JPH0648331Y2 - シート状物体の物理量測定装置 - Google Patents

シート状物体の物理量測定装置

Info

Publication number
JPH0648331Y2
JPH0648331Y2 JP1988040875U JP4087588U JPH0648331Y2 JP H0648331 Y2 JPH0648331 Y2 JP H0648331Y2 JP 1988040875 U JP1988040875 U JP 1988040875U JP 4087588 U JP4087588 U JP 4087588U JP H0648331 Y2 JPH0648331 Y2 JP H0648331Y2
Authority
JP
Japan
Prior art keywords
sheet
detection
detection head
physical quantity
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988040875U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01142808U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
武志 植田
勉 村上
豊 斎藤
時雄 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1988040875U priority Critical patent/JPH0648331Y2/ja
Publication of JPH01142808U publication Critical patent/JPH01142808U/ja
Application granted granted Critical
Publication of JPH0648331Y2 publication Critical patent/JPH0648331Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP1988040875U 1988-03-28 1988-03-28 シート状物体の物理量測定装置 Expired - Lifetime JPH0648331Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988040875U JPH0648331Y2 (ja) 1988-03-28 1988-03-28 シート状物体の物理量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988040875U JPH0648331Y2 (ja) 1988-03-28 1988-03-28 シート状物体の物理量測定装置

Publications (2)

Publication Number Publication Date
JPH01142808U JPH01142808U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-29
JPH0648331Y2 true JPH0648331Y2 (ja) 1994-12-12

Family

ID=31267332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988040875U Expired - Lifetime JPH0648331Y2 (ja) 1988-03-28 1988-03-28 シート状物体の物理量測定装置

Country Status (1)

Country Link
JP (1) JPH0648331Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005054593B4 (de) * 2005-11-14 2018-04-26 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messonde zur Messung der Dicke dünner Schichten

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529415U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-07-09 1977-01-22
JPS5211571U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-07-15 1977-01-26

Also Published As

Publication number Publication date
JPH01142808U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-29

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