JP4945010B1 - Shelf management system and shelf management program in semiconductor production line - Google Patents

Abstract

A shelf management system and a shelf management program capable of efficiently performing management on the premise that an operator performs lot loading and unloading operations in a semiconductor production line.
When position determining means 82 determines a position in which the lot is to be stored, position reservation means 83 sets the position as “reserving”. When the warehousing input means 62 accepts the warehousing completion operation, the position reservation means 83 sets the position state to “in use”.
[Selection] Figure 11

Description

  The present invention relates to a shelf management system and a shelf management program for managing information related to a shelf for storing a semiconductor lot in relation to a semiconductor production line including a plurality of processing inspection apparatuses.

  In a semiconductor manufacturing factory, shelves are used as a place for temporarily storing semiconductor lots that are being manufactured. As an example of a shelf management system that manages the relationship between each lot in the middle of manufacture and the mass (position) of the shelf, a production line management system described in Patent Document 1, for example, is known. In some factories, the same shelf may be shared by lots in different processes or different processing stages.

JP-A-11-254275

However, the conventional technique has a problem that it is difficult to perform management on the premise that an operator performs lot loading and unloading operations.
For example, the technique disclosed in Patent Document 1 cannot be used in a factory that does not include a transporter, an automatic loading stocker, or the like, because the transporter automatically carries in and out lots. In particular, when a worker carries out lot loading and unloading work, a mechanism for the worker to distinguish each lot is required. Identification information (RFID tag, barcode, etc.) is given to each lot, but it is necessary to use an RFID reader or barcode reader for the operator to recognize this, and the work becomes complicated. Efficiency is reduced.

  The present invention has been made to solve such problems, and a shelf management system and a shelf management program capable of efficiently performing management on the premise that an operator performs lot loading and unloading operations. The purpose is to provide.

In order to solve the above problems, the shelf management system according to the present invention is:
A shelf management system for managing information relating to a shelf for storing a semiconductor lot in relation to a semiconductor production line,
The shelf contains multiple positions for storing lots,
Shelf management system
Shelf information storage means for storing position information for each position included in the shelf,
Position information
Lot number of the lot associated with each position,
Shelf information storage means including position status regarding whether each position is not associated with any lot, reserved for the associated lot, or in use for the associated lot When,
A position determination means for determining the position in which the lot is to be stored;
A position reservation means for associating the lot with the position determined by the position determination means;
A shelf display means for displaying a shelf, a position, a position state of the position, and a lot number representing a lot associated with the position,
As a receipt completion operation indicating that a lot has been received at a position, it has a receipt input means for receiving an input of a position or a lot number,
When the position determination means determines the position, the position reservation means determines that the position status of the determined position is being reserved,
When the warehousing input means accepts the warehousing completion operation, the position reservation means determines that the position state of the position related to the accepted warehousing completion operation is in use.

The warehousing completion operation may be an operation for the area where the position or lot number is displayed on the shelf display means.
The shelf management system may further include a change input unit that receives an input of a change operation for changing a position associated with one of the lot numbers from the position before the change to the position after the change.
The shelf management system further includes a position release means for canceling the association between the lot and the position, and the change operation is a move operation for designating a pair consisting of the position or lot number before the change and the position after the change. In addition, when the change input means accepts the move operation, the position release means cancels the association between the position before the change and the lot number, and the position reservation means associates the lot number with the position after the change, and after the change. The position state of the position may be in use.
The shelf information storage means further stores saved lot information including the lot number of the lot saved from the shelf, and the change operation is included in the save operation for specifying the position or lot number before the change and the saved lot information. When the change input means accepts the save operation, the shelf information storage means stores the lot number related to the save operation in the saved lot information and releases the position. The means cancels the association between the position before the change and the lot number, and when the change input means accepts the restoration operation, the shelf information storage means deletes the lot number related to the restoration operation from the saved lot information, and the position reservation means In addition to associating the changed position with the lot number, the position state of the changed position may be in use.
The shelf information storage unit may further store change history information that associates the position before the change and the position after the change, and the position determination unit may determine the position where the lot is to be stored based on the change history information.
The shelf display means and the warehousing input means may be configured using a touch panel.
The shelf display means may display the positions arranged in two dimensions or three dimensions.
The semiconductor production line includes a plurality of processing inspection devices, and the shelf management system
A device-shelf information storage means for storing device-shelf information associating one of a plurality of shelves with each of the processing inspection devices;
Signal receiving means for receiving a signal, the signal including a processing inspection start signal indicating that the processing inspection of the lot has been started and a processing inspection end signal indicating that the processing inspection of the lot has been completed. The inspection start signal and the processing inspection end signal include a device number representing a processing inspection device and a lot number, a signal receiving means,
Lot storage means for storing lot information for each of the lots, the lot information including travel flow information that represents the order of a plurality of processing inspection devices that should process the lot using device numbers; ,
In response to reception of the processing inspection start signal, further comprising position release means for canceling the association between the lot and the position related to the received processing inspection start signal,
The position determining means may determine a position to store a lot related to the received processing inspection end signal based on the received processing inspection end signal, position information and lot information in response to receiving the processing inspection end signal. .

  The shelf management program according to the present invention causes a computer to function as the above-described shelf management system.

  According to the shelf management system and the shelf management program according to the present invention, the position determination unit determines the position where the lot is to be stored, and the shelf display unit displays each position and the lot number in association with each other. By checking the shelf status display window, it is possible to know which lot number is stored in which position. For this reason, it is possible to efficiently manage the shelves and lots on the premise that the worker carries out the work of carrying in and carrying out lots.

It is a figure which shows the structure containing the shelf management system which concerns on Embodiment 1 of this invention. It is a figure which shows the example of a structure of the apparatus-shelf information of FIG. It is a figure which shows the example of a structure of the shelf classification information of FIG. It is a figure which shows the example of a structure of the position information of FIG. It is a figure which shows the example of a structure of the save lot information of FIG. It is a figure which shows the example of a structure of the change log information of FIG. It is a figure which shows the example of a structure of the travel flow information of FIG. It is a figure which shows the example of a structure of the progress information of FIG. It is a figure which shows the example of a structure of the recipe information of FIG. It is a flowchart which shows the flow of a process of the shelf management system of FIG. It is an example of the shelf state display window which the shelf display means of FIG. 1 displays. It is an example of the confirmation window which the shelf display means of FIG. 1 displays. It is an example of the save lot display window which the shelf display means of FIG. 1 displays. It is an example of a screen which the shelf display means of FIG. 1 displays during the retreat operation.

Embodiments of the present invention will be described below with reference to the accompanying drawings.
Embodiment 1 FIG.
FIG. 1 shows a configuration including a shelf management system 10 according to the present invention. The shelf management system 10 is provided in association with a semiconductor production line. The semiconductor production line includes a plurality of process modules 20, and each process module 20 includes one or more processing inspection apparatuses 30.

The processing inspection apparatus 30 is an apparatus for processing a semiconductor or an apparatus for inspecting a semiconductor, and does not include an apparatus not related to processing or inspection (for example, a delivery apparatus or a transport apparatus). Moreover, there exists a photographic apparatus in the processing apparatus, for example. The photographic apparatus prints a pattern drawn on a mask onto a wafer. Further, some inspection apparatuses include, for example, film thickness measurement.
Note that the combination and processing order of the processing / inspection apparatus 30 for processing each lot of semiconductor to be manufactured may differ from lot to lot.

  Each process module 20 is provided with a shared shelf 40 for temporarily storing a semiconductor lot 41. Although one shared shelf 40 is shown for each process module 20 in FIG. In an actual factory, a single process module 20 is provided with a plurality of shared shelves 40 (generally less than the number of processing inspection devices 30), and each of these shared shelves 40 is connected to a plurality of processing inspection devices 30. It is often configured to be shared.

  The shared shelf 40 includes a plurality of squares, that is, spatial positions 42, and one lot 41 can be stored in each position 42. The factory worker enters the lot 41 that has undergone the processing inspection process in the processing inspection apparatus 30 into an appropriate position 42 of the shared shelf 40, and carries out the lot 41 stored in the position 42 to process the inspection apparatus. 30. Each lot 41 is assigned a unique lot number, and each lot 41 can be uniquely identified by this lot number. The lot number is assigned using a well-known method, for example, using an RFID tag. The shelf management system 10 manages the lot 41 using this lot number.

