JPH0644112Y2 - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPH0644112Y2
JPH0644112Y2 JP3943287U JP3943287U JPH0644112Y2 JP H0644112 Y2 JPH0644112 Y2 JP H0644112Y2 JP 3943287 U JP3943287 U JP 3943287U JP 3943287 U JP3943287 U JP 3943287U JP H0644112 Y2 JPH0644112 Y2 JP H0644112Y2
Authority
JP
Japan
Prior art keywords
type
piezoresistive element
pressure sensor
polycrystalline silicon
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3943287U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63147846U (US20030157376A1-20030821-M00001.png
Inventor
広志 鈴木
充吉 津波古
▲てつ▼ 尾土平
宣夫 宮地
利昭 藤井
哲哉 藤田
信行 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP3943287U priority Critical patent/JPH0644112Y2/ja
Publication of JPS63147846U publication Critical patent/JPS63147846U/ja
Application granted granted Critical
Publication of JPH0644112Y2 publication Critical patent/JPH0644112Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP3943287U 1987-03-18 1987-03-18 半導体圧力センサ Expired - Lifetime JPH0644112Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3943287U JPH0644112Y2 (ja) 1987-03-18 1987-03-18 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3943287U JPH0644112Y2 (ja) 1987-03-18 1987-03-18 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS63147846U JPS63147846U (US20030157376A1-20030821-M00001.png) 1988-09-29
JPH0644112Y2 true JPH0644112Y2 (ja) 1994-11-14

Family

ID=30852593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3943287U Expired - Lifetime JPH0644112Y2 (ja) 1987-03-18 1987-03-18 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPH0644112Y2 (US20030157376A1-20030821-M00001.png)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4749790B2 (ja) * 2004-08-20 2011-08-17 佐々木 実 マイクロミラーデバイスとその製造方法、マイクロミラーデバイスの角度計測方法、およびマイクロミラーデバイス応用装置
JP5151281B2 (ja) * 2007-07-11 2013-02-27 富士電機株式会社 半導体圧力センサ
JP6431505B2 (ja) * 2015-10-28 2018-11-28 株式会社フジクラ 半導体圧力センサ
WO2017073207A1 (ja) * 2015-10-28 2017-05-04 株式会社フジクラ 半導体圧力センサ

Also Published As

Publication number Publication date
JPS63147846U (US20030157376A1-20030821-M00001.png) 1988-09-29

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