JP3396042B2 - Product processing device and product processing method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a product processing apparatus in which a plurality of products are sequentially processed by a plurality of apparatuses corresponding to respective processes.

[0002]

2. Description of the Related Art A conventional product processing apparatus will be described with reference to FIG. FIG. 5 is a functional block diagram of a conventional product processing apparatus used in a production line for processing a plurality of products by an apparatus corresponding to each process.

The processing plan creating means 100 creates a plan of a processing flow of a product to be produced, a processing device, a processing condition, etc., and defines a sequence of steps for producing a plurality of products in a product processing plan table. It functions to register the processing flow, the device for processing each process, the processing conditions thereof, and the like.

The process processing means 101 processes the product by the device of each process, and based on the process flow, the processing device, the processing condition and the like of each product registered in the product processing plan table, each process. Function to process multiple products in sequence.

The process progress management means 102 manages the process progress status of each product, and when the product process is started by the device of each process, the process number of the product and the device used for the next process process are selected. Functions to register in the product processing progress management table.

The process waiting product group creating means 103 creates a product group waiting for the processing of each device, and based on the processing device information of the next process registered in the product processing progress management table, the product is processed. When the data of the processing management table is updated, the group of products to be processed for the corresponding apparatus is registered in the processing waiting product management table, and the product processing schedule of the apparatus is established based on this information.

In the conventional product processing apparatus configured as described above, the processing time of the process is set to a fixed time when the product processing schedule is set up.

[0008]

By the way, in a production line in which a plurality of products are processed by an apparatus arranged in each process,
A certain device for sequentially processing products (for example, a cleaning device for removing impurities such as dust from a lot in a semiconductor IC, particularly in a semiconductor line for producing a VLSI) from a lot
The longer the process time is, the more impurities are removed from the product, and the product is closer to a completely clean state. Therefore, the yield of the process and thus the product yield are improved.

However, in the above-mentioned conventional product processing apparatus, since the processing time of each process is set to a fixed time, the device maintenance and the processing waiting lot are performed on the device which performs the subsequent processing of the product. Even if there are too many products that cannot be processed within a certain period of time, or if there are few lots waiting to be processed and products can be processed at any time within a certain period of time, it is not possible to make changes to lengthen the process time. I don't know. Therefore, the impurities are not completely removed from the product,
There is a problem that the yield of the process and thus the total yield of the product cannot be improved.

The present invention has been made in view of the above points, and an object thereof is to provide a product processing apparatus for each processing device.
About the product
Processing to apparatus for performing, or if not possible product processing within a certain time, if possible products processed at any time within a predetermined time is longer change the processing time of the next step, with no impurities the product It is an object of the present invention to provide a product processing apparatus that improves the process yield and hence the product yield by bringing the product into a completely clean state.

[0011]

According to a first aspect of the present invention, there is provided a product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps. A processing plan creating means for creating a processing plan of a product by defining a processing time in the apparatus, and managing the processing status of the product in each step based on the above processing plan to manage the product processing in the apparatus of each step. a device state evaluating means for updating as needed a state, processing
For each product of the
And a processing time changing means for increasing and changing the processing time in the device for performing the next process of each product being processed , based on whether or not the device for performing the above process can process the product within a certain time.

The product processing apparatus according to claim 2 is a product processing apparatus for manufacturing products by sequentially performing processing in a plurality of steps. In the product processing apparatus, an order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus. A processing plan creating means for creating a processing plan of the product by defining the above, and a step processing means for controlling the devices of the respective steps based on the processing plan of the product created by the processing plan creating means, and sequentially processing the products. , a processing progress management unit that manages the progress of the processing of products in each process, and the device state evaluating means for evaluating the status of a product processing in the apparatus of each process managed by the processing progress management unit, each being processed About products
When the impossible products processing subsequent steps of processing performing unit along the process plan within a predetermined time, each being processed
And a processing time changing means for increasing and changing the processing time in the device for performing the next process of the product .

