JPS62152278U - - Google Patents

Info

Publication number
JPS62152278U
JPS62152278U JP4032586U JP4032586U JPS62152278U JP S62152278 U JPS62152278 U JP S62152278U JP 4032586 U JP4032586 U JP 4032586U JP 4032586 U JP4032586 U JP 4032586U JP S62152278 U JPS62152278 U JP S62152278U
Authority
JP
Japan
Prior art keywords
gas
tank
circulation
path
passage holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4032586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0645912Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986040325U priority Critical patent/JPH0645912Y2/ja
Publication of JPS62152278U publication Critical patent/JPS62152278U/ja
Application granted granted Critical
Publication of JPH0645912Y2 publication Critical patent/JPH0645912Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP1986040325U 1986-03-19 1986-03-19 槽循環用気体の供給装置 Expired - Lifetime JPH0645912Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986040325U JPH0645912Y2 (ja) 1986-03-19 1986-03-19 槽循環用気体の供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986040325U JPH0645912Y2 (ja) 1986-03-19 1986-03-19 槽循環用気体の供給装置

Publications (2)

Publication Number Publication Date
JPS62152278U true JPS62152278U (enExample) 1987-09-26
JPH0645912Y2 JPH0645912Y2 (ja) 1994-11-24

Family

ID=30854321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986040325U Expired - Lifetime JPH0645912Y2 (ja) 1986-03-19 1986-03-19 槽循環用気体の供給装置

Country Status (1)

Country Link
JP (1) JPH0645912Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4981751U (enExample) * 1972-11-06 1974-07-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4981751U (enExample) * 1972-11-06 1974-07-16

Also Published As

Publication number Publication date
JPH0645912Y2 (ja) 1994-11-24

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