JPH0634819Y2 - 定露点飽和気体発生装置 - Google Patents

定露点飽和気体発生装置

Info

Publication number
JPH0634819Y2
JPH0634819Y2 JP1987056977U JP5697787U JPH0634819Y2 JP H0634819 Y2 JPH0634819 Y2 JP H0634819Y2 JP 1987056977 U JP1987056977 U JP 1987056977U JP 5697787 U JP5697787 U JP 5697787U JP H0634819 Y2 JPH0634819 Y2 JP H0634819Y2
Authority
JP
Japan
Prior art keywords
temperature
tank
constant
saturation
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987056977U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63164936U (enrdf_load_stackoverflow
Inventor
昭夫 古市
末次三 二神
一男 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP1987056977U priority Critical patent/JPH0634819Y2/ja
Publication of JPS63164936U publication Critical patent/JPS63164936U/ja
Application granted granted Critical
Publication of JPH0634819Y2 publication Critical patent/JPH0634819Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP1987056977U 1987-04-15 1987-04-15 定露点飽和気体発生装置 Expired - Lifetime JPH0634819Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987056977U JPH0634819Y2 (ja) 1987-04-15 1987-04-15 定露点飽和気体発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987056977U JPH0634819Y2 (ja) 1987-04-15 1987-04-15 定露点飽和気体発生装置

Publications (2)

Publication Number Publication Date
JPS63164936U JPS63164936U (enrdf_load_stackoverflow) 1988-10-27
JPH0634819Y2 true JPH0634819Y2 (ja) 1994-09-14

Family

ID=30886269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987056977U Expired - Lifetime JPH0634819Y2 (ja) 1987-04-15 1987-04-15 定露点飽和気体発生装置

Country Status (1)

Country Link
JP (1) JPH0634819Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007263424A (ja) * 2006-03-28 2007-10-11 Espec Corp 飽和ガス供給装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112378A (ja) * 1974-07-23 1976-01-30 Fujitsu Ltd Kongogasuhatsuseiyobabura
JPH0328244Y2 (enrdf_load_stackoverflow) * 1984-10-19 1991-06-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007263424A (ja) * 2006-03-28 2007-10-11 Espec Corp 飽和ガス供給装置

Also Published As

Publication number Publication date
JPS63164936U (enrdf_load_stackoverflow) 1988-10-27

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