According to another aspect of the product processing apparatus of the present invention, the processing time changing means performs processing of the next step or the subsequent steps.
The number of products waiting to be processed in the device or
When the status of the device performing the subsequent process is extracted, when the number of extracted waiting products for processing is equal to or more than a predetermined number, or when the extracted status is stopped, the above
The processing time in the apparatus for performing the next process is increased and changed.

According to a fourth aspect of the present invention, there is provided a product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus. A processing plan creating means for creating a processing plan of the product by defining the above, and a step processing means for controlling the devices of the respective steps based on the processing plan of the product created by the processing plan creating means, and sequentially processing the products. , and the processing progress management means for managing the progress of the processing of the products in each of the steps, one after the other as much as the current processing factory for each product being processed
If the device that processes the process or the subsequent process can process the product according to the processing plan at any time within a fixed time, increase the processing time in the device that processes the next process of each product being processed. And a processing time changing means for changing the processing time.

According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the processing time changing means is the step or the next step.
A number 0 of the extracted pending product when extracted the number or status of the specific device pending product processing apparatus for performing a process after, when the extracted status is running, the increases changing the processing time in the apparatus for processing the next step of the device product to process the next step.

The next step is preferably a step in which the processing time of the step affects the yield of the step.

According to a seventh aspect of the present invention, in a product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus. The step of creating a product processing plan by specifying the above, the step of sequentially processing the products by controlling the devices of each process based on the created processing plan of the product, and the progress of the processing of the product in each process. to manage, and updating as necessary the status of the product processing in the apparatus of each process to be managed, in the process
For each product, one step after the current treatment step or the subsequent steps
If it is not possible to process the product in accordance with the processing plan within a certain time by the device that performs the process, the step of increasing the process time in the device that performs the next process of each product being processed is provided. There is.

The product processing apparatus according to claim 8 is a product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus. The step of creating a product processing plan by specifying the above, the step of sequentially processing the products by controlling the devices of each process based on the created processing plan of the product, and the progress of the processing of the product in each process. to manage, and updating as necessary the status of the product processing in the apparatus of each process to be managed, in the process
For each product, one step after the current treatment step or the subsequent steps
When a device for performing the above process can always perform product processing according to the process plan within a fixed time, the processing time in the device for performing the next process of each product under processing is increased and changed. And steps.

[0019]

With the above construction, in the invention of claim 2, the processing is performed.
For each product in the
When the processing by the device for processing the process is impossible, the processing time changing means improves the quality of the product as the processing time becomes longer as in the next process of the product, for example, the cleaning process in the production line of the semiconductor IC. Since the processing time of the probable process is increased and changed, the processing in the process is performed in a state close to perfection, for example, by prolonging the cleaning time, the product is kept in a completely clean state without impurities, and the process yield and thus the product The final yield will be improved.

According to the invention of claim 4 , each product under processing is
Process the current processing steps one after the other or the subsequent steps.
In the case where the processing by the apparatus is possible at any time within a fixed time, the processing time changing means 50 increases and changes the processing time of the next process of the product, for example, the cleaning process. The same effect as that of the invention can be obtained.

In the invention of claim 5, the above-mentioned claim 2 or 4
In the operation of the present invention, the device state evaluation means detects the number of products waiting to be processed, and when the number of products waiting to be processed is less than or equal to a predetermined number, the processing time changing means successively performs the steps or the steps.
Since the processing time of the device that performs the process of the subsequent process is increased and changed, the state in which the process by the device can be performed at any time within a certain time is surely detected, and the process of the next process or subsequent processes is surely detected.
It is possible to increase the processing time of the device that performs the above-mentioned processing, and the effect of the invention of claim 4 is surely obtained.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An example in which an embodiment of the product processing apparatus of the present invention is applied to a semiconductor process lot processing apparatus using a computer will be described with reference to FIGS.

First, the first embodiment will be described. Figure 1
Is a functional block diagram of the semiconductor process lot processing apparatus in the embodiment, FIG. 2 is a diagram showing an example of a lot processing plan table of the semiconductor process lot processing apparatus, and FIG. 3 is an example of a lot processing progress management table of the semiconductor process lot processing apparatus. FIG. 4 is a diagram showing an example of an apparatus state management table of the semiconductor process lot processing apparatus.

