JPH0645226Y2 - 表示分離型圧力センサ - Google Patents
表示分離型圧力センサInfo
- Publication number
- JPH0645226Y2 JPH0645226Y2 JP9776887U JP9776887U JPH0645226Y2 JP H0645226 Y2 JPH0645226 Y2 JP H0645226Y2 JP 9776887 U JP9776887 U JP 9776887U JP 9776887 U JP9776887 U JP 9776887U JP H0645226 Y2 JPH0645226 Y2 JP H0645226Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure sensor
- display
- sensor unit
- display unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9776887U JPH0645226Y2 (ja) | 1987-06-24 | 1987-06-24 | 表示分離型圧力センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9776887U JPH0645226Y2 (ja) | 1987-06-24 | 1987-06-24 | 表示分離型圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS642132U JPS642132U (enrdf_load_stackoverflow) | 1989-01-09 |
JPH0645226Y2 true JPH0645226Y2 (ja) | 1994-11-16 |
Family
ID=30965066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9776887U Expired - Lifetime JPH0645226Y2 (ja) | 1987-06-24 | 1987-06-24 | 表示分離型圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0645226Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4582715B2 (ja) * | 2006-03-29 | 2010-11-17 | ルネサスエレクトロニクス株式会社 | 半導体製造装置、並びに、感度調整のための装置及び方法 |
-
1987
- 1987-06-24 JP JP9776887U patent/JPH0645226Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS642132U (enrdf_load_stackoverflow) | 1989-01-09 |
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