the process number item 6 of the lot processing plan table 60 which is the same as the value obtained by adding 1 to the received lot name and current processing step number.
A record containing two values is searched, a processing device item 64 value is extracted, and a device status management table 8 having the same device name as that device name is extracted.
The value 1 is subtracted from the value 82 of the number-of-process-waiting lot item 82 of the record including the value 0 of the processing device item 81.

When the processing progress management means 30 registers the value of the processing equipment item 73 of the next process in the lot processing progress management table 70 in the processing progress management means 40, the device state evaluation means 40 is the same as the processing equipment item 73 value of the next process. A record including the value of the processing device item 81 in the state management table 80 is searched for, and 1 is added to the value 82 of the lot number waiting for processing. In addition, this processing is the processing device item 7 of the next process.
Although it is carried out when the three values are registered, it may be carried out at any time without particular limitation.

Further, if the computer receives from each device the device information indicating the operating condition of the device, such as the processing device and the device status (operating / stopped), the same device status management table as the received device name. A record including the value of the processing device item 81 of 80 is searched, and the received device status is registered in the device status item 83.

Each time the processing time changing means 50 updates the information in the equipment status management table 80 by the equipment status evaluation means 40, the lot name item 71 value and the current processing step number in the first record of the lot processing progress management table 70. A record including the lot name item 61 value and the process number item 62 value of the lot processing plan table 60 that is the same as the value obtained by adding 1 to the item 72 value is searched, and only when the processing time item 66 value is not 0 When a record including the value of the processing device item 81 in the device status management table 80 that is the same as the value of the processing device item 73 is searched and the value of the number of lots waiting to be processed 82 value is 5 or more or the value of the device status item 83 is stopped, that is, a fixed If processing by the device is not possible within the time, calculate the processing time item 66 value (multiply by 2) Alms, it changes the processing time item 66 value. Such processing is repeated record by record up to the last record of the lot processing progress management table 70.

In the first embodiment, it is judged that processing is not possible when the number of lots waiting to be processed is 5 or more, but this is only an example, and the invention of claim 1 is limited to such an embodiment. Not something. Although the processing time is doubled, the calculation method is not particularly limited. Further, the processing time changing means 50 here is carried out every time the information in the device status management table 80 is updated, but it may be carried out any time without any particular limitation.

As described above, in the first embodiment, when the number of lots waiting to be processed is 5 or more or the apparatus status is stopped, that is, the apparatus is operated within a certain period of time, in the specific apparatus for performing the process of the subsequent steps of the lot. When the processing is impossible, the processing time changing means 50 changes the processing time of the specific process (for example, the cleaning process in the above embodiment) of the lot so as to be doubled, for example. The processing can be performed almost completely. That is, by extending the processing time of the cleaning process in the above-mentioned embodiment, the product is kept in a completely clean state free from impurities, and the process yield and hence the final yield of the product are improved.

In the above embodiment, the processing time of the cleaning process is changed, but in the etching apparatus or the deposition apparatus, the processing rate may be changed so as to lower the etching rate or the deposition rate. Good. Further, although the apparatus state of each step is evaluated one after another, the apparatus state of processing subsequent steps may be evaluated.

Further, in this embodiment, the auxiliary storage device is used as the storage means of each table, but the main storage device may be used. A storage means using a list structure may be used instead of the table.

Next, a second embodiment according to the invention of claim 2 will be described. Also in the second embodiment, the configuration of the semiconductor process lot processing apparatus using the computer is as shown in FIGS. 1 to 4 as in the first embodiment.

Only the parts different from the first embodiment will be described below. In the second embodiment, the processing time changing means 50 and the lot name item 71 value of the first record of the lot processing progress management table 70 each time the equipment state evaluation means 40 updates the information of the equipment state management table 80. When the record including the lot name item 61 value and the process number item 62 value in the lot processing plan table 60 that is the same as the value obtained by adding 1 to the current process step number item 72 value is searched, and the processing time item 66 value is not 0, limit,
When a record including the processing device item 81 value of the device status management table 80 that is the same as the processing device item 73 value of the next process is searched, and the number of lots waiting for processing item 82 value is 0 and the device status item 83 value is operating, that is, When the processing by the device is possible at any time within a fixed time, the processing time item 66 value is calculated (multiplied by 2) to change the processing time item 66 value. The lot processing progress management table 70 for such processing is performed for each record.
Repeat until the last record of.

In this embodiment, it is judged that the processing can be performed at any time when the number of lots waiting for processing is 0, but the invention of claim 2 is not limited to such an embodiment. Also,
Although the processing time is doubled, the calculation method is not particularly limited. Further, the processing time changing means 50 here is
Although it is carried out every time the information in the device status management table 80 is updated, it may be carried out any time without particular limitation.

As described above, in the second embodiment, when the number of lots waiting to be processed is 0 and the device status is in operation in the specific device for performing the process of the lot after process, that is, the process by the device is performed within a fixed time. Whenever possible, the processing time changing means 50 can double the processing time of the specific process (for example, the cleaning process) of the lot. That is, by changing the time of the cleaning process to about double, it becomes possible to make the clean state of the product perfect, and it is possible to improve the yield of the product as in the first embodiment.

In the second embodiment, an example in which the processing time of the cleaning process is changed has been described, but in the etching apparatus or the deposition apparatus, the processing for lowering the etching rate or the deposition rate is performed. You may make changes. Further, although the apparatus state of each step is evaluated one after another, the apparatus state of processing subsequent steps may be evaluated.

Further, in the second embodiment, the auxiliary storage device is used as the storage means of each table, but the main storage device may be used. Further, storage means using a list structure may be used instead of the table.

