JPH0650986Y2 - ウエハカウント装置 - Google Patents

ウエハカウント装置

Info

Publication number
JPH0650986Y2
JPH0650986Y2 JP1985030514U JP3051485U JPH0650986Y2 JP H0650986 Y2 JPH0650986 Y2 JP H0650986Y2 JP 1985030514 U JP1985030514 U JP 1985030514U JP 3051485 U JP3051485 U JP 3051485U JP H0650986 Y2 JPH0650986 Y2 JP H0650986Y2
Authority
JP
Japan
Prior art keywords
wafer
counting
wafers
counting device
carrier cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985030514U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61146948U (enExample
Inventor
亘 大加瀬
貴庸 浅野
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1985030514U priority Critical patent/JPH0650986Y2/ja
Publication of JPS61146948U publication Critical patent/JPS61146948U/ja
Application granted granted Critical
Publication of JPH0650986Y2 publication Critical patent/JPH0650986Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985030514U 1985-03-04 1985-03-04 ウエハカウント装置 Expired - Lifetime JPH0650986Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985030514U JPH0650986Y2 (ja) 1985-03-04 1985-03-04 ウエハカウント装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985030514U JPH0650986Y2 (ja) 1985-03-04 1985-03-04 ウエハカウント装置

Publications (2)

Publication Number Publication Date
JPS61146948U JPS61146948U (enExample) 1986-09-10
JPH0650986Y2 true JPH0650986Y2 (ja) 1994-12-21

Family

ID=30530279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985030514U Expired - Lifetime JPH0650986Y2 (ja) 1985-03-04 1985-03-04 ウエハカウント装置

Country Status (1)

Country Link
JP (1) JPH0650986Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60136142U (ja) * 1984-02-20 1985-09-10 九州日本電気株式会社 半導体基板の収納箱

Also Published As

Publication number Publication date
JPS61146948U (enExample) 1986-09-10

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