  In each process module 20, in addition to the shared shelf 40, a dedicated shelf (not shown) is provided in each processing inspection apparatus 30. These shelves include a pre-processing shelf that stores a lot 41 to be input into the processing inspection apparatus 30 and a post-processing shelf that stores a lot 41 taken out from the processing inspection apparatus 30. Although the shelf before processing and the shelf after processing are not managed by the shelf management system 10 in this embodiment, they are not shown, but can be managed by the same method as the shared shelf 40.

  The processing inspection apparatus 30 performs processing inspection on the lot 41. Each of the processing inspection devices 30 has a function of recognizing the lot number of the lot 41 input for processing inspection. Lot number recognition is appropriately performed using a well-known technique. For example, an RFID tag is attached to each lot 41, and the lot number is recognized by reading the RFID reader provided in the processing inspection apparatus 30. Can do.

Further, the processing inspection apparatus 30 has a function of generating and outputting a processing inspection start signal X1 and a processing inspection end signal X2 in accordance with the start and end of the processing inspection processing.
The processing inspection start signal X1 is a signal indicating that the processing inspection device 30 has started processing inspection processing for at least one lot 41 (or that it is about to start processing inspection processing). The processing inspection end signal X2 is a signal indicating that the processing inspection device 30 has finished the processing inspection processing for at least one lot 41. Each of the processing inspection start signal X1 and the processing inspection end signal X2 includes information (for example, an apparatus number) for specifying the processing inspection apparatus 30 and a lot number (if there are a plurality of lot numbers of the lot 41 subjected to the processing inspection) Lot number list).

  The shelf management system 10 is provided in association with such a semiconductor production line, and manages information relating to a shelf for storing a semiconductor lot. The processing inspection apparatus 30, the shared shelf 40, and the lot 41 are objects to be managed by the shelf management system 10, and in this embodiment, they do not constitute a part of the shelf management system 10 itself. The management system 10 may be treated as part of the management system 10.

  The shelf management system 10 includes a PC (personal computer) 50, a touch panel 60, and a host server 70. One PC 50 and one touch panel 60 are provided for each process module 20, and one host server 70 is provided for a plurality of process modules 20 (all process modules 20 in the example of FIG. 1).

The PC 50, the touch panel 60, and the host server 70 have a configuration as a well-known computer.
For example, the host server 70 includes a calculation unit 80 that performs a calculation and a storage unit 90 that stores information. The calculation means 80 includes a CPU (Central Processing Unit), and the storage means 90 includes a semiconductor memory and an HDD (Hard Disk Drive). Although not particularly shown, the host server 70 includes an input device as input means used for a user to input information. This input device is, for example, a mouse or a keyboard. The host server 70 includes an output device as output means for outputting information to the user. The output device is a display device such as a liquid crystal display, but may be a printing device such as a printer.
Similarly to the host server 70, the PC 50 and the touch panel 60 also include a calculation unit, a storage unit, an input unit, and an output unit. However, in the touch panel 60, the input means is integrated with the output means as is well known.

  The processing inspection apparatus 30, the PC 50, the touch panel 60, and the host server 70 are connected to be communicable with each other via a LAN (local area network) 100. In particular, the processing inspection apparatus 30 has a function of transmitting a processing inspection start signal X1 and a processing inspection end signal X2 to another computer (for example, the host server 70) via the LAN 100.

  The computing means (not shown) of the PC 50 functions as the shelf display means 51 by executing the shelf management PC program stored in the storage means (not shown), and the others described in this specification. Realize the function. The shelf display means 51 includes information for identifying the shared shelf 40 of the corresponding process module 20 (for example, the shelf name of the shared shelf 40) and information for identifying each position 42 of the shared shelf 40 (for example, viewing the shared shelf 40 from the front). The position of each position 42 in this case) and information for identifying the lot 41 associated with each position 42 (for example, the lot number of the lot stored in each position) is displayed in association with each other.

Further, the calculation means (not shown) of the touch panel 60 executes the shelf management touch panel program stored in the storage means (not shown), whereby the shelf display means 61, the warehousing input means 62, and the change input means 63. As well as other functions described herein.
The shelf display unit 61 has a function of displaying information related to the shared shelf 40, similarly to the shelf display unit 51 of the PC 50.

  The warehousing input means 62 has a function of receiving a warehousing completion operation indicating that a specific lot 41 has been warehousing at an arbitrary position 42. For example, the operator inputs the information indicating that the warehousing is completed to the shelf management system 10 by performing the warehousing completion operation via the warehousing input means 62 after warehousing the lot 41 at the position 42.

  The change input means 63 has a function of accepting a change operation indicating that the storage position of the lot 41 is changed. For example, when a worker stores a lot 41 to be stored at a certain position 42 at another position 42, the worker performs a change operation via the change input means 63 to change the position to the shelf management system. Enter 10.

The computing means 80 of the host server 70 executes a shelf management host server program (not shown) stored in the storage means 90, thereby causing the signal receiving means 81, the position determining means 82, the position reservation means 83, and the position release. Acts as a means 84 and implements other functions described herein.
The above shelf management PC program and shelf management touch panel program and the shelf management host server program constitute the shelf management program according to the present embodiment.

  The signal receiving unit 81 has a function of receiving a signal from an external computer or the like. The received signal is, for example, a machining inspection start signal X1 or a machining inspection end signal X2. These signals are transmitted from the processing inspection apparatus 30 via the LAN 100, for example.

  The position determining means 82 has a function of determining the shared shelf 40 and the position 42 in which the lot 41 is to be stored. This function is executed, for example, in response to the signal receiving means 81 receiving the machining inspection end signal X2. That is, when the processing inspection device 30 finishes the processing inspection processing, the storage position of the lot 41 taken out from the processing inspection device 30 is determined accordingly.

  The position reservation unit 83 has a function of associating the lot 41 with the position 42. This association is performed by associating the lot number of the lot 41 with the position 42 and changing the position state (FIG. 4, described later) from “available” to “reserved”. This function is executed in response to, for example, the position determination means 82 determining the position 42.

  The position release means 84 has a function of canceling the association between the lot 41 and the position 42. The cancellation of the association includes changing the position state of the position 42 from “reserved” or “in use” to “empty”. This function is executed, for example, in response to the signal receiving means 81 receiving the machining inspection start signal X1. That is, when the processing inspection apparatus 30 starts the processing inspection processing of the lot 41, the position 42 previously occupied by the lot 41 is released accordingly and can be reserved for other lots 41. become.

The storage unit 90 of the host server 70 includes an apparatus-shelf information storage unit 91, a shelf information storage unit 92, and a lot storage unit 93.
The device-shelf information storage unit 91 stores device-shelf information D1 as information relating to each of the processing inspection devices 30.

FIG. 2 shows an example of the configuration of the device-shelf information D1. The device-shelf information D1 is information that associates one of the shared shelves 40 with each of the processing inspection devices 30.
A device number that is information for uniquely identifying the processing inspection device 30 is associated with a shelf that can be used in association with the processing inspection device 30. The “shelf that can be used in connection with the processing inspection apparatus 30” is, for example, a shelf that is determined to store a lot waiting for processing by the processing inspection apparatus 30. In some cases, a plurality of shelves can be used for one processing inspection apparatus 30, and the usable shelves are represented by a list including one or more shelf names (see FIG. 3, for example, alphanumeric strings). Further, the same shared shelf 40 may be associated with the plurality of processing inspection apparatuses 30 as usable shelves.

Returning to FIG. 1, the shelf information storage unit 92 stores shelf type information D2, position information D3, save lot information D4, and change history information D5 as information relating to each of the shared shelves 40.
FIG. 3 shows an example of the configuration of the shelf type information D2. The shelf type information D2 is information that defines the operation of the position determination unit 82 for the shared shelf 40. The shelf type information D2 associates a shelf name, which is information for uniquely identifying the shared shelf 40, and information related to the shared shelf 40. The information related to the shared shelf 40 includes the number of positions, the position for special express, the position for special use, the change learning threshold, the priority condition reference order, and the priority condition.