[0045]

As described above, according to the first aspect of the present invention, a product processing apparatus for sequentially processing a plurality of products by an apparatus corresponding to each process is used to process a product to be processed. A process plan creating unit for creating a plan, a process process unit for sequentially processing the products by controlling the apparatus of each process based on the product process plan created by the process plan creating unit, and a product process for each process A process progress management unit that manages the progress status, a device state evaluation unit that evaluates the state of product processing in the device of each process managed by the process progress management unit, and a product evaluation result obtained by the device state evaluation unit. If the device that performs the process after the next process cannot process the number of products according to the processing plan within a certain time, the processing time changing means for increasing and changing the processing time in the specific device is provided. In a specific device that performs various process steps, if the process cannot be performed by the device within a certain period of time, the longer the processing time is, the more specific the process of the product is, such as the cleaning process in the semiconductor IC production line. It is possible to increase and change the processing time of the process that is expected to improve quality, for example, by extending the cleaning time to keep the product in a clean state without impurities, the process yield and hence the final yield of the product can be improved. It is possible to improve.

According to the second aspect of the present invention, a processing plan creating means for creating a processing plan of a product to be processed is provided as a structure of a product processing apparatus for sequentially processing a plurality of products by an apparatus corresponding to each process. And a process processing unit that controls the apparatus of each process based on the product processing plan created by the processing plan creating unit to sequentially process the products, and a process progress management that manages the progress of the product processing in each process. Means, an apparatus state evaluation means for evaluating the state of product processing in the apparatus of each step managed by the processing progress management means, and an apparatus for performing processing of the next and subsequent steps of the product as a result of evaluation by the apparatus state evaluation means If it is possible to process the number of products according to the processing plan at any time within a fixed time, the processing time changing means for increasing and changing the processing time in the specific device is provided. In the case where the specific device for performing the process of (1) can be processed by the device at any time within a fixed time, the longer the processing time, such as the specific process of the product, for example, the cleaning process in the production line of the semiconductor IC, It is possible to increase and change the processing time of the process that can be expected to improve, for example, by extending the cleaning time to keep the product in a completely clean state without impurities, thereby improving the process yield and hence the final yield of the product. Can be planned.

According to the invention of claim 3, in the invention of claim 2, the device state evaluation means waits for the processing by the specified device for each specified device among the devices specified by the process progress management means. Since the number of products waiting to be processed is to be detected, and the processing time changing means is to increase and change the processing time by the specific device when the number of products waiting to be processed detected is less than or equal to a predetermined number, Based on the number, it is possible to reliably detect the state in which the processing by the device is possible at any time within a fixed time, and to increase the processing time of the specific device. Therefore, the effect of the invention of claim 2 is surely obtained. be able to.

[Brief description of drawings]

FIG. 1 is a functional block diagram of a semiconductor process lot processing apparatus in an embodiment according to claims 1 and 2 of the present invention.

FIG. 2 is a diagram showing an example of a lot processing plan table of a semiconductor process lot processing apparatus in an embodiment according to claims 1 and 2 of the present invention.

FIG. 3 is a diagram showing an example of a lot processing progress management table of a semiconductor process lot processing apparatus in an embodiment according to the first and second aspects of the present invention.

FIG. 4 is a diagram showing an example of an apparatus state management table of a semiconductor process lot processing apparatus in an embodiment according to the first and second aspects of the present invention.

FIG. 5 is a functional block diagram of a product processing apparatus in a conventional example.

[Explanation of symbols]

 10, 100 Processing plan preparation means 20, 101 Process processing means 30, 102 Processing progress management means 40 Equipment state management means 50 Processing time changing means 60 Lot processing plan table 61, 71 Lot name 62 Process number 63 Process name 64, 81 Processing Equipment 65 Processing conditions 66 Processing time 70 Lot processing progress management table 72 Current processing step number 73 Processing equipment for the next process 80 Equipment status management table 82 Number of processing waiting lots 83 Equipment status 103 Processing waiting product group creating means

Claims (3)

[Claims] 1. In a product processing device for sequentially processing a plurality of products by a device corresponding to each process, a processing plan creating means for creating a processing plan of a product to be processed, and the processing plan creating means. The process processing means for controlling the devices of the respective processes based on the processed product processing plan to process the products in sequence, the process progress managing means for managing the progress of the product processing in each process, and the process progress managing means. As a result of evaluation by the device state evaluation means for evaluating the state of product processing in the device of each process to be managed and the device state evaluation means, the device that performs the process after the next step of the product follows the processing plan within a certain time. And a processing time changing means for increasing and changing the processing time in the specific device when the number of products cannot be processed. 2. A product processing apparatus for sequentially processing a plurality of products by an apparatus corresponding to each process, and a processing plan creating means for creating a processing plan of a product to be processed, and the processing plan creating means. The process processing means for controlling the devices of the respective processes based on the processed product processing plan to process the products in sequence, the process progress managing means for managing the progress of the product processing in each process, and the process progress managing means. A device state evaluation means for evaluating the state of product processing in the equipment of each process to be managed, and an equipment state evaluation means for evaluating the equipment state evaluation means, and as a result of the evaluation by the equipment state evaluation means, the equipment for performing the process after the next step of the product is a process plan at any time within a fixed time. And a processing time changing means for increasing and changing the processing time in the specific apparatus when the number of products according to the above can be processed. 3. The product processing apparatus according to claim 2, wherein the apparatus status evaluation unit is the number of products waiting to be processed waiting for processing by the specific apparatus for each specific apparatus among the apparatuses designated by the processing progress management unit. The processing time changing means increases and changes the processing time by the specific device when the number of detected products waiting to be processed is less than or equal to a predetermined number.