JPH0639869Y2 - 真空チャック - Google Patents

真空チャック

Info

Publication number
JPH0639869Y2
JPH0639869Y2 JP1988052194U JP5219488U JPH0639869Y2 JP H0639869 Y2 JPH0639869 Y2 JP H0639869Y2 JP 1988052194 U JP1988052194 U JP 1988052194U JP 5219488 U JP5219488 U JP 5219488U JP H0639869 Y2 JPH0639869 Y2 JP H0639869Y2
Authority
JP
Japan
Prior art keywords
chuck
plate
base
check
outer edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988052194U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01156832U (enExample
Inventor
文雄 渡辺
Original Assignee
日立精工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立精工株式会社 filed Critical 日立精工株式会社
Priority to JP1988052194U priority Critical patent/JPH0639869Y2/ja
Publication of JPH01156832U publication Critical patent/JPH01156832U/ja
Application granted granted Critical
Publication of JPH0639869Y2 publication Critical patent/JPH0639869Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1988052194U 1988-04-20 1988-04-20 真空チャック Expired - Lifetime JPH0639869Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988052194U JPH0639869Y2 (ja) 1988-04-20 1988-04-20 真空チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988052194U JPH0639869Y2 (ja) 1988-04-20 1988-04-20 真空チャック

Publications (2)

Publication Number Publication Date
JPH01156832U JPH01156832U (enExample) 1989-10-27
JPH0639869Y2 true JPH0639869Y2 (ja) 1994-10-19

Family

ID=31278201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988052194U Expired - Lifetime JPH0639869Y2 (ja) 1988-04-20 1988-04-20 真空チャック

Country Status (1)

Country Link
JP (1) JPH0639869Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5630059B2 (ja) * 2010-04-01 2014-11-26 株式会社Ihi 真空吸着ステージ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694238U (enExample) * 1979-12-18 1981-07-27

Also Published As

Publication number Publication date
JPH01156832U (enExample) 1989-10-27

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