  The number of positions represents the number of positions (space for storing lots) provided in the shared shelf 40. The limited express position is a list of position coordinates representing positions that can be used only by those corresponding to the “limited express item” in the lot. For example, if the priority of a lot (see FIG. 8) is equal to or higher than a specific value, the lot is treated as an express product.

  Here, the position coordinates are expressed as “D21” for the position (2, 1) in the second row from the top and the first column from the left, for example, and the leading “D” indicates the position coordinates of the character string. The second character “2” indicates the ordinate of the position, and the third character “1” indicates the abscissa of the position. Note that this notation “D21” is an example in which the positions are two-dimensionally arranged vertically and horizontally, but if the positions are three-dimensionally arranged, a digit representing the depth is further added.

  The special application position is a list of position coordinates representing positions that can be used only by the lot before or after the processing of the specific processing inspection apparatus 30. For example, when a relatively long storage period is required after processing of a certain processing inspection apparatus 30, a lot for processing the processing inspection apparatus 30 can use a position for special applications. The definition of which processing inspection device 30 before or after processing can use the position for special use may be additionally defined in, for example, the device-shelf information D1, or may be defined in another format. May be.

  The change learning threshold value is a reference for determining whether or not to reflect the changed contents in the determination by the position determining means 82 when the position determined by the position determining means 82 for a certain lot is changed by an operator. For example, even though it is determined that the position determination means 82 should store a lot in the position (1, 1), the worker may change it to the next position (1, 2) for some reason. . When the change learning threshold is 3, if the change from (1,1) to (1,2) is less than 2 times, the position determination means 82 does not learn this change and the operation is not changed. If the position determination means 82 learns this change and the position where any lot is to be stored next is determined to be (1, 1), this is changed to (1, 2). Change to and make a reservation.

  The priority condition represents a priority condition to be referred to when the position determination unit 82 determines a position where each lot is to be stored. The priority condition includes four items: shelf type, priority position, mask priority, and batch priority. The priority condition reference order represents the order of referring to these four priority conditions. Details regarding the priority condition and the priority condition reference order will be described later in relation to the operation of the position determining means 82 (step S4 in FIG. 10).

FIG. 4 shows an example of the configuration of the position information D3. The position information D3 is information regarding each position included in the shared shelf 40. The position information D3 associates the shelf name of each shared shelf 40 (corresponding to the shelf name in FIG. 3) and information on each position provided in the shared shelf 40.
The number of positions represents the number of positions that the shared shelf 40 has.

The position information is represented by an array, and one element is defined for one position. Each element includes position coordinates, position state, lot number, reservation time, warehousing time, and processing condition information.
The position coordinates are coordinates representing the position of the position on the shared shelf 40. For example, the position coordinates of the position in the second row from the top and the first column from the left are represented as (2, 1). As described above, in the data, this position coordinate is expressed as “D21”.

  The position state represents the relationship between the position and the lot. “Free” indicates that the position is not associated with any lot. “Reserving” indicates a state in which the position is associated with a lot and is reserved for the lot. “In use” indicates that the associated lot has already been received and is in use.

  The lot number (corresponding to the lot number in FIG. 8) is information for uniquely identifying the lot associated with the position. “A lot is associated with a position” includes a state in which the position is reserved for the lot and a state in which the lot is already stored in the position. If no lot is associated with the position, the lot number for that position is blank.

The reservation time represents the time (date and time) when the position was last reserved for any lot.
The warehousing time represents the time (date and time) when any of the lots was garnished at the last position.
The processing condition information corresponds to the lot processing condition information (described later with reference to FIG. 8) associated with the position.

FIG. 5 shows an example of the configuration of the save lot information D4. The evacuation lot information D4 is information relating to the lot evacuated from the shared shelf 40.
The term “evacuation” means that the lot once placed in the shared shelf 40 is saved in a storage place other than the shared shelf 40 (for example, on a flat table placed beside the lot). For example, when the shared shelf 40 is full, the lot is evacuated in order to make room for a limited express product lot. By evacuating, the lot can be returned to the shared shelf 40 when the shared shelf 40 has room, and the information relating to the lot can also be returned to the state before the evacuation. In addition, the worker of the processing inspection apparatus performs work with priority on the lot in the shared shelf 40.
The evacuation lot information D4 associates the shelf name of each shared shelf 40 (corresponding to the shelf name in FIG. 3) and information on each lot evacuated from the shared shelf 40.

The number of evacuated lots represents the number of lots evacuated from the shared shelf 40.
The save lot information is represented by an array, and one element is defined for one save lot. Each element includes a lot number, a save time, a travel flow number, processing condition information, and a process code.
The lot number corresponds to the lot number in FIG. 8 and is information for uniquely identifying the lot.
The evacuation time represents the time (date) when the lot was evacuated from the shared shelf 40.
The travel flow number corresponds to the travel flow number in FIG. 7 and represents which travel flow is applied to the lot.
The processing condition information corresponds to the processing condition information of the lot (described later with reference to FIG. 8).
The process code is information for uniquely identifying the process, and corresponds to the process code in FIG.

FIG. 6 shows an example of the configuration of the change history information D5. The change history information D5 associates the shelf name of each shared shelf 40 (corresponding to the shelf name in FIG. 3) with the history that the position has been changed in the shared shelf 40.
The number of change histories represents the number of change histories related to the shared shelf 40, that is, the number of times the position has been changed in the past.

The change history information is represented by an array, and one element is defined for one change route. The “change path” represents a set of position coordinates before and after the change when the position where a certain lot is to be stored is changed. For example, when the position determining means 82 determines the position where the lot is to be stored as (1, 1), and the worker actually sets the position where the lot is stored as (1, 2), the position coordinates before change are (1, 1), the post-change position coordinates are (1, 2), and the change path is {(1, 1), (1, 2)}. Further, for example, even if two changes are made and the position coordinates before the change are the same, if the post-change positions are different, the change paths are different.
Each element of the array includes, in addition to the change path, a batch process change count, a mask required change count, another change count, and a last change date and time.

The batch process change count represents the number of change histories related to the lot for which the batch condition ID is defined in the progress information D7 (described later with reference to FIG. 8). The number of required mask changes represents the number of change histories related to a lot for which mask information is defined in the progress information D7 (FIG. 8) (that is, a lot that requires a mask). The number of other changes represents the number of change histories related to a lot for which neither a batch condition ID nor mask information is defined. Although not shown in FIG. 6, the total number of changes indicating the total number of changes may be stored. The total number of changes may be simply the sum of the number of batch processing changes, the number of required mask changes, and the number of other changes, but when both the batch condition ID and mask information are defined for the same lot. May be counted as one time.
The last change date and time represents the date and time when the change history was last recorded for the change route.

Returning to FIG. 1, the lot storage means 93 stores travel flow information D6, progress information D7, and recipe information D8 as lot information relating to each lot. A recipe information storage unit that stores the recipe information D8 may be separately provided.
FIG. 7 shows an example of the configuration of the travel flow information D6. The travel flow information D6 associates the travel flow number with the contents of the processing inspection process in the travel flow. The travel flow number is associated with each lot number in the progress information D7 (described later with reference to FIG. 8).

The contents of the processing inspection process include the number of processes and process information.
The number of steps represents the number of steps in the travel flow.
The process information is represented by an array, and one element is defined for one process.

Each element of the process information includes a processing stage, a work name, a process code, a usable processing inspection apparatus, a storage condition, and a recipe ID.
The processing stage represents the progress stage of processing in the travel flow.
The work name is a name indicating the type of the process, and for example, a character string such as “WET”, “photograph”, “diffusion”, or “etcher” is designated.
The process code is information that uniquely identifies the process.
The usable processing inspection apparatus is a list of processing inspection apparatuses 30 that can be used in the process. Each processing inspection device 30 included in the list is represented by a device number (corresponding to the device number in FIG. 2).
The storage condition represents a waiting time required after the process of the process is completed and before the process of the next process is started.
The recipe ID is information for identifying recipe information applied to the lot, and corresponds to the recipe ID in the recipe information (FIG. 9).

  The content of the travel flow information D6 can be updated at any time. For example, the operator may specify the machining inspection device that can be used that day and update the “usable machining inspection device” in the travel flow information D6 before starting the machining inspection device 30 every day.

