JPH0642211Y2 - 力学量センサ - Google Patents
力学量センサInfo
- Publication number
- JPH0642211Y2 JPH0642211Y2 JP1987016578U JP1657887U JPH0642211Y2 JP H0642211 Y2 JPH0642211 Y2 JP H0642211Y2 JP 1987016578 U JP1987016578 U JP 1987016578U JP 1657887 U JP1657887 U JP 1657887U JP H0642211 Y2 JPH0642211 Y2 JP H0642211Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- housing
- piezoelectric
- piezoelectric element
- mechanical quantity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987016578U JPH0642211Y2 (ja) | 1987-02-09 | 1987-02-09 | 力学量センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987016578U JPH0642211Y2 (ja) | 1987-02-09 | 1987-02-09 | 力学量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63124666U JPS63124666U (ar) | 1988-08-15 |
JPH0642211Y2 true JPH0642211Y2 (ja) | 1994-11-02 |
Family
ID=30808564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987016578U Expired - Lifetime JPH0642211Y2 (ja) | 1987-02-09 | 1987-02-09 | 力学量センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0642211Y2 (ar) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4701505B2 (ja) * | 2001-01-29 | 2011-06-15 | パナソニック株式会社 | 慣性トランスデューサ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5621728U (ar) * | 1979-07-28 | 1981-02-26 | ||
JPS61187463U (ar) * | 1985-05-14 | 1986-11-21 |
-
1987
- 1987-02-09 JP JP1987016578U patent/JPH0642211Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63124666U (ar) | 1988-08-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7677105B2 (en) | Double-ended tuning fork type piezoelectric resonator and pressure sensor | |
US3673442A (en) | Temperature compensated piezoelectric accelerometer | |
EP0221467B1 (en) | Vibrating type transducer | |
US4433580A (en) | Pressure transducer | |
US5969257A (en) | Pressure measuring membrane with resonant element vibrating orthogonal to membrane movement | |
JPH0642211Y2 (ja) | 力学量センサ | |
US3673354A (en) | Semiconductor stress transducer | |
US11262265B2 (en) | Temperature correction device, sensor module, and temperature correction method | |
JP2732287B2 (ja) | 加速度センサ | |
CN111486984A (zh) | 一种压电薄膜体波谐振器温度传感器 | |
JPH02248866A (ja) | 加速度センサの梁構造 | |
JPS61259174A (ja) | 力学量センサ | |
JP2008309731A (ja) | 加速度検知ユニット及び加速度センサ | |
JPS61259175A (ja) | 圧電型力学量センサ | |
JP2000258260A (ja) | 電気容量式力測定装置 | |
JPH0682131B2 (ja) | 振動加速度センサ | |
JPH0236188B2 (ar) | ||
JPH02218932A (ja) | 圧電型圧力分布センサ | |
JPS61266931A (ja) | 圧力センサ | |
JPH08201420A (ja) | 衝撃センサ | |
JPH04337430A (ja) | 力変換器 | |
EP0115908A2 (en) | Transducer | |
JPH0495743A (ja) | 静電容量式差圧検出器 | |
JPH05118933A (ja) | 歪センサー | |
JPH05322670A (ja) | 荷重検出器 |