JPH0452686Y2 - - Google Patents
Info
- Publication number
- JPH0452686Y2 JPH0452686Y2 JP1986195868U JP19586886U JPH0452686Y2 JP H0452686 Y2 JPH0452686 Y2 JP H0452686Y2 JP 1986195868 U JP1986195868 U JP 1986195868U JP 19586886 U JP19586886 U JP 19586886U JP H0452686 Y2 JPH0452686 Y2 JP H0452686Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- temperature sensing
- electrode
- rate sensor
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000035945 sensitivity Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986195868U JPH0452686Y2 (OSRAM) | 1986-12-22 | 1986-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986195868U JPH0452686Y2 (OSRAM) | 1986-12-22 | 1986-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63101865U JPS63101865U (OSRAM) | 1988-07-02 |
| JPH0452686Y2 true JPH0452686Y2 (OSRAM) | 1992-12-10 |
Family
ID=31154152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986195868U Expired JPH0452686Y2 (OSRAM) | 1986-12-22 | 1986-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452686Y2 (OSRAM) |
-
1986
- 1986-12-22 JP JP1986195868U patent/JPH0452686Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63101865U (OSRAM) | 1988-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0452686Y2 (OSRAM) | ||
| JP2530877B2 (ja) | ガスレ―トセンサ | |
| JP2961186B2 (ja) | 気体レートセンサ | |
| JP3004737B2 (ja) | ガスレートセンサ | |
| JPH04220516A (ja) | ガスレートセンサ | |
| JPH079102Y2 (ja) | ガスレートセンサ | |
| JPH0454182B2 (OSRAM) | ||
| JP3061290B2 (ja) | ガスレートセンサ | |
| JP2967147B2 (ja) | 気体レートセンサ | |
| JP2961185B2 (ja) | 気体レートセンサ | |
| JPH01167671A (ja) | ガスレートセンサ | |
| JPH0641171Y2 (ja) | ガスレートセンサ | |
| JP2961183B2 (ja) | ガスレートセンサ | |
| JPH0354475A (ja) | ガスレートセンサ | |
| JPH0348164A (ja) | ガスレートセンサ | |
| JP2504833Y2 (ja) | センサ―装置 | |
| JPH07167657A (ja) | ガスレートセンサの製法及びガスレートセンサ | |
| JPS63308568A (ja) | ガスレ−トセンサ | |
| JPS63308569A (ja) | ガスレ−トセンサ | |
| JPH04158264A (ja) | ガスレートセンサ | |
| JPH01207619A (ja) | ガスレートセンサ | |
| JPH10185939A (ja) | ガスレートセンサ | |
| JPH08334329A (ja) | ガスレートセンサ | |
| JPH04110665A (ja) | 気体レートセンサ | |
| JPH075417Y2 (ja) | ガスレートセンサ |