In FIG. 1, the semiconductor process lot processing apparatus comprises a processing plan creating means 10, a process processing means 20, a processing progress management means 30, an apparatus state evaluation means 40 and a processing time changing means 50. Hereinafter, the function of each means will be described in detail.

The processing plan creating means 10 uses the lot name 6
1, the process number 62, the process name 63, the processing device 64, the processing condition 65, the processing time 66 in the lot processing plan table 60 (see FIG. 2) in the auxiliary storage on the auxiliary storage, processing of each process of the lot for each record It has a function to register devices, processing conditions, processing time, and the like.

In a semiconductor line for producing a semiconductor IC, particularly a VLSI, impurities such as dust in the air are one of the factors that reduce the yield of lots. That is, the longer the cleaning time is, the more impurities are removed from the lot, and the lot becomes closer to a completely clean state, so that the yield of the process and hence the yield of the lot are improved. Therefore, in the processing time item 66, the processing time is registered only for a process in which the processing time of the process affects the yield of the process as described above, and the processing time is registered as 0 for the process that does not affect. . This registration is repeated according to the number of lots.

In the present embodiment, the processing time of the cleaning process by the apparatus 2 and the apparatus 6 is registered as 10 and 20, but another factor affecting the yield is the processing time of the water cleaning step after wet etching. , The etching rate of the etching process, the deposition rate of the deposition process, etc. are considered.

Further, the processing plan creating means 10 has a lot processing progress management table 70 (in the auxiliary storage device having the lot name 71, the current processing step number 72 and the processing apparatus 73 of the next step as items as shown in FIG. 3). 3),
A function of registering a lot name in the lot name item 71, and a device state management table 80 (FIG. 4) on an auxiliary storage device having a processing device 81, a waiting lot number 82 and a device status 83 as items as shown in FIG. In, the processing device item 81 has a function of registering a device that processes each process. Note that these registrations are repeated according to the number of devices.

Next, the process processing means 20 is operated by the process shown in FIG.
In the lot processing plan table 60 of No., a record in which the process number item 62 value is 1 is searched, and the lot name item 61 value for the processing device of the processing device item 64,
Lot processing information such as a process number item 62 value, a process name item 63 value, a processing device item 64 value, a processing condition item 65 value, and a processing time item 66 value is extracted, and the extracted data is stored in the processing device item 64 of the record. It has a function of transmitting from a computer to a corresponding device.

Further, each of the devices 1, 2, ... Processes the lot based on the lot processing information transmitted from the computer. At the start and end of the lot processing, the lot name, the processing start time ( (Processing end time), current processing step number, processing start information including processing device, and processing end information are transmitted to the computer.

On the other hand, the computer includes the devices 1, 2, ...
When the processing end information is received, a record in which the value obtained by adding 1 to the received lot name and current processing step number and the lot name item 61 value and the step number item 62 value in the lot processing plan table 60 are the same is retrieved, The above-mentioned lot processing information is extracted and transmitted, and in response to this, each of the devices 1, 2, ... Receives lot processing information, transmits processing start information, performs lot processing, and transmits processing end information. Is configured.

In this way, the computer and each device 1,
While exchanging signals with each other, search, extraction, transmission, reception processing and lot processing are repeated until the final step of the lot. Further, these processes are performed in parallel for the number of lots registered in the lot processing plan table 60.

Next, when the computer receives the processing start information from each of the devices 1, 2, ... In the function of the above-mentioned process processing means 20, the processing progress management means 30 has the same lot name as the received lot name. The record including the lot name item 71 value in the lot processing progress management table 70 is searched, and the received current process step number is registered in the current process step number item 72.