  FIG. 8 shows an example of the configuration of the progress information D7. The progress information D7 associates the lot number with the progress of processing inspection processing for the lot. The progress status includes priority, travel flow number, processing condition information, processing stage, work name, process code, storage condition, monitoring end process, notice notification period, storage period, and stepper file name.

The priority represents the priority at which the production of the lot should be rushed. For example, if it is 1, it is a lot corresponding to the express product, and if it is 0, it is a normal lot.
The travel flow number represents which of the travel flow information defined in the travel flow information D6 (FIG. 7) is applied to the lot.

  The processing condition information includes a batch condition ID, a batch position ID, a batch maintenance ID, and mask information as four items representing the processing conditions.

  The batch condition ID is an alphanumeric string and represents a processing condition related to batch processing. Batch processing means that a plurality of lots are processed simultaneously by one processing inspection apparatus 30. The batch condition ID is a code indicating a difference in processing conditions in each process. When the batch condition IDs of a plurality of lots match, it is efficient to process the lots simultaneously with the same processing inspection apparatus 30. . For lots that do not require batch processing, for example, the batch condition ID is not specified and is blank.

  The batch condition ID can be determined as follows, for example. First, a travel flow number and a processing stage corresponding to the lot number are acquired for a lot with reference to the progress information D7. Then, the travel flow information D6 is referred to using the travel flow number and the processing stage, and the recipe ID specified in the “acquired processing stage + 1st” process in the corresponding travel flow is specified. The recipe ID D8 is used to refer to the recipe information D8 to identify lots having the same temperature, baking time, and the like. In this way, a group of lots where all items other than the recipe ID in the recipe information are the same (in the example of FIG. 9, a group of lots where both items J1 and J2 match) are grouped together and the same batch condition ID ( (For example, a 4-digit number).

  The batch position ID is an alphanumeric string, and represents the position in the diffusion system when the same process is performed a plurality of times. The diffusion system represents a travel flow in which a combination of lots to be processed at the same time is determined and a plurality of processes need to be processed continuously, and the non-diffusion system represents the other travel flow. For example, a piece of travel flow information is composed of 600 pieces of process information, and there are 3 of the same processes in 600. Is it the 1st process or the 2nd process among the 3 processes? Indicates whether it is the third step. That is, the batch position ID is a relative position from the beginning of the current progress system in the diffusion system / non-diffusion system.

  For the batch position ID, for example, a 2-digit number is attached with reference to the travel flow information D6.

  The batch maintenance ID is an alphanumeric string, and is a code for identifying the constituent lot of the batch to be maintained in the diffusion system. The batch maintenance ID is used to determine a lot reserved for simultaneous processing in the diffusion system.

For batch maintenance IDs, the same 4-digit number for each group of batches that can be processed together by the processing inspection device (a number specified in advance) for a group of lots with the same batch condition ID and batch position ID. Add. (In other words, the meaning of reserving the use of the processing inspection apparatus in this unit is included.)
The operation of assigning the batch condition ID, the batch position ID, and the batch maintenance ID as described above may be performed by a worker or any of the computers included in the shelf management system 10.

  In this way, the batch condition ID, the batch position ID, and the batch maintenance ID are determined in advance. For example, as each lot processed by a recipe having the same recipe ID, a batch condition ID “0001010001” in the progress information D7 If there are a plurality of lots to which the batch position ID / batch maintenance ID is assigned, these lots can be collectively processed at one processing inspection apparatus 30. Further, if there are a plurality of lots to which batch condition ID, batch position ID, and batch maintenance ID of “0001010002” are assigned, these can be separately collected and processed by one processing inspection apparatus 30 at a time.

  The batch position ID and the batch maintenance ID may be treated as a part of the batch condition ID (that is, the batch condition ID may include the batch position ID and the batch maintenance ID. In this case, the batch position ID and the batch maintenance ID are included. Only when the batch condition IDs match, the batch condition IDs match as a whole). For example, the batch condition ID is represented by a 4-digit number, the batch position ID is represented by a 2-digit number, and the batch maintenance ID is represented by a 4-digit number, and may be treated as a continuous 10-digit number.

The mask information represents processing conditions related to mask processing. Since the mask processing requires different setups for each lot, even when a plurality of processing inspection apparatuses 30 are prepared for the same process, only a part of the processing inspection apparatuses 30 corresponding to a specific mask may be provided. The mask information specifies a mask corresponding to the lot. When the mask information of a plurality of lots matches, it is efficient to process these lots simultaneously with the same processing inspection apparatus 30. For lots that do not require such mask processing, for example, mask information is not specified and is blank.
The definition of which processing inspection apparatus 30 corresponds to which mask may be defined in addition to, for example, the apparatus-shelf information D1, or may be defined in another format. Note that the setting on the processing inspection apparatus 30 (for example, photographic apparatus) side in accordance with such a definition is reset every time the process proceeds. Also, the setting of parameters on the processing inspection apparatus 30 side according to the batch conditions and recipe information is reset every time the process proceeds.

The process stage represents the process progress stage in the travel flow of the lot corresponding to the process stage of FIG. For example, a value indicating what number of processes defined in the process information of the travel flow information D6 (FIG. 7) is completed is designated.
The work name and process code represent the work name and process code of the process that has been processed last for the lot. Alternatively, the work name and process code may represent the work name and process code of the process to be processed next for the lot. Further, the work name and process code correspond to the work name and process code of FIG.

The storage condition corresponds to the storage condition of FIG.
The monitoring end process represents the monitoring end process of the storage period. The advance notice period represents the advance notice period of the storage period. The storage period represents the monitoring time of the storage period. This storage period may correspond to the storage condition of the travel flow information D6 (FIG. 7).
Since the meaning of the stepper file name is obvious to those skilled in the art, the description is omitted.

  Note that the content of the progress information D7 in FIG. 8 is updated as the processing of the lot proceeds. For example, the processing stage is incremented by 1 each time the lot process proceeds. In addition, the processing condition information, work name, process code, storage condition, monitoring end process, notice period, storage period, and stepper file name are updated as needed with reference to the travel flow information D6 (FIG. 7) and other information. Is done.

  FIG. 9 shows an example of the configuration of the recipe information D8. The recipe information D8 associates the recipe ID with the contents of the recipe represented by the recipe ID. The recipe includes items J1 and J2. Items J1 and J2 are both parameters set in the processing inspection apparatus. For example, the item J1 is a numerical value representing the processing temperature in the processing inspection apparatus, and the item J2 is a numerical value representing the processing time (for example, the time for baking a lot) in the processing inspection apparatus. Note that items other than temperature and time may be defined.

The operation of the shelf management system 10 configured as described above and the business flow associated therewith will be described using the flowchart of FIG. 10 and the screen examples of FIGS.
When the processing inspection process is completed in any of the processing inspection devices 30, the processing inspection end signal X <b> 2 is transmitted from the processing inspection device 30 to the host server 70. The processing inspection end signal X2 includes the device number of the processing inspection device 30 and the lot number (one or more) of the lot subjected to the processing inspection.

  The process shown in FIG. 10 is started in response to the signal receiving means 81 of the host server 70 receiving this processing inspection end signal X2 (step S1). When a plurality of lot numbers are included in the processing inspection end signal X2, the process of FIG. 10 is executed in parallel for each lot.

  Next, the position determination means 82 identifies which processing inspection apparatus 30 is the next process of the lot, and acquires the apparatus number (step S2). In step S2, the position determination means 82 increases the value of the processing stage in the progress information D7 of the lot by 1, and refers to the “usable processing inspection apparatus” corresponding to the new processing stage in the travel flow information D6. . When there is only one device number designated as the “usable processing inspection device”, the processing inspection device in the next process is the processing inspection device 30 represented by the device number. When there are a plurality of device numbers designated as “available processing inspection devices”, one processing inspection device 30 is selected from them.

  Here, in the selection of the processing inspection device 30, the device-shelf information D1 (FIG. 2), the shelf type information D2 (FIG. 3), the position information D3 (FIG. 4), and the like may be referred to. For example, for a lot that is a limited express product, a search is made for a shared shelf 40 in which one of the positions for the limited express is vacant, and a processing inspection device whose shared shelf 40 is included in the “usable shelf” is selected. Also good. Similarly, for a lot for special use, a shared shelf 40 in which one of the positions for special use is empty is searched, and the processing inspection apparatus 30 in which the shared shelf 40 is included in the “usable shelf” is searched. You may choose.

