JPH0641133Y2 - 熱線式流量計 - Google Patents
熱線式流量計Info
- Publication number
- JPH0641133Y2 JPH0641133Y2 JP6869089U JP6869089U JPH0641133Y2 JP H0641133 Y2 JPH0641133 Y2 JP H0641133Y2 JP 6869089 U JP6869089 U JP 6869089U JP 6869089 U JP6869089 U JP 6869089U JP H0641133 Y2 JPH0641133 Y2 JP H0641133Y2
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- flow rate
- resistor
- rate adjusting
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 17
- 239000010409 thin film Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 229910000896 Manganin Inorganic materials 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Electrical Control Of Air Or Fuel Supplied To Internal-Combustion Engine (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6869089U JPH0641133Y2 (ja) | 1989-06-13 | 1989-06-13 | 熱線式流量計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6869089U JPH0641133Y2 (ja) | 1989-06-13 | 1989-06-13 | 熱線式流量計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038637U JPH038637U (enrdf_load_stackoverflow) | 1991-01-28 |
| JPH0641133Y2 true JPH0641133Y2 (ja) | 1994-10-26 |
Family
ID=31603341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6869089U Expired - Lifetime JPH0641133Y2 (ja) | 1989-06-13 | 1989-06-13 | 熱線式流量計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641133Y2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53135041U (enrdf_load_stackoverflow) * | 1977-03-30 | 1978-10-25 | ||
| JPS5549959U (enrdf_load_stackoverflow) * | 1978-09-28 | 1980-04-01 | ||
| JPS5676482U (enrdf_load_stackoverflow) * | 1979-11-15 | 1981-06-22 | ||
| JP3197770B2 (ja) * | 1993-12-30 | 2001-08-13 | 東京エレクトロン株式会社 | 半導体製造装置 |
-
1989
- 1989-06-13 JP JP6869089U patent/JPH0641133Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH038637U (enrdf_load_stackoverflow) | 1991-01-28 |
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