At the same time, a record containing the lot name item 61 value and the process number item 62 value in the lot processing plan table 60, which is the same as the value obtained by adding 2 to the received lot name and current processing step number, is searched for, and the processing device is searched. Item 6
The four values are extracted and registered in the processing device item 73 of the next step of the record including the lot name item 71 value of the lot processing management table 70 which is the same as the received lot name.

Further, the lot name item 61 value and the process number item 6 of the lot processing plan table 60, which is the same as the value obtained by adding 1 to the received lot name and current processing step number.
A record containing two values is searched, a processing device item 64 value is extracted, and a device status management table 8 having the same device name as that device name is extracted.
The value 1 is subtracted from the value 82 of the number-of-process-waiting lot item 82 of the record including the value 0 of the processing device item 81.

When the processing progress management means 30 registers the value of the processing equipment item 73 of the next process in the lot processing progress management table 70 in the processing progress management means 40, the device state evaluation means 40 has the same device as the value of the processing equipment item 73 of the next process. A record including the value of the processing device item 81 in the state management table 80 is searched for, and 1 is added to the value 82 of the lot number waiting for processing. In addition, this processing is the processing device item 7 of the next process.
Although it is carried out when the three values are registered, it may be carried out at any time without particular limitation.

Further, when the computer receives from each device the device information indicating the operating condition of the device, such as the processing device and the device status (operating / stopped), the same device status management table as the received device name. A record including the value of the processing device item 81 of 80 is searched, and the received device status is registered in the device status item 83.

Each time the processing time changing means 50 updates the information in the equipment status management table 80 by the equipment status evaluation means 40, the lot name item 71 value and the current processing step number in the first record of the lot processing progress management table 70. A record including the lot name item 61 value and the process number item 62 value of the lot processing plan table 60 that is the same as the value obtained by adding 1 to the item 72 value is searched, and only when the processing time item 66 value is not 0 When a record including the value of the processing device item 81 in the device status management table 80 that is the same as the value of the processing device item 73 is not found, and the value of the number of lots waiting to be processed 82 value is 5 or more or the value of the device status item 83 is stopped, that is, the value is constant. If processing by the device is not possible within the time, calculate the processing time item 66 value (multiply by 2) Alms, it changes the processing time item 66 value. Such processing is repeated record by record up to the last record of the lot processing progress management table 70.

In the first embodiment, it is judged that processing is not possible when the number of lots waiting to be processed is 5 or more, but this is only an example, and the invention of claim 1 is limited to such an embodiment. Not something. Although the processing time is doubled, the calculation method is not particularly limited. Further, the processing time changing means 50 here is carried out every time the information in the device status management table 80 is updated, but it may be carried out any time without any particular limitation.

As described above, in the first embodiment, when the number of lots waiting to be processed is 5 or more or the apparatus status is stopped, that is, the apparatus is operated within a certain period of time, in the specific apparatus for performing the process of the subsequent steps of the lot. When the processing is impossible, the processing time changing means 50 changes the processing time of the next step of the lot (for example, the cleaning step in the above embodiment) to double the processing time. The processing can be performed almost completely.
That is, by extending the processing time of the cleaning process in the above-mentioned embodiment, the product is kept in a completely clean state free from impurities, and the process yield and hence the final yield of the product are improved.

In the above embodiment, the processing time of the cleaning process is changed. However, in the etching apparatus or the deposition apparatus, the processing rate may be changed to lower the etching rate or the deposition rate. Good. Further, although the apparatus state of each step is evaluated one after another, the apparatus state of processing subsequent steps may be evaluated.

Further, in the present embodiment, the auxiliary storage device is used as the storage means of each table, but the main storage device may be used. A storage means using a list structure may be used instead of the table.

Next, the second embodiment will be described. Also in the second embodiment, the configuration of the semiconductor process lot processing apparatus using the computer is as shown in FIGS. 1 to 4 as in the first embodiment.