  In addition, as a reference when selecting one of the plurality of processing inspection apparatuses 30, for example, in a process having a long processing time, lots having the same batch condition ID are processed simultaneously by the same processing inspection apparatus 30. This can improve the processing efficiency. When lots having the same batch condition are processed simultaneously, the unit of processing can be 1 to 6 lots. Further, the conveyance time may be shortened by conveying a plurality of lots simultaneously. Further, lots having the same batch condition ID as the lots that have been once transported may be transported continuously. In addition, lots having the same batch condition ID may be arranged in units of processes, or a plurality of continuous processes may be arranged as a unit.

  As described above, the host server 70 updates the other contents of the progress information D7 so as to correspond to the new processing stage as the processing stage value is increased by 1. For example, referring to the travel flow information D6 (FIG. 7), the processing condition information, work name, process code, storage condition, monitoring end process, advance notice period, storage period, and stepper file name are updated.

  Next, the position determining means 82 determines the shared shelf 40 in which the lot is to be stored (step S3). Here, the position determination means 82 refers to the device-shelf information D1 to obtain a shelf that can be used for the processing inspection apparatus 30 in the next process, and selects one shared shelf 40 to be stored from among the shelves.

  An example of this selection algorithm can be configured as follows, for example. As a selection criterion, for example, the batch condition ID and mask information of the lot can be used. A batch condition ID is specified for the lot, and another lot having the same batch condition ID is already reserved or in use on one of the shared shelves 40 that can be used by the processing inspection apparatus 30 in the next process. If so, the shared shelf 40 may be selected. Similarly, mask information is specified for a lot, and another lot having the same mask information is already reserved or in use in one of the shared shelves 40 that can be used by the processing and inspection apparatus 30 in the next process. If so, the shared shelf 40 may be selected. Further, when neither the batch condition ID nor the mask information is specified for the lot, the shared shelf 40 having the most “vacant” positions may be selected.

  Next, the position determining means 82 determines the position where the lot is to be stored (step S4). The position is determined based on the progress information D7 of the lot, the travel flow information D6 related to the lot, the shelf type information D2 of the target shared shelf 40, and the position information D3.

In step S4, the position determination means 82 first refers to the priority condition reference order of the shelf type information D2, and applies the priority condition according to the order defined therein.
Among the priority conditions, “mask priority” and “batch priority” are criteria that give priority to the lot processing conditions.

  For example, “Batch priority” is specified at the top of the priority condition reference order and the “Batch priority” flag is set to ON, or “Shelve type” is specified at the top of the priority condition reference order. If “batch storage” is specified in “shelf type” and the “batch priority” flag is set to ON, the position determination means 82 determines the position based on the batch condition ID of the lot. To decide.

For example, with reference to the position information D3, it is determined whether another lot having the same batch condition ID as that lot is stored in the shared shelf 40. If it is stored, the “vacant” position among the positions adjacent to this is selected. If there is no “vacant” position in the adjacent position, the closest empty position is selected.
If lots having the same batch condition ID are not stored, it is determined whether or not a lot having the same batch condition ID is reserved. If it is reserved, the “vacant” position among the positions adjacent to this is selected. If there is no “vacant” position in the adjacent position, the closest empty position is selected.

  On the other hand, when the “batch priority” flag is set to off, or when another lot having the same batch condition ID as that lot is not reserved or stored in the shared shelf 40, If the ID is not specified, the position determining means 82 determines the position using the next priority condition without using the batch condition ID.

  Among the priority conditions, “mask priority” is processed in the same manner as “batch priority”. That is, the position determining means 82 determines the positions so that lots having the same mask information are adjacent to each other in principle.

  As described above, when the shelf type information indicates the processing condition priority, the position determination unit 82 determines whether another lot having the same processing condition as the processing condition (batch condition ID or mask information) of the lot is a position. When the position where the lot is to be stored is determined, the position closer to the position associated with the other lot is prioritized. For this reason, if the worker stores the lots according to this determination, the lots to be processed by the same processing inspection apparatus 30 can be collected in a close range at the same time, and the work efficiency is improved.

  As described above, the setting on the processing inspection apparatus 30 side according to mask information and batch conditions is reset every time the process proceeds. Here, according to the present embodiment, as described above, lots having the same processing conditions can be collected at close positions and concentrated on a small number of processing inspection apparatuses 30, so that a plurality of processing inspections at distant positions can be performed. It is not necessary to perform the setting correction work in each device 30 (or the number of processing inspection devices 30 that require the setting correction work can be reduced), and the work efficiency is improved.

Among the priority conditions, “shelf type” and “priority position” are standards that do not depend on the lot processing conditions.
When a value representing “random storage” is designated in the “shelf type”, the position determination unit 82 randomly selects a position from among the vacant positions on the shared shelf 40. Random selection results in that an array including the position coordinates of each position as an element is created in advance, the elements in the array are made random, and the elements are selected in order from the top. Position can be selected randomly.

  Note that the process of randomly rearranging the order of the elements may be performed by an appropriate unit at an appropriate timing, but the executing unit may be a host server, for example, and the execution timing is, for example, shelf type information When the shelf type of D2 is changed, when the priority condition reference order of the shelf type information D2 is changed, when new position information is created, when the position state of the position information is changed, etc. Can do.

  Further, when a value representing “sequential storage” is designated in the “shelf type”, the position determination unit 82 assigns empty positions to the shared shelf 40 according to a predefined order based on the priority position. Select sequentially. For example, if the priority position is (1, 1), search for an empty position from the upper left position to the right, and select the first empty position found (if it is not found to the right end, it is one step down Is similarly searched from the left end, and so on). However, if “priority position” is given a higher priority than “shelf type” in the priority condition reference order, empty positions are sequentially set based on the priority position regardless of the specified contents of “shelf type”. select.

  Here, when the value indicating “sequential storage” is specified in “shelf type” and “shelf type” is specified before “priority position” in the priority condition reference order, there is Even when any position of the shared shelf 40 changes from “in use” to “empty”, the rearrangement of the arrangement is not particularly performed. For example, even if there is a vacancy in the position with the highest priority (for example, the priority position is (1, 1)), it is sequentially stored without being used. That is, the position determination means 82 searches for an empty position in order from the position next to the last determined position. If an empty position cannot be found to the end of the array, the search is performed again from the beginning of the array.

  In a process suitable for processing in the order of loading, if shelves are managed in this way and the worker decides to work in order from (1, 1), the processing is performed in the order of loading. Can be done. Such designation of priority condition reference order and shelf type can be used when priority is given to the time series over the priority order of lots.

  On the other hand, if a value indicating “sequential storage” is specified in “shelf type” and “priority position” is specified before “shelf type” in the priority condition reference order, a certain common When any position on the shelf 40 changes from “in use” to “empty”, the arrangement of the position information D3 of the shared shelf 40 is rearranged. For example, if there is a vacancy in the position with the highest priority (for example, the priority position is (1, 1)), that position is selected next.

  Although it is suitable to carry out processing in the order of loading, there may be some change in order, and in the process where filling the shelf from the upper left is efficient for the operator, the shared shelf is used in this way. 40 can be managed.

In addition, when the “batch priority” flag of the priority condition is on, any position of a certain shared shelf 40 is changed from “in use” to “empty” regardless of the specified content of the priority condition reference order. When it is, the array is rearranged.
In this way, by rearranging the arrangement according to the priority order of the lots, when there are lots having the same batch condition ID, the lots can be arranged more reliably near the lot. As a result, when an operator searches for lots having the same conditions that can be processed simultaneously, the operator is more likely to find a lot in the vicinity and work efficiency is increased. In the case of a three-dimensionally arranged shelf, etc., the number of cases stored in a place where other lots cannot be removed is reduced as much as possible, and only necessary lots can be paid out by collecting them in the same place. It becomes possible to.

