JPH064304Y2 - 静電容量形半導体圧力センサ - Google Patents

静電容量形半導体圧力センサ

Info

Publication number
JPH064304Y2
JPH064304Y2 JP1987125054U JP12505487U JPH064304Y2 JP H064304 Y2 JPH064304 Y2 JP H064304Y2 JP 1987125054 U JP1987125054 U JP 1987125054U JP 12505487 U JP12505487 U JP 12505487U JP H064304 Y2 JPH064304 Y2 JP H064304Y2
Authority
JP
Japan
Prior art keywords
substrate
type
layer
type semiconductor
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987125054U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6430423U (OSRAM
Inventor
徳治 三枝
輝孝 平田
惇 木村
龍造 浅田
敏夫 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1987125054U priority Critical patent/JPH064304Y2/ja
Publication of JPS6430423U publication Critical patent/JPS6430423U/ja
Application granted granted Critical
Publication of JPH064304Y2 publication Critical patent/JPH064304Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1987125054U 1987-08-17 1987-08-17 静電容量形半導体圧力センサ Expired - Lifetime JPH064304Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987125054U JPH064304Y2 (ja) 1987-08-17 1987-08-17 静電容量形半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987125054U JPH064304Y2 (ja) 1987-08-17 1987-08-17 静電容量形半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS6430423U JPS6430423U (OSRAM) 1989-02-23
JPH064304Y2 true JPH064304Y2 (ja) 1994-02-02

Family

ID=31375319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987125054U Expired - Lifetime JPH064304Y2 (ja) 1987-08-17 1987-08-17 静電容量形半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPH064304Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4639487B2 (ja) * 2001-02-13 2011-02-23 株式会社デンソー 薄膜部を有するセンサの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
JPS60138434A (ja) * 1983-12-27 1985-07-23 Fuji Electric Co Ltd 半導体形静電容量式圧力センサの製造方法

Also Published As

Publication number Publication date
JPS6430423U (OSRAM) 1989-02-23

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