JPH0645912Y2 - 槽循環用気体の供給装置 - Google Patents

槽循環用気体の供給装置

Info

Publication number
JPH0645912Y2
JPH0645912Y2 JP1986040325U JP4032586U JPH0645912Y2 JP H0645912 Y2 JPH0645912 Y2 JP H0645912Y2 JP 1986040325 U JP1986040325 U JP 1986040325U JP 4032586 U JP4032586 U JP 4032586U JP H0645912 Y2 JPH0645912 Y2 JP H0645912Y2
Authority
JP
Japan
Prior art keywords
gas
tank
circulation
supply device
circulation path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986040325U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62152278U (enExample
Inventor
晴彦 絹川
喜代治 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orion Machinery Co Ltd
Fujitsu Ltd
Original Assignee
Orion Machinery Co Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orion Machinery Co Ltd, Fujitsu Ltd filed Critical Orion Machinery Co Ltd
Priority to JP1986040325U priority Critical patent/JPH0645912Y2/ja
Publication of JPS62152278U publication Critical patent/JPS62152278U/ja
Application granted granted Critical
Publication of JPH0645912Y2 publication Critical patent/JPH0645912Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP1986040325U 1986-03-19 1986-03-19 槽循環用気体の供給装置 Expired - Lifetime JPH0645912Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986040325U JPH0645912Y2 (ja) 1986-03-19 1986-03-19 槽循環用気体の供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986040325U JPH0645912Y2 (ja) 1986-03-19 1986-03-19 槽循環用気体の供給装置

Publications (2)

Publication Number Publication Date
JPS62152278U JPS62152278U (enExample) 1987-09-26
JPH0645912Y2 true JPH0645912Y2 (ja) 1994-11-24

Family

ID=30854321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986040325U Expired - Lifetime JPH0645912Y2 (ja) 1986-03-19 1986-03-19 槽循環用気体の供給装置

Country Status (1)

Country Link
JP (1) JPH0645912Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4981751U (enExample) * 1972-11-06 1974-07-16

Also Published As

Publication number Publication date
JPS62152278U (enExample) 1987-09-26

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