  In addition, when a value indicating “random storage” is specified for “shelf type” and the “mask priority” flag of the priority condition is on, regardless of the specified content of the priority condition reference order, When any position of a certain shared shelf 40 changes from “in use” to “empty”, the arrangement is rearranged. In this way, by rearranging the arrangement according to the priority order of the lots, when there are lots having the same mask information, the lots can be arranged more reliably near the lots. As a result, when searching for a lot with the same conditions that can be processed with the current mask setting, the operator is more likely to find it by searching for a nearby lot, and work efficiency is improved. In addition, when changing the mask setting of the device, you may check the shelf information, but when you are no longer in the vicinity, change the setup, etc. The stagnation of lots due to changeover can be reduced. (If you change one lot after processing it and change it while leaving it, the remaining lot will not be processed until the next changeover and will be stagnant.)

In addition, when the value indicating “batch storage” is specified in “shelf type” and the “batch priority” flag of the priority condition is on, regardless of the specified content of the priority condition reference order, Lots having the same batch condition ID are collectively arranged close to each other. That is, as described above, if there is a position adjacent to another lot having the same batch condition ID, it is selected, and if not, the nearest empty position is selected. Here, this position is selected with priority given to one column. For example, if the position array of the shared shelf 40 is two-dimensional (vertical and horizontal), lots having the same batch condition ID are collectively arranged in one row (horizontal row). (Note that even if there are vacant positions in this row, that position is not selected for lots with different batch condition IDs.) Also, if the position arrangement of the shared shelf 40 is three-dimensional (vertical, horizontal and depth). For example, lots having the same batch condition ID are collectively arranged in one depth column. The priority position coordinates are also affected as long as this set (row, depth, etc.) is not destroyed.
As a result, the operator can determine that all the lots on the same shelf can be used, so that the work of searching for the same processing lot is reduced, and an operation error such as processing an incorrect combination can be reduced.

In addition, when a value indicating “batch storage” is specified in “shelf type” and the “mask priority” flag of the priority condition is on, regardless of the specified content of the priority condition reference order, Lots having the same mask information are collectively arranged close to each other. That is, as described above, if there is a position adjacent to another lot having the same mask information, it is selected, and if not, the nearest empty position is selected. Here, this position is selected with priority given to one column. For example, if the position array of the shared shelf 40 is two-dimensional (vertical and horizontal), lots of the same mask information are collectively arranged in one row (horizontal column). (Even if there is an empty position in this row, that position is not selected for a lot of different mask information.) If the position array of the shared shelf 40 is three-dimensional (vertical, horizontal and depth), Lots having the same mask information are collectively arranged in one depth column. The priority position coordinates are also affected as long as this set (row, depth, etc.) is not destroyed.
As a result, it is understood that the same shelf can be processed by setting, and the work can be set up on the shelf. Further, it becomes possible to grasp the replacement timing (mask setting change) and the like.

  Thus, the position determination means 82 selects one position whose position state is “vacant” from all positions according to various priority conditions. Accordingly, there is no need to distinguish the shelves beforehand or to provide a dedicated position according to the process, lot attributes, etc. as in the prior art, and the position of the shared shelf 40 can be utilized without waste. For example, a lot can be stored in one position first, and another lot can be stored after the lot is unloaded, thus saving space. Also, different lots are not assigned to the same position at the same time.

  Note that the operator changes the specified contents of the priority condition reference order as appropriate. For example, when a lot with a higher priority (such as a short construction period) enters, the reference order is rearranged. In combination with mask priority / batch priority, it can be placed near a higher priority lot. For example, when the number of batches is 4, and the same batch is placed 2 batches apart for some reason in 3-3, it is possible to fill the empty space of the two batches with higher priority. (Effective when the number of batches cannot be processed with less than 4)

  Next, the position determination means 82 refers to the change history information D5 and changes the position where the lot is to be stored according to the result (step S5). For example, when the number of changes in which the combination of the pre-change position and the post-change position is equal to or greater than the change learning threshold of the shelf type information D2, the position to be stored is changed to the post-change position, Otherwise, the position to be stored is maintained as it is.

  This determination is made as follows, for example. First, the position determination means 82 extracts all array elements in the change history information D5 where the value of “position coordinates before change” included in the change path matches the position coordinates determined in step S4. Then, among the elements, the element having the largest number of changes (for example, the sum of the number of batch process changes, the number of required mask changes and the number of other changes) is identified. If the number of times of change is equal to or greater than the “change learning threshold” of the shelf type information D2, the position coordinate value where the lot is to be stored is changed (re-determined) to the “position coordinate after change” value of the change path. .

  In this way, when the judgment of the position determining means 82 and the judgment of the worker are different in the past, the judgment of the worker is given priority on a certain standard. If they are different, the position can be changed temporarily or fluidly.

  Next, the position reservation means 83 sets the position determined in steps S4 to S5 to be reserved (step S6). That is, in the position information D3, the lot number of the lot is associated with the position, the position status of the position is changed to “reserved”, the current time is stored as the reservation time of the position, and the processing conditions of the position The processing condition information of the lot is stored as information.

Next, the shelf display means 51 and the shelf display means 61 display a shelf state display window (step S7).
FIG. 11 is an example of a shelf status display window displayed by the shelf display means 61. The shelf status display window is a shelf name of the shared shelf 40, a graphic (for example, a rectangle) representing a position included in the shared shelf 40, a position status of each position, and a lot number representing a lot associated with each position. Including. In the example of FIG. 11, the position coordinates of each position are represented as positions instead of numerical values. For example, the position in the third column from the left in the upper row corresponds to the position coordinates (1, 3), and the lot number “ The lot with “AZM5703” is using this position.
Note that the host server 70 appropriately transmits information necessary for performing these displays to the PC 50 and the touch panel 60. Further, the shelf state window is displayed as a window that occupies only a part of the screen, for example.

The shelf status display window includes a reservation status button B1, a save button B2, a save display button B3, and a delete button B4. In the example of FIG. 11, the position state is represented by a pattern. However, the position state may actually be represented by a color, for example, red during use, yellow during reservation, and green during vacancy. .
A shelf status display window similar to that in FIG. 11 is also displayed on the shelf display means 51 of the PC 50, but the reservation status button B1, the save button B2, the save display button B3, and the delete button B4 are not displayed.

In this way, it is displayed that the position state of the position (position (2, 4 in FIG. 11)) is “reserved”.
In this way, the shelf display means 51 and the shelf display means 61 indicate which lot number is associated with each position, and the position status is “free”, “reserved”, or “in use”. Is displayed. Therefore, the operator can know what the lot number of the lot stored in each position is by checking the shelf state display window. For this reason, it is not necessary to use an RFID reader or a barcode reader for identifying the lot, and the work efficiency of the worker is improved.

  The operator knows that the position (2, 4) is being reserved by looking at the shelf status display window, and knows that the lot with the lot number “AZM5705” should be received at this position. In accordance with this, the corresponding processing inspection apparatus 30 picks up the lot and enters the common shelf 40. (In addition, immediately after the processing of each processing inspection device 30, the lot number of each lot can be easily confirmed. For example, the processing inspection device 30 may display the lot number of each lot.)

Here, the worker may receive the lot at the position as reserved for the lot, or may enter the other position at an appropriate judgment. The operator performs a warehousing completion operation when warehousing the lot at the reserved position. On the other hand, when warehousing at another position, a change operation is performed to change the position associated with the lot from the position before the change to the position after the change.
In response to this, the shelf management system 10 waits for the operator's operation input input from the touch panel 60, and starts different processing according to the received operation (step S8). However, when the processing inspection start signal X1 is received in step S8, the processing after step S40 is started accordingly.

Steps S <b> 10 to S <b> 11 are processes when a warehousing completion operation is performed.
The warehousing input means 62 of the touch panel 60 receives the warehousing completion operation (step S10). The warehousing completion operation is started by inputting a position or lot number in the shelf state display window. This input is performed, for example, by touching an area where the position or lot number being reserved is displayed. Thereafter, a confirmation response is input in a confirmation window (an example is shown in FIG. 12) displayed along with this (for example, a button displayed as “carrying in” is touched), and the warehousing completion operation is completed.

  When the carry-in input means 62 accepts the warehousing completion operation, the position reservation means 83 changes the position state of the corresponding position in the position information D3 to “in use” and stores the time at that time as the warehousing time (step) S11). Thereafter, the process returns to step S7. That is, the updated shelf state display window is displayed.

