JPH0650420Y2 - 基板のリフター装置 - Google Patents

基板のリフター装置

Info

Publication number
JPH0650420Y2
JPH0650420Y2 JP1988079459U JP7945988U JPH0650420Y2 JP H0650420 Y2 JPH0650420 Y2 JP H0650420Y2 JP 1988079459 U JP1988079459 U JP 1988079459U JP 7945988 U JP7945988 U JP 7945988U JP H0650420 Y2 JPH0650420 Y2 JP H0650420Y2
Authority
JP
Japan
Prior art keywords
substrate
support pins
lifter device
contact member
hitting member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988079459U
Other languages
English (en)
Japanese (ja)
Other versions
JPH022318U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
正美 大谷
雅美 西田
英治 奥野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1988079459U priority Critical patent/JPH0650420Y2/ja
Publication of JPH022318U publication Critical patent/JPH022318U/ja
Application granted granted Critical
Publication of JPH0650420Y2 publication Critical patent/JPH0650420Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP1988079459U 1988-06-17 1988-06-17 基板のリフター装置 Expired - Lifetime JPH0650420Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988079459U JPH0650420Y2 (ja) 1988-06-17 1988-06-17 基板のリフター装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988079459U JPH0650420Y2 (ja) 1988-06-17 1988-06-17 基板のリフター装置

Publications (2)

Publication Number Publication Date
JPH022318U JPH022318U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-09
JPH0650420Y2 true JPH0650420Y2 (ja) 1994-12-21

Family

ID=31304337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988079459U Expired - Lifetime JPH0650420Y2 (ja) 1988-06-17 1988-06-17 基板のリフター装置

Country Status (1)

Country Link
JP (1) JPH0650420Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212301U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-07-16 1977-01-28

Also Published As

Publication number Publication date
JPH022318U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-09

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