Only the parts different from the first embodiment will be described below. In the second embodiment, the processing time changing means 50 and the lot name item 71 value of the first record of the lot processing progress management table 70 each time the equipment state evaluation means 40 updates the information of the equipment state management table 80. When the record including the lot name item 61 value and the process number item 62 value in the lot processing plan table 60 that is the same as the value obtained by adding 1 to the current process step number item 72 value is searched, and the processing time item 66 value is not 0, limit,
When a record including the processing device item 81 value of the device status management table 80 that is the same as the processing device item 73 value of the next process is searched, and the number of lots waiting for processing item 82 value is 0 and the device status item 83 value is operating, that is, When the processing by the device is possible at any time within a fixed time, the processing time item 66 value is calculated (multiplied by 2) to change the processing time item 66 value. The lot processing progress management table 70 for such processing is performed for each record.
Repeat until the last record of.

In this embodiment, when the number of lots waiting to be processed is 0, it is judged that processing is possible at any time, but the present invention is not limited to this embodiment. Although the processing time is doubled, the calculation method is not particularly limited. Further, the processing time changing means 50 here is executed every time the information in the device status management table 80 is updated, but may be executed any time without any particular limitation.

As described above, in the second embodiment, when the number of lots waiting to be processed is 0 and the device status is in operation in the specific device for performing the process of the subsequent process of the lot, that is, the process by the device is performed within a fixed time. Whenever possible, the processing time changing means 50 can double the processing time of the next process (for example, cleaning process) of the lot. That is, by changing the time of the cleaning process to about double, it becomes possible to make the clean state of the product perfect, and it is possible to improve the yield of the product as in the first embodiment.

In the second embodiment, an example in which the processing time of the cleaning process is changed has been described. However, in the etching apparatus or the deposition apparatus, the processing for lowering the etching rate or the deposition rate is performed. You may make changes. Further, although the apparatus state of each step is evaluated one after another, the apparatus state of processing subsequent steps may be evaluated.

Further, in the second embodiment, the auxiliary storage device is used as the storage means of each table, but the main storage device may be used. Further, storage means using a list structure may be used instead of the table.

[0049]

As described above, according to the present invention,
For each product that is being processed,
In the case of a device that performs the process of the subsequent process, if the process by the device is not possible within a certain time, the longer the process time is, such as a cleaning process in the next process of the product, for example, a semiconductor IC production line, It is possible to increase and change the processing time of the process that is expected to improve quality, for example, by extending the cleaning time to keep the product in a clean state without impurities, the process yield and hence the final yield of the product can be improved. It is possible to improve.

Further, according to the present invention, each product being processed is
Regarding the processing of the current processing step after step or subsequent steps
When the apparatus to be used can perform processing by the apparatus at any time within a fixed time, the longer the processing time, such as the next step of the product, for example, the cleaning step in the production line of the semiconductor IC, is expected to improve the quality of the product. It is possible to increase and change the processing time of the process, for example, by extending the cleaning time to maintain the product in a completely clean state without impurities, it is possible to improve the process yield and hence the final yield of the product. .

Furthermore, based on the number of products waiting to be processed, it is possible to reliably detect a state in which processing by the device is possible at any time within a certain period of time, and perform the processing of the next step or subsequent steps.
The processing time of the device can be increased, and thus the above effects can be reliably obtained.

[Brief description of drawings]

FIG. 1 is a functional block diagram of a semiconductor process lot processing apparatus in an embodiment according to claims 1 and 2 of the present invention.

FIG. 2 is a diagram showing an example of a lot processing plan table of a semiconductor process lot processing apparatus in an embodiment according to claims 1 and 2 of the present invention.

FIG. 3 is a diagram showing an example of a lot processing progress management table of a semiconductor process lot processing apparatus in an embodiment according to the first and second aspects of the present invention.

FIG. 4 is a diagram showing an example of an apparatus state management table of a semiconductor process lot processing apparatus in an embodiment according to the first and second aspects of the present invention.

FIG. 5 is a functional block diagram of a product processing apparatus in a conventional example.