Steps S20 to S23 are processes when a moving operation is performed as a kind of changing operation.
The change input means 63 of the touch panel 60 accepts a moving operation (step S20). The move operation includes designating a set consisting of the position or lot number before the change and the position after the change. As a designation method, for example, a method of dragging a figure (a rectangle in the example of FIG. 11) representing a reserved or in-use position to the changed position is used. In response to this operation, a confirmation window similar to FIG. 12 may be displayed.

  When the change input means 63 accepts the moving operation, the position release means 84 releases the position before the change (step S21). Here, the position release means 84 cancels the association between the position before the change and the lot number in the position information D3, changes the position state of the position before the change to “empty”, the reservation time, the warehousing time, and the processing condition Erase information.

Next, the position reservation unit 83 associates the changed position with the lot number in the position information D3, and changes the position state of the changed position to “in use” (step S22). Further, the time at that time is stored as the warehousing time, and the processing condition information of the lot is stored as the processing condition of the position. Note that the processing condition information to be stored has the same content as the processing condition information before erasure in step S21.
Next, the change input means 63 updates the change history information D5 (step S23). That is, the number of change histories is increased by 1, and an element having a change path composed of a position before change and a position after change is updated. Here, if the batch condition ID is specified for the lot, the “number of batch processing changes” is increased by 1. If the mask information is specified for the lot, the “number of required mask changes” is increased by 1. If neither is specified, the “other change count” is incremented by one. Also, the last change date is changed to the current date and time.
Thereafter, the process returns to step S7. That is, the updated shelf state display window is displayed.

  Steps S30 to S36 are processing when a save operation and a restore operation are performed as a kind of change operation. In the following, “position before retraction” and “position after restoration” correspond to “position before change” and “position after change”, respectively.

  The change input means 63 of the touch panel 60 accepts a retreat operation (step S30). The evacuation operation includes specifying the position or lot number before evacuation corresponding to the lot to be evacuated after touching the evacuation button B2 to instruct the start of the evacuation operation. When the evacuation button B2 is touched, the shelf display means 61 accepts an instruction to start the evacuation operation by changing the background color of the screen and displaying a evacuation lot display window (example shown in FIG. 13). Display. The background color is changed from white to pink, for example. In the saved lot display window, the lot number and information about the lot (batch condition ID, mask information, etc.) are displayed for each lot that has already been saved.

  As a method for specifying a lot to be evacuated, for example, a method of dragging a figure (rectangle in the example of FIG. 11) representing a position before evacuation to the evacuation lot display window is used. FIG. 14 shows an example of the screen during this operation. Note that the fingers and arrows in FIG. 14 indicate a drag operation and are not displayed on the actual screen. In response to this operation, a confirmation window similar to FIG. 12 may be displayed.

  When the change input means 63 accepts the save operation, the lot number is stored in the save lot information D4 (step S31), the current time is stored as the save time, and the travel flow number of the lot is stored as the travel flow number. Then, the processing condition information of the lot is stored as the processing condition information, the process code of the process relating to the lot is stored as the process code, and the number of saved lots is incremented by one. Thereafter, the position releasing means 84 releases the position before retraction in the same manner as in step S21 (step S32).

  Next, the change input means 63 of the touch panel 60 receives a recovery operation (step S33). The restoration operation includes designating a lot number included in the saved lot information and a position after restoration. As these designation methods, for example, after the evacuation display button B3 is touched to display the evacuation lot display window, the lot number to be restored in the evacuation lot display window is displayed as the restored position in the shelf status display window. Use the method of dragging to the figure to represent.

  When the change input means 63 receives the restoration operation, the saved lot information (lot number, saved time, travel flow number, processing condition information, process code) related to the lot number is deleted from the saved lot information D4, and the saved lot number 1 is subtracted (step S34). Next, the position reservation means 83 associates the recovered position and the lot number in the position information D3, and changes the position state of the recovered position to “in use” (step S35). Further, the time at that time is stored as the warehousing time, and the processing condition information of the lot is stored as the processing condition of the position. The processing condition information to be stored is the same as the processing condition information before being deleted in step S34.

Next, the change input means 63 updates the change history information D5 as in step S23 (step S36). That is, the number of change histories is increased by 1, and the element having the change path including the position before saving and the position after recovery is updated.
Thereafter, the process returns to step S7. That is, the updated shelf state display window is displayed.

  As the processing inspection process proceeds, the worker appropriately takes out the lot stored in the shared shelf 40 and puts it in the processing inspection apparatus 30. In response to this, a processing inspection start signal X1 is transmitted from the processing inspection device 30 to the host server 70. The processing inspection start signal X1 includes the device number of the processing inspection device 30 and the lot number (one or more) of the lot subjected to the processing inspection.

Steps S40 to S41 are processes performed when the processing inspection start signal X1 is transmitted.
The signal receiving means 81 receives this processing inspection start signal X1 (step S40). In response to this, the position releasing means 84 releases the related position in the same manner as in step S21 (step S41). That is, referring to the position information D3, the position associated with the lot number included in the processing inspection start signal X1 is specified, the association between the position and the lot number is canceled, and the position state is set to “empty”. change.

  According to the shelf management system 10 described above, the position determination means 82 determines the position where the lot is to be stored, and the shelf display means 51 and the shelf display means 61 associate each position with the lot number. Since the information is displayed, the operator can know which lot number is stored in which position by checking the shelf state display window. For this reason, it is not necessary to use an RFID reader or a barcode reader for identifying the lot, and the work efficiency of the worker is improved.

  Moreover, since the shelf display means 61, the warehousing input means 62, and the change input means 63 are comprised using the touch panel 60, the operator can operate using the screen which confirmed the position state as it is, and work efficiency is improved. Further improve.

  Further, even when an IC tag is attached to a lot or a bar code or a sensor is not used, it is possible to realize an instruction-type shelf management system that reversely instructs a person where to place a free shelf by the system. Human intentions can be incorporated, and the system can take over the selection method currently used for ease of use, and even more efficient usage can be incorporated. As a result, the location of the lot is clarified, the setup of the apparatus and the search for a lot that can be processed in the same manner are facilitated, and the operating rate of the apparatus is increased.

  Note that the administrator of the shelf management system 10 may refer to the change history information D5 as appropriate and reflect it in the priority condition of the shelf type information D2. For example, if there is a large change history from one position to another position, the priority condition reference order and shelf type of the shelf type information D2 may be corrected so that the changed position can be selected from the beginning. In this way, the priority condition can be dynamically changed based on the change history information D5 while the permanent priority condition specified in the shelf type information D2 is set as the initial value.

  Further, the administrator of the shelf management system 10 may delete data that has not been updated for a certain period in the change history information D5. For example, the last change date and time of each element of the change history information can be referenced to target an element for which a predetermined period has elapsed. This deletion may be performed automatically, and the shelf management system 10 may include a change history deletion unit for executing the deletion.

  In addition, when the shelf type information D2 is updated, the shelf management system 10 deletes the change history information D5 corresponding to the shared shelf 40. Also, the corresponding change history information D5 is deleted when the shelf type information D2 corresponding to any of the shared shelves 40 is deleted. The shelf management system 10 may include a change history information deleting unit for executing this.

In the first embodiment, the following modifications can be made.
Information related to changes with high frequency in the change history information D5 may be notified by e-mail, and the shelf management system 10 may include e-mail transmission means for executing the information. For each element of the change history information of the change history information D5, the e-mail transmission means calculates the sum of the batch process change count, the mask required change count, and the other change count, and this sum is equal to or greater than a predetermined threshold value. For example, the content of the element is transmitted to a predetermined mail address. The predetermined email address may be the email address of the administrator of the shelf management system 10, or the administrator may correct the shelf type information D2 by referring to this email.

  The shared shelf may be one in which positions are arranged in one dimension or three dimensions instead of two dimensions. For example, the position may be expressed using depth coordinates in addition to ordinate and abscissa. In this case, the shelf display means 51 and the shelf display means 61 display the respective positions arranged one-dimensionally or three-dimensionally in the shelf state display window. A specific display method for arranging the positions in three dimensions can be appropriately designed by those skilled in the art.

