JPH0636480Y2 - チャンバ覗窓用ｏリングの過熱防止構造 - Google Patents

チャンバ覗窓用ｏリングの過熱防止構造

Info

Publication number
JPH0636480Y2
JPH0636480Y2 JP1134388U JP1134388U JPH0636480Y2 JP H0636480 Y2 JPH0636480 Y2 JP H0636480Y2 JP 1134388 U JP1134388 U JP 1134388U JP 1134388 U JP1134388 U JP 1134388U JP H0636480 Y2 JPH0636480 Y2 JP H0636480Y2
Authority
JP
Japan
Prior art keywords
ring
chamber
viewing window
cooling water
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1134388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01116400U (enrdf_load_stackoverflow
Inventor
幹夫 小泉
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1134388U priority Critical patent/JPH0636480Y2/ja
Publication of JPH01116400U publication Critical patent/JPH01116400U/ja
Application granted granted Critical
Publication of JPH0636480Y2 publication Critical patent/JPH0636480Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Furnace Details (AREA)
JP1134388U 1988-01-29 1988-01-29 チャンバ覗窓用ｏリングの過熱防止構造 Expired - Lifetime JPH0636480Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1134388U JPH0636480Y2 (ja) 1988-01-29 1988-01-29 チャンバ覗窓用ｏリングの過熱防止構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1134388U JPH0636480Y2 (ja) 1988-01-29 1988-01-29 チャンバ覗窓用ｏリングの過熱防止構造

Publications (2)

Publication Number Publication Date
JPH01116400U JPH01116400U (enrdf_load_stackoverflow) 1989-08-04
JPH0636480Y2 true JPH0636480Y2 (ja) 1994-09-21

Family

ID=31219815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1134388U Expired - Lifetime JPH0636480Y2 (ja) 1988-01-29 1988-01-29 チャンバ覗窓用ｏリングの過熱防止構造

Country Status (1)

Country Link
JP (1) JPH0636480Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01116400U (enrdf_load_stackoverflow) 1989-08-04

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