[Explanation of symbols]

10, 100 Processing plan creation means 20, 101 Process processing means 30, 102 Processing progress management means 40 Device status management means 50 Processing time changing means 60 lot processing plan table 61,71 Lot name 62 Process number 63 Process name 64, 81 processor 65 Processing conditions 66 processing time 70 Lot processing progress management table 72 Current process step number 73 Processing equipment for one after another 80 Device status management table 82 Number of lots waiting to be processed 83 Device status 103 Pending Product Group Creation Means

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Claims (8)

(57) [Claims] 1. A product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, wherein the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus are used to define the product. A processing plan creating means for creating a processing plan; and a device status evaluating means for managing the processing status of the product in each process based on the above processing plan and updating the product processing status in the device of each process as needed. For each product being processed,
And a processing time changing means for increasing and changing the processing time of the device performing the next process of each product being processed , based on the availability of the product processing within the fixed time of the device performing the subsequent process. A product processing device characterized by the above. 2. A product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, wherein the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus are defined. Processing plan creating means for creating a processing plan, process processing means for sequentially processing the products by controlling the apparatus of each process based on the processing plan of the product created by the processing plan creating means, and processing of the product in each step Processing progress management means for managing the progress status of the product, device status evaluation means for evaluating the status of product processing in the device of each process managed by the processing progress management means, and one after another of the current processing process for each product being processed. Process or its
If the device that processes the subsequent process cannot process the product according to the processing plan within a certain period of time, the processing time to increase and change the processing time of the device that processes the next process of each product being processed. A product processing apparatus comprising: a changing unit. 3. The product processing apparatus according to claim 2, wherein the processing time changing means is configured to perform the subsequent steps or subsequent steps.
The number of products waiting to be processed in the device that performs the above processing or the above
When the status of the device performing the next or subsequent process is extracted and the number of products waiting to be processed is equal to or greater than a predetermined number, or the extracted status is stopped, the process of the next process is performed. product processing apparatus and changes increase the processing time in the device. 4. A product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, wherein the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus are defined. Processing plan creating means for creating a processing plan, process processing means for sequentially processing the products by controlling the apparatus of each process based on the processing plan of the product created by the processing plan creating means, and processing of the product in each step Processing progress management means for managing the progress status of the product, device status evaluation means for updating the status of product processing in the device of each process managed by the processing progress management means as necessary, and current status for each product under processing. Process after process or its process
After the processing performed apparatus process, if possible products processing in accordance with any time processing scheme within a certain time, during processing
A product processing device, comprising: a processing time changing means for increasing and changing a processing time in a device for performing the next process of each product . 5. The product processing apparatus according to claim 4, wherein the processing time changing means is the step after the step after step or the step after the step.
If the number of products waiting to be processed in the device performing the above process or the number of products waiting to be processed when the status of the specific device is extracted is 0 and the extracted status is in operation , A product processing device characterized by increasing and changing a processing time in a device for performing processing. 6. The product processing apparatus according to claim 2, wherein the subsequent step is a step in which the processing time of the step affects the yield of the step. 7. A product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, wherein the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus are specified to define the product. Based on the step of creating a treatment plan, the step of controlling the equipment of each process to process the product sequentially based on the created treatment plan of the product, and managing the progress of the process of the product in each process The step of updating the product processing state in the device of each process as required, and the step after the current processing step for each product being processed or its steps.
If it is not possible to process the product according to the processing plan within a certain period of time by the device that processes the subsequent processes, each product being processed is processed.
And a step of increasing and changing a processing time in an apparatus for performing the next process of the product. 8. A product processing apparatus for manufacturing a product by sequentially performing processing in a plurality of steps, wherein the order of steps, an apparatus for performing the processing of the steps, and a processing time in the apparatus are used to define the product. Based on the step of creating a treatment plan, the step of controlling the equipment of each process to process the product sequentially based on the created treatment plan of the product, and managing the progress of the process of the product in each process The step of updating the product processing state in the device of each process as required, and the step after the current processing step for each product being processed or its steps.
If a product that meets the treatment plan can be processed at any time within a certain period of time by the device that performs the treatment of the subsequent process, processing is in progress.
And a step of increasing and changing a processing time in an apparatus for performing the next process of each product .