JPH0642163Y2 - 光学式形状測定装置 - Google Patents
光学式形状測定装置Info
- Publication number
- JPH0642163Y2 JPH0642163Y2 JP1880989U JP1880989U JPH0642163Y2 JP H0642163 Y2 JPH0642163 Y2 JP H0642163Y2 JP 1880989 U JP1880989 U JP 1880989U JP 1880989 U JP1880989 U JP 1880989U JP H0642163 Y2 JPH0642163 Y2 JP H0642163Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- focus error
- shape measuring
- arithmetic processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 40
- 238000001514 detection method Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 7
- 230000004075 alteration Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1880989U JPH0642163Y2 (ja) | 1989-02-20 | 1989-02-20 | 光学式形状測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1880989U JPH0642163Y2 (ja) | 1989-02-20 | 1989-02-20 | 光学式形状測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02110804U JPH02110804U (en, 2012) | 1990-09-05 |
| JPH0642163Y2 true JPH0642163Y2 (ja) | 1994-11-02 |
Family
ID=31233780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1880989U Expired - Lifetime JPH0642163Y2 (ja) | 1989-02-20 | 1989-02-20 | 光学式形状測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0642163Y2 (en, 2012) |
-
1989
- 1989-02-20 JP JP1880989U patent/JPH0642163Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02110804U (en, 2012) | 1990-09-05 |
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