JPH0635471Y2 - ウエーハ持ち替え用治具 - Google Patents

ウエーハ持ち替え用治具

Info

Publication number
JPH0635471Y2
JPH0635471Y2 JP3905990U JP3905990U JPH0635471Y2 JP H0635471 Y2 JPH0635471 Y2 JP H0635471Y2 JP 3905990 U JP3905990 U JP 3905990U JP 3905990 U JP3905990 U JP 3905990U JP H0635471 Y2 JPH0635471 Y2 JP H0635471Y2
Authority
JP
Japan
Prior art keywords
wafer
holding jig
wafer holding
support base
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3905990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH04749U (enrdf_load_stackoverflow
Inventor
隆広 森口
修二 谷ケ久保
Original Assignee
コマツ電子金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コマツ電子金属株式会社 filed Critical コマツ電子金属株式会社
Priority to JP3905990U priority Critical patent/JPH0635471Y2/ja
Publication of JPH04749U publication Critical patent/JPH04749U/ja
Application granted granted Critical
Publication of JPH0635471Y2 publication Critical patent/JPH0635471Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP3905990U 1990-04-13 1990-04-13 ウエーハ持ち替え用治具 Expired - Lifetime JPH0635471Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3905990U JPH0635471Y2 (ja) 1990-04-13 1990-04-13 ウエーハ持ち替え用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3905990U JPH0635471Y2 (ja) 1990-04-13 1990-04-13 ウエーハ持ち替え用治具

Publications (2)

Publication Number Publication Date
JPH04749U JPH04749U (enrdf_load_stackoverflow) 1992-01-07
JPH0635471Y2 true JPH0635471Y2 (ja) 1994-09-14

Family

ID=31547622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3905990U Expired - Lifetime JPH0635471Y2 (ja) 1990-04-13 1990-04-13 ウエーハ持ち替え用治具

Country Status (1)

Country Link
JP (1) JPH0635471Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH04749U (enrdf_load_stackoverflow) 1992-01-07

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