JPH064584Y2 - レ−ザマ−キング用ウエハ−搬送装置 - Google Patents

レ−ザマ−キング用ウエハ−搬送装置

Info

Publication number
JPH064584Y2
JPH064584Y2 JP1987062211U JP6221187U JPH064584Y2 JP H064584 Y2 JPH064584 Y2 JP H064584Y2 JP 1987062211 U JP1987062211 U JP 1987062211U JP 6221187 U JP6221187 U JP 6221187U JP H064584 Y2 JPH064584 Y2 JP H064584Y2
Authority
JP
Japan
Prior art keywords
wafer
transfer device
wafer transfer
laser marking
transfer arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987062211U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63167737U (enrdf_load_stackoverflow
Inventor
宏一 平塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1987062211U priority Critical patent/JPH064584Y2/ja
Publication of JPS63167737U publication Critical patent/JPS63167737U/ja
Application granted granted Critical
Publication of JPH064584Y2 publication Critical patent/JPH064584Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP1987062211U 1987-04-23 1987-04-23 レ−ザマ−キング用ウエハ−搬送装置 Expired - Lifetime JPH064584Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987062211U JPH064584Y2 (ja) 1987-04-23 1987-04-23 レ−ザマ−キング用ウエハ−搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987062211U JPH064584Y2 (ja) 1987-04-23 1987-04-23 レ−ザマ−キング用ウエハ−搬送装置

Publications (2)

Publication Number Publication Date
JPS63167737U JPS63167737U (enrdf_load_stackoverflow) 1988-11-01
JPH064584Y2 true JPH064584Y2 (ja) 1994-02-02

Family

ID=30896267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987062211U Expired - Lifetime JPH064584Y2 (ja) 1987-04-23 1987-04-23 レ−ザマ−キング用ウエハ−搬送装置

Country Status (1)

Country Link
JP (1) JPH064584Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI607817B (zh) * 2015-09-02 2017-12-11 E&R Eng Corp Laser printing apparatus and method

Also Published As

Publication number Publication date
JPS63167737U (enrdf_load_stackoverflow) 1988-11-01

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