JPH0648421Y2 - 半導体加速度センサ - Google Patents

半導体加速度センサ

Info

Publication number
JPH0648421Y2
JPH0648421Y2 JP1987105794U JP10579487U JPH0648421Y2 JP H0648421 Y2 JPH0648421 Y2 JP H0648421Y2 JP 1987105794 U JP1987105794 U JP 1987105794U JP 10579487 U JP10579487 U JP 10579487U JP H0648421 Y2 JPH0648421 Y2 JP H0648421Y2
Authority
JP
Japan
Prior art keywords
piezoresistors
semiconductor substrate
pair
substrate body
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987105794U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410664U (OSRAM
Inventor
英夫 室
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP1987105794U priority Critical patent/JPH0648421Y2/ja
Publication of JPS6410664U publication Critical patent/JPS6410664U/ja
Application granted granted Critical
Publication of JPH0648421Y2 publication Critical patent/JPH0648421Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP1987105794U 1987-07-08 1987-07-08 半導体加速度センサ Expired - Lifetime JPH0648421Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105794U JPH0648421Y2 (ja) 1987-07-08 1987-07-08 半導体加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105794U JPH0648421Y2 (ja) 1987-07-08 1987-07-08 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPS6410664U JPS6410664U (OSRAM) 1989-01-20
JPH0648421Y2 true JPH0648421Y2 (ja) 1994-12-12

Family

ID=31338728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105794U Expired - Lifetime JPH0648421Y2 (ja) 1987-07-08 1987-07-08 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPH0648421Y2 (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2715738B2 (ja) * 1991-09-30 1998-02-18 日産自動車株式会社 半導体応力検出装置
JP2737479B2 (ja) * 1991-09-30 1998-04-08 日産自動車株式会社 半導体応力検出装置
JP2001304997A (ja) * 2000-04-27 2001-10-31 Toyota Central Res & Dev Lab Inc 半導体圧力センサ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4488445A (en) * 1983-10-28 1984-12-18 Honeywell Inc. Integrated silicon accelerometer with cross-axis compensation
JPS61139758A (ja) * 1984-12-12 1986-06-27 Nissan Motor Co Ltd 半導体加速度センサ

Also Published As

Publication number Publication date
JPS6410664U (OSRAM) 1989-01-20

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