When the shared shelf has a three-dimensional array, priority may be given to depth in the determination of the batch condition ID in step S4. For example, only the lots having the same batch condition ID for the depth may be used (that is, different for the front and rear positions arranged in the depth direction having the same ordinate and the same abscissa. (Lots for which batch condition IDs are designated may not be mixed).
Such a function can be realized by the following processing, for example. That is, when determining the position of a lot for which the batch condition ID is not specified, do not select a position having the same ordinate and abscissa as other lots for which the batch condition ID is specified, and the batch For a lot for which a condition ID is specified, a position adjacent in the depth direction among the adjacent positions may be given priority.

The processing inspection start signal X1 and the processing inspection end signal X2 may be transmitted from other than the processing inspection apparatus 30. For example, the operator may specify a specific device number and a specific lot number, and input a processing inspection start signal or a processing inspection end signal at the PC 50. In this case, the PC 50 transmits a machining inspection start signal and a machining inspection end signal. In this case, the transmission / reception of the processing inspection start signal and the processing inspection end signal does not necessarily have to be synchronized with the start and end of the processing in the processing inspection apparatus 30.
Further, in this case, the signal receiving means 81 has a function of receiving the processing inspection start signal X1 and the processing inspection end signal X2 transmitted from the processing inspection apparatus 30, and the above processing inspection input from the operator and transmitted from the PC 50. And a function of receiving a start signal and a processing inspection end signal.

  The configuration including the arrangement (position information D3 in FIG. 4, save lot information D4 in FIG. 5, change history information D5 in FIG. 6, travel flow information D6 in FIG. 7, etc.) actually uses a plurality of tables. It may be realized. For example, in the example of FIG. 4, there is a table in which a list of the corresponding number of positions and position coordinates (for example, (2, 1), etc.) is stored using the shelf name as a key. There may be a table in which the corresponding position state, lot number, reservation time, warehousing time, and processing condition information (batch condition ID, mask information, etc.) are stored.

The travel flow information D6 in FIG. 7, the progress information D7 in FIG. 8, and the recipe information D8 in FIG. 9 are limited in specific configuration as long as each information can be finally obtained based on the lot number. Absent.
For example, in the first embodiment, the “usable processing inspection apparatus” included in the travel flow information D6 in FIG. 7 may be defined in association with the recipe ID in FIG. In this case, a travel flow number and a processing stage can be acquired based on the lot number, a recipe ID can be acquired based on the travel flow number and the processing stage, and a usable processing inspection apparatus can be acquired based on the recipe ID. .
Further, for example, information related to timing for changing the contents of the progress information D7 in FIG. 8 may be held in the process information (array) of the travel flow information D6 in FIG. For example, you may hold | maintain the information which concerns on the timing which changes batch condition ID, batch position ID, and batch maintenance ID. In this case, the item “batch maintenance section” may be designated for each element of the process information (array) (that is, for each processing stage). The batch maintenance section can take values such as “Start”, “Between”, and “End”, for example. When “Start” is specified in the batch maintenance section of the processing stage when the lot processing stage proceeds, the batch condition ID, batch position ID, and batch maintenance ID are numbered and stored. Further, when “Between” is specified in the batch maintenance section of the processing stage, the batch condition ID, the batch position ID, and the batch maintenance ID are not changed. Further, when “End” is designated in the batch maintenance section of the processing stage, the contents of the batch condition ID, the batch position ID, and the batch maintenance ID are deleted.
Even when the above modifications are made, the progress information D7 in FIG. 8 is updated with reference to the latest travel flow information D6 and other information as the lot process proceeds, as in the first embodiment. Is done.

  The structural unit of hardware is not limited to that shown in the first embodiment. For example, the touch panel 60 of the first embodiment is a computer having a calculation unit and a storage unit, but the touch panel may be configured as a simple input / output device. In this case, the host server 70 may control input / output on the touch panel. In this case, the shelf management program may be stored only in the PC 50 and the host server 70 without being stored in the touch panel.

10 shelf management system, 20 process module, 30 processing inspection device, 40 shared shelf, 41 lot, 42 position, 50 PC, 51 shelf display means, 60 touch panel, 61 shelf display means, 62 warehousing input means, 62 carry-in input means, 63 change input means, 70 host server, 80 calculation means, 81 signal reception means, 82 position determination means, 83 position reservation means, 84 position release means, 90 storage means, 91 apparatus-shelf information storage means, 92 shelf information storage means 93 lot storage means,
D1 shelf information, D2 shelf type information, D3 position information, D4 save lot information, D5 change history information, D6 travel flow information, D7 progress information,
X1 machining inspection start signal, X2 machining inspection end signal.

Claims (10)

A shelf management system for managing information relating to a shelf for storing a semiconductor lot in relation to a semiconductor production line,
The shelf includes a plurality of positions for storing the lot,
The shelf management system includes:
Shelf information storage means for storing position information for each of the positions included in the shelf,
The position information is
Lot number of the lot associated with each position,
Shelf information storage means including position status regarding whether each position is not associated with any lot, reserved for the associated lot, or in use for the associated lot When,
A position determination means for determining the position in which the lot is to be stored;
Position reservation means for associating a lot with the position determined by the position determination means;
Shelf display means for displaying the shelf, the position, the position state of the position, and a lot number representing a lot associated with the position;
A warehousing input means for receiving an input of a position or a lot number as a warehousing completion operation indicating that the lot has been warehousing at the position;
When the position determination means determines a position, the position reservation means sets the position status of the determined position as being reserved,
When the warehousing input means accepts the warehousing completion operation, the position reservation means makes the position state of the position related to the accepted warehousing completion operation in use,
Shelf management system.   The shelf management system according to claim 1, wherein the warehousing completion operation is an operation on an area in which a position or a lot number is displayed on the shelf display means.   The shelf management system further includes a change input unit that receives an input of a change operation for changing a position associated with any of the lot numbers from a position before change to a position after change. The shelf management system described in. The shelf management system further comprises position release means for canceling association between a lot and the position,
The change operation includes a move operation for designating a set consisting of the position or lot number before the change and the position after the change,
When the change input means accepts the moving operation, the position release means cancels the association between the position before the change and the lot number, and the position reservation means associates the lot number with the position after the change. The shelf management system according to claim 3, wherein the position state of the changed position is in use. The shelf information storage means further stores saved lot information including a lot number of a lot saved from the shelf,
The change operation is
Save operation to specify the position or lot number before the change,
Including a lot number included in the evacuation lot information and a recovery operation for designating the changed position;
When the change input means accepts the save operation, the shelf information storage means stores a lot number related to the save operation in the save lot information, and the position release means sets the position before the change and the lot number. Break the association,
When the change input unit accepts the restoration operation, the shelf information storage unit deletes the lot number related to the restoration operation from the saved lot information, and the position reservation unit obtains the changed position and the lot number. The shelf management system according to claim 3, wherein the shelf management system associates the position status of the position after the change and is in use. The shelf information storage means further stores change history information that associates the position before the change and the position after the change,
The shelf management system according to any one of claims 3 to 5, wherein the position determination unit determines a position in which a lot is to be stored based on the change history information.   The shelf management system according to any one of claims 1 to 6, wherein the shelf display unit and the warehousing input unit are configured using a touch panel.   The shelf management system according to any one of claims 1 to 7, wherein the shelf display means displays the positions arranged in two dimensions or three dimensions. The semiconductor production line includes a plurality of processing inspection devices,
The shelf management system includes:
Device-shelf information storage means for storing device-shelf information associating any of a plurality of shelves with each of the processing inspection devices;
Signal receiving means for receiving a signal, wherein the signal includes a processing inspection start signal indicating that the processing inspection of the lot has started, and a processing inspection end signal indicating that the processing inspection of the lot has ended. The processing inspection start signal and the processing inspection end signal include a device number representing a processing inspection device and the lot number, and a signal receiving means,
Lot storage means for storing lot information for each of the lots, wherein the lot information includes travel flow information that represents the order of a plurality of processing inspection devices that should process the lot using the device numbers. Storage means;
In response to reception of the processing inspection start signal, further comprising position release means for canceling the association between the lot and the position related to the received processing inspection start signal,
In response to the reception of the processing inspection end signal, the position determination means determines a position in which a lot related to the received processing inspection end signal is to be stored based on the received processing inspection end signal, the position information, and the lot information. decide,
The shelf management system according to any one of claims 1 to 8.   The shelf management program for functioning a computer as a shelf management system as described in any one of Claims 1-9.

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