JPH0641171Y2 - ガスレートセンサ - Google Patents

ガスレートセンサ

Info

Publication number
JPH0641171Y2
JPH0641171Y2 JP1990063553U JP6355390U JPH0641171Y2 JP H0641171 Y2 JPH0641171 Y2 JP H0641171Y2 JP 1990063553 U JP1990063553 U JP 1990063553U JP 6355390 U JP6355390 U JP 6355390U JP H0641171 Y2 JPH0641171 Y2 JP H0641171Y2
Authority
JP
Japan
Prior art keywords
gas
casing
rate sensor
pump
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990063553U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421966U (OSRAM
Inventor
宗吉 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP1990063553U priority Critical patent/JPH0641171Y2/ja
Publication of JPH0421966U publication Critical patent/JPH0421966U/ja
Application granted granted Critical
Publication of JPH0641171Y2 publication Critical patent/JPH0641171Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Measuring Volume Flow (AREA)
JP1990063553U 1990-06-18 1990-06-18 ガスレートセンサ Expired - Lifetime JPH0641171Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990063553U JPH0641171Y2 (ja) 1990-06-18 1990-06-18 ガスレートセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990063553U JPH0641171Y2 (ja) 1990-06-18 1990-06-18 ガスレートセンサ

Publications (2)

Publication Number Publication Date
JPH0421966U JPH0421966U (OSRAM) 1992-02-24
JPH0641171Y2 true JPH0641171Y2 (ja) 1994-10-26

Family

ID=31593709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990063553U Expired - Lifetime JPH0641171Y2 (ja) 1990-06-18 1990-06-18 ガスレートセンサ

Country Status (1)

Country Link
JP (1) JPH0641171Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002122611A (ja) * 2000-10-13 2002-04-26 Tamagawa Seiki Co Ltd 気体レートセンサ

Also Published As

Publication number Publication date
JPH0421966U (OSRAM) 1992-02-24

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